agr series - gmp · rotary stages agr series 402 world headquarters: aerotech, inc., united states...

10
Rotary Stages AGR Series 402 www.aerotech.com WORLD HEADQUARTERS: Aerotech, Inc., United States • Phone: +1-412-963-7470 • Email: [email protected] Aerotech, Ltd., United Kingdom • Phone: +44-118-9409400 • Email: [email protected] Aerotech GmbH, Germany • Phone: +49-911-9679370 • Email: [email protected] Aerotech KK, Japan • Phone: +81-47-489-1741 • Email: [email protected] Aerotech China • Phone: +852-3793-3488 • Email: [email protected] AGR Series Mechanical-Bearing, Worm-Driven Rotary Stage AGR series motorized rotary stages provide significant improvements in speed, load capacity, and long-term positioning performance over previous generations of worm-gear-drive stages. AGR series stages address a wide range of applications for general purpose positioning in laboratory and industrial uses. Innovative Gear Design A unique preloading scheme avoids changing wear characteristics, allowing an orders of magnitude increase in stage life without any degradation in stage performance, and allows stage operation over a wide temperature range. The addition of a larger clear aperture is a key enhancement over previous generations of worm-gear-driven stages. This feature allows the AGR series to address applications requiring a through-hole or accommodations to mount an optic, including articulation of beam polarizing lenses, through-holes for cabling and/or air lines, or vision/camera/inspection applications. Other Construction Features The AGR stage base is fabricated from a special aluminum alloy which offers significant weight savings in multi-axis arrangements and other weight critical applications, while providing high structural stiffness and long-term stability. Enhanced speed and load capacity Innovative precision worm-gear assembly (patent pending) provides outstanding accuracy and repeatability over a long lifetime Large aperture addresses a wide range of applications Continuous 360º rotary positioning Direct encoder options available Operation over a wide temperature range Each stage incorporates dual large diameter pre-loaded angular contact bearings optimally separated to provide excellent error motion specifications, as well as best possible load handling capability. All stage tabletops feature aluminum hardcoat plating and stainless-steel Heli-Coil ® inserts to prevent thread wear. Flexible Options Options include flexible motor selections as well as a direct encoder mounted concentric to the axis of rotation for outstanding repeatability and to virtually eliminate hysteresis and backlash. Vacuum-compatible versions (for use in pressures as low as 10 -6 torr) are also available. Motor and Drives Standard AGR stage configurations feature Aerotech’s brushless servomotors. However, all AGR stages can be outfitted with stepper or DC brush motors. A full range of matching drives and controls are available for a complete single-source solution.

Upload: lyxuyen

Post on 05-Oct-2018

215 views

Category:

Documents


0 download

TRANSCRIPT

Rotary StagesAGR Series

402www.aerotech.comWORLD HEADQUARTERS: Aerotech, Inc., United States • Phone: +1-412-963-7470 • Email: [email protected]

Aerotech, Ltd., United Kingdom • Phone: +44-118-9409400 • Email: [email protected] GmbH, Germany • Phone: +49-911-9679370 • Email: [email protected]

Aerotech KK, Japan • Phone: +81-47-489-1741 • Email: [email protected] China • Phone: +852-3793-3488 • Email: [email protected]

AGR SeriesMechanical-Bearing, Worm-Driven Rotary Stage

AGR series motorized rotary stages provide significantimprovements in speed, load capacity, and long-termpositioning performance over previous generations ofworm-gear-drive stages. AGR series stages address a widerange of applications for general purpose positioning inlaboratory and industrial uses.

Innovative Gear DesignA unique preloading scheme avoids changing wearcharacteristics, allowing an orders of magnitude increase instage life without any degradation in stage performance,and allows stage operation over a wide temperature range.

The addition of a larger clear aperture is a key enhancementover previous generations of worm-gear-driven stages. Thisfeature allows the AGR series to address applicationsrequiring a through-hole or accommodations to mount anoptic, including articulation of beam polarizing lenses,through-holes for cabling and/or air lines, orvision/camera/inspection applications.

