wafer robot electric gripper rs406 specification ... · wafer robot specification specification...
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FeaturesFeatures
SpecificationSpecification
RS406
SCARA SCARA
Robot Type RS406-600
Degree of Freedom 4
PayloadRated
kg2
Maximum 6
Reach mm 600
Joint Range
J1 deg ±130
J2 deg ±150
J3 mm 200
J4 deg ±360
Standard Cycle Time* sec 0.39
Repeatability
J1+J2 mm ±0.02
J3 mm ±0.01
J4 deg ±0.01
Z-Axis Shaft Diameter mm 20
J3(Z-Axis)Push Force N 100
Allowable Initial
Moment
Ratedkg-m2 0.01
Maximum 0.12
I/O Channels7 output point / 8 input point
User Tubing Ø4×2,Ø6×2
Weight kg 17(Not Included controller)
Electric GripperElectric Gripper
XEG-16 XEG-32 XEG-64 XEG-C1
Industrial Robot
High SpeedHigh Precision
Multifunctional IntegrationEcology First
Humanistic Technology
Industrial Robot
©2014 FORM C99DE01-1404 (PRINTED IN TAIWAN)
HIWIN TECHNOLOGIES CORP.No. 7, Jingke Road, Taichung Precision Machinery Park,Taichung 40852, TaiwanTel :[email protected]
Mega-Fabs Motion Systemswww.mega-fabs.com
HIWIN SCHWEIZwww.hiwin.ch
HIWIN KOREAwww.hiwin.kr
HIWIN s.r.o. www.hiwin.cz
HIWIN FRANCEwww.hiwin.fr
HIWIN SINGAPOREwww.hiwin.sg
HIWIN Srlwww.hiwin.it
HIWIN USAwww.hiwin.com
HIWIN JAPANwww.hiwin.co.jp
HIWIN GmbH www.hiwin.de
Subsidiaries & R&D Centers
● Uses the closed-loop control of a stepper motor combined with an encoder.
● The gripping transmission is a single axis robot that utilizes a ballscrew.
● Adjustable gripping force, position, velocity and acceleration.
● The gripper's compact size offers high speed, accuracy, stiffness and efficiency.
● Uses the closed-loop control of a stepper motor combined with an encoder.
● The gripping transmission is a single axis robot that utilizes a ballscrew.
● Adjustable gripping force, position, velocity and acceleration.
● The gripper's compact size offers high speed, accuracy, stiffness and efficiency.
● SCARA[Selective Compliance Assembly
Robot Arm]● SCARA provides an excellent solution
for rapid motion in the horizontal plane
for pick and place and assembly
applications. Widely used in the plastic,
automobile, electronic pharmaceutical
and food industries.
● Mounting Position:Floor or Wall
● SCARA[Selective Compliance Assembly
Robot Arm]● SCARA provides an excellent solution
for rapid motion in the horizontal plane
for pick and place and assembly
applications. Widely used in the plastic,
automobile, electronic pharmaceutical
and food industries.
● Mounting Position:Floor or Wall
XEG-16 16 5~50 ± 0.01 1~60 0.34
XEG-32 32 15~150 ± 0.01 1~80 0.63
XEG-64 64 90~450 ± 0.01 1~100 1.85
ModelStroke/
both sidesGripper
Force RepeatabilityOpening/
closing speed Weight
XEG-C1 DC24V±10% 3A MAX 0.14
ControllerModel Power Supply (V) Total Current (A) Weight (kg)
(mm) (N) (mm) (mm/s) (kg)
RS406
Wafer RobotWafer Robot
SpecificationSpecification
SpecificationSpecification
External Dimensions / Motion RangeExternal Dimensions / Motion Range
External Dimensions / Motion RangeExternal Dimensions / Motion Range
FeaturesFeatures
* Cycle time is based on a reciprocating movement over a vertical distance of 25 mm and a horizontal distance of 300 mm. Actual cycle time will depend on operating conditions.
* Cycle time is based on a reciprocating movement over a vertical distance of 25 mm and a horizontal distance of 300 mm. Actual cycle time will depend on operating conditions.
● Product Description: According to customer needs to provide the robot with the key components of the customized. (Eg, linear guideways, ball screw, Toque motor, AC servo motor, controller ... etc.)
● Applications include: Automatic wafer transfer and positioning.
FeaturesFeatures● Product Description: According to customer needs to provide the robot with the key
components of the customized. (Eg, linear guideways, ball screw, Toque motor, AC servo motor, controller ... etc.)
● Applications include: Automatic wafer transfer and positioning.
Stroke 500mm
Velocity
Stroke
Velocity
250mm/s
Turning Range 0 ~゚340゜
Angular Velocity 360 /゚s
420mm
900mm/s
Approx. 48kg
ISO Class 2 (ISO 14644)
60,000hrs
290x290mm2
± 0.02mm
0.5Kgf
RS-232,I/O
-40kPa ~ -55kPa, Ø6
Single-Phase AC110V/AC220V
Z-Axis
T-Axis
R-Axis
Power Supply
MTBF
Cleanliness
Weight
Top Mount Plate
Operating Tempature
Repeatability
Payload Capacity
Control interfaces
Vacuum Require
10~40 C゚
20
139 19
6
176
146
23.5
198
110
78 1572
8
□264
500
(Z-S
trok
e)
ExhaustDirection
70 45.5
110 440 (R-Stroke)(Rotational Range)
182
550
258
135135
340°
20°Dead Zone
55°
Wafer min:2"
Wafer max:8" Wafer min:2"
Wafer max:8"
Min Rotational Diameter:Ø510
200
40
570
(Z S
TRO
KE
200m
m)
233.
5
472.
