1 challenge the future to do list. add extra slide about the coupling, at pressure level. burn cd
TRANSCRIPT
![Page 1: 1 Challenge the future To do list. add extra slide about the coupling, at pressure level. Burn CD](https://reader036.vdocument.in/reader036/viewer/2022062421/56649e2a5503460f94b17bb6/html5/thumbnails/1.jpg)
1Challenge the future
To do list.add extra slide about the coupling, at pressure level.Burn CD
![Page 2: 1 Challenge the future To do list. add extra slide about the coupling, at pressure level. Burn CD](https://reader036.vdocument.in/reader036/viewer/2022062421/56649e2a5503460f94b17bb6/html5/thumbnails/2.jpg)
2Challenge the future
Wafer transport and gas separation in a contact-less Spatial Atomic Layer Deposition track.
Candidate: Gonzalo Ramirez Troxler
Committee: Dr. ir. R.A.J van OstayenDr. E.H.A GrannemanProf.ir. R. Munnig SchmidtDr. R. Delfos
![Page 3: 1 Challenge the future To do list. add extra slide about the coupling, at pressure level. Burn CD](https://reader036.vdocument.in/reader036/viewer/2022062421/56649e2a5503460f94b17bb6/html5/thumbnails/3.jpg)
3Challenge the future
Outline• Introduction and motivation
• Solar Cells Market and challenges.
• Solar cells, recombination velocity and passivation.
• Atomic Layer Deposition• Levitrack System
• Working principle
• Thesis goals: fine tuning stage.• Modelling
• Thin Film Flow
• Concentration of Species• Results
• CFD model
• Prototype system to measure position of wafer• Conclusions and recommendations
![Page 4: 1 Challenge the future To do list. add extra slide about the coupling, at pressure level. Burn CD](https://reader036.vdocument.in/reader036/viewer/2022062421/56649e2a5503460f94b17bb6/html5/thumbnails/4.jpg)
4Challenge the future
IntroductionSolar Cells Market
• 1,600% growth of MW installed last decade.
• Resources depletion.
• Ecological impact.
Outlook
![Page 5: 1 Challenge the future To do list. add extra slide about the coupling, at pressure level. Burn CD](https://reader036.vdocument.in/reader036/viewer/2022062421/56649e2a5503460f94b17bb6/html5/thumbnails/5.jpg)
5Challenge the future
Introduction
Challenge: To position Solar Cells as a major actor in the power generation scenario.
Cost Reduction and Increase efficiency.
Motivation
Surface Passivation using aluminium oxide - Al2O3
![Page 6: 1 Challenge the future To do list. add extra slide about the coupling, at pressure level. Burn CD](https://reader036.vdocument.in/reader036/viewer/2022062421/56649e2a5503460f94b17bb6/html5/thumbnails/6.jpg)
6Challenge the future
Introduction
Levitrack: • Contact-less transportation track• Substrates levitate and layers of Al2O3 are deposited
(ALD).• High Throughput.• Low cost of construction.
LEVITECH and LEVITRACK
Levitech BV is a Dutch based company that develops novel solutions for the IC and Solar Cells Industry. Spin-off of ASM International.
![Page 7: 1 Challenge the future To do list. add extra slide about the coupling, at pressure level. Burn CD](https://reader036.vdocument.in/reader036/viewer/2022062421/56649e2a5503460f94b17bb6/html5/thumbnails/7.jpg)
7Challenge the future
IntroductionSolar cell and passivation
With silver print all rear fingers are short-circuitedand no light is transmitted though the back
With silver print all rear fingers are short-circuitedand no light is transmitted though the back
Front
Rear
Ag contacts
n++
ARC SiNx
Al lines
4444
p-Si
Al2O3
p++Al-BSF
Front Rear
Back-sheet foil
Surface Passivation increase efficiency of solar cell:
• Increase lifetime of charge carriers.