Other Construction FeaturesThe AGR stage base is fabricated from a special aluminumalloy which offers significant weight savings in multi-axisarrangements and other weight critical applications, whileproviding high structural stiffness and long-term stability.

Enhanced speed and load capacity

Innovative precision worm-gear assembly(patent pending) provides outstanding accuracyand repeatability over a long lifetime

Large aperture addresses a wide range ofapplications

Continuous 360º rotary positioning

Direct encoder options available

Operation over a wide temperature range

Each stage incorporates dual large diameter pre-loadedangular contact bearings optimally separated to provideexcellent error motion specifications, as well as bestpossible load handling capability.

All stage tabletops feature aluminum hardcoat plating andstainless-steel Heli-Coil® inserts to prevent thread wear.

Flexible OptionsOptions include flexible motor selections as well as a directencoder mounted concentric to the axis of rotation foroutstanding repeatability and to virtually eliminatehysteresis and backlash. Vacuum-compatible versions (foruse in pressures as low as 10-6 torr) are also available.

Motor and DrivesStandard AGR stage configurations feature Aerotech’sbrushless servomotors. However, all AGR stages can beoutfitted with stepper or DC brush motors. A full range ofmatching drives and controls are available for a completesingle-source solution.

gmp
GMP
GMP
gmp

AGR

Serie

sRo

tary

Sta

ges

WORLD HEADQUARTERS: Aerotech, Inc., United States • Phone: +1-412-963-7470 • Email: [email protected], Ltd., United Kingdom • Phone: +44-118-9409400 • Email: [email protected] GmbH, Germany • Phone: +49-911-9679370 • Email: [email protected] KK, Japan • Phone: +81-47-489-1741 • Email: [email protected] China • Phone: +852-3793-3488 • Email: [email protected]

403 www.aerotech.comWORLD HEADQUARTERS: Aerotech, Inc., United States • Phone: +1-412-963-7470 • Email: [email protected], Ltd., United Kingdom • Phone: +44-118-9409400 • Email: [email protected] GmbH, Germany • Phone: +49-911-9679370 • Email: [email protected] KK, Japan • Phone: +81-47-489-1741 • Email: [email protected] China • Phone: +852-3793-3488 • Email: [email protected]

Basic Model AGR-50 AGR-75 AGR-100 AGR-150 AGR-200

Total Travel 360° (Unlimited Travel Versions Available)

Drive System

Precision WormGear (51:1 motor-

to-table ratiostandard)

Precision WormGear (67:1 motor-

to-table ratiostandard)

Precision WormGear (42.5:1

motor-to-table ratiostandard)

Precision WormGear (58.5:1

motor-to-table ratiostandard)

Precision WormGear (63:1 motor-

to-table ratiostandard)

Bus Voltage Up to 80 VDC Up to 320 VDC

Motor Type BM22 BM22 BMS60 BMS60 BMS280

Continuous Current, StallA

pk4.9 4.9 2.3 2.3 3.8

Arms

3.5 3.5 1.6 1.6 2.7

Accuracy arc sec 120

Accuracy (With Encoder Option) arc sec 20

Repeatability (Unidirectional) arc sec 10

Repeatability

(Unidirectional; With Encoder Option)arc sec 5

Repeatability (Bidirectional) arc sec 30

Repeatability

(Bidirectional; With Encoder Option)arc sec 8

Axial Error Motion µm 5

Radial Error Motion µm 10

Tilt Error Motion arc sec 10

Height mm 50 mm 50 mm 65 mm 65 mm 90 mm

Aperture mm 50 mm 75 mm 100 mm 150 mm 200 mm

Resolution(1) arc sec 3.2 2.4 3.0 2.2 2.1

Resolution(1) (Direct Encoder Option) lines 15744 18000 23600 31488 40000

Moment Load Nm 80 200 410 720 1750

Axial Load kg 90 170 270 350 570

Rated Speed rpm 30

Rotor Shaft Inertia kg-m2 .00052 .0013 .0035 .011 .076

Mass(2) kg 1.8 2.2 5.1 6.6 21.4

Mass (With Encoder Option) kg 2.4 3.0 6.2 8.1 24.3

FinishTabletop Hardcoat

Stage Black Anodize

Note:1. Resolution assumes 2000 line rotary motor encoder for the AGR-50 and -75, and a 2500 line encoder for the AGR-100/-150/-200.2. Mass including motor.