8
680
B DETAIL
B DETAIL
10
Ø20
1530
R20
2-M3x0.5P
MaxØ14 Through Hole
R660J1+J2 Rotational Range R600
130°
150°
J2 Rotational Range R325
220
245
R162.6
130°
150°
483.91
A DETAIL
168
B
B
15045
15
915
0
B-B SECTION
8
19
4-Ø
9
600
325275
660
60
A DETAIL
Degrees of freedom
Nominal load capacity
6
5kg
710mm (Point P)
±165°
+85°~-125°
+185°~-55°
±190°
±115°
±360°
±0.02mm
0.5s
40kg
RCA605
floor, ceiling and wall-mounted
● A compact and agile 6-axis jointed-arm robot for precise assembly, part transfer and workpiece loading/unloading.
● Applications include: pick-and-place, handling, assembly, deburring, grinding and polishing.
FeaturesFeatures
FeaturesFeatures
SpecificationSpecification SpecificationSpecification SpecificationSpecification
RD401RD401RA605RA605
Articulated RobotArticulated Robot Delta RobotDelta RobotRD403RD403
Delta RobotDelta RobotRK401RK401
47h7
28h7
4-M3X0.5PX6.5DP BCD 20
12H7
3012
519
5
View A
632
100
50
Ø320
Ø420
2514
046
7
A
B
120°
View B
Ø800
BCD 760
7.5°
Ø720
Ø16
J1
J2
J3
J4
J5
J6
4-M5 Screw, Depth 6
45°Ø5H7, Depth 7
Ø20H7, Depth 3
P.C.D Ø31.5
Intersection
Mechanical Interface DetailVIEW A
180
180
210
210
107
107
4-Ø11 Installation hole
Installation Dimension DetailVIEW B
818
220
120
Front View
125°
85°
R340
71030
648
1055
160
309239
201
71
R680
115°
Point P
434
281
33886
Motion space at point P
Side ViewB
R242
R340
107°
138°
R34
0
40
115°R710
Motion space at point P
Point P
Top View
A
165°
165°
R272
47h7
28h7
4-M3X0.5PX6.5DP BCD 20
12H7 30
125 19
5
View A
Ø1000
BCD 1040
Ø1080
View B
7.5°
120°
Ø18
4032
7
1057
300
200
690
A
Ø750
Ø1300
B
External Dimensions / Motion RangeExternal Dimensions / Motion Range
External Dimensions / Motion RangeExternal Dimensions / Motion Range External Dimensions / Motion RangeExternal Dimensions / Motion Range External Dimensions / Motion RangeExternal Dimensions / Motion Range
* Cycle time is based on a reciprocating movement over a vertical distance of 25 mm and a horizontal distance of 300 mm. Actual cycle time will depend on operating conditions.
* Cycle time is based on a reciprocating movement over a vertical distance of 25 mm and a horizontal distance of 300 mm. Actual cycle time will depend on operating conditions.
* Cycle time is based on a reciprocating movement over a vertical distance of 25 mm and a horizontal distance of 300 mm. Actual cycle time will depend on operating conditions.
* Cycle time is based on a reciprocating movement over a vertical distance of 25 mm and a horizontal distance of 300 mm. Actual cycle time will depend on operating conditions.
* Cycle time is based on a reciprocating movement over a vertical distance of 25 mm and a horizontal distance of 300 mm. Actual cycle time will depend on operating conditions.
* Cycle time is based on a reciprocating movement over a vertical distance of 25 mm and a horizontal distance of 300 mm. Actual cycle time will depend on operating conditions.
Mot
ion
Ran
ge
Maximum reach radius
Position repeatability
Cycle time*
Weight
Controller
Installation
4
1kg
420mm
150mm
Mot
ion
Ran
ge
Horizontal stroke
Vertical stroke
Degrees of freedom
Nominal load capacity
Position repeatability
Cycle time*
Weight
Controller
Installation
±0.05mm
0.3s
80kg
RCD401
ceiling mount
4
3kg
1300mm
500mm
Mot
ion
Ran
ge
Horizontal stroke
Vertical stroke
Degrees of freedom
Nominal load capacity
Position repeatability
Cycle time*
Weight
Controller
Installation
±0.1mm
0.3s
165kg
RCD403
ceiling mount
● A 4-axis parallel robot utilizing a parallel linkage mechanism to perform extremely
high speed motions with stability and high accuracy.● Applications include: pick-and-place, assembly, alignment and packaging.
● A 4-axis parallel robot utilizing a parallel linkage mechanism to perform extremely
high speed motions with stability and high accuracy.● Applications include: pick-and-place, assembly, alignment and packaging.
● A 4-axis parallel robot utilizing a parallel linkage mechanism to perform extremely
high speed motions with stability and high accuracy.● Applications include: pick-and-place, assembly, alignment and packaging.
● A 4-axis parallel robot utilizing a parallel linkage mechanism to perform extremely
high speed motions with stability and high accuracy.● Applications include: pick-and-place, assembly, alignment and packaging.
● A 4-axis parallel robot utilizing a parallel linkage mechanism to perform extremely
high speed motions with stability and high accuracy.● Applications include: pick-and-place, assembly, alignment and packaging.
● A 4-axis parallel robot utilizing a parallel linkage mechanism to perform extremely
high speed motions with stability and high accuracy.● Applications include: pick-and-place, assembly, alignment and packaging.
FeaturesFeatures
SpecificationSpecification
* Cycle time is based on a reciprocating movement over a vertical distance of 25 mm and a horizontal distance of 300 mm. Actual cycle time will depend on operating conditions.
* Cycle time is based on a reciprocating movement over a vertical distance of 25 mm and a horizontal distance of 300 mm. Actual cycle time will depend on operating conditions.
FeaturesFeatures
● A compact and agile 6-axis jointed-arm robot for precise assembly, part transfer and workpiece loading/unloading.
● Applications include: pick-and-place, handling, assembly, deburring, grinding and polishing.
Movable Parallel RobotMovable Parallel Robot
Ø868
Ø560
120°
47h728h7
4-M3X0.5PX6.5DP BCD 20
12H7
3012
519
5
View A
1175
.115
9.43
800
440.