![Page 8: 1 Challenge the future To do list. add extra slide about the coupling, at pressure level. Burn CD](https://reader036.vdocument.in/reader036/viewer/2022062421/56649e2a5503460f94b17bb6/html5/thumbnails/8.jpg)
8Challenge the future
IntroductionAtomic Layer Deposition (ALD)
Initial surface
![Page 9: 1 Challenge the future To do list. add extra slide about the coupling, at pressure level. Burn CD](https://reader036.vdocument.in/reader036/viewer/2022062421/56649e2a5503460f94b17bb6/html5/thumbnails/9.jpg)
9Challenge the future
IntroductionAtomic Layer Deposition (ALD)
TMA reacts with hydroxyl groups
![Page 10: 1 Challenge the future To do list. add extra slide about the coupling, at pressure level. Burn CD](https://reader036.vdocument.in/reader036/viewer/2022062421/56649e2a5503460f94b17bb6/html5/thumbnails/10.jpg)
10Challenge the future
IntroductionAtomic Layer Deposition (ALD)
TMA saturates surface.
![Page 11: 1 Challenge the future To do list. add extra slide about the coupling, at pressure level. Burn CD](https://reader036.vdocument.in/reader036/viewer/2022062421/56649e2a5503460f94b17bb6/html5/thumbnails/11.jpg)
11Challenge the future
IntroductionAtomic Layer Deposition (ALD)
Purge using N2.
![Page 12: 1 Challenge the future To do list. add extra slide about the coupling, at pressure level. Burn CD](https://reader036.vdocument.in/reader036/viewer/2022062421/56649e2a5503460f94b17bb6/html5/thumbnails/12.jpg)
12Challenge the future
IntroductionAtomic Layer Deposition (ALD)
H2O reacts with methyl groups and Al.
![Page 13: 1 Challenge the future To do list. add extra slide about the coupling, at pressure level. Burn CD](https://reader036.vdocument.in/reader036/viewer/2022062421/56649e2a5503460f94b17bb6/html5/thumbnails/13.jpg)
13Challenge the future
IntroductionAtomic Layer Deposition (ALD)
H2O saturates the surface forming Al2O3.
![Page 14: 1 Challenge the future To do list. add extra slide about the coupling, at pressure level. Burn CD](https://reader036.vdocument.in/reader036/viewer/2022062421/56649e2a5503460f94b17bb6/html5/thumbnails/14.jpg)
14Challenge the future
IntroductionAtomic Layer Deposition (ALD)
Purge using N2.
![Page 15: 1 Challenge the future To do list. add extra slide about the coupling, at pressure level. Burn CD](https://reader036.vdocument.in/reader036/viewer/2022062421/56649e2a5503460f94b17bb6/html5/thumbnails/15.jpg)
15Challenge the future
IntroductionSpatial Atomic Layer Deposition (1)
Single Reactor
Spatial ALD N2
TMA
H2O
![Page 16: 1 Challenge the future To do list. add extra slide about the coupling, at pressure level. Burn CD](https://reader036.vdocument.in/reader036/viewer/2022062421/56649e2a5503460f94b17bb6/html5/thumbnails/16.jpg)
16Challenge the future
IntroductionSpatial Atomic Layer Deposition (2)
Single Reactor 12 meter Spatial ALD
Track
Layer height: 10 nm
Time: 5 min Time: 5
min
X 5
![Page 17: 1 Challenge the future To do list. add extra slide about the coupling, at pressure level. Burn CD](https://reader036.vdocument.in/reader036/viewer/2022062421/56649e2a5503460f94b17bb6/html5/thumbnails/17.jpg)
17Challenge the future
LEVITRACKWorking principle (1)
![Page 18: 1 Challenge the future To do list. add extra slide about the coupling, at pressure level. Burn CD](https://reader036.vdocument.in/reader036/viewer/2022062421/56649e2a5503460f94b17bb6/html5/thumbnails/18.jpg)
18Challenge the future
LEVITRACKWorking principle (2)
0.5 mm
![Page 19: 1 Challenge the future To do list. add extra slide about the coupling, at pressure level. Burn CD](https://reader036.vdocument.in/reader036/viewer/2022062421/56649e2a5503460f94b17bb6/html5/thumbnails/19.jpg)
19Challenge the future
LEVITRACKWorking principle (3)
156 mm
156 mm
![Page 20: 1 Challenge the future To do list. add extra slide about the coupling, at pressure level. Burn CD](https://reader036.vdocument.in/reader036/viewer/2022062421/56649e2a5503460f94b17bb6/html5/thumbnails/20.jpg)
20Challenge the future
LEVITRACKWorking principle (4)
![Page 21: 1 Challenge the future To do list. add extra slide about the coupling, at pressure level. Burn CD](https://reader036.vdocument.in/reader036/viewer/2022062421/56649e2a5503460f94b17bb6/html5/thumbnails/21.jpg)
21Challenge the future
LEVITRACKThesis goal: fine tuning stage.
