wafer loader nwl860 series · 2013. 5. 9. · select “cnvrt”. the conversion starts. upon...

M232 E 04.7.CF.3

Wafer Loader NWL860 Series

IFC Function(SECS Communications)

Specifications

i

Thank you for purchasing a Nikon Product. Communications requirements for the Nikon Wafer LoaderNWL860 series are specified in this IFC Function (SECS Communications) Specifications. To ensurecorrect usage, please read this manual before using.

� No part of this manual may be reproduced or transmitted in any form without the prior consent ofNikon.

� This manual is subject to change in part or in full without prior notice.

� Every effort has been made to ensure the accuracy of this manual. If you find that parts of the manualare unclear or in error, please contact your nearest Nikon representative.

� Please be sure to read the manuals for the NWL wafer loader, microscope, and other products usedwith the wafer loader.

� PurposeThis specification described the requirements for serial communications between the modelNWL860TMB-SP or NWL860INX and the customer's computer. The specification has the followingpurposes:

<Online Remote Control Mode>

All operations except those involving the stage and the joystick can be performed with external devices,including PCs, after communications have been set up correctly.

<Online Local Control Mode>

During manual operation, information on sampling/inspection patterns, the carrier, wafer loader, andinspection results can be accessed both by the host computer and by the wafer loader.

� Wafer Loader� NWL860TMB-SP using interface communications (NWL3R-IFC)

� NWL860INX using interface communications (NWL3A-IFC)

(See “5. Hardware and Setting” in Chapter 1.)

� ROM� NWL3R-IFC, Ver 2.30 or later

� NWL3A-IFC, Ver 2.30 or later

The IFC function is available only with the models shown above, using the indicated ROMs.

1

Chaper 1 General Description

1

2

3

4

Table of Contents

Chaper 1 General Description .............................................................................. 4

1. Wafer Loader Model No. ............................................................................ 4

2. Summary ..................................................................................................... 4

3. IFC Protection .............................................................................................. 4

4. Standard Compliance ................................................................................. 4

5. Hardware and Setting................................................................................. 5

Chaper 2 System Specification............................................................................ 6

1. Communications Port ................................................................................. 6

2. Control Mode .............................................................................................. 62-1. Online Remote Control Mode ...................................................................... 6

2-2. Online Local Control Mode ........................................................................... 6

2-3. Offline Control Mode .................................................................................... 7

3. External Connection ................................................................................... 7

Chaper 3 Interface Specification.......................................................................... 8

1. Physical Interface (Common to all ports) .................................................. 81-1. Interactive Signal Connection Circuit .......................................................... 8

1-2. Connector ....................................................................................................... 8

1-3. Data Rate ........................................................................................................ 8

1-4. Pin Connection .............................................................................................. 8

1-5. Synchronization System ............................................................................... 8

1-6. Transmission .................................................................................................. 8

1-7. Connection ..................................................................................................... 8

2. Character ..................................................................................................... 92-1. Character Length ........................................................................................... 9

2-2. Format ............................................................................................................ 9

2-3. Start Bit .......................................................................................................... 9

2-4. Data Bit ........................................................................................................... 9

2-5. Parity Bit ......................................................................................................... 9

2-6. Stop Bit ........................................................................................................... 9

3. Block Transfer Protocol ............................................................................ 103-1. System ......................................................................................................... 10

3-2. Transmission Control Character ................................................................. 10

3-3. Protocol Parameter ..................................................................................... 10

4. Message..................................................................................................... 114-1. Format .......................................................................................................... 11

4-2. Message Length .......................................................................................... 11

4-3. Header .......................................................................................................... 11

4-4. Message Data .............................................................................................. 11

4-5. Checksum..................................................................................................... 11

4-6. Header .......................................................................................................... 11

4-7. Message Data .............................................................................................. 14

2


15. Message Protocol ..................................................................................... 17

5-1. Detection of Double Block .......................................................................... 17

5-2. Handling of Multi-Block .............................................................................. 17

5-3. Multi-Transaction......................................................................................... 17

5-4. Size of Incoming Message .......................................................................... 17

5-5. Size of Outgoing Message .......................................................................... 17

6. Examples of Data Link Protocol ............................................................... 186-1. Normal Transmission and Receipt ............................................................. 18

6-2. Contention ................................................................................................... 18

Chaper 4 Communications Specification ......................................................... 20

1. Compliance with GEM .............................................................................. 201-1. GEM Compliance Level Shown by E30 GEM Compliance Sheet

(E30 Table 8.3) .............................................................................................. 20

1-2. GEM Basic Requirements ........................................................................... 21

1-3. Equipment Processing State ...................................................................... 23

1-4. Saving of Settings ....................................................................................... 24

2. List of SECS Messages to and from the Host ......................................... 25

3. Functions Implemented in Communications with Host andScenario ..................................................................................................... 273-1. Establishment of Communications ............................................................ 27

3-2. Online Check ................................................................................................ 27

3-3. Sample File Management ........................................................................... 27

3-4. Carrier File Management ............................................................................ 28

3-5. Equipment Information Management ....................................................... 29

3-6. Event Report ................................................................................................ 29

3-7. Control Mode Selection .............................................................................. 31

3-8. Remote Control ........................................................................................... 33

3-9. Alarm Management .................................................................................... 33

3-10. Status Data Collection ................................................................................. 34

3-11. Error Message ............................................................................................. 34

4. Detailed Message Format ........................................................................ 364-1. Stream 1 ....................................................................................................... 36

4-2. Stream 2 ....................................................................................................... 42

4-3. Stream 5 ....................................................................................................... 49

4-4. Stream 6 ....................................................................................................... 52

4-5. Stream 7 ....................................................................................................... 56

4-6. Stream 9 ....................................................................................................... 61

5. Definition of Message Variable (Data Item) ............................................ 655-1. ACKC5 .......................................................................................................... 65

5-2. ACKC6 .......................................................................................................... 65

5-3. ACKC7 .......................................................................................................... 65

5-4. ACKC7A ........................................................................................................ 65

5-5. ALCD............................................................................................................. 65

5-6. ALED ............................................................................................................. 66

3


15-7. ALID .............................................................................................................. 66

5-8. ALTX ............................................................................................................. 68

5-9. CCODE .......................................................................................................... 69

5-10. CEED ............................................................................................................. 72

5-11. CEID .............................................................................................................. 73

5-12. COMMACK ................................................................................................... 75

5-13. CPNAME ....................................................................................................... 75

5-14. CPACK .......................................................................................................... 75

5-15. CPVAL ........................................................................................................... 75

5-16. DATALENGHTH............................................................................................ 76

5-17. DATAID ......................................................................................................... 76

5-18. DRACK .......................................................................................................... 76

5-19. EAC ............................................................................................................... 76

5-20. ECDEF ........................................................................................................... 77

5-21. ECID .............................................................................................................. 77

5-22. ECMAX ......................................................................................................... 80

5-23. ECMIN .......................................................................................................... 80

5-24. ECNAME ....................................................................................................... 80

5-25. ECV ............................................................................................................... 80

5-26. EDID .............................................................................................................. 81

5-27. ERACK .......................................................................................................... 81

5-28. ERRW7 .......................................................................................................... 81

5-29. GRANT6 ....................................................................................................... 81

5-30. LENGTH ........................................................................................................ 81

5-31. LRACK .......................................................................................................... 82

5-32. HCACK .......................................................................................................... 82

5-33. MDLN ........................................................................................................... 82

5-34. MEXP ............................................................................................................ 82

5-35. MHEAD ......................................................................................................... 83

5-36. OFLACK ........................................................................................................ 83

5-37. ONLACK ....................................................................................................... 83

5-38. PPARM .......................................................................................................... 83

5-39. PPGNT .......................................................................................................... 83

5-40. PPID .............................................................................................................. 84

5-41. RCMD ........................................................................................................... 84

5-42. RPTID ............................................................................................................ 87

5-43. SEQNUM ...................................................................................................... 87

5-44. SHEAD .......................................................................................................... 87

5-45. SOFTREV ...................................................................................................... 88

5-46. SV ................................................................................................................. 88

5-47. SVID .............................................................................................................. 88

5-48. SVNAME ...................................................................................................... 89

5-49. UNITS ........................................................................................................... 89

5-50. V .................................................................................................................... 89

5-51. VID ................................................................................................................ 89

4

1

1 General Description

1. Wafer Loader Model No.This specification applies to the following wafer loader models.

� NWL860TMB-SP

� NWL860INX

In this document, these models will be referred to collectively as NWLs.

This specification applies to the following ROM versions.

� NWL3R-IFC Version 2.30 or later for NWL860TMB-SP

� NWL3A-IFC Version 2.30 or later for NWL860INX

2. SummaryFor more information on the following requirements, please see the following chapters.

� External devices and control mode ................................... Chapter 2 “System Specification”

� Connectors, signal standards, mechanical,and electrical requirements ................................................ Chapter 3 “Interface Specification”

� Transmission timing, messages, and protocols .............. Chapter 3 “Interface Specification”

� Communications scenario and message details .............. Chapter 4 “Communications Specification”

3. IFC ProtectionThis specification applies when the ROM is NOT IFC-protected and the DipSW (1 of SW1) of the controlcircuit board is ON.

4. Standard ComplianceThis specification conforms to the following standards.

* For details on GEM standard compliance, see 1 in Chapter 5.

Physical Interface (See 1 in Chapter 3.)Character (See 2 in Chapter 3.)Block Transfer Protocol (See 3 in Chapter 3.)

Message (See 4 in Chapter 3.)Message Protocol (See 5 in Chapter 3.)

State ModelEquipment Behavior and ScenarioData ItemCollection EventBehavior Conforming to GEM

SEMI E4-91SEMI Equipment Communications Standard 1Message Transfer (SECS-I)

SEMI E5-95SEMI Equipment Communications Standard 2Message Content (SECS-II)

SEMI E30-95Generic Model for Communications and Controlof SEMI Equipment (GEM)GEMDefines basic requirements and additions to theequipment for the equipment only forcommunications with the host.

General Description

5


15. Hardware and SettingSome ROMs used with the NWL are not designed for IFC function. If the ROM name does not include“-IFC”, it cannot be used for communications.

Additionally, some NWLs are not designed for IFC function. To add IFC functionality to these NWLs, youmust upgrade the ROM and modify related settings.

<NWL860INX>

The circuit board and the internal cable required for communications are built in.

Use ROMs for NWL3A-IFC version 2.30 or later.

� Setting

① Change the ROM if it is not designed for IFC function.

② Turn on DipSW (1 of SW1) on the control circuit board.

③ Turn on power.

④ Proceed through the steps below, following the instructions given in the operation panel. (The stepsmay vary slightly with different ROM versions.)

A prompt for conversion appears in the display screen.

Select “Cnvrt”. The conversion starts.

Upon completion, the “Welcome NWL860” screen (the screen shown at startup) is displayed.

<NWL860TMB-SP>

The circuit board and internal cable required for communications are built in.

Use ROMs for NWL3R-IFC version 2.30 or later.

* NWL860TMBs other than type SP lack the required circuit board and internal cable. Those modelscannot communicate with external devices, even with upgraded ROMs.

� Setting

① Change the ROM if it is not designed for IFC function.

② Turn on DipSW (1 of SW1) on the control circuit board.

③ Turn on power.

④ Proceed through the steps below, following the instructions given in the operation panel. (The stepsmay vary slightly with different ROM versions.)

A prompt for conversion appears in the display screen.

Select “Cnvrt”. The conversion starts.

Upon completion, the “Welcome NWL860” screen (the screen shown at startup) is displayed.

6

2

2 System Specification

1. Communications PortThree communications ports are available.

① COM1: Used for communications with PC (host)

② COM2: Used for communications with indexer (equipment)

③ COM3: Used for debug monitoring (reserved for Remote Box)

2. Control Mode(Note) Control mode is not a communications mode; rather, it refers to on-line or off-line control of the

equipment.

* For communications modes, see “1-2-1. State Model” in Chapter 4.

Three control modes are available. The control mode is automatically switched by the operations on theNWL’s option setting screen, commands from the external device, and in the event of an error. Atstartup, control mode is factory-set to offline. You can change this setting.

Communications between the NWL860INX and the indexer are always controlled in online mode.

2-1. Online Remote Control Mode

In this mode, all operations (except those involving the joystick and the stage) and file management arecontrolled through communications by an external device.

� All switches and control knob settings except the joystick, emergency stop switch and function switchfor turning off communications are disabled. (If any of these switches is turned on, the inhibit buzzerwill sound.)

� The control mode is switched to offline (host offline) mode by a command from the host.

� The control mode is also switched to offline (host offline) mode if the host does not reply and a timer’sset time elapses.

� When the NWL requires manual initialization of wafer storage and arms at startup, key operationbecomes available, just as in local mode.

2-2. Online Local Control Mode

The equipment is controlled in the same environment as offline, with the difference that this mode allowsthe equipment to exchange sample files, result files, carrier files, and status information with the host.

� All operating switches and the control knobs are enabled.

� Files are transmitted by a command from the host at a timing regulated by the host. File transmissionis not controlled by the NWL operation.

� The control mode is switched to offline (host offline) mode by a command from the host.

� The control mode is also switched to offline (host offline) mode if the host does not reply and a timer’sset time elapses.

System Specification

7

Chapter 2 System Specification

2

2-3. Offline Control Mode

The equipment is controlled locally.

� All operating switches and control knobs are enabled.