46
A
4
1kg
560mm
670mm
Mot
ion
Ran
ge
Horizontal stroke
Vertical stroke
Degrees of freedom
Nominal load capacity
Position repeatability
Cycle time*
Weight
Controller
Installation
±0.05mm
0.3s
50kg
RCK401
floor, ceiling
(without controller)
Degrees of freedom
Nominal load capacity
6
5kg
710mm (Point P)
±165°
+85°~-125°
+185°~-55°
±190°
±115°
±360°
±0.02mm
0.5s
40kg
RCA605
floor, ceiling and wall-mounted
● A compact and agile 6-axis jointed-arm robot for precise assembly, part transfer and workpiece loading/unloading.
● Applications include: pick-and-place, handling, assembly, deburring, grinding and polishing.
FeaturesFeatures
FeaturesFeatures
SpecificationSpecification SpecificationSpecification SpecificationSpecification
RD401RD401RA605RA605
Articulated RobotArticulated Robot Delta RobotDelta RobotRD403RD403
Delta RobotDelta RobotRK401RK401
47h7
28h7
4-M3X0.5PX6.5DP BCD 20
12H7
3012
519
5
View A
632
100
50
Ø320
Ø420
2514
046
7
A
B
120°
View B
Ø800
BCD 760
7.5°
Ø720
Ø16
J1
J2
J3
J4
J5
J6
4-M5 Screw, Depth 6
45°Ø5H7, Depth 7
Ø20H7, Depth 3
P.C.D Ø31.5
Intersection
Mechanical Interface DetailVIEW A
180
180
210
210
107
107
4-Ø11 Installation hole
Installation Dimension DetailVIEW B
818
220
120
Front View
125°
85°
R340
71030
648
1055
160
309239
201
71
R680
115°
Point P
434
281
33886
Motion space at point P
Side ViewB
R242
R340107°
138°
R34
0
40
115°R710
Motion space at point P
Point P
Top View
A
165°
165°
R272
47h7
28h7
4-M3X0.5PX6.5DP BCD 20
12H7 30
125 19
5
View A
Ø1000
BCD 1040
Ø1080
View B
7.5°
120°
Ø18
4032
7
1057
300
200
690
A
Ø750
Ø1300
B
External Dimensions / Motion RangeExternal Dimensions / Motion Range
External Dimensions / Motion RangeExternal Dimensions / Motion Range External Dimensions / Motion RangeExternal Dimensions / Motion Range External Dimensions / Motion RangeExternal Dimensions / Motion Range
* Cycle time is based on a reciprocating movement over a vertical distance of 25 mm and a horizontal distance of 300 mm. Actual cycle time will depend on operating conditions.
* Cycle time is based on a reciprocating movement over a vertical distance of 25 mm and a horizontal distance of 300 mm. Actual cycle time will depend on operating conditions.
* Cycle time is based on a reciprocating movement over a vertical distance of 25 mm and a horizontal distance of 300 mm. Actual cycle time will depend on operating conditions.
* Cycle time is based on a reciprocating movement over a vertical distance of 25 mm and a horizontal distance of 300 mm. Actual cycle time will depend on operating conditions.
* Cycle time is based on a reciprocating movement over a vertical distance of 25 mm and a horizontal distance of 300 mm. Actual cycle time will depend on operating conditions.
* Cycle time is based on a reciprocating movement over a vertical distance of 25 mm and a horizontal distance of 300 mm. Actual cycle time will depend on operating conditions.
Mot
ion
Ran
ge
Maximum reach radius
Position repeatability
Cycle time*
Weight
Controller
Installation
4
1kg
420mm
150mm
Mot
ion
Ran
ge
Horizontal stroke
Vertical stroke
Degrees of freedom
Nominal load capacity
Position repeatability
Cycle time*
Weight
Controller
Installation
±0.05mm
0.3s
80kg
RCD401
ceiling mount
4
3kg
1300mm
500mm
Mot
ion
Ran
ge
Horizontal stroke
Vertical stroke
Degrees of freedom
Nominal load capacity
Position repeatability
Cycle time*
Weight
Controller
Installation
±0.1mm
0.3s
165kg
RCD403
ceiling mount
● A 4-axis parallel robot utilizing a parallel linkage mechanism to perform extremely
high speed motions with stability and high accuracy.● Applications include: pick-and-place, assembly, alignment and packaging.
● A 4-axis parallel robot utilizing a parallel linkage mechanism to perform extremely
high speed motions with stability and high accuracy.● Applications include: pick-and-place, assembly, alignment and packaging.
● A 4-axis parallel robot utilizing a parallel linkage mechanism to perform extremely
high speed motions with stability and high accuracy.● Applications include: pick-and-place, assembly, alignment and packaging.
● A 4-axis parallel robot utilizing a parallel linkage mechanism to perform extremely
high speed motions with stability and high accuracy.● Applications include: pick-and-place, assembly, alignment and packaging.
● A 4-axis parallel robot utilizing a parallel linkage mechanism to perform extremely
high speed motions with stability and high accuracy.● Applications include: pick-and-place, assembly, alignment and packaging.
● A 4-axis parallel robot utilizing a parallel linkage mechanism to perform extremely
high speed motions with stability and high accuracy.● Applications include: pick-and-place, assembly, alignment and packaging.
FeaturesFeatures
SpecificationSpecification
* Cycle time is based on a reciprocating movement over a vertical distance of 25 mm and a horizontal distance of 300 mm. Actual cycle time will depend on operating conditions.
* Cycle time is based on a reciprocating movement over a vertical distance of 25 mm and a horizontal distance of 300 mm. Actual cycle time will depend on operating conditions.
FeaturesFeatures
● A compact and agile 6-axis jointed-arm robot for precise assembly, part transfer and workpiece loading/unloading.
● Applications include: pick-and-place, handling, assembly, deburring, grinding and polishing.
Movable Parallel RobotMovable Parallel Robot
Ø868
Ø560
120°
47h728h7
4-M3X0.5PX6.5DP BCD 20
12H7
3012
519
5
View A
1175
.115
9.43
800
440.