The aim of this thesis is to study and improve this 4-m test setup, in order to demonstrate stable transport, while minimizing the
mixing of precursor gases.
• Stable transport: no damage on wafers.
• Mixing of precursors: TMA and H2O need to be always separated on space.
![Page 22: 1 Challenge the future To do list. add extra slide about the coupling, at pressure level. Burn CD](https://reader036.vdocument.in/reader036/viewer/2022062421/56649e2a5503460f94b17bb6/html5/thumbnails/22.jpg)
22Challenge the future
Modelling
• Multiphysics• Fluid Flow• Concentration of species• Surface Chemistry• Heat transport• Structural mechanics
CFD Model
![Page 23: 1 Challenge the future To do list. add extra slide about the coupling, at pressure level. Burn CD](https://reader036.vdocument.in/reader036/viewer/2022062421/56649e2a5503460f94b17bb6/html5/thumbnails/23.jpg)
23Challenge the future
ModellingThin film flow (1)
Navier-Stokes equations + Continuity equation.
Reynolds’ equation
Unknowns: 3 velocities and pressure.
Unknown: pressure
Assumptions:• Lubricant isoviscous.• Low Reynolds number. (Negligible
Inertia force)• Negligible body forces.
![Page 24: 1 Challenge the future To do list. add extra slide about the coupling, at pressure level. Burn CD](https://reader036.vdocument.in/reader036/viewer/2022062421/56649e2a5503460f94b17bb6/html5/thumbnails/24.jpg)
24Challenge the future
Modelling
• Height average velocity.• N2-O2 model.• Stationary.
Concentration of species
Thin Film Flow
Concentration of Species.
One way coupling.
![Page 25: 1 Challenge the future To do list. add extra slide about the coupling, at pressure level. Burn CD](https://reader036.vdocument.in/reader036/viewer/2022062421/56649e2a5503460f94b17bb6/html5/thumbnails/25.jpg)
25Challenge the future
Results and discussionCFD Model (1)
OutVolume
Top VolumeGap
Bottom VolumeGap
Exhaust
![Page 26: 1 Challenge the future To do list. add extra slide about the coupling, at pressure level. Burn CD](https://reader036.vdocument.in/reader036/viewer/2022062421/56649e2a5503460f94b17bb6/html5/thumbnails/26.jpg)
26Challenge the future
Results and discussionFlat surface track: benchmark
Mixing requirement not fulfilled.
Flat surface
![Page 27: 1 Challenge the future To do list. add extra slide about the coupling, at pressure level. Burn CD](https://reader036.vdocument.in/reader036/viewer/2022062421/56649e2a5503460f94b17bb6/html5/thumbnails/27.jpg)
27Challenge the future
Results and discussionFlat surface track: improvement to geometry
100% groove
70% groove
![Page 28: 1 Challenge the future To do list. add extra slide about the coupling, at pressure level. Burn CD](https://reader036.vdocument.in/reader036/viewer/2022062421/56649e2a5503460f94b17bb6/html5/thumbnails/28.jpg)
28Challenge the future
Results and discussion100% grooves
Mixing requirement fulfilled.