� The control mode is switched to online remote or online local control mode by selecting the option setting.

� When the equipment is in maintenance mode, control mode is automatically set to offline mode.

The offline control mode is further divided into two states.

<Host Offline State>

The equipment is ready for communications, but the host rejects communications with the equipment orthe connection fails.

<Equipment Offline State>

The equipment is in offline mode.

3. External ConnectionThis specification is based on three different connection methods.

① Communications with Host

② Communications with Indexer

③ Communications with Host and Indexer

Host Equipment

COM2

NWL(Indexer)

INX

Host Equipment

COM2

NWLHost

(Indexer)INX

COM1

Equipment Host

COM1

NWL Host

For remote control and monitoring of the NWL by the host.

For control of the INX by the NWL.

For remote control and monitoring ofthe NWL and the INX by the host.

Equipment Host

8

Interface Specification

2

3

3

1. Physical Interface (Common to all ports)

1-1. Interactive Signal Connection Circuit

RS-232C: Conforms to the EIA Standard.

1-2. Connector

D-Sub 25-pin female (ISO 2110-1980) or equivalent.

Locking: Female 4-40 threaded jack screw lock

1-3. Data Rate

300, 1200, 2400, 4800, 9600 (default) baud

1-4. Pin Connection

1-5. Synchronization System

Start-stop system (asynchronous system)

1-6. Transmission

Half-duplex transmission

1-7. Connection

Point-to-point connection

Interface Specification

FGTXDRXDRTSCTSDSR

SGCD

DTR

②�

⑧�⑦�⑥�

④�⑤�

③�

①�

⑧�～� ⑨�

<NWL ←→ PC Connection>

④�

⑥�⑦�

⑤�

②�③�

①�

⑳�

Shielding

D-sub25pin (male) D-sub9pin (female)M2.6 Screw #4-40 Screw

Frame

～�

Frame

NWL PC

*The Length of cable must be less than 3M

22

9

Chapter 3 Interface Specification

3

2. Character

2-1. Character Length

10 bits

2-2. Format

2-3. Start Bit

1 bit (0)

2-4. Data Bit

8 bits

2-5. Parity Bit

N/A

2-6. Stop Bit

1 bit (1)

Data Bit

Start Bit Stop Bit(LSB)1

(MSB)82 3 4 5 6 7

10


2

3

3. Block Transfer Protocol

3-1. System

Line contention system (The master is the equipmemt.)

3-2. Transmission Control Character

* “H” stands for hexadecimal numbers.

① ENQ (05H): Request to send

② EOT (04H): Ready to receive

③ ACK (06H): Acknowledge

④ NAK (15H): Negative acknowledge

3-3. Protocol Parameter

You can set the following parameters in the NWL display screen with the precision shown below.

Typical

ValueCode

9600

101 (65H)

0.5 S

10 S

45 S

45 S

3

Serial communications speed

Equipment identification number

Error detected in characters

No protocol response determination

No reply message determination

Error detected in a multi-block message

The maximum number of retries

BAUD

DEVID

T1

T2

T3

T4

RTY

Function

Baud rate

Device ID

Character time out

Protocol time out

Reply time out

Block time out

Retry limit

300–9600

0–32767

0.1–10 S

0.2–25 S

1–120 S

1–120 S

0–31

—

1

0.1 S

0.2 S

1 S

1 S

1

DescriptionRange Precision

Parameter

11


3

4. Message

4-1. Format

4-2. Message Length

The first message byte.This gives the total length (byte count) of the header and the message data.

4-3. Header

See “4-6. Header” in this chapter.

4-4. Message Data

See “4-7. Message Data” in this chapter.

4-5. Checksum

A 2-byte block representing the sum of the binary numbers of the header and the message data withoutcodes.The upper-digit byte is sent before the lower-digit byte.

4-6. Header

4-6-1. Format

Message length 1 byte

Header 10 bytes

Message data max 244 bytes

Checksum 2 bytes

Messages consists of the following blocks.

Time

Upper device IDLower device IDUpper message IDLower message IDUpper block No.Lower block No.

System byte

8 7 6 5 4 3 2 1123456789

10

Device ID

Message ID

Block No.

System Byte

R

W

E

4-6-2. Device ID

Used as an identification number for each device in an SECS network.

12


2

3

4-6-3. R-Bit

Defines the direction of message transmission.

R = 0: Host (H) → Equipment (E)R = 1: Host (H) ← Equipment (E)

4-6-4. Message ID

Consists of 2 bytes; seven upper bits (stream code) + eight lower bits (function code).See 4-6-6. for the stream code, and 4-6-7. For the function code.

4-6-5. W-Bit

Defines whether the message contains a request for a response.

W = 0: The transmitter does not expect a response.W = 1: The transmitter expects a response.

4-6-6. Stream Code

Stream code represents the category of a message. Several code numbers are reserved by theSECS.

Code

S1

S2

S3

S4

S5

S6

S7

S8

S9

S10

Equipment status

Equipment status and diagnosis

Status of the material

Control of the material

Exception report

Data gathering

Control of manufacturing program

Control program

System error

Terminal service

Message Type

4-6-7. Function Code

The Function code represents the specific message contained in a stream. Several codenumbers are reserved by the SECS.

① The code F0 is defined as an abort transaction for all stream codes.

② During information exchange, the first message sent is always assigned an odd codenumber, while the response to the message is assigned an even code number, determined byincrementing the first message code number by one.

Stream Code 0–63: Reserved by the SECS.64–127: Defined by the user.

Function Code 0–63: Reserved by the SECS.64–255: Defined by the user.

13


34-6-8. Standard Message ID

For standard stream and function codes, see “4. Detailed Message Format” in Chapter 4.

4-6-9. Block No.

When the length of message data to be transmitted exceeds 244 bytes, the message is dividedinto several blocks, and the blocks are sent separately. Block No. represents the order in whichthey are transmitted.

* See “4-6-11. Multi-Block” in this chapter.

When the message consists of only one block, it is assigned Block No. 1.

4-6-10. E-Bit

Defines whether additional message blocks follow.

E = 0: More blocks follow.E = 1: No blocks follow.

4-6-11. Multi-Block

When message data consists of more than one block, the data is referred to as a multi-blockmessage. One multi-block message can contain up to 32767 blocks (a total length of 7.99Mbytes).

The first block of a multi-block message is numbered 1. All subsequent blocks are numbered inorder, with each assigned number incremented by one from the preceding.

Defined by the user

Stream

Reservedby theSECSFunction Code

0 1 – 63 64 – 12701

6364

255

Message to Transmit

Transmitted Message

HeaderNo. = 1

HeaderNo. = 2

HeaderNo. = 3

① ② ③

① ② ③

System Byte 1

System Byte 2

System Byte 3

System Byte 4

Source ID (Upper)

Source ID (Lower)

Transaction ID (Upper)

Transaction ID (Lower)

4-6-12. System Byte

System byte is classified as follows.

14


2

3

� Source IDAn identification code given to the message for every source in the application level.The source ID of a primary message is a copy of the transaction ID. When a message isretransmitted due to errors or for other reasons, the source ID is incremented.The source ID of a secondary message is a copy of the system byte of the received primarymessage.

� Transaction IDAn integer, incremented each time a primary message is transmitted.The same transaction ID is assigned to all blocks of a multi-block message.

4-7. Message Data

4-7-1. Format

The data in a message is written in the form of an item (item header) or list (list header).

4-7-2. Item Header Format

Item header consists of format byte (upper 6 bits) and length byte (lower 2 bits).

4-7-3. Format Byte

Format byte consists of item format code and length byte count.

4-7-4. Item Format Code

Defines the format of data.

(DATA) . . . . . . . . . . . . . . . . . . . . . . . . .Item or

List DATAItem or

List

8 7 6 5 4 3 2 1

Item Format Code Length Byte Count

MSB Data Length Byte LSB



1

2

3

4

MS Byte

LS Byte

Format Byte

Length Byte

Data Format

List

Binary

Truth value

ASCII

8-byte binary integer (with sign)

2-byte binary integer (with sign)

8-byte floating point

4-byte floating point

1-byte integer (without sign)



00

10

11

20

30

32

40

44

51

52

54

octal

000000

001000

001001

010000

011000

011010

100000

100100

101001

101010

101100

bit — 876543

Format Code

15


3

4-7-5. Length Byte Count

Defines the number of bytes making up the length byte.

0 = Illegal, data format error1 = 1-byte binary length byte (max. 255)2 = 2-byte binary length byte (max. 64 K)3 = 3-byte binary length byte (max. 7.99 M)

For list format, length represents the number of elements (lists or items) in the list.

The length byte of 0 has a special meaning, which is defined by the individual specification.

4-7-6. Length Byte

Defines the byte count required for the following data.

When the length byte is made up of more than one byte, the bytes are sent out in order, fromthe upper byte.

The length byte consists of 1 to 3 bytes.

4-7-7. List

Defines the number of component data (elements) when the data consists of data in differentformats.

The format of the list header is the same as that of the item header.

Individual component data are defined by the item header.

4-7-8. Examples of Item and List

(a) Item containing one binary code 10101010bit 87654321

00100001 Item with length byte 100000001 Byte length 110101010 Data byte

(b) Item containing three ASCII characters A, B, and C01000001 Item ASCII, length byte 100000011 Byte length 301000001 ASCII character A01000010 ASCII character B01000011 ASCII character C

(c) Item containing (b) above and three binary numbers in 2-byte format00000001 List, length byte 100000100 Number of elements 401000001 Item ASCII, length byte 100000011 Byte length 301000001 ASCII character A01000010 ASCII character B01000011 ASCII character C01101001 Item 2-byte integer, length byte 100000010 Byte length 2xxxxxxxx Upper byte for a number Xxxxxxxxx Lower byte for a number X

16


2

3

01101001 Item 2-byte integer, length byte 100000010 Byte length 2yyyyyyyy Upper byte for a number Yyyyyyyyy Lower byte for a number Y01101001 Item 2-byte integer, length byte 100000010 Byte length 2zzzzzzzz Upper byte for a number Zzzzzzzzz Lower byte for a number Z

4-7-9. Examples of Message

Response, from the equipment (device ID = 0487H) to the host, to an inquiry into online status.

00011100 Message length 28 bytes10000100 From host (Device ID) to equipment10000111 0487H00000001 Not expecting response message00000010 S1F210000000 Single block00000001 Block No. 100000000 System byte ‘0’00000001 ‘1’00000000 ‘0’00000001 ‘1’00000001 List00000010 2 elements01000001 ASCII 1 byte00000110 6 bytes00110001 MDLN ‘1’00110010 ‘2’00110011 ‘3’00110100 ‘4’00110101 ‘5’00110110 ‘6’01000001 ASCII 1 byte00000110 6 bytes01000001 SOFTREV ‘A’01000010 ‘B’01000011 ‘C’01000100 ‘D’01000101 ‘E’01000110 ‘F’

17


3

5. Message Protocol

5-1. Detection of Double Block

Double blocks are detected by checking the block header system byte. If a double block is detected, thedata is ignored.

5-2. Handling of Multi-Block

Multi-block messages are handled at both the transmitting and receiving ends.

5-3. Multi-Transaction

The NWLs do not apply to multi-transactions (interleaving messages).

5-4. Size of Incoming Message

An incoming message should not exceed 17 blocks.

5-5. Size of Outgoing Message

An outgoing message should not exceed 17 blocks.

18


2

3

6. Examples of Data Link Protocol

6-1. Normal Transmission and Receipt

* For details on T1–T3, see “3-3. (Block Transfer) Protocol Parameter” in this chapter.

6-2. Contention

Requestto send

T2

T2

T3

T2

T1

ENQ

EOT

Message length

DATA

DATA

Checksum

Checksum

ACK

ENQ

EOT

Message length

DATA

T2

T1

T2

Acknowledge

Send a reply.

Ready to receive

··

Equipment HostENQ

EOT

Message

ACK

ENQ

EOT

Message

ACK

ENQ

··

Ready to receive

Acknowledge

Send a reply (if required).

Resend contention.

20

Communications Specification

4

4

1. Compliance with GEM

1-1. GEM Compliance Level Shown by E30 GEM Compliance Sheet(E30 Table 8.3)

　Yes

Yes

Yes

Yes

Yes

Yes

Yes

Yes

Capability

Yes

Yes

Yes

No

Yes

Yes

Yes

Yes

Yes

No

No

No

No

No

Yes

Capability

State model

Equipment processing state

S1F13/F14 scenario initiated by host

Event report

Online check

Error message

Control (started by operator)

Documentation

Additional Capabilities

Establishment of Communications

Selecting the dynamic event report setting

Variable data collection

Trace data collection

Status data collection

Alarm management

Remote control

Equipment constant

Process program management

Material movement

Equipment terminal service

Clock

Limit monitoring

Spooling

Control (started by host)

GEM Basic Requirements

GEM Compliance

Compliance

Compliance

Yes

Yes

Yes

Yes

Yes

Yes

Yes

Yes

Yes

Communications Specification

21

Chapter 4 Communications Specification

4

1-2. GEM Basic Requirements

1-2-1. State Model

� Online Communications State Model

(Example: Transition from one state to another, ② or ③)

� Equipment Constant for Establishment of Communications Time-Out Value

See “5-21. Message Variable ECID (028)” in this chapter.

DISABLE

ENABLE

NOTCOMMUNICATING

COMMUNICATING

c

State

DISABLE

ENABLE

NOT COMMUNICATING

COMMUNICATING

Communications between host and equipment are disabled.

