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CNEU Cleanroom UpdateSpring 2007

Terry Kuzma

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Outline

• Goal of the Cleanroom

• Design/Selection

• Infrastructure

• Tools and Systems

• Invitation for a Tour

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Cleanroom Goal

• To meet the needs of industry, the students should master safety protocol, processing system design and recipes, material characteristics, and contamination issues.

• Our feedback from both industry and students identifies the lab as a primary tool to accomplish the training goals

• The NMT students spend approximately 3 hours a day performing “hands on activities”

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Outline

• Goal of the Cleanroom

• Design/Selection

• Infrastructure

• Tools and Systems

• Invitation for a Tour

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Options to Obtain the Training Goal

• University Research Facility Approach– Not explicitly designed for teaching– No initial equipment costs, only re-occurring user fees (expensive?)

• Educational Laboratory Approach– Equipment in the low and medium cost tools are incorporated.– High cost equipment not easily incorporated due to size of equipment,

facilities needed, cost of equipment and maintenance, etc.

• Hybrid Approach– Create an Educational Laboratory and partner with a research university

that can provide access to equipment in the high cost echelon.

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Design/Selection

• A cleanroom is not absolutely necessary, but it helps to inspire conscientiousness and prepares students for full range of industries

• Typically unfiltered lab space has a few million micron size particles per square foot. Depending upon the nature of the lab experiments, it is desirable to have a cleanroom. Typically class 100,000, or 10,000 are cost effective for education. Lower classification (class 1000) cleanrooms are generally not cost effective

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Design/Selection

We considered a class 1000 industrial cleanroom.– The same size class 1000 “hardwall” cleanroom in the

same building was estimated to be 800,000 dollars (2005).

– The large increase in cost was mainly due to HVAC environmental control

– The class 1000 cleanroom also cost more to maintain.• Gowns, filters, online monitoring, maintenance

Design/Selection • Class 100,000 cleanroom design was selected because it did not

need additional HVAC; i.e., it utilized existing infrastructure.– The facility did not require additional electrical service– Minimal state permits (Time)– No reoccurring charges for environmental monitoring.– Arguably the same impact for education as a costlier facility– Valid model, most pharmaceutical cleanrooms are this design– Less cost for gowns, filters, monitoring, maintenance.– The CNEU cleanroom is 1000 square feet. The cost was

approximately 200,000 dollars (2006).

Educational Cleanroom-Spring 200754’0”

24’0”

19’6”

41’0”

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Outline

• Goal of the Cleanroom

• Design/Selection

• Infrastructure

• Tools and Systems

• Invitation for a Tour

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Infrastructure

DI water is a priority for contamination control and chemistry. Our facility has filtered water that is polished in our DI water system. Our system does not store water, and has a 15 gallon per hour limitation.

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Infrastructure

• In support of our LPCVD system, we needed to safely monitor hydride gas.

• Annual preventative maintenance, tapes, and travel expense.

• Our system is connected to Fire/Police services at no annual cost.

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Infrastructure

• Gas cabinets• Store diborane and

silane• Both cabinets require

hydride gas detection safety system

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Additional infrastructure costs

• Fixed cost– Eye wash / shower– Chemical storage cabinets– SCBA air packs

Compressed dry air– Card access system, – Police / fire monitoring– Fire extinguishers– Hand tools– Computers

• Reoccurring costs– Gowns, gloves, mats, etc– Process gas – Chemical spill kits– Consumables such as

probe tips, beakers, chemicals, deposition metals, substrates, vacuum pumps, etc………

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Outline

• Goal of the Cleanroom

• Design/Selection

• Infrastructure

• Tools and Systems

• Invitation for a Tour

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Tools and Systems

• Wet chemistry area• Solvent bench• Acid and base bench

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Tools and Systems

• Reactive ion processing• The reactive ion

processing system can be used to modify surface morphology, modify surface chemistry, dry phase cleaning, and etching

• Our system has CF4, O2, H2, Ar

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Tools and Systems

• Low Pressure Chemical Deposition (LPCVD)

• The LPCVD system is used to deposit nanowires and thin films

• Current chemistry are SiH4, B2H6, O2, NH3, CH4.

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Tools and Systems

• Atomic Force Microscope (AFM)

• Capable of remote access over the internet

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Tools and Systems• Scanning Electron Microscope

(SEM)• Capable of imaging samples

with resolutions in the 1-20um range. One of the limitations is that the sample must be conductive, or be coated with a layer of conductive material in order to avoid charging effects

• Base unit $60,000 to $150,000• Our system is on lone from

R.J. Lee company, and is valued at $200,000

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Tools and Systems

• This sputter coater systems is designed for electron microscopy sample preparation

• A turbo pump is used on this systems to obtain fine grain, contamination free coatings

• Materials available are Au, Pt, and C

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Tools and Systems

• This system is a thermal evaporator

• It is used to thermally deposit elemental metals.

• Current metals include Al, Au, Ag

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Tools and Systems• 3 inch tube furnace• 3 zone temperature

control with a maximum temperature of 1100oC

• Gas – Ar, N2, O2

• Used for anneals, crystallization, oxidation growth

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Tools and Systems

• This system is the vacuum trainer

• It teaches the students about vacuum components and subsystems

• It has most of the common vacuum hardware, mechanical pump, turbo pump, various vacuum gauges, and RGA

• This system is used in conjunction with the computer based vacuum simulator.

Tools and Systems• Microscopes with data

storage.• Dark Field: light scattered off

features on the sample surface making features visible through the microscope

• Bright Field: A traditional light source is used to illuminate the sample and the reflection yields the image

Tools and Systems

Ellipsometer Profilometer

SpectrophotometerRTA

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Tools and Systems

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Outline

• Goal of the Cleanroom

• Design/Selection

• Infrastructure

• Tools and Systems

• Invitation for a Tour

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Finally, Cleanroom Tour

• Tours of the CNEU cleanroom will start at 4:00 today. You can sign up at the registration desk.

• Any questions?