y · pemc sic manufacturing facility located at suny poly: sic production capabilities yielding...

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Applied Power Electronics Conference (APEC) 2015

Paul A. Farrar Jr. SUNY Polytechnic Institute


SUNY Polytechnic Sites

NY PEMC - Albany


Integrated Device Manufacturers

Materials & Site Services Partners

Open Innovation Eco-System

Industry Consortia

Avalanche Technology

Derivative Development Partners

UNYCNSE.COMCNSE Confidential and Proprietary

Equipment Suppliers


High Volume Manufacturing

Capability

Experienced High Volume CMOS Manufacturing

Customer Centric Development

Team

Targeted Customers/Applications

Development and Commercialization

CNSE – FOUNDRY Cooperation Model

Capability Benefit

CNSE comprehensive development facility Flexible and IP protected environment for commercialization of technologies

FOUNDRY technology and manufacturing infrastructure

Cost effective and fast path to high volume manufacturing

Fast process transfer methodology Seamless path from concept to HVM


NanoFab 300 North (NY PEMC)

ZEN Building

NanoFab East

NanoFab 300/450 Extension

Albany NanoTech Complex

NanoFab 300

South

> 1,000,000 sq.ft. of cutting-edge facilities, with 135,000 sq. ft. of 300mm and 450 mm cleanrooms with a current expansion to 1,300,000 sq. ft.

More than 300 industry partners including electronics, energy, defense & biohealth Over $20Bil investments and over 3,100 R&D jobs currently on site


CNSE Silicon Capabilities

EUV 3300

300 mm Cleanroom

24/7 pilot line operation Capacity of ~5,000 wafer starts per month Leading-edge lithography (MUV, 193i, EUV, e-beam) Backwards compatible to 65 nm; license to produce 10-7 nm CMOS node development 193i lithography and RIE etch for low loss photonics devices Waveguides, hi-speed modulators, filters, gratings, Ge detectors

Full 2.5D/3D integrated process developed and implemented 3D Integration DtW and WtW bonding

1st of a kind 450mm tool set Advanced 3D packaging development @ Utica Location


Collaboratively work with Industry Suppliers and IDMs to develop and test 450mm equipment and build up infrastructure to meet industry needs

Consists of 5 member companies (Intel, TSMC, GLOBALFOUNDRIES, IBM, Samsung) and New York State partnering with SUNY Poly

Full flow 28 nm and below capability by mid 2016

Over forty 1st of a kind tools on-site


NY Governor Andrew M. Cuomo announced that NY State will partner with over 100 private companies, led by GE, to

launch the New York Power Electronics Manufacturing Consortium (NY PEMC).

Develop the next generation of materials and processes used on wide band gap semiconductors in partnership

Over $500 million invested

Create thousands of high-skilled, high-paying focusing on the development and manufacture of the next generation of materials used on semiconductors 8


Advantages of silicon carbide (SiC) power devices

Higher max. temperature: TSiC≥ 200oC vs. TSi ≤ 175o

Reduced power losses… by more than 50%

2X higher power density… more compact / powerful

More reliable in high temperature environments


PEMC SiC Manufacturing Facility located at SUNY Poly: SiC production capabilities yielding between ~30,000-50,000 wafers/year Equipment will be specified as 200mm, capable of processing 150mm SiC wafers. Cleanroom processing area class 100 with proper ESD controls in place. MES managed processing facility under ISO 9001 Quality system Full complement of metrology and analytical equipment suite

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State-of-the-Art 6 inch Capability

Reactive Ion Etching

Metallization

Wet processing

Photolithography

Furnace

Metrology/ Analytical

Activation

Implant Test and Dice

• Qualified 1.2kV MOSFET baseline SiC process capability • Parametric Test and Dice capability.


Proven MOSFET Device Process Flow

Alignment Marks

P-Well Implant

N-plus Implant

P-plus Implant

P-JTE Implant

Field Oxide

Gate

Inter-Layer Dielectric

Ohmic Contacts

Gate Pad

Pad Metal

Passivation

Backmetal

Polyimide

Activation


NY SiC Timeline

2H 2014 1H 2015 2H 2015 1H 2016 2H 2016

1st SiC MOSFET

Qualified SiC MOSFET

ISO certified

Equipment Installation

Process Verification

Q l f d S C MOSFET

MOSFET yield, reliability optimization

RFP and PO process

RFP and POR

Tool Set Selected

Equipment Installation

Fab Prep Fab Prep


Consortium Membership includes: Access to PEMC’s ISO 9001 Quality Certified SiC production facility capable of yielding between ~30,000-50,000 wafers/year Access State-of-the-Art equipment set for device and process development using Company flow or Consortiums 1.2kV baseline MOSFET flow SUNY Poly’s Proven Environment for Partnership Development and IP Protection

Full complement of metrology and analytical equipment suite

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Questions & Discussion

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DC-AC Inverter

>5kW/Kg 200°C

Data Center Products Wind, Solar +1-2% efficiency

1.5-2.2kV SiC

MV Drives 4-6kV MW class

with 2.2kV or higher voltage SiC

System

Increasing TRL / MRL 4-7

HVDC / MVDC

MV Motor Drive

PV Inverter

Wind Converter

Data Center

Aviation

EV Charger

DC-DC

D600V

H10kV

PV3.3kV

WW1.2kV

D20V


Governor Cuomo’s initiative to transform SUNY campuses and other university communities into tax-free communities for new and expanding businesses. Business will locate in these zones and for 10 years enjoy

No state income tax No business or corporate state or local taxes No sales tax No property tax No franchise fees

Prospective businesses must satisfy various criteria, including being new to NYS or determined by the Commissioner to be creating net new jobs within the first year and beyond

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