AGR Series SPECIFICATIONSAGR Series SPECIFICATIONS

AGR-75 Table Torque vs Speed

0.0

5.0

10.0

15.0

20.0

25.0

30.0

35.0

0 5 10 15 20 25 30

Table Speed (rpm)

Tabl

e To

rque

0.0

50.0

100.0

150.0

200.0

250.0

300.0

Peak (BM22)Continuous (BM22)

lb-inN-m

AGR-75 table torque versus speed.

AGR-50 Table Torque vs Speed

0.0

5.0

10.0

15.0

20.0

25.0

30.0

0 5 10 15 20 25 30

Table Speed (rpm)

Tabl

e To

rque

0.0

50.0

100.0

150.0

200.0

250.0

Peak (BM22)Continuous (BM22)

lb-in N-m

AGR-50 table torque versus speed.

GMP
GMP

Rotary StagesAGR Series

404www.aerotech.comWORLD HEADQUARTERS: Aerotech, Inc., United States • Phone: +1-412-963-7470 • Email: [email protected]

Aerotech, Ltd., United Kingdom • Phone: +44-118-9409400 • Email: [email protected] GmbH, Germany • Phone: +49-911-9679370 • Email: [email protected]

Aerotech KK, Japan • Phone: +81-47-489-1741 • Email: [email protected] China • Phone: +852-3793-3488 • Email: [email protected]

AGR-100 Table Torque vs Speed

0.0

5.0

10.0

15.0

20.0

25.0

30.0

35.0

40.0

45.0

0 5 10 15 20 25 30

Table Speed (rpm)

Tabl

e To

rque

0.0

50.0

100.0

150.0

200.0

250.0

300.0

350.0

Peak (BMS60)Continuous (BMS60)

N-m lb-in

AGR-100 table torque versus speed.

AGR Series SPECIFICATIONSAGR Series SPECIFICATIONS

AGR-150 Table Torque vs Speed

0.0

10.0

20.0

30.0

40.0

50.0

60.0

0 5 10 15 20 25 30

Table Speed (rpm)

Tabl

e To

rque

0.0

100.0

200.0

300.0

400.0

500.0

Peak (BMS60)Continuous (BMS60)

N-m lb-in

AGR-150 table torque versus speed.

AGR-200 Table Torque vs Speed

0.0

50.0

100.0

150.0

200.0

250.0

300.0

0 5 10 15 20 25 30

Table Speed (rpm)

Tabl

e To

rque

0.0

500.0

1000.0

1500.0

2000.0

2500.0

Peak (BMS280)Continuous (BMS280)

lb-inN-m

AGR-200 table torque versus speed.

GMP
GMP
GMP
gmp

AGR

Serie

sRo

tary

Sta

ges

WORLD HEADQUARTERS: Aerotech, Inc., United States • Phone: +1-412-963-7470 • Email: [email protected], Ltd., United Kingdom • Phone: +44-118-9409400 • Email: [email protected] GmbH, Germany • Phone: +49-911-9679370 • Email: [email protected] KK, Japan • Phone: +81-47-489-1741 • Email: [email protected] China • Phone: +852-3793-3488 • Email: [email protected]

405 www.aerotech.comWORLD HEADQUARTERS: Aerotech, Inc., United States • Phone: +1-412-963-7470 • Email: [email protected], Ltd., United Kingdom • Phone: +44-118-9409400 • Email: [email protected] GmbH, Germany • Phone: +49-911-9679370 • Email: [email protected] KK, Japan • Phone: +81-47-489-1741 • Email: [email protected] China • Phone: +852-3793-3488 • Email: [email protected]

