Agenda

Tuesday, May 20, 2014 12:00 pm - 1:00 pm Registration & MIG Member Poster Set Up – Atrium 1:15 pm - 2:00 pm Welcome & Overview of Lab Tour – Stanley 105

John Huggins, Ph.D, Executive Director, Berkeley Sensor & Actuator Center (BSAC) Bill Flounders, Ph.D, Executive Director, Marvell Nanofabrication Laboratory Michel Maharviz, Ph.D, Co-Director, Berkeley Sensor & Actuator Center (BSAC)

2:00 pm - 5:30 pm BSAC / Marvell Nano Fab Lab Site Visit & Student Poster Sessions – Atrium 6:00 pm - 7:00 pm New Member Soiree (invited guests only) – Jupiter Brewery 7:00 pm - 9:00 pm MIG Power Launch Cocktail Party (All MIG Members Welcome) – Jupiter Brewery

Wednesday, May 21, 2014 7:00 am - 8:00 am Breakfast & Registration & MIG Member Poster Session – Atrium 8:00 am - 8:30 am Welcome and Overview Update on MIG - Stanley 105

Karen Lightman, Executive Director, MEMS Industry Group 8:30 am - 8:45 am Update on MEMS Standard Performance Definitions - Stanley 105

Mike Gaitan, Leader, Acoustics and Vibration Project, National Institute of Standards and Technology (NIST)

8:45 am - 9:00 am MEMS Roadmapping Efforts & iNEMI update - Stanley 105 Bill Bader, Chief Executive Officer, iNEMI

9:00 am - 9:45 am Keynote Speaker - Stanley 105 - Campus Richie Payne, Ph.D, Principal Consultant, MEMS Strategies, LLC

9:45 am - 10:15 am Coffee Break – B1 Atrium - Campus 10:15 am - 10:45 am The Path to Pervasive Sensing – Tackling the Integration Challenge - Stanley 105

Keith M. Jackson, Ph.D., Senior MEMS Engineer, A.M. Fitzgerald & Associates, LLC 10:45 am - 11:15 am PZT Thin-film Processing Technology for Piezo-MEMS Manufacturing - Stanley 105

Koukou Suu, Ph.D., General Manager, ULVAC, Inc. 11:15 am - 11:45 am Challenges in Commercializing MEMS for Self Driving Cars, to Smart Homes, and Wearables -

Stanley 105 Babak Taheri, Ph.D, Freescale Semiconductor

11:45 am - 1:00 pm Lunch & MIG Member Poster Session - B1 Atrium 1:00 pm - 2:00 pm MEMS and Innovation from a MEMS Supply Chain Perspective Panel - Stanley 105 or 106

Craig Core, VP Operations, Qualtré, Inc. Alissa M. Fitzgerald Ph.D., Founder and Managing Member, AM Fitzgerald & Associates, LLC Rob O’Reilly (Moderator), Senior Technical Staff, MEMS Sensor and Technology Group, Analog Devices, Inc. David Dornfeld Ph.D., Professor of Mechanical Engineering, University of California, Berkeley Ian Ferguson, VP of Segment Marketing, ARM

2:10 pm - 3:30 pm Working Group Track A - Innovative Collaboration & IP Management & Working Group Track B - Successful Tech Transfers - 177 Stanley & Auditorium Valerie Marty, MEMS Integration Engineer, Hewlett-Packard Company (HP) Dirk Ortloff, Ph.D, Product Manager XperiDesk, camLINE GmbH John Huggins, Ph.D, Executive Director, Berkeley Sensor & Actuator Center (BSAC) Jason Tauscher, Director of MEMS Development, Microvision

3:30 pm - 4:00 pm Coffee Break - B1 Atrium 4:00 pm - 5:00 pm Wrap-up/Presentation with WG Leaders - Stanley 105 5:15 pm - 5:30 pm Closing Remarks - Stanley 105

Karen Lightman, Executive Director, MEMS Industry Group 6:00 pm - 8:30 pm MIG Dinner Party - Bancroft Hotel

2

Working Groups as of May 15, 2014 Group A - Innovative Collaboration & IP Management Julie Adams, UBOTiC William Bader, iNEMI Bruno Bowden, Data Collective Wayne Breyer, Kaplan Breyer Schwarz & Ottesen, LLP Wei Chen, Ulvac Technologies, Inc Craig Core, Qualtre Dan Croft, Hewlett-Packard Alan Evans, Unisem Group Ian Ferguson, ARM Leslie Field, SmallTech Consulting, LLC Gregory Heiland, Valutek Mike Hikita, Murata Electronics N.A., Inc. Jeff Hintzman, Hewlett-Packard Keith Jackson, AM Fitzgerald & Associates, LLC Erwan Le Roy, SSEC

Kurt Li, Ling Star Technology Mozafar Maghsoudnia, InvenSense Valerie Marty, Hewlett-Packard Chad Meyer, Cinder Solutions Jay Minami, Lam Research Corporation Dirk Ortloff, camLine GmbH Richard Payne, MEMS Strategies LLC Magnus Rimskog, Silex Microsystems Koukou Suu, ULVAC, Inc. Monica Takacs, MEMS Industry Group Charles Turk, OAI James Walker, Kaplan Breyer Schwarz & Ottesen, LLP Bettina Weiss, SEMI Stephen Whalley, Intel Corporation

Group B - Successful Tech Transfers Richard Allen, NIST Dallan Andrus, Merit Sensor Systems Edward Bell, MEMStaff Inc. Gilbert Chiu, Unisem James Crow, Micrel Hector De Los Santos, IntelliSense David Dornfeld, Univ of California Berkeley Eric Faucette, Cinder Solutions Peter Ferraro, Empower Materials Alissa Fitzgerald, AM Fitzgerald & Associates, LLC Michael Gaitan, NIST Venkat Goli, Independent Consultant Michael Grimes, Applied Microstructures, Inc. John Huggins, BSAC Chivonne Hyppolite, MEMS Industry Group Angela Lee, Unisem

Karen Lightman, MEMS Industry Group Michel Maharbiz, Berkeley Sensor & Actuator Center Mary Ann Maher, SoftMEMS LLC Carl Mann, EV Group Tony McKie, memsstar Ltd Michael Mignardi, Texas Instruments Robert O'Reilly, Analog Devices, Inc Eric Pabo, EV Group Jerome Parent, LynceeTec Cole Porter, Expertech Scott Sullivan, esi Babak Taheri, Freescale Jason Tauscher, Microvision, Inc. Jason Taylor, Wisdom IC Lisong Zhou, Applied Microstructures, Inc.

Bancroft Hotel 2680 Bancroft Way Berkeley, CA 94704 510-549-1000

Jupiter Brewery 2181 Shattuck Avenue Berkeley, CA 94704