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Installation and Operation ManualX-DPT-EtherCAT-SLA58xx-SLAMFxx-Series-RevB-MFC-engPart Number: 541B208AAGJune, 2016 Brooks® SLA58xx/SLAMfxx EtherCAT®
EtherCAT® Supplemental Manual for Brooks®
SLA58xx and SLAMf SeriesMass Flow Controllers and Meters
Brooks® SLA5851 Serieswith EtherCAT® Communications
Installation and Operation ManualX-DPT-EtherCAT-SLA58xx-SLAMFxx-Series-RevB-MFC-eng
Part Number: 541B208AAGJune, 2016Brooks® SLA58xx/SLAMfxx EtherCAT®
Installation and Operation ManualX-DPT-EtherCAT-SLA58xx-SLAMFxx-Series-RevB-MFC-engPart Number: 541B208AAGJune, 2016 Brooks® SLA58xx/SLAMfxx EtherCAT®
Dear Customer,
We recommend that you read this manual in its entirety as this will enable efficient and proper use of theEtherCAT® thermal mass flow controllers and meters. Should you require any additional information concerning theEtherCAT thermal mass flow controllers and meters, please feel free to contact your local Brooks Sales and ServiceOffice; see back cover for contact information, or visit us on the web at www.BrooksInstrument.com. We appreciatethis opportunity to service your fluid measurement and control requirements, and trust that we will be able to provideyou with further assistance in future.
Yours sincerely,
Brooks Instrument
Installation and Operation ManualX-DPT-EtherCAT-SLA58xx-SLAMFxx-Series-RevB-MFC-eng
Part Number: 541B208AAGJune, 2016Brooks® SLA58xx/SLAMfxx EtherCAT®
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ContentsInstallation and Operation ManualX-DPT-EtherCAT-SLA58xx-SLAMFxx-Series-RevB-MFC-engPart Number: 541B208AAG
June, 2016 Brooks® SLA58xx/SLAMfxx EtherCAT®
Paragraph PageNumber Number
Section 1 General Information1.1 Introduction ................................................................................................................................... 1-1
Section 2 Definition of Terms2.1 Definition of Terms ........................................................................................................................ 2-1
Section 3 Before Starting3 Before Starting ............................................................................................................................... 3-13.1 Background & Assumptions ........................................................................................................... 3-13.2 Numbers ........................................................................................................................................ 3-1
Section 4 Quick Start4 Quick Start .................................................................................................................................... 4-14.1 Master Hardware ............................................................................................................................ 4-14.2 Physical Interfaces ........................................................................................................................ 4-14.2.1 Power Supply and Analog I/O ........................................................................................................ 4-14.2.2 RUN and MOD LEDs ..................................................................................................................... 4-34.2.3 EtherCAT MFC Slave Hardware ..................................................................................................... 4-34.3 EtherCAT Theory ............................................................................................................................ 4-44.4 Frames (EtherCAT vs Ethernet) ..................................................................................................... 4-44.5 Speed ............................................................................................................................................ 4-44.6 EtherCAT Examples ...................................................................................................................... 4-54.7 EtherCAT Explained ....................................................................................................................... 4-7
Section 5 Slave Configuration5.1 Introduction .................................................................................................................................... 5-15.2 Outputs (Master Side) .................................................................................................................... 5-15.3 Inputs (Master Side) ...................................................................................................................... 5-25.4 COE Online Attributes.................................................................................................................... 5-35.4.1 Device Attributes ............................................................................................................................ 5-35.4.2 Flow Sensor ................................................................................................................................... 5-45.4.2.1 Flow Sensor Zero Adjust ................................................................................................................ 5-55.4.2.2 Flow Sensor Status ........................................................................................................................ 5-55.4.3 Temperature Sensor ....................................................................................................................... 5-65.4.3.1 Temperature Sensor Status ........................................................................................................... 5-75.4.4 Setpoint Controller ......................................................................................................................... 5-85.4.4.1 Setpoint Controller Status .............................................................................................................. 5-95.4.5 Valve Actuator Attributes ................................................................................................................ 5-95.4.6 Service Transfer Attributes ............................................................................................................ 5-105.4.7 Calibration Object Attributes ......................................................................................................... 5-105.4.8 Exceptions ................................................................................................................................... 5-115.4.8.1 Alarm- and Warning Details .......................................................................................................... 5-115.4.8.2 Exception Status .......................................................................................................................... 5-125.4.9 PDC (Product Description Code): I/O and Model Code ................................................................. 5-125.4.10 Tables ........................................................................................................................................... 5-13