63 B.C.

121

100

8X M5X0.8 8

50

4X 10 26

6 THRU ALL

5031

105

209

37 BRAKE130

69

75

25

11

95

4X M5X0.8 8Coupling Access

Lubrication Access

PreloadAdjustment

4X M3X0.5 6

22

31 Sq.

6.35 .25COUPLING

50

Basic Model

66

Encoder Option

56

Seal Option

72

Encoderand

Seal Option

2

5

4

3

Motor Cabling Orientation

25.4 1.00 50.8 2.00

50

25

101.6 4.00

100

152.4 6.00 150

125

170

8X 10-32 UNF 10

8X M5X0.8 10

107

ACCESSORIES

100101.6 4.00

1012

24

DIMENSIONS: MILLIMETERS

AGR-50

AGR Series DIMENSIONS

GMP
GMP

Rotary StagesAGR Series

406www.aerotech.comWORLD HEADQUARTERS: Aerotech, Inc., United States • Phone: +1-412-963-7470 • Email: [email protected]

Aerotech, Ltd., United Kingdom • Phone: +44-118-9409400 • Email: [email protected] GmbH, Germany • Phone: +49-911-9679370 • Email: [email protected]

Aerotech KK, Japan • Phone: +81-47-489-1741 • Email: [email protected] China • Phone: +852-3793-3488 • Email: [email protected]

146

8X M5X0.8 8

75

4X 10 26

6 THRU ALL

5025

125

222

85 B.C.

37 BRAKE

155

82

95

25

11

95

4X M5X0.8 8

Coupling Access

Lubrication Access

PreloadAdjustment

4X M3X0.5 6

22

31 Sq.

6.35 .25COUPLING

50

Basic Model

66

Encoder Option

56

Seal Option

72

Encoderand

Seal Option

2

5

4

3

Motor Cabling Orientation

25.4 1.00 50.8 2.00

5025

127 5.00125

152.4 6.00 150

145

170

12X 10-32 UNF 10

12X M5X0.8 10

97

76.2 3.00

75

ACCESSORIES

125127 5.00

1012

24

DIMENSIONS: MILLIMETERS

AGR-75

AGR Series DIMENSIONS

GMP
GMP

AGR

Serie

sRo

tary

Sta

ges

WORLD HEADQUARTERS: Aerotech, Inc., United States • Phone: +1-412-963-7470 • Email: [email protected], Ltd., United Kingdom • Phone: +44-118-9409400 • Email: [email protected] GmbH, Germany • Phone: +49-911-9679370 • Email: [email protected] KK, Japan • Phone: +81-47-489-1741 • Email: [email protected] China • Phone: +852-3793-3488 • Email: [email protected]

407 www.aerotech.comWORLD HEADQUARTERS: Aerotech, Inc., United States • Phone: +1-412-963-7470 • Email: [email protected], Ltd., United Kingdom • Phone: +44-118-9409400 • Email: [email protected] GmbH, Germany • Phone: +49-911-9679370 • Email: [email protected] KK, Japan • Phone: +81-47-489-1741 • Email: [email protected] China • Phone: +852-3793-3488 • Email: [email protected]

172

100

4X 13 26

7 THRU ALL

80

150

301

8X M6X1.0 12

112.5 B.C.

40

77 BRAKE2

191

105

127

4X M6X1.0 9140

40

10

Coupling Access

Lubrication Access

PreloadAdjustment

33

6.35 .25COUPLING

47.14 Sq.4X M4X0.7 8

65

Basic Model

81

Encoder Option

71

Seal Option

87

Encoderand

Seal Option

2

5

Motor Cabling Orientation

3

4

152.4 6.00150

203.2 8.00 200

170

220

135

25.4 1.00 50.8 2.00 76.2 3.00

25

5075

12X 1/4-20 UNC 13

12X M6X1.0 12

ACCESSORIES

150152.4 6.00

10

15

24

DIMENSIONS: MILLIMETERS

AGR-100

AGR Series DIMENSIONS

GMP
GMP

Rotary StagesAGR Series

408www.aerotech.comWORLD HEADQUARTERS: Aerotech, Inc., United States • Phone: +1-412-963-7470 • Email: [email protected]