46
A
4
1kg
560mm
670mm
Mot
ion
Ran
ge
Horizontal stroke
Vertical stroke
Degrees of freedom
Nominal load capacity
Position repeatability
Cycle time*
Weight
Controller
Installation
±0.05mm
0.3s
50kg
RCK401
floor, ceiling
(without controller)
Degrees of freedom
Nominal load capacity
6
5kg
710mm (Point P)
±165°
+85°~-125°
+185°~-55°
±190°
±115°
±360°
±0.02mm
0.5s
40kg
RCA605
floor, ceiling and wall-mounted
● A compact and agile 6-axis jointed-arm robot for precise assembly, part transfer and workpiece loading/unloading.
● Applications include: pick-and-place, handling, assembly, deburring, grinding and polishing.
FeaturesFeatures
FeaturesFeatures
SpecificationSpecification SpecificationSpecification SpecificationSpecification
RD401RD401RA605RA605
Articulated RobotArticulated Robot Delta RobotDelta RobotRD403RD403
Delta RobotDelta RobotRK401RK401
47h7
28h7
4-M3X0.5PX6.5DP BCD 20
12H7
3012
519
5
View A
632
100
50
Ø320
Ø420
2514
046
7
A
B
120°
View B
Ø800
BCD 760
7.5°
Ø720
Ø16
J1
J2
J3
J4
J5
J6
4-M5 Screw, Depth 6
45°Ø5H7, Depth 7
Ø20H7, Depth 3
P.C.D Ø31.5
Intersection
Mechanical Interface DetailVIEW A
180
180
210
210
107
107
4-Ø11 Installation hole
Installation Dimension DetailVIEW B
818
220
120
Front View
125°
85°
R340
71030
648
1055
160
309239
201
71
R680
115°
Point P
434
281
33886
Motion space at point P
Side ViewB
R242
R340
107°
138°
R34
0
40
115°R710
Motion space at point P
Point P
Top View
A
165°
165°
R272
47h7
28h7
4-M3X0.5PX6.5DP BCD 20
12H7 30
125 19
5
View A
Ø1000
BCD 1040
Ø1080
View B
7.5°
120°
Ø18
4032
7
1057
300
200
690
A
Ø750
Ø1300
B
External Dimensions / Motion RangeExternal Dimensions / Motion Range
External Dimensions / Motion RangeExternal Dimensions / Motion Range External Dimensions / Motion RangeExternal Dimensions / Motion Range External Dimensions / Motion RangeExternal Dimensions / Motion Range
* Cycle time is based on a reciprocating movement over a vertical distance of 25 mm and a horizontal distance of 300 mm. Actual cycle time will depend on operating conditions.
* Cycle time is based on a reciprocating movement over a vertical distance of 25 mm and a horizontal distance of 300 mm. Actual cycle time will depend on operating conditions.
* Cycle time is based on a reciprocating movement over a vertical distance of 25 mm and a horizontal distance of 300 mm. Actual cycle time will depend on operating conditions.
* Cycle time is based on a reciprocating movement over a vertical distance of 25 mm and a horizontal distance of 300 mm. Actual cycle time will depend on operating conditions.
* Cycle time is based on a reciprocating movement over a vertical distance of 25 mm and a horizontal distance of 300 mm. Actual cycle time will depend on operating conditions.
* Cycle time is based on a reciprocating movement over a vertical distance of 25 mm and a horizontal distance of 300 mm. Actual cycle time will depend on operating conditions.
Mot
ion
Ran
ge
Maximum reach radius
Position repeatability
Cycle time*
Weight
Controller
Installation
4
1kg
420mm
150mm
Mot
ion
Ran
ge
Horizontal stroke
Vertical stroke
Degrees of freedom
Nominal load capacity
Position repeatability
Cycle time*
Weight
Controller
Installation
±0.05mm
0.3s
80kg
RCD401
ceiling mount
4
3kg
1300mm
500mm
Mot
ion
Ran
ge
Horizontal stroke
Vertical stroke
Degrees of freedom
Nominal load capacity
Position repeatability
Cycle time*
Weight
Controller
Installation
±0.1mm
0.3s
165kg
RCD403
ceiling mount
● A 4-axis parallel robot utilizing a parallel linkage mechanism to perform extremely
high speed motions with stability and high accuracy.● Applications include: pick-and-place, assembly, alignment and packaging.
● A 4-axis parallel robot utilizing a parallel linkage mechanism to perform extremely
high speed motions with stability and high accuracy.● Applications include: pick-and-place, assembly, alignment and packaging.
● A 4-axis parallel robot utilizing a parallel linkage mechanism to perform extremely
high speed motions with stability and high accuracy.● Applications include: pick-and-place, assembly, alignment and packaging.
● A 4-axis parallel robot utilizing a parallel linkage mechanism to perform extremely
high speed motions with stability and high accuracy.● Applications include: pick-and-place, assembly, alignment and packaging.
● A 4-axis parallel robot utilizing a parallel linkage mechanism to perform extremely
high speed motions with stability and high accuracy.● Applications include: pick-and-place, assembly, alignment and packaging.
● A 4-axis parallel robot utilizing a parallel linkage mechanism to perform extremely
high speed motions with stability and high accuracy.● Applications include: pick-and-place, assembly, alignment and packaging.
FeaturesFeatures
SpecificationSpecification
* Cycle time is based on a reciprocating movement over a vertical distance of 25 mm and a horizontal distance of 300 mm. Actual cycle time will depend on operating conditions.
* Cycle time is based on a reciprocating movement over a vertical distance of 25 mm and a horizontal distance of 300 mm. Actual cycle time will depend on operating conditions.
FeaturesFeatures
● A compact and agile 6-axis jointed-arm robot for precise assembly, part transfer and workpiece loading/unloading.
● Applications include: pick-and-place, handling, assembly, deburring, grinding and polishing.
Movable Parallel RobotMovable Parallel Robot
Ø868
Ø560
120°
47h728h7
4-M3X0.5PX6.5DP BCD 20
12H7
3012
519
5
View A
1175
.115
9.43
800
440.