Section 6 TwinCAT® Master6 Beckhoff Automation: TwinCAT® (A PC Master Option) .................................................................. 6-16.1 Establishing a PC Ethernet Master (TwinCAT) ............................................................................... 6-16.1.2 AUTO SETUP - PC Ethernet Master (TwinCAT) ............................................................................. 6-16.2 MANUAL SETUP - PC Ethernet Master (TwinCAT) ........................................................................ 6-36.3 COE Online Attributes - MAking Changes (Beckhoff Automation: TwinCAT) ................................... 6-4
Warranty, Local Sales/Service Contact Information ...................................................................... Back Cover
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Contents Installation and Operation ManualX-DPT-EtherCAT-SLA58xx-SLAMFxx-Series-RevB-MFC-eng
Part Number: 541B208AAG
June, 2016Brooks® SLA58xx/SLAMfxx EtherCAT®
Figure FigureNumber Number
4-1 EtherCAT Top Cover ....................................................................................................................... 4-14-2 M8 Male Device Connector Pin Layout, Pin Side View .................................................................. 4-24-3 M8 Female Mating Cable ............................................................................................................... 4-24-4 M8 Female Mating Cable Connector Pin Layout ............................................................................ 4-2
5-1 Output PDOs ................................................................................................................................. 5-15-2 Input PDOs .................................................................................................................................... 5-25-3 Device Attributes ............................................................................................................................ 5-35-4 Flow Sensor Attributes ................................................................................................................... 5-45-5 Flow Sensor Zero Adjust Attribute .................................................................................................. 5-55-6 Flow Sensor Status Attributes ....................................................................................................... 5-55-7 Temperature Sensor Attributes ....................................................................................................... 5-65-8 Temperature Sensor Status Attributes ............................................................................................ 5-75-9 Setpoint Controller Attributes ......................................................................................................... 5-85-10 Setpoint Controller Status Attribute ................................................................................................ 5-95-11 Valve Actuator Attributes ................................................................................................................ 5-95-12 Valve Actuator Status Attributes .................................................................................................... 5-105-13 Service Transfer Attributes ............................................................................................................ 5-105-14 Calibration Object Attributes ......................................................................................................... 5-10
6-1 AUTO SETUP - PC Ethernet Master, Scanning for Compatible Devices ........................................ 6-16-2 AUTO SETUP - PC Ethernet Master, I/O Devices Found ............................................................... 6-16-3 AUTO SETUP - Pop-Up Screens ................................................................................................... 6-26-4 AUTO SETUP - Proper Communications: Master and Slave (Beckhoff Automation: TwinCAT) ....... 6-26-5 MANUAL SETUP - PC Ethernet Master, Scanning for Compatible Devices ................................... 6-36-6 MANUAL SETUP - Pop-Up Screen ................................................................................................ 6-36-7 COE Online: Changing the Active Gas Page (and other devices) ................................................... 6-46-8 COE Attributes - Pop-Up Screen ................................................................................................... 6-4
Table TableNumber Number
4-1 Pin Labeling of M8 Male Device and Female Mating Cable Connector ........................................... 4-24-2 Wire Labeling of M8 Female Mating Cable Connector .................................................................... 4-34-3 M8 Female Mating Cable Part Numbers ........................................................................................ 4-34-4 MOD LED Specification ................................................................................................................. 4-3
5-1 Valve Override Values (vdOverride) ................................................................................................ 5-135-2 Flow Data Units (fmUnits) ............................................................................................................. 5-135-3 Temperature Data Units (tmUnits) ................................................................................................. 5-135-4 Setpoint Control Mode (fcControlMode)......................................................................................... 5-135-5 Valve Drive Data Units (vdUnits) .................................................................................................... 5-13
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Section 1 IntroductionInstallation and Operation ManualX-DPT-EtherCAT-SLA58xx-SLAMFxx-Series-RevB-MFC-engPart Number: 541B208AAG
June, 2016 Brooks® SLA58xx/SLAMfxx EtherCAT®
1.1 Introduction
Many applications of Flow Controllers/Meters are moving to increase theuse of automation. Automation comes in many forms: PLC’s (ProgrammableLogic Controllers, such as the Siemens S7 300/4000), DCS’s (DistributedControl Systems, such as Emerson’s Digital V), PC based solutions(National Instruments Labview TM), and Ethernet based field buses. Digitalcommunications from these varied systems and the devices they measureand control, are a very effective means of not only accomplishing moreeffective and rapid system integration, but also providing greatly improvedsystem diagnostics and maintainability. EtherCAT is an Ethernet basedcommunication system and is known for its high cycle time and costefficient cabling and master application solutions. Brooks Instrument nowintroduces the EtherCAT interface on its SLA Enhanced Series platform.