This setting has two sub-states; COMMUNICATING and NOT

COMMUNICATING.

No messages except S1F13,F14, or S9Fx may be transmitted.

Full communications established

Explanation

HOST WL

S1F13

S1F14

DISABLE or ENABLENOT COMMUUNICATING

DISABLE or ENABLECOMMUUNICATING

①

② ③

④

⑤ ⑥

22


4

� Control State Model

With the standard specification, you may change the control state any time the equipment isidle or active.

� Indication of Current Control State and Change of Control State by Operator

Check the communications control state in the initial screen or in the option-setting screen.

The control state is indicated as follows under these conditions:

OFFLINE

LOCAL

c

①

②③

④

⑤

⑥

ONLINE

REMOTE

State

OFFLINE

ONLINE

LOCAL

REMOTE

When the equipment is offline, the equipment and

host are able to exchange messages, but use of

messages for automation is restricted.

When online, the equipment can be controlled

through exchange of messages with the host.

The equipment is controlled directly by operators.

The host can control a range of equipment functions

via the communications interface.

Explanation

c

CommunicationsState

Equipment

OFFLINE

Host OFFLINE

ONLINE

The “OFFLINE” indication appears in the

option setting screen, and no indication

appears in the initial screen.

The “OFFLINE” key in the initial screen

starts blinking.

The “OFFLINE” indication at the bottom

of the fixed screen starts blinking.

The “REMOTE” function key appears in

the initial screen.

The “ONLINE” indication appears at the

bottom of the fixed screen.

IndicationControl

LOCAL

LOCAL

REMOTE

LOCAL

REMOTE

Recipe isSelected

by

Operator

Operator

Host

Operator

Host

Processingis initiated

by

Operator

Operator

Host

Operator

Host

23


4

� Control State Changed by Operator

<To save changes: Engineer mode>

Start the equipment in engineer mode. → Select Setting. → Select Option.→ Select SECS.→ Select OFFLINE, LOCAL, or REMOTE.

<To make temporary changes: Operator mode>

(Online Local → Online Remote)Press the Remote key in the initial screen.

(Online Remote → Online Local)Press the Local key in the fixed screen.

� Status Variable Controlling Current Control State

See “5. Definition of Message Variable” in this chapter.

� Operator Command Event in Remote State

See “5. Definition of Message Variable” in this chapter.

� Event in State Transition

Inquiries for control state (S1F3,F4), operator command event reports (S6F11,F12) and statetransition event reports (S6F11,F12) may be available, through the particular communicationssoftware.

1-3. Equipment Processing State

� NWL Processing State Model

POWER ON

MAINTENANCE INIT

ERROR

PROCESS

PAUSE ACTIVE

IDLE

SET-UP

24


4

State

INIT

IDLE

ACTIVE

PAUSE

ERROR

MAINTENANCE

SET-UP

The equipment is undergoing system initialization.

The equipment is ON and awaiting commands.

The equipment is ON and operating.

The equipment is temporarily halted.

The equipment is in an error state.

The equipment is in maintenance status.

The equipment is in setup status.

Explanation

� State Transition Event

See “5-11. CEID” in this chapter.

� Variables of Current and Preceding Processing States

Event reports for current and the preceding processing states (S6F11,F12) and inquiries for processingstate (S1F3,F4) may be available, through the particular communications software.

1-4. Saving of Settings

The following status settings are stored in non-volatile memory.

GEM-DefinedCapabilities

Establishment of

Communications

Control

Event Report

Alarm

Management

Time (seconds) within which

S1F13 must be transmitted

once communications are

established.

Online/Offline

Equipment Online/

Online Establishment Try/

Host Offline

Enable or disable event

transmission.

ID attached to the report, and

VID representing the

attributive value of the report

Report ID linked to the

collection event.

Enable or disable alarm

transmission.

CommentEquipment Parameter

Establish communications

time-out (constant)

Control state at equipment

startup (constant)

The offline sub-state at

equipment startup (constant)

Setting parameter for event

enable/disable S2F37

Setting parameter for define

report S2F33: Report ID,

variable ID

Setting parameter for link

event report S2F35: Event ID,

report ID

Alarm enable/disable

Related Data

Estabilish

Communication

Timeout

Control State (variable)

Control State (variable)

Event Enabled reflects

the CEID of the enabled

event.

RPTID,VID

CEID,VID

Alarms Enabled reflects

the ALID of the enabled

alarm.

25


4

2. List of SECS Messages to and from the HostH: Host E: NWL S: Single block M: Multi-block

<Stream Function> <Function> <Direction of Transmission>

S* F0 Abort Transaction S H ↔ E

Stream 1: Equipment StateS1 F1 Are You There Request S H → E REPLY

F2 Online data (D) S H ← EF3 Selected equipment status request (SSR) S H → E REPLYF4 Selected equipment status data (SSD) S · M H ← EF11 Status variable name list request (SVNR) S H → E REPLYF12 Status variable name list reply (SVNRR) (S) H ← EF13 Establish communications request (CR) S H ↔ E REPLYF14 Establish communications request acknowledge (CRA) S H ↔ EF15 Request offline (ROFL) S H → E REPLYF16 Offline acknowledge (OFLA) S H ← EF17 Request online (RONL) S H → E REPLYF18 Online acknowledge (ONLA) S H ← E

Stream 2: Equipment Control and DiagnosisS2 F13 Equipment constant request (ECR) S H → E REPLY

F14 Equipment constant data (ECD) S · M H ← EF15 New equipment constant send (ECS) S H → E REPLYF16 New equipment constant acknowledge (ECA) S H ← EF29 Equipment constant name list request (ECNR) S H → E REPLYF30 Equipment constant name list (ECN) S H ← EF33 Define report (DR) S · M H → E REPLYF34 Define report acknowledge (DRA) S H ← EF35 Link event report (LER) S · M H → E REPLYF36 Link event report acknowledge (LERA) S H ← EF37 Enable/disable event report (EDER) S H → E REPLYF38 Enable/disable event report acknowledge (EERA) S H ← EF41 Host command send (HCS) S H → E REPLYF42 Host command acknowledge (HCA) S H ← E

Stream 5: Exception (alarm) reportS5 F1 Alarm report send (ARS) S H ← E REPLY

F2 Alarm report acknowledge (ARA) S H → EF3 Enable/disable alarm send (EAN) S H → E REPLYF4 Enable/disable alarm acknowledge (EAA) S H ← EF5 List alarm request (LAR) S H → E REPLYF6 List alarm data (LAD) (S) H ← E

26


4

Stream 6: Data collectionS6 F5 Multi-block data send inquire (MBI) S H ← E REPLY

F6 Multi-block grant (MBG) S H → EF11 Event report send (ERS) S · M H ← E REPLYF12 Event report acknowledge (ERA) S H → EF15 Event report request (ERR) S H → E REPLYF16 Event report data (ERD) S · M H ← EF19 Individual report request (IRR) S H → E REPLYF20 Individual report data (IRD) S · M H ← E

Stream 7: Process program loadS7 F1 Process program load inquire (PPI) S H ↔ E REPLY

F2 Process program load grant (PPG) S H ↔ EF19 Current EPPD request (RER) S H → E REPLYF20 Current EPPD data (RED) S · M H ← EF23 Formatted process program send (FPS) S · M H ↔ E REPLYF24 Formatted process program acknowledge (FPA) S H ↔ EF25 Formatted process program request (FPR) S H ↔ E REPLYF26 Formatted process program data (FPD) S · M H ↔ EF27 Process program verification send (PVS) S H ← E REPLYF28 Process program verification acknowledge (PVA) S H → E

Stream 9: System errorS9 F1 Unrecognized device ID (UDN) S H ← E

F3 Unrecognized stream type (USN) S H ← EF5 Unrecognized function type (UFN) S H ← EF7 Illegal data (IDN) S H ← EF9 Transaction timer time-out (TTN) S H ← EF11 Data too long (DLN) S H ← EF13 Conversation time-out (CTN) S H ← E

27


4

3. Functions Implemented in Communications with Hostand Scenario

This chapter complies with the SEMI E30-95 (GEM).

3-1. Establishment of Communications

Notification that interrupted communications (power off or error) are restored. This notification may bemade by the host or by the equipment (NWL).

<Scenario>

○ Communications established from host Message: S1F13,F14

<Comment> [Host] [Equipment] <Comment>Communications state = ENABLE

Request to establish communications S1F13 →← S1F14 Transmits COMMACK = 0 in reply.

Communications state = COMMUNICATING

○ Communications established from equipment Message: S1F13,F14

<Comment> [Host] [Equipment] <Comment>Communications state = ENABLE

← S1F13 Requests to establish communications.Acknowledges request to establish S1F14 → Transmits COMMACK = 0 in reply.communications.

For scenarios involving time-outs and negative acknowledgements, refer to SEMI E30-4-1-5-2.

3-2. Online Check

Checks the line or equipment status. The online check is performed by the host and used for periodic linecheck (heart beat) by the host.

<Scenario>

○ Online check Message: S1F1,F2

<Comment> [Host] [Equipment] <Comment>Are You There? S1F1 →

← S1F2 Transmits MDLN,SOFTREV in reply.

3-3. Sample File Management

3-3-1. Sample File Uploading

The equipment transfers sample file data to the host for the host-selected PPID.

The equipment should not transmit a multi-block data send inquiry before sending the processprogram.

The NWL transfers the sample files in multi-block data format.

28


4

<Scenario>

○ Process program (sample file) uploading by host Message: S7F25,F26

<Comment> [Host] [Equipment] <Comment>Requests formatted process program. S7F25 →

← S7F26 Transmits formatted process program data.

3-3-2. Sample File Downloading

① The host transmits information to the equipment involving PPID and the size of the samplefile to be transferred.

② The equipment allows the transfer, if no problems are detected.

③ The host transfers the sample file to the equipment.

④ The equipment checks the sample file and notifies the host of the results.

The sample files must be transferred to the NWL in multi-block data format.

<Scenario>

○ Process program (sample file) downloading by host Message: S7F1,F2,F23,F24,F27,F28

<Comment> [Host] [Equipment] <Comment>Inquires for process program loading. S7F1 →

← S7F2 Acknowledges inquiry for process program loading.Transmits formatted process program. S7F23 →

← S7F24 Acknowledges formatted process program.← S7F27 Transmits process program verification.

Acknowledges process program verification. S7F28 →

3-3-3. PPID List Transmission

The equipment transfers PPID information to the host for all host sample and carrier files.

<Scenario>

○ Process program directory request Message: S7F19,F20

<Comment> [Host] [Equipment] <Comment>Request for current EPPD. S7F19 →

← S7F20 Transmits current EPPD data.

3-4. Carrier File Management

3-4-1. Carrier File Uploading

The equipment transfers data to the host for the carrier file of the PPID selected by the host.

<Scenario>

○ Process program (carrier file) uploading by host Message: S7F25,F26

<Comment> [Host] [Equipment] <Comment>Requests formatted process program. S7F25 →

← S7F26 Transmits formatted process program data.

3-4-2. Carrier File Downloading

① The host transfers the sample file to the equipment.

② The equipment checks the carrier file and notifies the host of the results.

29


4

<Scenario>

○ Process program (carrier file) downloading by host Message: S7F23,F24,F27,F28

<Comment> [Host] [Equipment] <Comment>Transmits formatted process program. S7F23 →

← S7F24 Acknowledges formatted process program.← S7F27 Transmits process program verification.

Acknowledges process program verification. S7F28 →

3-5. Equipment Information Management

3-5-1. Equipment Setting Changes Made by Host

The equipment changes the equipment constant selected and transmitted by the host.

<Scenario>

○ Equipment constant transmission by host Message: S2F15,F16

<Comment> [Host] [Equipment] <Comment>Transmits equipment constant. S2F15 →

← S2F16 Sets the ERC = 0 equipment constant.

3-5-2. Equipment Setting Data Request from Host

The equipment transmits the equipment constant selected and transmitted by the host.

<Scenario>

○ Equipment constant request by host Message: S2F13,F14

<Comment> [Host] [Equipment] <Comment>Requests equipment constant. S2F13 →

← S2F14 Transmits equipment constant data.

3-5-3. Equipment Setting Definition Request by Host

The equipment transmits the maximum, minimum, and default values for the equipmentconstant selected by the host.

<Scenario>

○ Equipment constant name list request from host Message: S2F29,F30

<Comment> [Host] [Equipment] <Comment>Requests equipment constant name list. S2F29 →

← S2F30 Transmits equipment constant name list.

3-6. Event Report

3-6-1. Event Report Transmission upon Occurrence

When an enabled collection event (change in equipment status) occurs, the equipmenttransmits the event report to the host. The host learns the equipment state has changed andobtains the linked data.

30


4

<Scenario>

○ Collection event occurs at equipment. Message: S6F11,F12

<Comment> [Host] [Equipment] <Comment>[IF] The event report is multi-block data;

← S6F5 [THEN] The equipment sends a multi-block datasend inquiry.

Grants multi-block data send inquiry. S6F6 →← S6F11 Transmits event report.

Acknowledges event report. S6F12 →

3-6-2. Event Report Transmission Upon Request

The equipment transmits the event report requested by the host to the host.

The equipment does not send a multi-block data send inquiry before transmission, even if thereport is to be transmitted in multi-block data format.