100% grooves
.
![Page 29: 1 Challenge the future To do list. add extra slide about the coupling, at pressure level. Burn CD](https://reader036.vdocument.in/reader036/viewer/2022062421/56649e2a5503460f94b17bb6/html5/thumbnails/29.jpg)
29Challenge the future
Results and discussion100% grooves: Flying height
![Page 30: 1 Challenge the future To do list. add extra slide about the coupling, at pressure level. Burn CD](https://reader036.vdocument.in/reader036/viewer/2022062421/56649e2a5503460f94b17bb6/html5/thumbnails/30.jpg)
30Challenge the future
Results and discussion70% grooves
Mixing requirement not fulfilled.
Fh = 140 μm
70% grooves
.
![Page 31: 1 Challenge the future To do list. add extra slide about the coupling, at pressure level. Burn CD](https://reader036.vdocument.in/reader036/viewer/2022062421/56649e2a5503460f94b17bb6/html5/thumbnails/31.jpg)
31Challenge the future
Results and discussionFlat surface vs. 100% grooves
![Page 32: 1 Challenge the future To do list. add extra slide about the coupling, at pressure level. Burn CD](https://reader036.vdocument.in/reader036/viewer/2022062421/56649e2a5503460f94b17bb6/html5/thumbnails/32.jpg)
32Challenge the future
Results and discussionFlat surface vs. 70% grooves
![Page 33: 1 Challenge the future To do list. add extra slide about the coupling, at pressure level. Burn CD](https://reader036.vdocument.in/reader036/viewer/2022062421/56649e2a5503460f94b17bb6/html5/thumbnails/33.jpg)
33Challenge the future
Results and discussionGrooved surface track (5)
No Groove
70% Groove 100% Groove
Mixing Requirement
![Page 34: 1 Challenge the future To do list. add extra slide about the coupling, at pressure level. Burn CD](https://reader036.vdocument.in/reader036/viewer/2022062421/56649e2a5503460f94b17bb6/html5/thumbnails/34.jpg)
34Challenge the future
LEVITRACKThesis goal: fine tuning stage.
The aim of this thesis is to study and improve this 4-m test setup, in order to demonstrate stable transport, while minimizing the
mixing of precursor gases.
![Page 35: 1 Challenge the future To do list. add extra slide about the coupling, at pressure level. Burn CD](https://reader036.vdocument.in/reader036/viewer/2022062421/56649e2a5503460f94b17bb6/html5/thumbnails/35.jpg)
35Challenge the future
Results and discussion
• Design system to measure separation of the of the wafer to the lateral wall.
Lateral gap measurement system (1)
![Page 36: 1 Challenge the future To do list. add extra slide about the coupling, at pressure level. Burn CD](https://reader036.vdocument.in/reader036/viewer/2022062421/56649e2a5503460f94b17bb6/html5/thumbnails/36.jpg)
36Challenge the future
Results and discussionLateral gap measurement system (2)
![Page 37: 1 Challenge the future To do list. add extra slide about the coupling, at pressure level. Burn CD](https://reader036.vdocument.in/reader036/viewer/2022062421/56649e2a5503460f94b17bb6/html5/thumbnails/37.jpg)
37Challenge the future
Conclusions and recommendations
It was developed:
• Fast and accurate enough CFD model to predict the pressure profile and spread of precursors inside the track.• As reference 3d NS model takes 2 day per model, while
the thin film flow model 10-20 minutes.
• System to measure the lateral gap.• Submitted to be patented.
It was found:
• Alternative geometry, which fulfils the mixing requirement.
Conclusions
![Page 38: 1 Challenge the future To do list. add extra slide about the coupling, at pressure level. Burn CD](https://reader036.vdocument.in/reader036/viewer/2022062421/56649e2a5503460f94b17bb6/html5/thumbnails/38.jpg)
38Challenge the future
Conclusions and recommendations
• Include dynamics of the wafer in the model.
• Implement and study lateral stability with proposed measurement system.