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Section 1 Introduction Installation and Operation ManualX-DPT-EtherCAT-SLA58xx-SLAMFxx-Series-RevB-MFC-eng
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Section 2 Definition of TermsInstallation and Operation ManualX-DPT-EtherCAT-SLA58xx-SLAMFxx-Series-RevB-MFC-engPart Number: 541B208AAG
June, 2016 Brooks® SLA58xx/SLAMfxx EtherCAT®
2.1 Definition of Terms
Abbreviation DescriptionByte A Byte refers to 8 consecutive bits.CoE CANOpen over EtherCATCRC Checksum
Cycle A cycle is defined as the process of sending a command, waiting for aresponse, and processing it in order to be ready to send a new command.
EEPROM Electrically Erasable Programmable Read Only Memory.ESC EtherCAT Slave ControllerESI EtherCAT Slave Information file. (Device description in XML format)EtherCAT Ethernet for Control and Automation Technology
Frame The transportation unit in a network, also known as a packet. (Contains aHeader followed by the data to be sent).
Header The Header is part of the Frame and contains all protocol definedconstructs for addressing, size, etc.
LSB Least Significant Bit
MAC Media Access Control is responsible for address checking and is most oftendone in the hardware of a NIC.
Master A Master is a unit which controls the Slaves, feeding them commands andreceiving status reports in exchange.
MFC/MFM Mass Flow Controller / Mass Flow MeterMSB Most Significant Bit
MTUMaximum Transmission Unit. The maximum payload that a standardEthernet Frame can hold. The MTU is set at 1500 bytes (Not consideringtheHeader and Checksum).
NIC Network Interface Controller. A hardware component that connects acomputer to a network.
OSI ModelA standardized representation for how a communication system can beorganized. (e.g., a protocol stack) The model is divided into layers, eachresponsible for a part of the communication.
PDO Process Data ObjectPDU Protocol Data Unit. A Slave commandRO Read OnlyRT Real time. A system that adheres to strict timing demands.RW Read / WriteSDO Service Data Object
SII Slave Information Interface. Data stored on an EEPROM in the Slave,containing information about it and its operation.
Slave A Slave is a unit (node) on the EtherCAT network (e.g., an MFC). The Slaveis connected to a Master.
Stack A synonym for the implementation of the layers of a protocol. (e.g., aMaster)
Topology The way a network (Master & Slaves) is connected. The overall layout.(e.g., Star, Tree, Line Topology)
WO Write Only
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Section 2 Definition of Terms Installation and Operation ManualX-DPT-EtherCAT-SLA58xx-SLAMFxx-Series-RevB-MFC-eng
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Section 3 Before StartingInstallation and Operation ManualX-DPT-EtherCAT-SLA58xx-SLAMFxx-Series-RevB-MFC-engPart Number: 541B208AAG
June, 2016 Brooks® SLA58xx/SLAMfxx EtherCAT®
3 Before Starting
3.1 Background & Assumptions
This manual is a supplement to the Brooks SLA Enhanced Seriesinstallation and operation manual. It is assumed that the owner of thisEtherCAT MFC/MFM is thoroughly familiar with the theory and operation ofthis device. If not, it is recommended that the owner read the installation andoperation manual first before continuing with this supplement.This manual assumes basic knowledge and understanding of EtherCAT (itstopology and its method of logically accessing the data or parameters withinthis device). This manual is not intended to be a replacement to theEtherCAT specifications. It is recommended but not required, for thepurposes of this manual, that the user obtains a copy of the EtherCATspecifications (www.ethercat.org).This manual does not make any assumptions about any particularmanufacturer of equipment or custom software used by the user tocommunicate with the Brooks device, but assumes that the user hasthorough understanding of such equipment and any configuration software.Application Notes and FAQ’s are available at the Brooks Instrument website (www.BrooksInstrument.com).