<Scenario>

○ Event report request by host Message: S6F15,F16

<Comment> [Host] [Equipment] <Comment>Requests event report. S6F15 →

← S6F16 Transmits event report.

3-6-3. Event Report Setting

① The host defines the report (defines a data group as a report). (Single-block transmission)

② The host links the above report to the collection event. (Single-block transmission)

③ The host defines the collection event as enabled or disabled. (Single-block transmission)

During communications with the NWL, the host can define up to eight (0–7) reports. One reportcan contain up to five variable data.

The define reports must be transmitted in single-block data format.

<Scenario>

○ Collection event report setting Message: S2F33,F34,F35,F36,F37,F38

<Comment> [Host] [Equipment] <Comment>Defines report. S2F33 → Receives DATAIDs, RPTIDs, and VDSs.

← S2F34 DRACK = 0, the report is OK.Links the report to the event. S2F35 → Receives CEIDs and corresponding RPTIDs.

← S2F36 LRACK = 0, acknowledges that the report is linkedto the event.

Enable the collection event. S2F37 → Receives CEIDs and corresponding RPTIDs.← S2F38 ERACK = 0, OK. The selected report is created

when the applicable event occurs.

31


4

3-6-4. Report Transmission upon Request

The equipment transmits the report requested by the host to the host.

The equipment does not send a multi-block data send inquiry before transmission, even if thereport is to be transmitted in multi-block data format.

<Scenario>

○ Report request by host Message: S6F19,F20

<Comment> [Host] [Equipment] <Comment>Requests variable data in RPTID. S6F19 →

← S6F20 Transmits the variable data for the given RPTID.

3-7. Control Mode Selection

Switches from one control mode to another (Offline/Online Local/Online Remote).

3-7-1. Switching to Online by Equipment (Operator) — (Permitted by Host)

The operator switches equipment control mode from offline to online.

<Scenario>

○ Online permitted by host Message: S1F1,F2,S6F11,F12

<Comment> [Host] [Equipment] <Comment>← S1F1 Request to switch to online mode.

Grants request to switch to online mode. S1F2 →← S6F11 Transmits event report; control state is local

(remote).Acknowledges S6F12 →

3-7-2. Switching to Online by Equipment (Operator) — (Rejected by Host)

<Scenario>

○ Online rejected by host Message: S1F1,F0

<Comment> [Host] [Equipment] <Comment>← S1F1 Request to switch to online mode.

Rejects request to switch to online mode. S1F0 →

3-7-3. Switching to Offline by Equipment (Operator)

The operator switches equipment control mode from online to offline.

<Scenario>

○ Offline selected by operator Message: S6F11,F12

<Comment> [Host] [Equipment] <Comment>← S6F11 Transmits event report; equipment offline.

Acknowledges S6F12 →

32


4

3-7-4. Switching to Remote by Equipment (Operator)

The operator switches equipment control mode from local to remote.

<Scenario>

○ Remote selected by operator Message: S6F11,F12

<Comment> [Host] [Equipment] <Comment>← S6F11 Transmits event report; control state is remote.


3-7-5. Switching to Local by Equipment (Operator)

The operator switches equipment control mode from remote to local.

<Scenario>

○ Local selected by operator Message: S6F11,F12

<Comment> [Host] [Equipment] <Comment>← S6F11 Transmits event report; control state is local.


3-7-6. Switching to Offline by Host

<Scenario>

○ Offline selected by host Message: S1F0,F15,F16,S6F11,F12

<Comment> [Host] [Equipment] <Comment>Request to switch to offline mode. S1F15 → [IF] The equipment is offline;

[THEN]← S1F10 Rejects request.

[ELSE]← S1F16 Accepts request.← S6F11 Transmits event report; host offline.

Acknowledges S6F12 → [END_IF]

3-7-7. Switching to Online by Host

<Scenario>

○ Online selected by host Message: S1F17,F18,S6F11,F12

<Comment> [Host] [Equipment] <Comment>Request to switch to online mode. S1F17 → [IF] Other than host offline;

[THEN]← S1F18 Rejects request. (other than ONLACK0)

[ELSE]← S1F18 Accepts request. (ONLACK = 0)← S6F11 Transmits event report; control state is local

(remote).Acknowledges S6F12 → [END_IF]

33


4

3-8. Remote Control

Remote control of equipment from the host is performed through transmission of commands from thehost and corresponding event reports from equipment.

(Examples: Changes in current PPID, startup, stop, and individual operation (mapping))

<Scenario>

○ Remote control Message: S2F41,F42,S6F11,F12

<Comment> [Host] [Equipment] <Comment>Transmits a command. S2F41 →

← S2F42 Acknowledges the host command.[IF] The command is accepted (HCACK = 0, 4);

← S6F11 [THEN] Event report of changes in status or othercollection events.

Acknowledges event report. S6F12 →

3-9. Alarm Management

When a problem included in the preset alarm conditions by the host occurs, the equipment sendsnotification to the host of the alarm.

Alarm notification is transmitted separately from event reports.

3-9-1. Alarm Enable/Disable Setting

The host sets the alarms for which the equipment should transmit notification.

<Scenario>

○ Alarm enable/disable Message: S5F3,F4

<Comment> [Host] [Equipment] <Comment>Transmits the alarm enable/disable setting. S5F3 →

← S5F4 Acknowledges the setting.

3-9-2. Alarm Information Uploading

<Scenario>

○ Alarm information uploading Message: S5F5,F6

<Comment> [Host] [Equipment] <Comment>Requests alarm data/text. S5F5 →

← S5F6 Transmits alarm data/text.

3-9-3. Alarm Report Transmission

The equipment detects the occurrence of an alarm.

<Scenario>

○ Alarm report transmission Message: S5F1,F2

<Comment> [Host] [Equipment] <Comment>← S5F1 Transmits alarm data/text.

Acknowledges alarm data/text. S5F2 →(Transmits event report, if the alarm is enabled.)

34


4

3-10. Status Data Collection

The host can query the equipment for status information selected by the host.

<Scenario>

○ Equipment status report request Message: S1F3,F4

<Comment> [Host] [Equipment] <Comment>Requests status variable report. S1F3 →

← S1F4 Replies by transmitting requested status variabledata.

○ Equipment status variable name list request Message: S1F11,F12

<Comment> [Host] [Equipment] <Comment>Requests acknowledgement of selected S1F11 →status variable. ← S1F12 Replies by transmitting description of requested

status variable.

3-11. Error Message

The equipment notifies the host of messages and errors in communications detected by the equipment.

3-11-1. Message Error by Unrecognized Device ID

<Scenario>

○ Message error by unrecognized device ID Message: S9F1

<Comment> [Host] [Equipment] <Comment>Transmits a message. SxFx →

Detects unrecognized device ID.← S9F1 Notifies the host that an unrecognized device ID

is detected.

3-11-2. Message Error by Unrecognized Stream Type

<Scenario>

○ Message error by unrecognized stream type Message: S9F3


Detects unrecognized stream type.← S9F3 Notifies the host that an unrecognized stream

type is detected.

3-11-3. Message Error by Unrecognized Function Type

<Scenario>

○ Message error by unrecognized function type Message: S9F5


Detects unrecognized function type.← S9F5 Notifies the host that an unrecognized function

type is detected.

35


4

3-11-4. Message Error by Unrecognized Data Format

<Scenario>

○ Message error by unrecognized data format Message: S9F7


Detects illegal data format.← S9F7 Notifies the host that an unrecognized data

format is detected.

3-11-5. Communications Error by Transaction Time-Out

<Scenario>

○ Communications error by transaction time-out Message: S9F9


Failure to receive expected reply from the host.Transaction time-out occurs.

← S9F9 Notifies the host that transaction time-out hasoccurred.

3-11-6. Message Error by Excessive Data Size

<Scenario>

○ Message error involving excessive data size Message: S9F11


Detects data longer than can be processed by theequipment in message from host.

← S9F11 Notifies the host of excessive data length.

3-11-7. Communications Error by Communications Time-Out

<Scenario>

○ Communications error by communications time-out Message: S9F13


←SxF(x+1) ReplyAwaits message from the host resulting from thepreceding transaction.Fails to receive expected message, resulting incommunications time-out.

← S9F13 Notifies the host that communications time-outhas occurred.

36


4

1 Are You There Requestst

FunctionS F

1 ↔SR

REPLYH-EM/SAbbr.

Checks whether the equipment is operating online.

When receiving “function 0,” the host cannot communicate with the equipment.

Structure

<HEADER>

Required

4. Detailed Message Format

4-1. Stream 1

1 On Line Data

FunctionS F

2 ↔SD

REPLYH-EM/SAbbr.

Declares that the equipment is operating online.

Structure

<HEADER>

L, 2 1.<MDLN> 2.<SOFTREV>

37


4

1 Selected Equipment Status Request

FunctionS F

3 →SSSR

REPLYH-EM/SAbbr.

The host queries the equipment for the selected status variable value.

Structure

<HEADER>

L, n 1.<SVID1> . . . n.<SVIDn>

Required

1 Selected Equipment Status Data

FunctionS F

4 ←SSSD

REPLYH-EM/SAbbr.

The equipment reports SVID values by order of request.

The host should retain a record of the SVID whose values were requested.

Structure

<HEADER>

L, n 1.<SV1> . . . n.<SVn>

38


4

1 Status Variable Name list Request

FunctionS F

11 →SSVNR

REPLYH-EM/SAbbr.

The host queries the equipment to check status variables.

Structure

<HEADER>

L, n 1.<SVID1> . . . n.<SVIDn>

Required

1 Status Variable Name list Reply

FunctionS F

12 ←SSVNRR

REPLYH-EM/SAbbr.

The equipment reports the name and unit of the requested status variables.

Structure

<HEADER>

L, n 1.L, 3 1.<SVID1> 2.<SVNAME1> 3.<UNITS1> . . . n.L, 3 1.<SVIDn> 2.<SVNAMEn> 3.<UNITSn>

39


4

1 Establish Communication Request

FunctionS F

13 ↔SCR

REPLYH-EM/SAbbr.

At the logical level at which power is switched on again after completion or interruption of communications,

this command establishes the start of a new communications session.

Structure

<HEADER>

L, 2 1.<MDLN> 2.<SOFTREV>

Required

1 Establish Communication Request Acknowledge

FunctionS F

14 ↔SCRA

REPLYH-EM/SAbbr.

Accepts or denies the Establish Communications Request (S1F13).

Structure

<HEADER>

L, 2 1.<COMMACK> 2.L, 2 1.<MDLN> 2.<SOFTREV>

40


4

1 Request OFF-LINE

FunctionS F

15 →SROFL

REPLYH-EM/SAbbr.

The host asks the equipment to shift to offline status.

Structure

<HEADER>

Required

1 OFF-LINE Acknowledge

FunctionS F

16 ←SOFLA

REPLYH-EM/SAbbr.

Transmits OK or NG to S1F15.

Structure

<HEADER>

<OFLACK>

41


4

1 Request ON-LINE

FunctionS F

17 →SRONL

REPLYH-EM/SAbbr.

The host asks the equipment to shift to online status.

Structure

<HEADER>

Required

1 ON Line Acknowledge

FunctionS F

18 →SONLA

REPLYH-EM/SAbbr.


Structure

<HEADER>

<ONLACK>

42


4

2 Equipment Constant Request

FunctionS F

13 →SECR

REPLYH-EM/SAbbr.

Inquires for correction value, servo gain, limit for alarm, data collection mode, and other values that do not vary

significantly (constant).

Structure

<HEADER>

L, n 1.<ECID1> . . . 2.<ECIDn>

Required

2 Equipment Constant Data

FunctionS F

14 ←SECD

REPLYH-EM/SAbbr.

Transmits constants by order of request in response to F13.

Structure

<HEADER>

L, n 1.<ECV1> 2.<ECV2> . . . n.<ECVn>

4-2. Stream 2

43


4

2 New Equipment Constant Send

FunctionS F

15 →SECS

REPLYH-EM/SAbbr.

Changes one or more equipment constants.

Structure

<HEADER>

L, n 1.L, 2 1.<ECID1> 2.<ECV1> . . . n.L, 2 1.<ECIDn> 2.<ECVn>

Required

2 New Equipment Constant Acknowledge

FunctionS F

16 ←SEAC

REPLYH-EM/SAbbr.


Structure

<HEADER>

<EAC>

44


4

2 Equipment Constant Name list Request

FunctionS F

29 →SECNR

REPLYH-EM/SAbbr.

The host gathers basic information on equipment constants currently valid for the equipment.

Structure

<HEADER>

L, n 1.<ECID1> . . . n.<ECIDn>

Required

2 Equipment Constant Name list

FunctionS F

30 ←MECN

REPLYH-EM/SAbbr.

Replies to S2F29.

Structure

<HEADER>

L, n　(n represents the number of equipment constant names.) 1.L, 6 1.<ECID1> 2.<ECNAME1> 3.<ECMIN1> 4.<ECMAX1> 5.<ECDEF1> 6.<UNITS1> . . . n.L, 6 1.<ECIDn> 2.<ECNAMEn> 3.<ECMINn> 4.<ECMAXn> 5.<ECDEFn> 6.<UNITSn>

45


4

2 Define Report

FunctionS F

33 →MDR

REPLYH-EM/SAbbr.

The host defines a series of reports on the equipment.