46
A
4
1kg
560mm
670mm
Mot
ion
Ran
ge
Horizontal stroke
Vertical stroke
Degrees of freedom
Nominal load capacity
Position repeatability
Cycle time*
Weight
Controller
Installation
±0.05mm
0.3s
50kg
RCK401
floor, ceiling
(without controller)
Degrees of freedom
Nominal load capacity
6
5kg
710mm (Point P)
±165°
+85°~-125°
+185°~-55°
±190°
±115°
±360°
±0.02mm
0.5s
40kg
RCA605
floor, ceiling and wall-mounted
● A compact and agile 6-axis jointed-arm robot for precise assembly, part transfer and workpiece loading/unloading.
● Applications include: pick-and-place, handling, assembly, deburring, grinding and polishing.
FeaturesFeatures
FeaturesFeatures
SpecificationSpecification SpecificationSpecification SpecificationSpecification
RD401RD401RA605RA605
Articulated RobotArticulated Robot Delta RobotDelta RobotRD403RD403
Delta RobotDelta RobotRK401RK401
47h7
28h7
4-M3X0.5PX6.5DP BCD 20
12H7
3012
519
5
View A
632
100
50
Ø320
Ø420
2514
046
7
A
B
120°
View B
Ø800
BCD 760
7.5°
Ø720
Ø16
J1
J2
J3
J4
J5
J6
4-M5 Screw, Depth 6
45°Ø5H7, Depth 7
Ø20H7, Depth 3
P.C.D Ø31.5
Intersection
Mechanical Interface DetailVIEW A
180
180
210
210
107
107
4-Ø11 Installation hole
Installation Dimension DetailVIEW B
818
220
120
Front View
125°
85°
R340
71030
648
1055
160
309239
201
71
R680
115°
Point P
434
281
33886
Motion space at point P
Side ViewB
R242
R340
107°
138°
R34
0
40
115°R710
Motion space at point P
Point P
Top View
A
165°
165°
R272
47h7
28h7
4-M3X0.5PX6.5DP BCD 20
12H7 30
125 19
5
View A
Ø1000
BCD 1040
Ø1080
View B
7.5°
120°
Ø18
4032
7
1057
300
200
690
A
Ø750
Ø1300
B
External Dimensions / Motion RangeExternal Dimensions / Motion Range
External Dimensions / Motion RangeExternal Dimensions / Motion Range External Dimensions / Motion RangeExternal Dimensions / Motion Range External Dimensions / Motion RangeExternal Dimensions / Motion Range
* Cycle time is based on a reciprocating movement over a vertical distance of 25 mm and a horizontal distance of 300 mm. Actual cycle time will depend on operating conditions.
* Cycle time is based on a reciprocating movement over a vertical distance of 25 mm and a horizontal distance of 300 mm. Actual cycle time will depend on operating conditions.
* Cycle time is based on a reciprocating movement over a vertical distance of 25 mm and a horizontal distance of 300 mm. Actual cycle time will depend on operating conditions.
* Cycle time is based on a reciprocating movement over a vertical distance of 25 mm and a horizontal distance of 300 mm. Actual cycle time will depend on operating conditions.
* Cycle time is based on a reciprocating movement over a vertical distance of 25 mm and a horizontal distance of 300 mm. Actual cycle time will depend on operating conditions.
* Cycle time is based on a reciprocating movement over a vertical distance of 25 mm and a horizontal distance of 300 mm. Actual cycle time will depend on operating conditions.
Mot
ion
Ran
ge
Maximum reach radius
Position repeatability
Cycle time*
Weight
Controller
Installation
4
1kg
420mm
150mm
Mot
ion
Ran
ge
Horizontal stroke
Vertical stroke
Degrees of freedom
Nominal load capacity
Position repeatability
Cycle time*
Weight
Controller
Installation
±0.05mm
0.3s
80kg
RCD401
ceiling mount
4
3kg
1300mm
500mm
Mot
ion
Ran
ge
Horizontal stroke
Vertical stroke
Degrees of freedom
Nominal load capacity
Position repeatability
Cycle time*
Weight
Controller
Installation
±0.1mm
0.3s
165kg
RCD403
ceiling mount
● A 4-axis parallel robot utilizing a parallel linkage mechanism to perform extremely
high speed motions with stability and high accuracy.● Applications include: pick-and-place, assembly, alignment and packaging.
● A 4-axis parallel robot utilizing a parallel linkage mechanism to perform extremely
high speed motions with stability and high accuracy.● Applications include: pick-and-place, assembly, alignment and packaging.
● A 4-axis parallel robot utilizing a parallel linkage mechanism to perform extremely
high speed motions with stability and high accuracy.● Applications include: pick-and-place, assembly, alignment and packaging.
● A 4-axis parallel robot utilizing a parallel linkage mechanism to perform extremely
high speed motions with stability and high accuracy.● Applications include: pick-and-place, assembly, alignment and packaging.
● A 4-axis parallel robot utilizing a parallel linkage mechanism to perform extremely
high speed motions with stability and high accuracy.● Applications include: pick-and-place, assembly, alignment and packaging.
● A 4-axis parallel robot utilizing a parallel linkage mechanism to perform extremely
high speed motions with stability and high accuracy.● Applications include: pick-and-place, assembly, alignment and packaging.
FeaturesFeatures
SpecificationSpecification
* Cycle time is based on a reciprocating movement over a vertical distance of 25 mm and a horizontal distance of 300 mm. Actual cycle time will depend on operating conditions.
* Cycle time is based on a reciprocating movement over a vertical distance of 25 mm and a horizontal distance of 300 mm. Actual cycle time will depend on operating conditions.
FeaturesFeatures
● A compact and agile 6-axis jointed-arm robot for precise assembly, part transfer and workpiece loading/unloading.
● Applications include: pick-and-place, handling, assembly, deburring, grinding and polishing.
Movable Parallel RobotMovable Parallel Robot
Ø868
Ø560
120°
47h728h7
4-M3X0.5PX6.5DP BCD 20
12H7
3012
519
5
View A
1175
.115
9.43
800
440.