3.2 Numbers
Numeric values used throughout this manual will be clearly denoted as tothe base numeric system it represents. All hexadecimal numbers (base 16)will be prefixed with a 0x, like “0xA4”. All binary numbers (base 2) will besuffixed with a b, like “1001b”. All other numbers not annotated this way willbe assumed decimal (base 10).
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Section 3 Before Starting Installation and Operation ManualX-DPT-EtherCAT-SLA58xx-SLAMFxx-Series-RevB-MFC-eng
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Section 4 Quick StartInstallation and Operation ManualX-DPT-EtherCAT-SLA58xx-SLAMFxx-Series-RevB-MFC-engPart Number: 541B208AAG
June, 2016 Brooks® SLA58xx/SLAMfxx EtherCAT®
4 Quick Start
This section assumes that the owner of the Digital Series device has a fullyoperational and trouble-free communications network with appropriate powersupplies. This section also assumes that an EtherCAT master application isconnected to the network capable of PDO and mailbox data communication.Both types of data communication modes are supported by theBrooks SLA 5800 ‘E’ Series EtherCAT device
4.1 Master Hardware
Various companies provide EtherCAT master applications, e.g. TwinCATfrom Beckoff, or offer EtherCAT master stacks to develop a masterapplication, e.g. Acontis. A P.C. can be used to run most EtherCAT masterapplications but needs dedicated EtherCAT hardware to support the highcycle times and kernel mode operations of the master applications, seewww.beckoff.com. Screen dumps of master applications used in this manualare taken from the EtherCAT Configurator tool or TwinCAT 3® applicationsfrom Beckoff Inc.
4.2 Physical Interfaces
The available physical interfaces on the EtherCAT device are listed below:• 5 pin M8 threaded male connector for power and Analog I/O, indicated by pwr.• In and Out ports with RJ-45 connectors.• 2.5mm female jack for RS485 diagnostic port indicated by ‘DIAG’, refer to
the SLA 5800 Series installation and operation manual for more details.
4.2.1 Power Supply and Analog I/O
Power needs to be supplied via the M8 connector. This connector alsoprovides access to analog I/O signals, see Table 4-1.
Figure 4-1 EtherCAT Top Cover
SLA58xx Top Cover SLAMfxx Top Cover
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Figure 4-3 M8 Female Mating Cable
Pin Label Function at Remote Connector
P_COM Power Supply Common
+VPWR Positive Power Supply Voltage
V_AUX_OUT Flow Output 0-5VAGND Analog I/O CommonV_AUX_IN Auxiliary Input 0-5/10V for Future Use
Table 4-1 Pin Labeling of M8 Male Device and Female Mating Cable Connector
Figure 4-2 M8 Male Device Connector Pin Layout, Pin Side View
Figure 4-4 Female Mating Cable Connector Pin Layout
Mating Side Female Cable Connector
M8 mating cables can be purchased as a second line item, details given below.
SLA58xx
SLAMfxxSLA58xx
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Wire Color Wire Label Function at Remote Connector
Blue P_COM Power Supply CommonBrown +VPWR Positive Power Supply VoltageBlack V_AUX_OUT Flow Output 0-5VWhite AGND Analog I/O CommonGrey V_AUX_IN Auxiliary Input 0-5/10V for Future Use
Table 4-2 Wire Labeling of M8 Female Mating Cable Connector
Supplier Part Number Description
Brooks 124X049AAA M8 Mating Cable 2mInstrument 124X050AAA M8 Mating Cable 5m
124Z170AAA ECAT to DB15 Male
Table 4-3 M8 Female Mating Cable Part Numbers
Flash Code Description
Flashing The device is in the Self-Test mode.Red/GreenSolid Green All Self-Tests have passed. No faults have been detected.