Structure

<HEADER>

L, 2 1.<DATAID> 2.L, a 1.L, 2 1.<RPTID1> 2.L, b 1.<VID1> . . . b.<VIDb> . . . a. L, 2 1.<RPTIDa> 2.L, c 1.<VID1> . . . c.<VIDc>

Required

2 Define Report Acknowledge

FunctionS F

34 ←SDRA

REPLYH-EM/SAbbr.

Acknowledgement or error. If an error state is detected, all messages are rejected. Partial changes are not

permitted.

Structure

<HEADER>

<DRACK>

46


4

2 Link Event Report

FunctionS F

35 →MLER

REPLYH-EM/SAbbr.

The host links to the report collected event ID (CEID).

Structure

<HEADER>

L, 2 1.<DATAID> 2.L, a 1.L, 2 1.<CEID1> 2.L, b 1.<RPTID1> . . . b.<RPTIDb> . . . a.L, 2 1.<CEIDa> 2.L, c 1.<RPTID1> . . . c.<RPTIDc>

Required

2 Link Event Report Acknowledge

FunctionS F

36 ←SLERA

REPLYH-EM/SAbbr.

Transmits acceptance or error. If an error state is detected, all messages are rejected. Partial changes are not

permitted.

Structure

<HEADER>

<LRACK>

47


4

2 Enable/Disable Event Report

FunctionS F

37 →SEDER

REPLYH-EM/SAbbr.

The host enables or disables a series of reports on the collected event ID (CEIDs).

Structure

<HEADER>

<CEED>L, n　(n represents the number of CEID.) 1.<CEID1> . . . n.<CEIDn>

Required

2 Enable/Disable Event Report Acknowledge

FunctionS F

38 ←SEERA

REPLYH-EM/SAbbr.

Transmits acceptance or error. If an error state is detected, all messages are rejected. Partial changes are not

permitted.

Structure

<HEADER>

<ERACK>

48


4

2 Host Command Send

FunctionS F

41 →SHSC

REPLYH-EM/SAbbr.

The host asks the equipment to implement a particular remote command with the related parameters.

Structure

<HEADER>

L, 2 1.2<RCMD> 2.L, n　(Number of parameters) 1.L, 2 1.<CPNAME1> 2.<CPVAL1> . . . n.L, 2 1.<CPNAMEn> 2.<CPVALn>

Required

2 Host Command Acknowledge

FunctionS F

42 ←SHCA

REPLYH-EM/SAbbr.

Transmits a host command or error. If the command is not accepted due to one or more incorrect parameters,

the equipment returns a list of incorrect parameters, including parameter names and reasons for

inappropriateness.

Structure

<HEADER>

L, 2 1.<HCACK> 2.L, n 1.L, 2 1.<CPNAME1> 2.<CPACK1> . . . n.L, 2 1.<CPNAMEn> 2.<CPACKn>

49


4

5 Alarm Report Send

FunctionS F

1 ←SARS

REPLYH-EM/SAbbr.

Transmits notification that an alarm has occurred or has been canceled. This message is transmitted when an

alarm is activated or canceled. The errors that cannot be recovered and the caution flag are not required to

have corresponding release messages.

Structure

<HEADER>

L, 3 1.<ALCD> 2.<ALID> 3.<ALTX>

Required

5 Alarm Report Acknowledge

FunctionS F

2 →SARA

REPLYH-EM/SAbbr.


Structure

<HEADER>

<ACKC5>

4-3. Stream 5

50


4

5 Enable/Disable Alarm Send

FunctionS F

3 →SEAS

REPLYH-EM/SAbbr.

(Enable/disable alarm send)

Sets or resets the enable bit of an alarm report from the equipment. Using this bit, the equipment determines

whether to send an alarm report to the host. Some alarms may not be controlled by this method.

Structure

<HEADER>

L, 2 1.<ALED> 2.<ALID>

Required

5 Enable/Disable Alarm Acknowledge

FunctionS F

4 ←SEAA

REPLYH-EM/SAbbr.


Structure

<HEADER>

<ACKC5>

51


4

5 List Alarm Request

FunctionS F

5 →SLAR

REPLYH-EM/SAbbr.

(Alarm list request)

The host asks the equipment to send an alarm information list.

Structure

<HEADER>

<ALID1.....ALIDn>

Required

5 List Alarm Request

FunctionS F

6 ←SLAD

REPLYH-EM/SAbbr.

(Alarm list data)

This indicates the current alarm status (alarm has occurred/is being canceled). It may contain more than one

alarm data.

Structure

<HEADER>

L, m 1.L, 3 1.<ALCD1> 2.<ALID1> 3.<ALTX1> . . . m.L, 3 1.<ALCDm> 2.<ALIDm> 3.<ALTXm>

When m=0, there is no alarm data.When ALCDi or ALTXi item length is 0, there is no data for the alarm in question.

52


4

6 Multi-block Data Send Inquire

FunctionS F

5 ←SMBI

REPLYH-EM/SAbbr.

When a discrete type data report S6F11 requires multi-block format, this transaction must be performed before

transmission.

Structure

<HEADER>

L, 2 1.<DATAID> 2.<DATALENGTH>

Required

6 Multi-block Grant

FunctionS F

6 →SMBG

REPLYH-EM/SAbbr.


Structure

<HEADER>

<GRANT6>

4-4. Stream 6

53


4

6 Event Report Send

FunctionS F

11 ←MERS

REPLYH-EM/SAbbr.

The equipment sends a series of defined and linked enabled reports to the host as soon as an event occurs.

Structure

<HEADER>

L, 3 1.<DATAID> 2.<CEID> 3.L, a 1.L, 2 1.<RPTID1> 2.L, b 1.<V1> . . . b.<Vb> . . . a.L, 2 1.<RPTIDa> 2.L, c 1.<V1> . . . c.<Vc>

Required

6 Event Report Acknowledge

FunctionS F

12 →SERA

REPLYH-EM/SAbbr.

Indicates acceptance or error.

Structure

<HEADER>

<ACKC6>

54


4

6 Event Report Request

FunctionS F

15 →SERR

REPLYH-EM/SAbbr.

(Event report request)

The host queries the equipment for a series of given reports.

<HEADER>

<CEID>

Required

6 Event Report Data

FunctionS F

16 ←MERD

REPLYH-EM/SAbbr.

(Event report data)

The equipment transmits reports linked to the given CEID.

Structure

<HEADER>

L, 3 1.<DATAID> 2.<CEID> 3.L, a 1.L, 2 1.<RPTID1> 2.L, b 1.<V1> . . . b.<Vb> . . . a.L, 2 1.<RPTIDa> 2.L, c 1.<V1> . . . c.<Vc>

55


4

6 Individual Report Request

FunctionS F

19 →SIRR

REPLYH-EM/SAbbr.

The host requests defined reports from the equipment.

Structure

<HEADER>

<RPTID>

Required

6 Individual Report Data

FunctionS F

20 ←MIDR

REPLYH-EM/SAbbr.

The equipment sends variable data defined for the given RPTID to the host.

Structure

<HEADER>

L, n　(Number of variable data items) 1.<V1> . . . n.<Vn>

56


4

7 Process Program Load Inquire

FunctionS F

1 ↔SPPI

REPLYH-EM/SAbbr.

Used before process program transmission (S7F3,F4) sent before loading or unloading of process programs.

Structure

<HEADER>

L, 2 1.<PPID> 2.<LENGTH>

Required

7 Process Program Load Grant

FunctionS F

2 ↔SPPG

REPLYH-EM/SAbbr.

Grants permission to load process program.

Structure

<HEADER>

<PPGNT>

4-5. Stream 7

57


4

7 Current EPPD Request

FunctionS F

19 →SRER

REPLYH-EM/SAbbr.

Requests the current equipment process program directory (EPPD), a list of the process program PPID stored by

the equipment.

Structure

<HEADER>

Required

7 Current EPPD Data

FunctionS F

20 ←MRED

REPLYH-EM/SAbbr.

Transmits the current EPPD.

Structure

<HEADER>

L, n　(n represents the number of process programs in the directory.) 1.<PPID1> . . . n.<PPIDn>

58


4

7 Formatted Process Program Send

FunctionS F

23 ↔MFPS

REPLYH-EM/SAbbr.

(Formatted process program send)

Transmits a formatted process program to the host or equipment.

If S7F23 is in multi-block data format, an S7F1 transaction must be performed before this transaction.

Structure

<HEADER>

L, 4

1.<PPID> 2.<MDLN> 3.<SOFTREV> 4.L, c　(c represents the number of process commands.) 1.L, 2 1.<CCODE> 2.L, p　(p represents the number of parameters.) 1.<PPARM> . . . p.<PPARM> . . . c.L, 2

Required

7 Formatted Process Program Acknowledge

FunctionS F

24 ↔SFPA

REPLYH-EM/SAbbr.

(Formatted process program acknowledge)

Transmits notification that the formatted process program has been received, and the interpreter accepts the

process program. Acceptance by the interpreter indicates only that the message is understood. Verification of

the content of the process program is sent by S7F27,F28 transactions.

Structure

<HEADER>

<ACKC7>

59


4

7 Formatted Process Program Request

FunctionS F

25 ↔SFPR

REPLYH-EM/SAbbr.

(Formatted process program request)

The host or equipment requests a process program.

Structure

<HEADER>

<PPID>

Required

7 Formatted Process Program DATA

FunctionS F

26 ↔MFPD

REPLYH-EM/SAbbr.

(Formatted process program data)

Transfers process program in response to PPID request. MDLN and SOFTREV values are obtained from the

PCV used to create the process program.

Structure

<HEADER>

L, 4

1.<PPID> 2.<MDLN> 3.<SOFTREV> 4.L, c　(c represents the number of process commands.) 1.L, 2 1.<CCODE>　 2.L, p　(p represents the number of parameters.) 1.<PPARM> .　 .　 .　 p.<PPARM> . . . c.L, 2

60


4

7 Process Program Verification Send

FunctionS F

27 ←MPVS

REPLYH-EM/SAbbr.

(Process program verification send)

The equipment notifies the host that the equipment has received and checked the process program. The results

of the check are shown in the error list.

A list length of 0 or a single-element list with ACKC7A of 0 indicates that no errors are found in the process.

The equipment is responsible for sending a copy of this message to the host when it receives any formatted

process program (S7F23,F26,F31).

Structure

<HEADER>

L, 2

1.<PPID> 2. L, n　(n represents the number of errors to report.) 2.L, 3 1.<ACKC7A> 2.<SEQNUM> 3.<ERRW7> . . .

n.L, 3 1.<ACKC7A> 2.<SEQNUM> 3.<ERRW7>

Required

7 Process Program Verification Acknowledge

FunctionS F

28 →SPVA

REPLYH-EM/SAbbr.

(Process program verification acknowledge)

The host acknowledges receipt of S7F27.

Structure

<HEADER>

61


4

9 Unrecognized Device ID

FunctionS F

1 ←SUDN

REPLYH-EM/SAbbr.

Transmits notification that the device ID in the message block header is not recognized at the node.

Structure

<HEADER>

<MHEAD>

9 Unrecognized Stream Type

FunctionS F

3 ←SUSN

REPLYH-EM/SAbbr.

Transmits notification that the stream type in the message block header is not recognized by the equipment.

Structure

<HEAD>

<MHEAD>

4-6. Stream 9

62


4

9 Unrecognized Function Type

FunctionS F

5 ←SUFN

REPLYH-EM/SAbbr.

Transmits notification that the function type in the message ID is not recognized by the equipment.

Structure

<HEADER>

<MHEAD>

9 Illegal Data

FunctionS F

7 ←SIDN

REPLYH-EM/SAbbr.

Transmits notification that the equipment is able to understand the stream and function, but unable to interpret

the data format.

Structure

<HEADER>

<MHEAD>

63


4

9 Transaction Timer Time-out

FunctionS F

9 ←STTN

REPLYH-EM/SAbbr.

Transmits notification that the set time for the transaction (receiving) timer has elapsed and that the current

transaction is terminated.

Structure

<HEADER>

<SHEAD>

Required

9 Data Too Long

FunctionS F

11 ←SDLN

REPLYH-EM/SAbbr.

Transmits notification that the equipment has received data longer than can be processed.

Structure

<HEADER>

<MHEAD>

64


4

9 Conversation Time-out

FunctionS F

13 ←SCTN

REPLYH-EM/SAbbr.

Transmits notification that the equipment has failed to receive expected data within a certain timeframe.

Structure

<HEADER>

L, 2 1.<MEXP> 2.<EDID>

65


4

MessageVariable

S5F2

S5F4

ACKC5 Acknowledge code 1 byte

0 = Accepted

1 = Denied (error, unacceptable)

Format: 10

(Binary)

Constant Format

5. Definition of Message Variable (Data Item)Numbers are expressed in decimal form, unless otherwise specified. Hexadecimal numbers are indicatedby H (XXH).

5-1. ACKC5

MessageVariable

S6F12ACKC6 Acknowledge code 1 byte

0 = Accepted

1 = Error (unacceptable)

Format: 10

(Binary)

Constant Format

5-2. ACKC6

MessageVariable

S7F18

S7F24

ACKC7 Acknowledge code 1 byte

0 = Accepted

1 = Not granted

2 = Length error

3 = Array overflow

4 = Unrecognized PPID

5 = Mode error

Format: 10

(Binary)

Constant Format

5-3. ACKC7

MessageVariable

S7F27ACKC7A Acknowledge code 1 byte

0 = Accepted

1 = MDLN does not match.

2 = SOFTRREV does not match.