Aerotech, Ltd., United Kingdom • Phone: +44-118-9409400 • Email: [email protected] GmbH, Germany • Phone: +49-911-9679370 • Email: [email protected]

Aerotech KK, Japan • Phone: +81-47-489-1741 • Email: [email protected] China • Phone: +852-3793-3488 • Email: [email protected]

222

150

4X 13 26

7 THRU ALL

125

200

327

8X M6X1.0 12

164 B.C.

62.5

77 BRAKE2

241

130

177

4X M6X1.0 9140

40

10

Coupling Access

Lubrication Access

PreloadAdjustment

6.35 .25COUPLING

47.14 Sq.4X M4X0.7 8

3365

Basic Model

81

Encoder Option

73

Seal Option

89

Encoderand

Seal Option

2

5

Motor Cabling Orientation

3

4

203.2 8.00

200

254 10.00 250

220

272

158

50.8 2.00

76.2 3.00

101.6 4.00

5075

100

127 5.00

125

16X M6X1.0 12

16X 1/4-20 UNC 13

ACCESSORIES

200203.2 8.00

10

15

24

DIMENSIONS: MILLIMETERS

AGR-150

AGR Series DIMENSIONS

GMP
GMP

AGR

Serie

sRo

tary

Sta

ges

WORLD HEADQUARTERS: Aerotech, Inc., United States • Phone: +1-412-963-7470 • Email: [email protected], Ltd., United Kingdom • Phone: +44-118-9409400 • Email: [email protected] GmbH, Germany • Phone: +49-911-9679370 • Email: [email protected] KK, Japan • Phone: +81-47-489-1741 • Email: [email protected] China • Phone: +852-3793-3488 • Email: [email protected]

409 www.aerotech.comWORLD HEADQUARTERS: Aerotech, Inc., United States • Phone: +1-412-963-7470 • Email: [email protected], Ltd., United Kingdom • Phone: +44-118-9409400 • Email: [email protected] GmbH, Germany • Phone: +49-911-9679370 • Email: [email protected] KK, Japan • Phone: +81-47-489-1741 • Email: [email protected] China • Phone: +852-3793-3488 • Email: [email protected]

AGR Series DIMENSIONS

305

200

4X 15 26

9 THRU ALL

200

250

492

100

217 B.C.

8X M8X1.25 16

56 BRAKE

340

188

235

59

12.7

2504X M8X1.25 16

Coupling Access

Lubrication Access

PreloadAdjustment

12.70 .50COUPLING

73

70 Sq.

4X M5X0.8 10

90

Basic Model

109

Encoder Option

98

Seal Option

117

Encoderand

Seal Option

2

5

Motor Cabling Orientation

3

4

254 10.00

250

355.6 14.00350

300

375

215

50.8 2.00 76.2 3.00101.6 4.00

5075

100

127 5.00

12520X M6X1.0 12

20X 1/4-20 UNC 13

150

152.4 6.00

ACCESSORIES

275279.4 11.00

15

20

24

DIMENSIONS: MILLIMETERS

AGR-200

GMP
GMP

Rotary StagesAGR Series

410www.aerotech.comWORLD HEADQUARTERS: Aerotech, Inc., United States • Phone: +1-412-963-7470 • Email: [email protected]

Aerotech, Ltd., United Kingdom • Phone: +44-118-9409400 • Email: [email protected] GmbH, Germany • Phone: +49-911-9679370 • Email: [email protected]

Aerotech KK, Japan • Phone: +81-47-489-1741 • Email: [email protected] China • Phone: +852-3793-3488 • Email: [email protected]

