40 to 28 nm migration

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The problem: To move dual-port SRAM library and macros from a 40nm process to a 28nm  process. In addition to all the changes between two different foundry processes, the 28nm rules are disruptive and incompatible with the previous ru les. The memory corecells (foundry-specific) would also need to be completely replaced. Current wisdom was that an IP block migration to 28nm was impossible and a complete re- design would be requ ired. As usual, the schedule was very aggressive so a quick migration was really the only feasible option. The main changes: There were many changes in design rules between the two foundry  processes. Some of the most challenging changes were: y  No poly bends. The original process allowed poly bends and made extensive use of them in the design. y Extra dummy rule. Small transistor stacks required an add itional dummy poly ³gate´ off the end of the t ransis tor. T his was not electrically functional, but was required for optical lithography reasons. y Memory core cells from the original process were replaced with new core ce lls f or the new process. These new co re cells are architecturally different, resulting in various mismatches that would requ ire attention. y ]Devices outside the memory core-cells needed to have width and length adjusted according to complex ru les. y ]All devices must be vertical. The original des ign was done in the horizonta l direction meaning it must be rotated when it is written onto the reticle. The main non-changes: Many aspects of the design could not be changed. The design was originally done using Virtuoso and Pce lls in DFII but the migrated design needed to be in OpenAccess. It was important to maintain the hierarchy a nd ensure that LVS would pass for the new design. Transistor aspect ratios also needed to be adjusted appropriately. The schedule: There was only a month to do the migration. No more than two days of manual cleanup was allowed at the end to fix anything that could not be migrated automatically. How each major challenge was addressed:  No poly bends. When possible, the poly would need to be replaced with metal1 if the routing channel was open. If the routing channel was not open, then the result was left LVS clean but with DRC violations that would need to be fixed manually. A pre liminary analysis revealed that there would be very few such cases left.

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Page 1: 40 to 28 Nm Migration

8/6/2019 40 to 28 Nm Migration

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