Flashing Red A recovering alarm has been detected.
Flashing Green A recovering warning has been detected.Solid Red An unrecoverable fault has occured.
Table 4-4 MOD LED Specification
4.2.2 RUN and MOD LED's
The MOD LED indicates that the device is supplied sufficiently with power.The MOD LED will indicate the following:
4.2.3 EtherCAT MFC Slave Hardware
The main parts of the EtherCAT MFC are:• Standard Ethernet Physical Layer Components• EtherCAT Slave Controller (ESC) and EEPROM (ESC configuration dataand application specific data)• For intelligent slaves with an application controller: Host controller
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4.3 EtherCAT Theory
Ethernet for Control and Automation Technology
• Uses standard Ethernet hardware, Cat 5 cabling, and Network InterfaceCards (NIC).
• Streamlines Ethernet communication at the hardware level.• Data processing on Slave devices is handled “on-the-fly” via FPGA or
ASIC, minimizing latency.• Initial setup and configuration is required.
4.4 Frames (EtherCAT vs Ethernet)
Ethernet Header:• Ether type 0x08A4 specifies EtherCAT
EtherCAT Header:• Data Length: 11bits• Reserved: 1bit• Protocol type: 4bits (0x01 indicates CoE/Can over EtherCAT)
EtherCAT Data:• 46 – 1496 bytes
Working Counter:• 2 Bytes
CRC (Checksum):• 4 Bytes
Ethernet Frame
14 bytes 46 1500 bytes 4 bytes
EtherCAT Frame
14 bytes 2 bytes 46 1496 bytes 2 bytes 4 bytes
4.5 Speed
• The EtherCAT protocol reduces the addressing overhead by letting aMaster communicate with all Slaves using a single frame, instead of oneframe per device.
• This One Frame holds messages to any or all slaves on the network.
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4.6 EtherCAT Examples
Header
Analogy: Fast Train.
• “Train” (EtherCAT Frame) does not stop.
• Even when watching “Train” through narrow window one sees the entire “Train”
• “Car 27” (Sub-Telegram) has variable length. (46-1496 bytes)
• One can “extract” or “insert” single “persons” (Bits) or entire “groups”(Bytes) – even multiple groups per train… This is done without the trainever having to stop!
• An EtherCAT Master initially maps out the location and addresses of all ofthe slaves.
• The single EtherCAT Frame (the train) has instructions loaded on-board forsome or all of the slaves.
• Only the instructions that are specifically addressed to a specific slave aredelivered to that slave.
• So, for example, if there is a specific instruction on-board the EtherCATFrame for a slave (node) with the Station ID, then only that slave with thataddress, will receive that specific instruction. The slave (node) will ignore allinstructions on the EtherCAT frame Except for those instructions that arespecifically addressed to it.
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Another Example of the EtherCAT process...
• Each cubicle is an EtherCAT slave containing an engineer (a SLA58xx).
• Each engineer is told where to sit by its hardware address (Station ID).
• The Engineer is assigned specific tasks (by SDO’s).
• The Boss (Master) identifies each engineer by first and last name, whatthey look like, and where exactly they are sitting.
• The Boss is the EtherCAT Master, sending instructions (PDO’s) out to theengineers each morning and picking up their work at the end of the day.
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4.7 EtherCAT Explained
1. EtherCAT Communication• Each slave on the network has a unique address, set by hardware.• Master/Slave configuration with the EtherCAT Master sending and
requesting data from the Slave.• Data not addressed to a particular slave are forwarded along to the
network.• Minimal processing time can provide cycle update rates of up to 32kHz.• Network physical layout is limited only by the allowable lengths of CAT5
Ethernet cable, up to 100m.• Increased noise immunity due to reliance on Ethernet physicalcomponents.
2. SDO’s and PDO’sData is moved along an EtherCAT network using two protocols: SDO’s and PDO’s
SDO: Service Data Object• SDO’s can be sent at any time… before, after or during real time operation
of the network but require additional communication overhead.• As a result, SDO usage is typically only used for Network SetupCommands.