46
A
4
1kg
560mm
670mm
Mot
ion
Ran
ge
Horizontal stroke
Vertical stroke
Degrees of freedom
Nominal load capacity
Position repeatability
Cycle time*
Weight
Controller
Installation
±0.05mm
0.3s
50kg
RCK401
floor, ceiling
(without controller)
FeaturesFeatures
SpecificationSpecification
RS406
SCARA SCARA
Robot Type RS406-600
Degree of Freedom 4
PayloadRated
kg2
Maximum 6
Reach mm 600
Joint Range
J1 deg ±130
J2 deg ±150
J3 mm 200
J4 deg ±360
Standard Cycle Time* sec 0.39
Repeatability
J1+J2 mm ±0.02
J3 mm ±0.01
J4 deg ±0.01
Z-Axis Shaft Diameter mm 20
J3(Z-Axis)Push Force N 100
Allowable Initial
Moment
Ratedkg-m2 0.01
Maximum 0.12
I/O Channels7 output point / 8 input point
User Tubing Ø4×2,Ø6×2
Weight kg 17(Not Included controller)
Electric GripperElectric Gripper
XEG-16 XEG-32 XEG-64 XEG-C1
Industrial Robot
High SpeedHigh Precision
Multifunctional IntegrationEcology First
Humanistic Technology
Industrial Robot
©2014 FORM C99DE01-1404 (PRINTED IN TAIWAN)
HIWIN TECHNOLOGIES CORP.No. 7, Jingke Road, Taichung Precision Machinery Park,Taichung 40852, TaiwanTel :[email protected]
Mega-Fabs Motion Systemswww.mega-fabs.com
HIWIN SCHWEIZwww.hiwin.ch
HIWIN KOREAwww.hiwin.kr
HIWIN s.r.o. www.hiwin.cz
HIWIN FRANCEwww.hiwin.fr
HIWIN SINGAPOREwww.hiwin.sg
HIWIN Srlwww.hiwin.it
HIWIN USAwww.hiwin.com
HIWIN JAPANwww.hiwin.co.jp
HIWIN GmbH www.hiwin.de
Subsidiaries & R&D Centers
● Uses the closed-loop control of a stepper motor combined with an encoder.
● The gripping transmission is a single axis robot that utilizes a ballscrew.
● Adjustable gripping force, position, velocity and acceleration.
● The gripper's compact size offers high speed, accuracy, stiffness and efficiency.
● Uses the closed-loop control of a stepper motor combined with an encoder.
● The gripping transmission is a single axis robot that utilizes a ballscrew.
● Adjustable gripping force, position, velocity and acceleration.
● The gripper's compact size offers high speed, accuracy, stiffness and efficiency.
● SCARA[Selective Compliance Assembly
Robot Arm]● SCARA provides an excellent solution
for rapid motion in the horizontal plane
for pick and place and assembly
applications. Widely used in the plastic,
automobile, electronic pharmaceutical
and food industries.
● Mounting Position:Floor or Wall
● SCARA[Selective Compliance Assembly
Robot Arm]● SCARA provides an excellent solution
for rapid motion in the horizontal plane
for pick and place and assembly
applications. Widely used in the plastic,
automobile, electronic pharmaceutical
and food industries.
● Mounting Position:Floor or Wall
XEG-16 16 5~50 ± 0.01 1~60 0.34
XEG-32 32 15~150 ± 0.01 1~80 0.63
XEG-64 64 90~450 ± 0.01 1~100 1.85
ModelStroke/
both sidesGripper
Force RepeatabilityOpening/
closing speed Weight
XEG-C1 DC24V±10% 3A MAX 0.14
ControllerModel Power Supply (V) Total Current (A) Weight (kg)
(mm) (N) (mm) (mm/s) (kg)
RS406
Wafer RobotWafer Robot
SpecificationSpecification
SpecificationSpecification
External Dimensions / Motion RangeExternal Dimensions / Motion Range
External Dimensions / Motion RangeExternal Dimensions / Motion Range
FeaturesFeatures
* Cycle time is based on a reciprocating movement over a vertical distance of 25 mm and a horizontal distance of 300 mm. Actual cycle time will depend on operating conditions.
* Cycle time is based on a reciprocating movement over a vertical distance of 25 mm and a horizontal distance of 300 mm. Actual cycle time will depend on operating conditions.
● Product Description: According to customer needs to provide the robot with the key components of the customized. (Eg, linear guideways, ball screw, Toque motor, AC servo motor, controller ... etc.)
● Applications include: Automatic wafer transfer and positioning.
FeaturesFeatures● Product Description: According to customer needs to provide the robot with the key
components of the customized. (Eg, linear guideways, ball screw, Toque motor, AC servo motor, controller ... etc.)
● Applications include: Automatic wafer transfer and positioning.
Stroke 500mm
Velocity
Stroke
Velocity
250mm/s
Turning Range 0 ~゚340゜
Angular Velocity 360 /゚s
420mm
900mm/s
Approx. 48kg
ISO Class 2 (ISO 14644)
60,000hrs
290x290mm2
± 0.02mm
0.5Kgf
RS-232,I/O
-40kPa ~ -55kPa, Ø6
Single-Phase AC110V/AC220V
Z-Axis
T-Axis
R-Axis
Power Supply
MTBF
Cleanliness
Weight
Top Mount Plate
Operating Tempature
Repeatability
Payload Capacity
Control interfaces
Vacuum Require
10~40 C゚
20
139 19
6
176
146
23.5
198
110
78 1572
8
□264
500
(Z-S
trok
e)
ExhaustDirection
70 45.5
110 440 (R-Stroke)(Rotational Range)
182
550
258
135135
340°
20°Dead Zone
55°
Wafer min:2"
Wafer max:8" Wafer min:2"
Wafer max:8"
Min Rotational Diameter:Ø510
200
40
570
(Z S
TRO
KE
200m
m)
233.
5
472.