• Integration of the deposition process to the model.
Recommendations
![Page 39: 1 Challenge the future To do list. add extra slide about the coupling, at pressure level. Burn CD](https://reader036.vdocument.in/reader036/viewer/2022062421/56649e2a5503460f94b17bb6/html5/thumbnails/39.jpg)
39Challenge the future
![Page 40: 1 Challenge the future To do list. add extra slide about the coupling, at pressure level. Burn CD](https://reader036.vdocument.in/reader036/viewer/2022062421/56649e2a5503460f94b17bb6/html5/thumbnails/40.jpg)
40Challenge the future
Back Up slides
![Page 41: 1 Challenge the future To do list. add extra slide about the coupling, at pressure level. Burn CD](https://reader036.vdocument.in/reader036/viewer/2022062421/56649e2a5503460f94b17bb6/html5/thumbnails/41.jpg)
41Challenge the future
Back up slidesSolar cell and passivation (1)
+
-
+ ++ ++ + ++ +
----- ----
1.- N-type and P-type junction together.2.- Creation of the depletion region.3.- Light adsorbed by the silicon.4.- Creation of electron-holes pairs.
-
+5.- Hole->p-type. Electron->n-type Electron-hole pair tries to recombine.6.-Electrones conducted.
![Page 42: 1 Challenge the future To do list. add extra slide about the coupling, at pressure level. Burn CD](https://reader036.vdocument.in/reader036/viewer/2022062421/56649e2a5503460f94b17bb6/html5/thumbnails/42.jpg)
42Challenge the future
P1 systemWorking principle (4)
![Page 43: 1 Challenge the future To do list. add extra slide about the coupling, at pressure level. Burn CD](https://reader036.vdocument.in/reader036/viewer/2022062421/56649e2a5503460f94b17bb6/html5/thumbnails/43.jpg)
43Challenge the future
Modelling Analytical model
• A negative pressure difference decrease the wafer velocity.
• 0.1 mbar 20% reduction of expected velocity.
• Analytical model developed in Levitech.
• Simple approach.
![Page 44: 1 Challenge the future To do list. add extra slide about the coupling, at pressure level. Burn CD](https://reader036.vdocument.in/reader036/viewer/2022062421/56649e2a5503460f94b17bb6/html5/thumbnails/44.jpg)
44Challenge the future
Model ValidationModel validation (1)
7 mbar
3 mbar
5 mbar
10 mbar
![Page 45: 1 Challenge the future To do list. add extra slide about the coupling, at pressure level. Burn CD](https://reader036.vdocument.in/reader036/viewer/2022062421/56649e2a5503460f94b17bb6/html5/thumbnails/45.jpg)
45Challenge the future
Model ValidationModel validation (2)
1 8 10 12 30
• Velocity: 0 [m/s]:• Row 8: in front of the
wafer.
• Row 10: on the edge of the wafer.
• Row 12: Below the wafer.
![Page 46: 1 Challenge the future To do list. add extra slide about the coupling, at pressure level. Burn CD](https://reader036.vdocument.in/reader036/viewer/2022062421/56649e2a5503460f94b17bb6/html5/thumbnails/46.jpg)
46Challenge the future
Model ValidationModel validation (3)
![Page 47: 1 Challenge the future To do list. add extra slide about the coupling, at pressure level. Burn CD](https://reader036.vdocument.in/reader036/viewer/2022062421/56649e2a5503460f94b17bb6/html5/thumbnails/47.jpg)
47Challenge the future
Results and discussion
• Channel effect.• Load asymmetry
• Variation of the flying height (100μm).
• Reduce transportation velocity.• Needs to be further studied in the
functional prototype.
Summary of grooved geometry
![Page 48: 1 Challenge the future To do list. add extra slide about the coupling, at pressure level. Burn CD](https://reader036.vdocument.in/reader036/viewer/2022062421/56649e2a5503460f94b17bb6/html5/thumbnails/48.jpg)
48Challenge the future
Results and discussionLateral gap measurement system (3)