PDO: Process Data Object• PDO’s contain the raw operational data with minimal overhead and thus
are used for real time processes, like motion and I/O control.• PDO’s can only be used once they have been mapped using SDO’s.• Mapping sets up which byte in each PDO goes to which memory address
on the slave.
3. EtherCAT Master• Can be software and or hardware configured to assemble, send and
receive EtherCAT datagrams.• Requires only standard Ethernet physical layer components for
communication.• Facilitates coordination between EtherCAT slaves, writing and receiving
data from each slave in an EtherCAT frame.• In motion control applications, the relevant data sent to the drives are
profiling data.• The data requested are position and input status.
4. EtherCAT Slave• Reads and processes profiling data.• Can be configured for multiple modes of operation.• All slaves contain specific spaces in memory where data can be written• These spaces are called Objects… The entire memory space is called the
Object Dictionary.• Each Object has its own address, specified as an index/sub index.
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5. SDO vs PDD Summary
SDO PDO
Transfer Confirmation No Transfer Confirmation
Client/Server Model Peer to peer Model
Device Configuration, PDO Mapping High priority transfer of small amounts of Data.
Can be sent at any time Can only be used after configuration using SDO’s
Significant communication overhead No additional protocol overhead.
6. The EtherCAT Slave State Machine
STATE Allowed Communication
INIT No User Communication
Pre OP SDO Communication Only
Safe OP SDO, PDO Communication AllowedOutput PDO Info ignored
OP SDO & PDO Communication Allowed
X607A X6060 X6040
MASTER (PC) PDO EXCHANGE EXAMPLE SLAVE (MFC)
X6041 X6062 X6061 X60FD
Incoming PDOLocation Function
X607A Target Setpoint
X6060 Mode of Operation
X6040 Control Word
Outgoing PDOLocation Function
X6041 Status word
X6062 Setpoint Demand Value
X6061 Mode of Operation
X6064 Setpoint Actual Value
X60FD Digital Input Status
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Section 5 Slave ConfigurationInstallation and Operation ManualX-DPT-EtherCAT-SLA58xx-SLAMFxx-Series-RevB-MFC-engPart Number: 541B208AAG
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Figure 5-1 Output PDOs
5.2 Outputs (Master Side)
The request message, sent from master to slave, consists of the fieldsindicated in Figure 5-1, these fields will be described in the sections below.
5.1 Introduction
Based on the information provided by the EtherCAT Slave Information File(ESI, device description in XML format) and/or the EEPROM, masterapplications are able to configure the EtherCAT networkFor the EtherCAT network configuration of the SLA 5800 Series devices, thefollowing ESI file is provided on the Brooks Instrument website.(www.BrooksInstrument.com):• ‘Brooks SLA Enh.xml’ – SLA5800 Series Mass Flow Controller/Meter
Output PDO Data Units DescriptionFlow Controller Setpoint(Real) Specified by Setpoint Controller
Data UnitsSetpoint specified in theselected Data Units
Actuator Override vdOverrideTable 5 1 Valve Override Values(vdOverride)
Valve Override
Pressure ControllerSetpoint(Real)
Specified by Setpoint ControllerData Units
Setpoint specified in theselected Data Units
Act Inst ControllerSetpoint(Real)
TBD TBD
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Figure 5-2 Input PDOs
5.3 Inputs (Master Side)
Input PDO Data Units DescriptionSensor AI MF (Flow, Real) Specified by Flow Sensor Data
UnitsFlow specified in Flow SensorData Units
Temperature (Real) Specified by TemperatureSensor Data Units
Temperature specified inTemperature Sensor Data Units
Actuator Drive Value (Real) % Valve drive valueFlow Controller Setpoint (Real) Specified by Setpoint Controller
Data UnitsSetpoint specified in SetpointController Data Units
Sensor AI MF Flow Totalizer cm Flow totalizer valueActuator Override vdOverride
Table 5 1 Valve Override Values(vdOverride)
Valve Override
Pressure (Real) Specified by Pressure SensorData Units
Pressure specified in PressureSensor Data Units
Pres Controller Setpoint (Real) Specified by Pressure ControllerData Units