8
680
B DETAIL
B DETAIL
10
Ø20
1530
R20
2-M3x0.5P
MaxØ14 Through Hole
R660J1+J2 Rotational Range R600
130°
150°
J2 Rotational Range R325
220
245
R162.6
130°
150°
483.91
A DETAIL
168
B
B
15045
15
915
0
B-B SECTION
8
19
4-Ø
9
600
325275
660
60
A DETAIL
FeaturesFeatures
SpecificationSpecification
RS406
SCARA SCARA
Robot Type RS406-600
Degree of Freedom 4
PayloadRated
kg2
Maximum 6
Reach mm 600
Joint Range
J1 deg ±130
J2 deg ±150
J3 mm 200
J4 deg ±360
Standard Cycle Time* sec 0.39
Repeatability
J1+J2 mm ±0.02
J3 mm ±0.01
J4 deg ±0.01
Z-Axis Shaft Diameter mm 20
J3(Z-Axis)Push Force N 100
Allowable Initial
Moment
Ratedkg-m2 0.01
Maximum 0.12
I/O Channels7 output point / 8 input point
User Tubing Ø4×2,Ø6×2
Weight kg 17(Not Included controller)
Electric GripperElectric Gripper
XEG-16 XEG-32 XEG-64 XEG-C1
Industrial Robot
High SpeedHigh Precision
Multifunctional IntegrationEcology First
Humanistic Technology
Industrial Robot
©2014 FORM C99DE01-1404 (PRINTED IN TAIWAN)
HIWIN TECHNOLOGIES CORP.No. 7, Jingke Road, Taichung Precision Machinery Park,Taichung 40852, TaiwanTel :[email protected]
Mega-Fabs Motion Systemswww.mega-fabs.com
HIWIN SCHWEIZwww.hiwin.ch
HIWIN KOREAwww.hiwin.kr
HIWIN s.r.o. www.hiwin.cz
HIWIN FRANCEwww.hiwin.fr
HIWIN SINGAPOREwww.hiwin.sg
HIWIN Srlwww.hiwin.it
HIWIN USAwww.hiwin.com
HIWIN JAPANwww.hiwin.co.jp
HIWIN GmbH www.hiwin.de
Subsidiaries & R&D Centers
● Uses the closed-loop control of a stepper motor combined with an encoder.
● The gripping transmission is a single axis robot that utilizes a ballscrew.
● Adjustable gripping force, position, velocity and acceleration.
● The gripper's compact size offers high speed, accuracy, stiffness and efficiency.
● Uses the closed-loop control of a stepper motor combined with an encoder.
● The gripping transmission is a single axis robot that utilizes a ballscrew.
● Adjustable gripping force, position, velocity and acceleration.
● The gripper's compact size offers high speed, accuracy, stiffness and efficiency.
● SCARA[Selective Compliance Assembly
Robot Arm]● SCARA provides an excellent solution
for rapid motion in the horizontal plane
for pick and place and assembly
applications. Widely used in the plastic,
automobile, electronic pharmaceutical
and food industries.
● Mounting Position:Floor or Wall
● SCARA[Selective Compliance Assembly
Robot Arm]● SCARA provides an excellent solution
for rapid motion in the horizontal plane
for pick and place and assembly
applications. Widely used in the plastic,
automobile, electronic pharmaceutical
and food industries.
● Mounting Position:Floor or Wall
XEG-16 16 5~50 ± 0.01 1~60 0.34
XEG-32 32 15~150 ± 0.01 1~80 0.63
XEG-64 64 90~450 ± 0.01 1~100 1.85
ModelStroke/
both sidesGripper
Force RepeatabilityOpening/
closing speed Weight
XEG-C1 DC24V±10% 3A MAX 0.14
ControllerModel Power Supply (V) Total Current (A) Weight (kg)
(mm) (N) (mm) (mm/s) (kg)
RS406
Wafer RobotWafer Robot
SpecificationSpecification
SpecificationSpecification
External Dimensions / Motion RangeExternal Dimensions / Motion Range
External Dimensions / Motion RangeExternal Dimensions / Motion Range
FeaturesFeatures
* Cycle time is based on a reciprocating movement over a vertical distance of 25 mm and a horizontal distance of 300 mm. Actual cycle time will depend on operating conditions.
* Cycle time is based on a reciprocating movement over a vertical distance of 25 mm and a horizontal distance of 300 mm. Actual cycle time will depend on operating conditions.
● Product Description: According to customer needs to provide the robot with the key components of the customized. (Eg, linear guideways, ball screw, Toque motor, AC servo motor, controller ... etc.)
● Applications include: Automatic wafer transfer and positioning.
FeaturesFeatures● Product Description: According to customer needs to provide the robot with the key
components of the customized. (Eg, linear guideways, ball screw, Toque motor, AC servo motor, controller ... etc.)
● Applications include: Automatic wafer transfer and positioning.
Stroke 500mm
Velocity
Stroke
Velocity
250mm/s
Turning Range 0 ~゚340゜
Angular Velocity 360 /゚s
420mm
900mm/s
Approx. 48kg
ISO Class 2 (ISO 14644)
60,000hrs
290x290mm2
± 0.02mm
0.5Kgf
RS-232,I/O
-40kPa ~ -55kPa, Ø6
Single-Phase AC110V/AC220V
Z-Axis
T-Axis
R-Axis
Power Supply
MTBF
Cleanliness
Weight
Top Mount Plate
Operating Tempature
Repeatability
Payload Capacity
Control interfaces
Vacuum Require
10~40 C゚
20
139 19
6
176
146
23.5
198
110
78 1572
8
□264
500
(Z-S
trok
e)
ExhaustDirection
70 45.5
110 440 (R-Stroke)(Rotational Range)
182
550
258
135135
340°
20°Dead Zone
55°
Wafer min:2"
Wafer max:8" Wafer min:2"
Wafer max:8"
Min Rotational Diameter:Ø510
200
40
570
(Z S
TRO
KE
200m
m)
233.
5
472.
