Zeiss Neon 40 EsB Sample Insertion/Removal
Close the column chamber valve and make sure sample stage is at the exchange position Click on Close Column Chamber Valve under the Airlock panel Using the ChamberScope, make sure sample stage is at 0o tilt and lowered out of the way of the SEM/FIB columns Under the Stage Points List panel, double click on $exchange to drive the stage to the exchange position Zeiss Neon 40 EsB Sample Insertion/Removal
Load samples (or not if removing) and evacuate the airlock While wearing gloves pick an appropriate stage and load the samples Open the airlock door (swivel the monitor out of the way) and fit the dovetail stage securely onto one of the two teflon holders On the airlock, the red Wait light should be lit as well as the yellow Rod Status and Gate Closed lights While holding the chamber door closed, push the Pump button (green light on) followed by the Open button (green light on) When the green Proceed light turns on and the yellow Gate Closed light turns off, wait until the gate valve fully opens (~30 seconds, look for motor rolling to cease) and the sample chamber lights up Zeiss Neon 40 EsB Sample Insertion/Removal
Insert or remove the specimen stage from the SEM chamber If necessary, line up the sample insertion rod with the position of the sample using the knob underneath the rod Release the lock on the sample insertion rod and carefully screw the sample insertion rod into the stage Be careful not to push the stage off the holder and do not over tighten the rod Insert the sample into the SEM chamber fitting the dovetail stage onto the holder securely Unscrew the sample insertion rod from the sample holder (Rod Status light should be solid yellow, not blinking otherwise system will not proceed to the next step), retract it all the way and lock it into the fully withdrawn position Zeiss Neon 40 EsB Sample Insertion/Removal
Vent the airlock to atmosphere and open the column chamber valve Release the Open button (green light off) and push the Close button (green light on) to close the gate valve Wait until the Gate Closed yellow light comes on Release the Pump button (green light off) and then the Close button (green light off) Push the Purge button (green light on) to vent the airlock to atmosphere The red Wait light will turn on When the airlock is fully vented (~ 10 seconds), release the Purge button (green light off) Open the column chamber valve on the Airlock panel