anode layer ion beam sources

Ion beam sources

Anode layer type ion beam sources(inverted magnetron)

A wide range of applications:● sputtering of materials both dielectric and

conductive targets;● magnetron sputtering assistance;● ion cleaning, etching;● polishing;● plasma-enhanced chemical vapor

deposition (PECVD);● surface modification.

Scalable for different applications

Technical data

Parameter IBS-145 IBS-400 IBS-600 IBS-800

Supply voltage, kV 1.5..5

Mean ion energy Approx. of supply voltage½Maximum beam current, A* 0.3 1.0 1.5 2.0

Gas efficiency, mA/sccm* 10

Electrode lifetime (Ar at maximal current),

hours**200

Beam shape Hollow rectangular

Beam sized, WхT, mm 120х42 375х42 575х42 775x42

Beam divergence angle 2°

Maximum operating pressure, Pa 10

Work gas Ar, H2, He, Xe, O

2, N

2, Ne, C

xH

y, CO

2, C

xF

y

* Parameters measured in the following conditions: Argon, voltage 3 kV, chamber pressure 0.1 Pa** Electrodes are sputtered in inert gases except He only .

IBS-145

Current vs Voltage graph (IBS-145)

Gas – N2, flow rates are shown in the legend

500 1000 1500 2000 2500 3000 35000

50

100

150

200

250

300

350

400

450

0,67

0,64

0,58

0,53

0,47

0,42

0,36

0,31

Supply voltage, V

Be

am

cu

rre

nt,

mA

Current vs gas flow rate graph (IBS-145)

Supply voltage 3000 Volts

0,00 5,00 10,00 15,00 20,00 25,00 30,00 35,00 40,00 45,000

50

100

150

200

250

300

350

400

450

f(x) = 8,9x

f(x) = 10,0x

Gas flow, sccm

Be

am

cu

rre

nt,

mA

Ar

N2

IBS-600..800

Device A

IBS-400 396

IBS-600 596

IBS-800 796

Laboratory of Vacuum Technologies (© Beams&Plasmas) develops and produces vacuum equipment for coating deposition. State-of-the-art technical concepts, high reliability and capacity, as well as reasonable prices and compact sizes are distinguishing features of our machines.

● Vacuum systems process equipment (magnetrons, ion beam sources, plasma generators, vacuum system matching units, sensors and accessories)

● Engineering advice● Maintenance and repair of vacuum equipment● Modernization of the existing vacuum process equipment

Laboratory of Vacuum Technologies, LTDPhone. +7 (499) 346 2020E-mail: ebeam@e-beam.ruPostal address: 124460, Zelenograd, Moscow, c/o OOO LVT, suite #36 (for documents only).Legal address: 124536, Zelenograd, Moscow, 527-61.