8
680
B DETAIL
B DETAIL
10
Ø20
1530
R20
2-M3x0.5P
MaxØ14 Through Hole
R660J1+J2 Rotational Range R600
130°
150°
J2 Rotational Range R325
220
245
R162.6
130°
150°
483.91
A DETAIL
168
B
B
15045
15
915
0
B-B SECTION
8
19
4-Ø
9
600
325275
660
60
A DETAIL
FeaturesFeatures
SpecificationSpecification
RS406
SCARA SCARA
Robot Type RS406-600
Degree of Freedom 4
PayloadRated
kg2
Maximum 6
Reach mm 600
Joint Range
J1 deg ±130
J2 deg ±150
J3 mm 200
J4 deg ±360
Standard Cycle Time* sec 0.39
Repeatability
J1+J2 mm ±0.02
J3 mm ±0.01
J4 deg ±0.01
Z-Axis Shaft Diameter mm 20
J3(Z-Axis)Push Force N 100
Allowable Initial
Moment
Ratedkg-m2 0.01
Maximum 0.12
I/O Channels7 output point / 8 input point
User Tubing Ø4×2,Ø6×2
Weight kg 17(Not Included controller)
Electric GripperElectric Gripper
XEG-16 XEG-32 XEG-64 XEG-C1
Industrial Robot
High SpeedHigh Precision
Multifunctional IntegrationEcology First
Humanistic Technology
Industrial Robot
©2014 FORM C99DE01-1404 (PRINTED IN TAIWAN)
HIWIN TECHNOLOGIES CORP.No. 7, Jingke Road, Taichung Precision Machinery Park,Taichung 40852, TaiwanTel :[email protected]
Mega-Fabs Motion Systemswww.mega-fabs.com
HIWIN SCHWEIZwww.hiwin.ch
HIWIN KOREAwww.hiwin.kr
HIWIN s.r.o. www.hiwin.cz
HIWIN FRANCEwww.hiwin.fr
HIWIN SINGAPOREwww.hiwin.sg
HIWIN Srlwww.hiwin.it
HIWIN USAwww.hiwin.com
HIWIN JAPANwww.hiwin.co.jp
HIWIN GmbH www.hiwin.de
Subsidiaries & R&D Centers
● Uses the closed-loop control of a stepper motor combined with an encoder.
● The gripping transmission is a single axis robot that utilizes a ballscrew.
● Adjustable gripping force, position, velocity and acceleration.
● The gripper's compact size offers high speed, accuracy, stiffness and efficiency.
● Uses the closed-loop control of a stepper motor combined with an encoder.
● The gripping transmission is a single axis robot that utilizes a ballscrew.
● Adjustable gripping force, position, velocity and acceleration.
● The gripper's compact size offers high speed, accuracy, stiffness and efficiency.
● SCARA[Selective Compliance Assembly
Robot Arm]● SCARA provides an excellent solution
for rapid motion in the horizontal plane
for pick and place and assembly
applications. Widely used in the plastic,
automobile, electronic pharmaceutical
and food industries.
● Mounting Position:Floor or Wall
● SCARA[Selective Compliance Assembly
Robot Arm]● SCARA provides an excellent solution
for rapid motion in the horizontal plane
for pick and place and assembly
applications. Widely used in the plastic,
automobile, electronic pharmaceutical
and food industries.
● Mounting Position:Floor or Wall
XEG-16 16 5~50 ± 0.01 1~60 0.34
XEG-32 32 15~150 ± 0.01 1~80 0.63
XEG-64 64 90~450 ± 0.01 1~100 1.85
ModelStroke/
both sidesGripper
Force RepeatabilityOpening/
closing speed Weight
XEG-C1 DC24V±10% 3A MAX 0.14
ControllerModel Power Supply (V) Total Current (A) Weight (kg)
(mm) (N) (mm) (mm/s) (kg)
RS406
Wafer RobotWafer Robot
SpecificationSpecification
SpecificationSpecification
External Dimensions / Motion RangeExternal Dimensions / Motion Range
External Dimensions / Motion RangeExternal Dimensions / Motion Range
FeaturesFeatures
* Cycle time is based on a reciprocating movement over a vertical distance of 25 mm and a horizontal distance of 300 mm. Actual cycle time will depend on operating conditions.
* Cycle time is based on a reciprocating movement over a vertical distance of 25 mm and a horizontal distance of 300 mm. Actual cycle time will depend on operating conditions.
● Product Description: According to customer needs to provide the robot with the key components of the customized. (Eg, linear guideways, ball screw, Toque motor, AC servo motor, controller ... etc.)
● Applications include: Automatic wafer transfer and positioning.
FeaturesFeatures● Product Description: According to customer needs to provide the robot with the key
components of the customized. (Eg, linear guideways, ball screw, Toque motor, AC servo motor, controller ... etc.)
● Applications include: Automatic wafer transfer and positioning.
Stroke 500mm
Velocity
Stroke
Velocity
250mm/s
Turning Range 0 ~゚340゜
Angular Velocity 360 /゚s
420mm
900mm/s
Approx. 48kg
ISO Class 2 (ISO 14644)
60,000hrs
290x290mm2
± 0.02mm
0.5Kgf
RS-232,I/O
-40kPa ~ -55kPa, Ø6
Single-Phase AC110V/AC220V
Z-Axis
T-Axis
R-Axis
Power Supply
MTBF
Cleanliness
Weight
Top Mount Plate
Operating Tempature
Repeatability
Payload Capacity
Control interfaces
Vacuum Require
10~40 C゚
20
139 19
6
176
146
23.5
198
110
78 1572
8
□264
500
(Z-S
trok
e)
ExhaustDirection
70 45.5
110 440 (R-Stroke)(Rotational Range)
182
550
258
135135
340°
20°Dead Zone
55°
Wafer min:2"
Wafer max:8" Wafer min:2"
Wafer max:8"
Min Rotational Diameter:Ø510
200
40
570
(Z S
TRO
KE
200m
m)
233.
5
472.
8
680
B DETAIL
B DETAIL
10
Ø20
1530
R20
2-M3x0.5P
MaxØ14 Through Hole
R660J1+J2 Rotational Range R600
130°
150°
J2 Rotational Range R325
220
245
R162.6
130°
150°
483.91
A DETAIL
168
B
B
15045
15
915
0
B-B SECTION
8
19
4-Ø
9
600
325275
660
60
A DETAIL