3 = Ineffective CCODE

4 = Ineffective PPARM

Format: 51

(1-byte integer)

Constant Format

5-4. ACKC7A

MessageVariable

S5F1

S5F6

ALCD Alarm code

8 = Alarm activated.

0 = Alarm canceled.

Format: 10

(Binary)

Constant Format

5-5. ALCD

66


4

MessageVariable

S5F3ALED Alarm enable/disable 1 byte

Bit 8 = 1 Enable alarm.

Bit 8 = 0 Disable alarm.

Format: 10

Constant Format

5-6. ALED

MessageVariable

S5F1

S5F3

S5F5

ALID This ID is used to distinguish errors shown in the

error display screen from other errors.

It accompanies the ALTX of the related data item.

Format: 20 (ASCII)

Format: 52

(2-byte integer)

Constant Format

5-7. ALID

The text consists of two lines: error type and action, which are separated by NUL. If the text in the tablebelow has only one line, the error type is indicated. If so, the common action given below is applied.

If the default is marked by *, the error is factory-set for notification upon occurrence.

63 EEPROM checksum err *

68 Incorrect ROM is used *

69 EEPROM checksum err *

166 Carr is not installed *

Install carr

167 Waf not correctly set to carr *

Set waf correctly

169 V.S. err of Stage *

Confirm waf vacuum section setting

197 BScentmac ispct sec init err *

Initialize by manual key

198 Feed armX init err *

Move Feed arm to Buf side sensor pstn

199 Feed arm Y init err *

Move Feed arm to Buf side sensor pstn

200 Chng arm init err *


201 Elvtr init err *


DefaultALID ALTX

Reset the system.

DefaultALID ALTX

202 Buf section init err *


223 Bad course algn (no centraliz) *

229 Carrier Data err *

Confirm Carr data

231 Waf srch err (hght, ptch) *

236 Elevator sensor err *

238 Elevator movement T.O. *

240 Waf srch err (waf cen pstn det) *

241 Waf srch err (bad waf cen pstn) *

242 Waf srch err (waf not flat) *

243 Waf srch err (waf not found) *

244 Waf srch err (nospaceforfeedarm) *

245 Waf srch err (AGC err) *

262 OrFl ispct T.O. *

263 V.S. err of Buf sec (Stage) *


264 Buf lwr limit move T.O. *

67


4

DefaultALID ALTX ALID

265 Buf OrFl pstn move T.O. *

266 Buf surf mac pstn move T.O. *

267 Buf BS mac pstn move T.O. *

274 Buf sec macX tilt err *

275 Buf sec macY tilt err *

287 OriFla detect err *

Confirm Carr data

299 BS cent mac snsr cant be ON *

305 BS cent mac ispct lwr limit T.O. *

306 BS cent mac ispct trnsfer T.O. *

315 V.S. err of BS cent mac (Stage) *


322 Change arm movement T.O. *

324 V.S. err of Change arm *


333 Chng arm sensor pstn not spcfd *

334 Chng arm uplmt snsr err *

335 Chng arm lwrlmt snsr err *

337 Chng arm slide sensorerr (buf) *

338 Chng arm slide sensorerr (stage) *

339 Chng arm sld pstn not spcfd *

Move Chang arm to sensor pstn

349 Feed armX home pstn move T.O. *

350 Feed armX wait pstn move T.O. *

352 Feed arm does not move out buf *

359 Feed arm pstn is not spcfd *

363 Feeder XorY hit the other unit *

364 V.S. err of Feed arm (Stage) *


368 Centering rangeX is exceeded *

Confirm carr pstn

369 Centering rangeY is exceeded *

Confirm carr pstn

370 Centering rangeXY is exceeded *

Confirm carr pstn

375 Incorrect carrier is set *

Confirm the specification

377 V.S. err of Stage *


378 System cant load wafer *

DefaultALTX

379 System cant unload wafer *

380 Uplmt snsr of elvtr cant be OFF *

381 Uplmt snsr of elvtr cant be ON *

382 Lrlmt snsr of elvtr cant be OFF *

383 Lrlmt snsr of elvtr cant be ON *

386 Carr data error *

Confirm Carrier Data

387 System detected more than 3 waf *

Remove wafer

388 System does not prod a vacuum *

Confirm vacuum pres

389 Waf storage system does not work *

Remove wafer

393 Vacuum pres is not sufficient *

Confirm vacuum pres

395 V.S. err of Feed arm *

serch next wafer, push Skip key

396 Feeder arm timeout (Yaxis) *

397 Wafer was detected. *

Store wafer with Control Local

400 Feeder not in buffer when rise *

401 Feeder Z operation timeout *

402 Feeder Z hit the other unit *

403 Feeder arm Z not in position *

404 Feeder arm Z upper sensor OFF *

405 Feder arm Z lower sensor OFF *

406 SECS framing error *

Check the cable connection

407 SECS overrun error *


408 SECS break signal detected *


409 SECS communication lost *


410 SECS block timeout *


411 SECS undefined device ID *


412 SECS undefined stream *


68


4

DefaultALID ALTX DefaultALID ALTX

413 SECS undefined function *


414 SECS undefined data format *


415 SECS data too long *


416 SECS conversation timeout *


417 SECS unexpected primary msg *


418 SECS unexpected secondary msg *


419 SECS in/out line err *


420 Initialization cant be done *

Specify transfer

421 Wafr size incarrfil not corct *

Initialize carrier file

422 Unexpected wafer detected *

Remove wafer on change arm (stage)

423 Detected the carrier removed *

Do not select “Conti” if the carrier

has been replaced Select

424 Detected the carrier removed *

Do not select “End” if the carrier

has been replaced Select

425 Can’t unload the wafer *

Set the correct carrier

426 Remote box hardware err *

Turn off the power once and again

427 Remove box line err *


428 Initialization can’t be done *

Indicate the operation by the

function key on the display

429 Centering sensor is shaded *

Confirm the lighting state of

centering sensor

430 Height search err *

Check and see if the wafer is in the

lowermost pocket of the carrier

431 Pitch search err *

Check and see if the wafer is in the

uppermost pocket of the carrier

9XX < < < Indxr error > > >

900 Indxr error *

901 Indxr Internal error *

902 Indxr in/out line err *

903 Indxr send retry-limit over *


904 Indxr abort msg. receive error *

905 Indxr interference error *

906 Pod is not installed *

Install Pod

907 Load/Unload Position error *

Other Internal Err *

ALID Please push reset key

MessageVariable

S5F1

S5F6

ALTX Alarm message text

Text indicating “error type” and the “action” shown

on the LCD if an error occurs. Each text

corresponds to an ALID. All text is in English (see

ALID above). NUL is used to start a new line.

Format: 20

(ASCII)

Constant Format

5-8. ALTX

69


4

Command code

Control unit used to express a process program

(sample/carrier file)

(The inspection items and settings are determined

by the PPRAM, described later.)

A process program is transmitted by order of

CCODE No.

[Sample File Defining CCODE]

When the process program to be transmitted is a

sample file, the entirety of the following CCODE for

sample file definition must be transmitted.

1 = Inspection item for Slot 1

PPARM Format: 10 (binary)

Bit 0: The wafer is selected when wafer

sampling is 1, and not selected

when 0.

When no inspection item is

selected, the equipment only

performs centering and orientation

flat alignment. When an inspection

item(s) is selected, if the wafer is

not selected, no inspection(s) is

performed on the wafer.

Bit 1: Surface Macro inspection

1: Selected 0: Not selected

Bit 2: Back Side Edge Macro inspection


Bit 3: Back Side Center Macro

inspection


Bit 4: Microscopic inspection


Bit 5, 6, 7: Always set to 0.

(Example) Select Back Side Edge Macro and

microscopic inspections.

(MSB) (LSB)

0 0 0 1 0 1 0 1 B

2 = Inspection item for Slot 2 Same as 1 above.

↓26 = Inspection item for Slot 26 Same as 1 above.

102 = Surface Macro inspection time

PPARM Format: 31 (1-byte integer with sign)

0–99 (0–99 seconds)

-1 (infinite)

103 = Back Side Edge Macro inspection time

Same as 102 above.

MessageVariable

S7F23

S7F26

CCODE Format: 52

(2-byte integer)

Constant Format

5-9. CCODE

70


4

MessageVariable

S7F23

S7F26

CCODE Format: 52

(2-byte integer)

Constant Format

104 = Back Side Center Macro inspection time

Same as 102 above.

105 = Orientation flat/Notch alignment angle for

LOAD


0: (0°), 90: (90°), 180: (180°), 270: (270°)


accepted wafer storage Same as 105 above.


rejected wafer storage in Surface Macro

inspection


0: (0°), 45: (45°), 90: (90°), 135: (135°),

180: (180°), 225: (225°), 270: (270°), 315: (315°)


rejected wafer storage in Back Side Edge

Macro inspection Same as 107 above.


rejected wafer storage in Back Side Center

Macro inspection Same as 107 above.


rejected wafer storage in microscopic

inspection Same as 107 above.

111 = Rotational rate (VR-dependent/independent)

PPARM Format: 52 (2-byte integer)

MSB of Upper Byte = 1: Set independent of

equipment VR setting

(The value of the PPARM lower byte is used.)

MSB of Upper Byte = 0: The equipment VR

setting is used.

(The value of the PPARM lower byte is

ignored.)

Relation between lower byte and rate

00H: (Stop)–FFH: (Maximum rate)

112 = Surface Macro X-axis tilt (VR-dependent/

independent)




(The value of the PPARM lower byte is used.)


setting is used.


ignored.)

Relation between lower byte and tilt

00H: (- maximum tilt)–FFH: (+ maximum tilt)

113 = Surface Macro Y-axis tilt (VR-dependent/

independent) Same as 112 above.

114 = Back Side Edge Macro tilt (VR-dependent/

independent) Same as 112 above.

71


4

MessageVariable

S7F23

S7F26

CCODE Format: 52

(2-byte integer)

Constant Format

115 = Back Side Center Macro tilt (VR-dependent/

independent)





used.)


setting is used.


ignored.)

Relation between lower byte and tilt

00H: (0°)–FFH: (160°)

116 = Protection attribute


Permits or prohibits reading (restore) and

writing (store) of a sample file in operator

mode.

Bit 0: Always set to 1.

Bit 1: RESTORE

1: Prohibited 0: Permitted

Bit 2: STORE


Bit 3–7: Always set to 0.

(Example): Prohibit both STORE and

RESTORE.

(MSB) (LSB)

0 0 0 0 0 1 1 1 B

117 = Use of orientation flat/Notch for unloading


0 = Orientation flat/Notch is used.

1 = Orientation flat/Notch is not used.

Default = 0

[Carrier File Defining CCODE]

When the process program to be transmitted is a

carrier file, the entirety of the following CCODE for

carrier file definition must be transmitted.

202 = Carrier (wafer) size

PPARM Format: 44 (4-byte floating point)

150.0 = 6" wafer

200.0 = 8" wafer

203 = Maximum number of pockets


25 = 25-pocket carrier

26 = 26-pocket carrier

204 = Pocket counting direction (does wafer

transfer start from the top or bottom of a

carrier?)


72


4

MessageVariable

S7F23

S7F26

CCODE Format: 52

(2-byte integer)

Constant Format

0 = Start from bottom pocket

1 = Start from top pocket

205 = Orientation flat/notch


0 = Orientation flat

1 = Notch

206 = SEMI/JEIDA


0 = SEMI

1 = JEIDA

207 = Carrier height adjustment range


Range: 6-inch wafer

69.165–81.915 mm

8-inch wafer

69.165–81.915 mm

Actual adjustment resolution: 0.1 mm

208 = Carrier pitch adjustment range


Range: 6-inch wafer

4.51–5.01 mm

8-inch wafer

6.10–6.60 mm

Actual adjustment resolution: 0.1 mm

209 = Protection attribute


Permits or prohibits reading (restore) and

writing (store) of a carrier file in the operator

mode.

Bit 0: Always set to 1.

Bit 1: RESTORE


Bit 2: STORE


Bit 3–7: Always set to 0.

(Example): Prohibit both STORE and

RESTORE.

(MSB) (LSB)

0 0 0 0 0 1 1 1 B

MessageVariable

S2F37CEED Collection event enable/disable code

0 = Disable

1 = Enable

Format: 11

(Truth value)

Constant Format

5-10. CEED

73


4

MessageVariable

S2F35

S2F37

S6F11

S6F15

CEID Format: 52

(2-byte integer)

Constant Format

5-11. CEID

Collected Event ID

Transmits notification of a processing state change

important for the host. An even-numbered ID

represents a normal change, while an odd-

numbered ID represents an abnormal change. For

the same incident, notification of this ID is sent

independent of the alarm ID, if any.

In maintenance mode, the system operates offline,

and no collection events occur.

CEID 0020 and 0022 occur with ROM version 2.10 or

later when the NWL is connected to the remote box.