Stage Aperture-50 50 mm (2 in) diameter clear aperture-75 75 mm (3 in) diameter clear aperture-100 100 mm (4 in) diameter clear aperture-150 150 mm (6 in) diameter clear aperture-200 200 mm (8 in) diameter clear aperture

AGR Rotary Stage Travel Options-UNLIMITED Unlimited travel-LI5 5° of travel-LI10 10° of travel-LI15 to -LI340 5° to 45° of travel in increments of 5°; 50° to 340° of travel in increments of 10°

LIMITS-NO Normally open switch-NC Normally closed switch-9DU 9-pin limit connector-FLY Flying leads for limits

Motor-BMS Brushless servomotor with connectors and encoder; requires motor-to-controller cable; AGR-100 and -150

(BMS60-A-D25-E2500H/); AGR-200 (BMS280-AH-MS-E2500H)-BMS-BK Brushless servomotor with brake and 2500 line encoder-BM Brushless servomotor with connectors and encoder; requires motor-to-controller cable; AGR-50 and -75 (BM22-

D25-E2000H); AGR-100 and -150 (BM75-D25-E2500H); AGR-200 (BM250-MS-E2500H)-BM-BRK Same brushless servomotor but with brake-SM Stepper motor option for AGR-100/-150/-200 only; AGR-100 and -150: 38 oz-in NEMA 23; AGR-200: 370 oz-in

NEMA 34-NM No motor or encoder

MOTOR LOCATION (Optional)-L Motor mounting on left side of stage (optional)Note: Motor mounting is right side of stage (standard). See CAD drawings.

MOTOR ORIENTATION-0 No motor-2 Bottom cable exit-3 Forward side cable exit (standard orientation)-4 Top cable exit-5 Back side cable exit

SEALS-NSL Standard top and bottom covers (no seals)-SL Labyrinth seal kit top and bottom

elpmaxEgniredrO

RGA 001- 5IL- ON- SMB- L- 3- LSN- SA- TT-

seireSegatS

erutrepAlevarT stimiL rotoM

rotoM*

noitacoL

rotoM

noitatneirOslaeS

redocnE

snoitpOseirosseccA

RGA

05-57-001-051-002-

DETIMILNU-5IL-01IL-xxIL-

ON-CN-UD9-YLF-

SMB-KB-SMB-

MB-KRB-MB-

MS-MN-

L-

0-2-3-4-5-

LSN-LS-

SA-05X-

TT-PA-

.sgniwardDACeeS.)dradnats(egatsfoedisthgirsignitnuomrotoM:ETON*

AGR Series ORDERING INFORMATIONAGR Series ORDERING INFORMATION

GMP
GMP

AGR

Serie

sRo

tary

Sta

ges

WORLD HEADQUARTERS: Aerotech, Inc., United States • Phone: +1-412-963-7470 • Email: [email protected], Ltd., United Kingdom • Phone: +44-118-9409400 • Email: [email protected] GmbH, Germany • Phone: +49-911-9679370 • Email: [email protected] KK, Japan • Phone: +81-47-489-1741 • Email: [email protected] China • Phone: +852-3793-3488 • Email: [email protected]

411 www.aerotech.comWORLD HEADQUARTERS: Aerotech, Inc., United States • Phone: +1-412-963-7470 • Email: [email protected], Ltd., United Kingdom • Phone: +44-118-9409400 • Email: [email protected] GmbH, Germany • Phone: +49-911-9679370 • Email: [email protected] KK, Japan • Phone: +81-47-489-1741 • Email: [email protected] China • Phone: +852-3793-3488 • Email: [email protected]

AGR Series ORDERING INFORMATIONAGR Series ORDERING INFORMATION

ENCODER OPTIONS-AS Amplified sine encoder-X50 50X multiplication

ACCESSORIES-TT Tabletop, round, universal English/metric accessory-AP Adapter plate, rectangular, universal English/metric accessory

GMP
GMP
GMP
gmp