[Events Related to Changes in Operational Mode

(Security)]

<Meaning> <Default Setting>

0002 = Initial routine starts. OFF

0004 = Wafer is detected during initial routine. ON

0005 = More than 2 wafers are detected during

the initial routine. ON

0006 = Initial routine ends. OFF

0008 = Enters operator mode. OFF

0010 = Enters engineer mode. OFF

0020 = Enters remote box mode. OFF

0022 = Exits remote box mode. OFF

[Events Related to Changes in Carrier and Wafer

Transfer]

0100 = Cassette is installed. OFF

0102 = Cassette is removed. OFF

0200 = Wafer has moved into Surface

macro position. OFF

0300 = Wafer has moved into Back Side

Edge Macro position. OFF

0400 = Wafer has moved into Back Side

Center Macro position. OFF

0450 = Wafer has moved into Surface PS

position. OFF

0500 = Stage sensor is ON. OFF

0502 = Stage sensor is OFF. OFF

0504 = Wafer has moved onto the stage. OFF

0510 = Wafer has moved onto the change arm

from the stage. OFF

[Events Related to Progress of Inspection]

0600 = Lot inspection starts. OFF

0602 = Wafer is accepted. OFF

0604 = Wafer is rejected in Macro inspection. OFF

0606 = Wafer is rejected in Micro inspection. OFF

74


4

MessageVariable

S2F35

S2F37

S6F11

S6F15

CEID Format: 52

(2-byte integer)

Constant Format

0608 = Pause OFF

0610 = Pause canceled. OFF

0612 = Inspection of one item is completed. OFF

Occurs on completion of:

• Surface Macro inspection

• Back Side Edge Macro inspection

• Back Side Center Macro inspection

• Surface PS inspection

• Micro inspection

0614 = One wafer inspection begins. OFF

0616 = One wafer inspection is completed. OFF

0618 = Lot inspection is completed. OFF

0620 = Lot inspection is forcibly terminated. OFF

0622 = Mapping is completed. OFF

0624 = Wafer ejection is completed. OFF

0626 = Immediate stop is completed. OFF

0628 = An error occurs. OFF

Refers to errors defined by ALID.

0630 = An error is canceled. OFF

0632 = Height/pitch measurement is

completed. OFF

[Events Related to File Management]

0800 = Data for a sample file is changed

(STORE). OFF

Occurs when the change is saved.

0802 = Data for a carrier file is changed

(STORE). OFF

Occurs when the changes is stored.

0804 = Another sample file is selected for

implementation. OFF

0808 = Another carrier file is selected for

implementation. OFF

0810 = Equipment setting(s) is changed. OFF

0812 = Data for a sample file is changed

(temporary). OFF

Occurs when changes are made,

or during temporary inspections.

[Events Related to Control Mode]

0900 = Shifts to offline mode. OFF

0902 = Shifts to online local mode. OFF

0904 = Shifts to online remote mode. OFF

[Events Related to Indexer]

9000 = Indexer self-check is completed. OFF

9001 = Indexer self-check is completed

(abnormal). OFF

9002 = Indexer pod has been locked. OFF

9003 = Indexer pod has been locked

(abnormal). OFF

9004 = Indexer pod has been unlocked. OFF

75


4

9005 = Indexer pod has been unlocked

(abnormal). OFF

9010 = MSC interlock is enabled. OFF

9012 = MSC interlock is disabled. OFF

9097 = Indexer error occurs. OFF

9098 = Indexer error is canceled. OFF

MessageVariable

S2F35

S2F37

S6F11

S6F15

CEID Format: 52

(2-byte integer)

Constant Format

MessageVariable

S1F14COMMACK Establish communications acknowledge code, 1

byte

0 =Accepted

1 =Denied, retry

2–63 = Reserved

Format: 10

(Binary)

Constant Format

5-12. COMMACK

MessageVariable

S2F41

S2F42

CPNAME Command parameter name

Parameter name for a remote-controlled operation

performed by the NWL upon receipt of a host

remote command (RCMD). Specific operations

are defined by RCMD.

Format: 20

(ASCII)

Constant Format

5-13. CPNAME

MessageVariable

S2F42CPACK Command parameter acknowledge code

1 =The parameter name (CPNAME) does not exist.

2 = Illegal value. It is used for CPVAL.

3 = Illegal format. It is used for CPVAL.

>3 =Other equipment-specific errors

4–63 = Reserved

Format: 10

(Binary)

Constant Format

5-14. CPACK

MessageVariable

S2F41CPVAL Command parameter.

Parameter value for a remote-controlled operation

performed by the NWL upon receipt of a host

remote command (RCMD). These values are sent

along with the host command in S1F41. The

parameter names are defined by CPNAME. Specific

operations are defined by RCMD.

Format:

Depends on

CPNAME.

Constant Format

5-15. CPVAL

76


4

MessageVariable

S2F39

S6F5

DATALENGHTH Total length (byte count) of the message data Format: 30, 31

(32 or 34 for the

sign, 50 or 51 for

Yes/No, 52 or 54 for

integer)

Constant Format

5-16. DATALENGHTH

MessageVariable

S2F33

S2F35

S2F39

S6F5

S6F11

DATAID Data ID = 0

Used to identify a series of data collectively. It is

used particularly for a series of data having a high

likelihood of multi-block transmission. (This is

used for a multi-block data format send inquiry.)

It is set to 0.

Format: 51

(1-byte integer)

Constant Format

5-17. DATAID

MessageVariable

S2F34DRACK Define report acknowledge code

0 = Accepted

1 = Denied, insufficient space

2 = Denied, incorrect format

3 = Denied. At least one RPTID is already defined.

4 = Denied. At least one VID does not exist.

>4 = Other errors

Format:10

(Binary)

Constant Format

5-18. DRACK

MessageVariable

S2F16EAC Equipment acknowledge code. Reply to host

request to modify equipment constants. 1 byte

0 = Accepted

1 = Denied. No constant exists.

2 = Denied. Busy

3 = Denied. The constant falls outside the range.

4 = Denied. Unrecognized command

>4 = Other errors

Format:10

(Binary)

Constant Format

5-19. EAC

77


4

MessageVariable

S2F30ECDEF Equipment constant default

The default value of an equipment constant.

See ECV:DEFAULT in “5-21. ECID” below.

The format and code depend on the ECV.

Depends on ECID.

Constant Format

5-20. ECDEF

MessageVariable

S2F13

S2F15

S2F29

S2F30

ECID Format: 51

(1-byte integer)

Constant Format

5-21. ECID

Equipment Constant ID

Identifies NWL setting items; used in

communications concerning retrieval, updates, and

changes to settings. The setting values are

indicated by ECV.

001 = Wafer search retry/skip

ECNAME = SET_SKIP_RETRY

ECV: Format 51 (1-byte integer)

0 = Skip

1 = Retry Default = 0

002 = Rejected wafer removal

ECNAME = SET_EJECT


0 = Not remove

1 = Remove Default = 0

003 = Orientation flat/Notch angle offset

(instrumental error adjustment range)

ECNAME = OFFSET_ROT

ECV: Format 44 (4-byte floating point)

Range: -45–45 (-45°–+45°)

Precision: 1° Default = 0

004 = Feeder offset (LOAD)

ECNAME = OFFSET_LOAD_FEEDER


Range: -5.1403–7.9441

(-5.1403–+7.9441 mm)

Precision: 0.23365 mm Default = 0

005 = Feeder offset (UNLOAD)

ECNAME = OFFSET_UNLOAD_FEEDER


Range: -8–8 (-8–+8 mm)

Precision: 0.23365 mm Default = 0

006 = Elevator downward travel for wafer transfer

(6-inch wafer)

ECNAME = ELV_DN_6


78


4

MessageVariable

S2F13

S2F15

S2F29

S2F30

ECID Format: 51

(1-byte integer)

Constant Format

Range: 1.35–2.10 (1.35–2.10 mm)

Precision: 0.01 mm Default = 2.10

007 = Elevator downward travel for wafer transfer

(8-inch wafer)

ECNAME = ELV_DN_8


Range: 2.05–2.80 (2.05–2.80 mm)


008 = Elevator offset

(instrumental error adjustment range)

ECNAME = OFFSET_ELV


Range: -6.40–6.35 (-6.40–+6.35 mm)


009 = Display language

ECNAME = SET_DISP_LANG


0 = Japanese

1 = English Default = 0

010 = Cassette eject error

(during elevator rises after inspection)

ECNAME = SET_WITHDRAW


0 = Error

1 = Non-error Default = 0

011 = Change arm speed

ECNAME = SET_CHG_SPEED


0 = Regular

1 = Slow Default = 0

012 = Slot sensor (6-inch)

ECNAME = SET_SLOT_SNS_6


0 = On

1 = Off Default = 0

013 = Slot sensor (8-inch)

ECNAME = SET_SLOT_SNS_8


0 = On

1 = Off Default = 0

021 = COM1 baud rate

ECNAME = SECS_BAUD


0 = 9600 baud

1 = 4800 baud

2 = 2400 baud

3 = 1200 baud

4 = 300 baud Default = 0

79


4

MessageVariable

S2F13

S2F15

S2F29

S2F30

ECID Format: 51

(1-byte integer)

Constant Format

022 = SECSDEVID

ECNAME = SECS_DEVID


Range: 0–32767

Setting unit: 1 Default = 101

023 = SECST1 (character to character time-out)

ECNAME = SECS_T1


Range: 1–100 (0.1–10 seconds)

Setting unit: 1 (0.1 seconds)

Default = 5 (0.5 seconds)

024 = SECST2 (protocol time-out)

ECNAME = SECS_T2


Range: 1–125 (0.2–25 seconds)

Setting unit: 1 (0.2 seconds)

Default = 50 (10 seconds)

025 = SECST3 (Response time-out)

ECNAME = SECS_T3


Range: 1–120 (1–120 seconds)

Setting unit: 1 (1 second)


026 = SECST4 (block to block time-out)

ECNAME = SECS_T4



Setting unit: 1 (1 second)


027 = SECS retry

ECNAME = SECS_RTY


Range: 0–31 (0–3 times)

Setting unit: 1 (once)

Default = 3 (3 times)

028 = Establishment of Communications time-out

ECNAME = ECD



Setting unit: 1 (10 seconds)


041 = Programmable stop

ECNAME = SET_PS


0 = Off

1 = On Default = 0

80


4

MessageVariable

S2F13

S2F15

S2F29

S2F30

ECID Format: 51

(1-byte integer)

Constant Format

042 = Programmable stop time

ECNAME = PS_TIME

ECV: Format 31 (1-byte integer with sign)

-1–99 (second)

-1 = Infinite Setting unit: 1 (1 second)

Default = -1

043 = Programmable stop angle

ECNAME = PS_ROT

ECV: Format 32 (2-byte integer with sign)

0,45,90,135,180,225,270,315 (degree)

Default = 0

MessageVariable

S2F30ECMAX Maximum value of equipment constants

See ECV ranges in “5-21. ECID” above. Format

codes vary, depending on ECV.

Depends on ECID.

Constant Format

5-22. ECMAX

MessageVariable

S2F30ECMIN Minimum value of equipment constants

See the ECV ranges in “5-21. ECID” above. Format

codes vary, depending on ECV.

Depends on ECID.

Constant Format

5-23. ECMIN

MessageVariable

S2F30ECNAME Text data for equipment constant names

See “5-21. ECID” above.

Format: 20

(ASCII)

Constant Format

5-24. ECNAME

MessageVariable

S2F14

S2F15

ECV Value of equipment constants

See “5-21. ECID” above.

Depends on ECID.

Constant Format

5-25. ECV

81


4

MessageVariable

S9F13EDID ID of data to receive

MEXP EDID EDID

S7F3 <PPID> A[16],B[16]

Depends on ECID.

Constant Format

5-26. EDID

MessageVariable

S2F38ERACK Enable/disable event report acknowledge code

0 = Accepted

1 = Denied: At least one CEID doesn’t exist.

>1 = Other errors

Format: 10

(Binary)

Constant Format

5-27. ERACK

MessageVariable

S7F27ERRW7 Not defined for NWL. (Always shown as a blank) Format: 20

(ASCII)

Constant Format

5-28. ERRW7

MessageVariable

S6F6GRANT6 Grant code, 1 byte

Response to a multi-block data send inquiry

0 = Permits the transmission.

1 = Busy; Requests for retry.

2 = Response is not required.

Format: 10

(Binary)

Constant Format

5-29. GRANT6

MessageVariable

S7F1LENGTH Byte length of service or process program Format: 30,31

(32 or 34 for the

sign, 50 or 51 for

Yes/No, 52 or 54 for

integer)

Constant Format

5-30. LENGTH

82


4

MessageVariable

S2F36LRACK Link report acknowledge code, 1 byte

0 = Accepted

1 = Denied: Not enough space

2 = Denied: Ineffective format

3 = Denied: At least one CEID link is already

defined.

4 = Denied: At least one CEID doesn’t exist.

5 = Denied: At least one RPTID doesn’t exist.

>5 = Other errors

6–63 = Reserved

Format: 10

(Binary)

Constant Format

5-31. LRACK

MessageVariable

S2F42HCACK Host command/parameter acknowledge code, 1 byte

Response to host command

0 = Acknowledge: The command has been

implemented.

1 = Reject: The command doesn’t exist.

2 = Reject: The command can’t be implemented at

this point.

3 = Reject: At least one parameter is disabled.

4 = Acknowledge: The command has been

implemented, and completion notification is

sent by event report.

5 = Reject: The equipment is already in the state

requested.

Format: 10

(Binary)

Constant Format

5-32. HCACK

MessageVariable

S1F2MDLN Equipment model name, 6 bytes at max.

Model name: “NWL860”

Format: 20

(ASCII)

Constant Format

5-33. MDLN

MessageVariable

S9F13MEXP SxxFyy of a message to receive Format: 20

(ASCII)

Constant Format

5-34. MEXP

83


4

MessageVariable

S9F1

S9F3

S9F5

S9F7

S9F11

MHEAD Header of a message with error, 10 bytes Format: 10

(Binary)

Constant Format

5-35. MHEAD

MessageVariable

S1F16OFLACK Acknowledge code for offline request, 1 byte

0 =Offline OK

Format: 20

(ASCII)

Constant Format

5-36. OFLACK

MessageVariable

S1F18ONLACK Acknowledge code for online request, 1 byte

0 =Online OK

1 =Online not permitted.

2 =Equipment is already online.

Format: 10

(Binary)

Constant Format

5-37. ONLACK

MessageVariable

S7F23

S7F26

PPARM Process parameter

Parameters contained in process program

See “5-9. CCODE” above.

Depends on CCODE.

Constant Format

5-38. PPARM

MessageVariable

S7F2

S7F30

PPGNT Process program permit state

0 =OK

3 =Disabled PPID

4 =Busy (a program is being implemented)

5 =Not permitted (in error state)

Format: 10

(Binary)

Constant Format

5-39. PPGNT

84


4

MessageVariable

S7F1

S7F17

S7F20

S7F23

S7F25

S7F26

S9F13

PPID Process program ID

Name of process program (sample file/carrier file)

“_” in the file name means a blank.

(Sample File Created by NWL)

S_1–S10

(Sample File Created by Host)

XXXXS_1–XXXXS10

(where XXXX are alphanumeric characters)

(Carrier File Created by NWL)

C_1–C10

(Carrier File Created by Host)

XXXXC_1–XXXXC10

(where XXXX are alphanumeric characters)

When a file created by the host is changed on

the NWL, XXXX is deleted.

A file name must consist of 7 letters.

XXXXS_1

XXXXC10

The name may not end with a blank “_”. For

example, XXXXS1_ is not a valid file name.

Format: 20

(ASCII)

Constant Format

5-40. PPID

MessageVariable

S2F41RCMD Remote command code

Operation command from the host to the NWL.

When detailed identification of operation and

parameter value are required, they are expressed

by command parameters (CPNAME and CPVAL).

<START>

Implements the selected sample file; enabled when

equipment processing status is READY.

Command Parameter: Not Required

When the command is enabled, collection event

CEID = 0600 occurs.

<PP-SELECT>

Selects (changes) a sample file to implement;

enabled when equipment processing status is

READY.� Selects a sample file.

CPNAME = C_PPID_S

CPVAL Format: 20 (ASCII)

Content: PPID of the sample file to implement� Selects a carrier file.

CPNAME = C_PPID_C

CPVAL Format: 20 (ASCII)

Format: 20

(ASCII)

Constant Format

5-41. RCMD

85


4

MessageVariable

S2F41RCMD Format: 20

(ASCII)

Constant Format

Content: PPID of the carrier file to implement


CEID = 0804 or 0808 occurs.

<STOP>

Completes the ongoing sequence of operations to

finish a lot.

(Equivalent to selecting End after the key-initiated

pause.)



CEID = 0620 occurs.

<PAUSE>

Equivalent to key-initiated pause. (Resumable)



CEID = 0608 occurs.

<RESUME>

Equivalent to resuming after key-initiated pause.



CEID = 0610 occurs.

<ABORT>

Immediately halts operation. (Not resumable)



CEID = 0626 occurs.

<ERR_RECOVER>

Sends notification that the error cause has been

resolved and instructs the equipment to resume

interrupted operations.



CEID = 0630 occurs.

<ACCEPT>

Equivalent to pressing the Accept key (OK, NEXT).

Does not have start function. Enabled when the

processing status is inspecting.



CEID = 0602 occurs.

<MIC_NG>

Equivalent to pressing the Microscope Reject key;

enabled only when a Micro inspection is underway.� When the reject type is not specified, a list of

zero length follows MIC_NG.� When the reject type is specified:

CPNAME = NG_TYPE

CPVAL Format: 20 (ASCII) one character

Content: 1–9

86


4

MessageVariable


(ASCII)

Constant Format


CEID = 0606 occurs.

<MACRO_NG>

Equivalent to pressing the Macro-NG key; enabled

only when a Macro inspection is underway.� When the reject type is not specified, a list of

zero length follows MIC_NG.� When the reject type is specified:

CPNAME = NG_TYPE

CPVAL Format: 20 (ASCII) one character

Content: 1–9


CEID = 0604 occurs.

<GETMAP>

Performs mapping and obtains MAP data; enabled

when equipment processing status is READY.


VID of Mapping Data to be obtained = 4


CEID = 0622 occurs.

<GET_H/P>

Measures height and pitch and obtains the height/

pitch data; enabled when equipment processing

status is READY.


VID of Height Data to be obtained = 50

VID of Pitch Data to be obtained = 51


CEID = 0632 occurs.

<EJECT_OK>

Sends notification to the NWL that the wafer has

been removed at wafer eject with the Microscope

Reject key.



CEID = 0624 occurs.

<INX_P_LK>

Locks the indexer pod.




<INX_P_ULK>

Unlocks the indexer pod.




<INX_PD_LK>

Locks the indexer pod door.


Collection event doesn’t occur.

87


4

MessageVariable


(ASCII)

Constant Format

<INX_PD_ULK>

Unlocks the indexer pod door.



<EEPROM_DMP>

Updates all EEPROM data. Enabled when

equipment processing status is READY.

CPNAME = EEPROM_DATA

CPVAL: Format 10 (Binary)


<REMOTE_BOX_ON> (available with the ROM

version 2.10 or later)

Selects the remote box mode.



MessageVariable

S2F33

S2F35

S6F11

S6F16

RPTID Report ID

Name (number) of a report (a group of data defined

by VID)

(Defined by the host using 1-byte integer: S2F33)

Format: 51

(1-byte integer)

Constant Format

5-42. RPTID

MessageVariable

S7F27SEQNUM Command No.

Specifies a processing command and indicates its

position within the list. The first command of a

process program has SEQNUM 1.

Format: 52

(2-byte integer)

Constant Format

5-43. SEQNUM

MessageVariable

S9F9SHEAD Header of a primary message that sets a transaction

timer, 10 bytes

Format: 10

(Binary)

Constant Format

5-44. SHEAD

88


4

MessageVariable

S1F2

S1F13

S1F14

S7F23

S7F26

SOFTREV Software revision code, 6 bytes maximum

ROM Version

V1.22: 122000

V1.22S1(custom-built): 122S01

Format: 20

(ASCII)

Constant Format

5-45. SOFTREV

MessageVariable

S1F4SV Status variable data

Value of status variable defined by SVID. See

“5-47. SVID” below.

Depends on SVID.

Constant Format

5-46. SV

MessageVariable

S1F3

S1F11

S1F23

SVID Status variable ID

0 = Total number of inspected wafers

SVNAME = TOTAL

SV: Format 54 (4-byte integer)

1 = Rotation VR value

SVNAME = VOL_ROT


0–255 (0: MIN, 255: MAX)

2 = Surface Macro X Tilt VR value

SVNAME = VOL_X


0–255 (0: MIN, 255: MAX)

3 = Surface Macro Y Tilt VR value

SVNAME = VOL_Y


0–255 (0: MIN, 255: MAX)

4 = Back Side Edge Tilt VR value

SVNAME = VOL_EDGE


0–255 (0: MIN, 255: MAX)

5 = Back Side Center Tilt VR value

SVNAME = VOL_CNT


0–255 (0: MIN, 255: MAX)

6 = J/S X Tilt value

SVNAME = J/S_X


0–255 (0: MIN, 255: MAX, 128: Neutral)

Format: 51

(1-byte integer)

Constant Format

5-47. SVID

89


4

MessageVariable

S1F3

S1F11

S1F23

SVID Format: 51

(1-byte integer)

Constant Format

7 = J/S Y Tilt value

SVNAME = J/S_Y


0–255 (0: MIN, 255: MAX, 128: Neutral)

11 = Current Control State

SVNAME = CNT_ST


0 = Offline

1 = Online Local

2 = Online Remote

MessageVariable

S1F12SVNAME A single line of characters: status variable name

See “5-47. SVID” above.

Format: 20

(ASCII)

Constant Format

5-48. SVNAME

MessageVariable

S1F12

S2F30

UNITS Specifies the value unit.

Always shown as a blank for the NWL.

Format: 20

(ASCII)

Constant Format

5-49. UNITS

MessageVariable

S6F11

S6F16

S6F20

V Variable data

See “5-51. VID” below.

Depends on VID.

Constant Format

5-50. V

MessageVariable

S2F33VID Variable ID

1 = All inspection results data for a carrier

V Format: 20 (ASCII)

Results of 26 wafers x 5 inspection items

[Wafer judgement (whether the wafers are

accepted on all items), Surface Macro, Back

Side Edge Macro, and Back Side Center

Macro]

Format: 51

(1-byte integer)

Constant Format

5-51. VID

90


4

MessageVariable

S2F33VID Format: 51

(1-byte integer)

Constant Format

Results are transmitted in order of wafer

number on orientation flat alignment,

Surface Macro, Back Side Edge Macro, and

Back Side Center Macro, in this order. Wafer

results are delimited from following wafer

results by a comma. (A comma is also used

to indicate the end of the result message.)

(Meaning of Character)

G: Accepted

N: Rejected

0–9: Reject type

U: Uninspected (the inspection is

terminated halfway)

,: Separate wafers.

_: The inspection item is not

selected.

(Example)

GGGGG,NGGGG,GGGGG,GGGGG,GGGGG,

GGGGG,GGGGG,GGGGG,GGGGG,GGGGG,

GGGGG,GGGGG,22GGG,GGGGG,GGGGG,

GGGGG,GGGGG,GGGGG,GGGGG,GGGGG,

GGGGG,GGUUU,UUUUU,UUUUU,UUUUU,

_ _ _ _ _,

In a 25-pocket carrier, wafer No. 2 is rejected

on Surface Macro inspection, and wafer No.

13 is rejected on Surface Macro and Back

Side Edge Macro, with reject type 2.

2 = Inspection result data for preceding pocket

(one wafer)


Wafer number, wafer judgement, Surface

Macro, Back Side Edge Macro, and Back Side

Center Macro results are transmitted, in this

order. The meaning of the characters is the

same as for VID = 1 above.


G: Accepted

N: Rejected

0–9: Reject type

U: Uninspected

_: The inspection item is not

selected.

(Example)

09NGN1U

Wafer No. 9 is accepted on Surface Macro,

rejected on Back Side Edge Macro, rejected

on Back Side Center Macro with reject type

1, uninspected on Micro, and rejected for

general wafer judgement.

91


4

MessageVariable

S2F33VID Format: 51

(1-byte integer)

Constant Format

3 = Result data for the preceding inspection item


Wafer number, inspection item, and results

are transmitted.

The meaning of the characters is the same

as for VID = 1 above.


The number sent first, 0–26:

Inspected wafer number

S: Surface Macro inspection

E: Back Side Edge Macro inspection

C: Back Side Center Macro

inspection

P: Surface programmable stop

inspection

M: Microscopic inspection

G: Accepted

N: Rejected

0–9: Reject type

(Example)

09M1

Wafer No. 9 is rejected on microscopic

inspections, with reject type 1.

4 = Mapping data


Wafer detection data


*: Wafer is in the pocket.

_: Wafer is not in the pocket.

(Example)

*****_ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _*_

Wafers No. 1, 2, 3, 4, 5, and 25 are

held in the carrier.

10 = Carrier Detection


0: Carrier is not installed.

1: 6" Carrier is installed.

2: 8" Carrier is installed.

?: Unknown

11 = Stage sensor status


1: ON

0: OFF

12 = Wafer sensor status


1 = ON (wafer sticks out)

0 = OFF

? = Unknown (A model with unknown

status (e.g. NWL860INX) is used.)

92


4

MessageVariable

S2F33VID Format: 51

(1-byte integer)

Constant Format

N = N/A (Not equipped with sensor, or

sensor setting is OFF.)

13 = Wafer pocket number

V format: 20 (ASCII)

Transmit a wafer pocket number.

This wafer pocket number is transmitted

together with CEID when CEID is any of the

following: 200 (transfer to surface macro

position complete); 300 (transfer to back side

edge macro position complete); 400 (transfer

to back side center macro position

complete); 450 (transfer to PS position

complete); 504 (transfer to stage complete);

510 (transfer from stage to change arm

complete)

'01' to '26': Target wafer pocket numbers

'00': Not applicable

(The wafer pocket number is valid only

when CEID is 200, 300, 400, 450, 504, or

510. '00' is returned if the event is other

than these.)

19 = Pressure sensor pressure level


00(xxx)–FF(xxx)

50 = Height measurement data

V Format: Format 44 (4-byte floating point)

Carrier height measurement data: mm

51 = Pitch measurement data

V Format: Format 44 (4-byte floating point)

Carrier pitch measurement data: mm

101 = Currently-selected sample file


PPID of currently-selected sample file

102 = Currently-selected carrier file


PPID of the currently-selected carrier file

103 = All EEPROM data

V Format: 10 (Binary)

201 = Indexer software revision


202 = Indexer MSC_ENABLE status


0 = Disable

1 = Enable

? = Unknown

203 = Indexer MSC_INTLK status


0 = Disable

1 = Enable

N= Unknown (NWL860INX is always in

this state.)

wafer loader nwl860 series · 2013. 5. 9. · select “cnvrt”. the conversion starts. upon...

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