Pressure specified in PressureController Data Units
Input PDO Data Units DescriptionActive Instance Setpoint (Real) TBD TBDException Status Bit Mask Summary of Alarm and Warning
detailAlarm Detail Bit Mask AlarmsWarning Detail Bit Mask Warnings
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Figure 5-3 Device Attributes
5.4 COE Online Attributes
5.4.1 Device Attributes
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5.4.2 Flow Sensor
Figure 5-4 Flow Sensor Attributes
Flow sensor attributes Data Units DescriptionAlarmEnable Enable (1)
Disable (0)Enable/Disable the high and lowflow Alarm
WarningEnable Enable (1)Disable (0)
Enable/Disable the high and lowflow Warning
Alarm Trip Point High To be specified in selected flowdata units
Flow alarm high limit
Alarm Trip Point Low To be specified in selected flowdata units
Flow alarm low limit
Warning Trip Point High To be specified in selected flowdata units
Flow warning high limit
Warning Trip Point Low To be specified in selected flowdata units
Flow warning low limit
Data Type Real (202) Data type is fixed to RealData Units fmUnits
Table 5 2 Flow Data Units(fmUnits)
Flow Data Units
Alarm Settling Time Time:ms Time in milliseconds that thealarm condition needs to bepresent before an alarm israised
Warning Settling Time Time:ms Time in milliseconds that thewarning condition needs to bepresent before an warning israised
Reset Flow Totalizer 0 Writing the value 0 to thisattribute will reset the flowtotalizer
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Figure 5-5 Flow Sensor Zero Adjust Attribute
Figure 5-6 Flow Sensor Status Attributes
5.4.2.1 Flow Sensor Zero Adjust
5.4.2.2 Flow Sensor Status
Service Transfer Attribute Data Units DescriptionPerform Zero 1 The Flow Sensor can be zero
adjusted by writing a 1 to thisattribute. Refer to theinstruction manual for properinstructions
Flow sensor status attributes Data Units DescriptionStatus
B00000001 (0x01)B00000010 (0x02)B00000100 (0x04)B00001000 (0x08)
Flow sensor status bit maskindicating high or low flowalarms and warningsHigh Flow AlarmLow Flow AlarmHigh Flow WarningLow Flow Warning
Zeroing Status 01
0 = Idle1 = Zero Adjust in Process
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Figure 5-7 Temperature Sensor Attributes
5.4.3 Temperature Sensor
Temperature sensor attributes Data Units DescriptionTemperature AlarmEnable Enable (1)
Disable (0)Enable/Disable the high and lowtemperature Alarm
Temperature WarningEnable Enable (1)Disable (0)
Enable/Disable the high and lowtemperature Warning
Alarm Trip Point High To be specified in selectedTemperature data units
Temperature alarm high limit
Alarm Trip Point Low To be specified in selectedTemperature data units
Temperature alarm low limit
Warning Trip Point High To be specified in selectedTemperature data units
Temperature warning high limit
Warning Trip Point Low To be specified in selectedTemperature data units
Temperature warning low limit
Data Type Real (202) Data type is fixed to RealData Units Table 5 3 Temperature Data
Units(tmUnits)
Temperature Data Units
Alarm Settling Time Time:ms Time in milliseconds that thealarm condition needs to bepresent before an alarm israised
Warning Settling Time Time:ms Time in milliseconds that thewarning condition needs to bepresent before an warning israised
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Section 5 Slave ConfigurationInstallation and Operation ManualX-DPT-EtherCAT-SLA58xx-SLAMFxx-Series-RevB-MFC-engPart Number: 541B208AAG
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Figure 5-8 Temperature Sensor Status Attribute
5.4.3.1 Temperature Sensor Status
Temperature sensor statusattributes
Data Units Description
Status
b00000001 (0x01)b00000010 (0x02)b00000100 (0x04)b00001000 (0x08)
Temperature sensor status bitmask indicating high or low flowalarms and warningsHigh Temperature AlarmLow Temperature AlarmHigh Temperature WarningLow Temperature Warning
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Section 5 Slave Configuration Installation and Operation ManualX-DPT-EtherCAT-SLA58xx-SLAMFxx-Series-RevB-MFC-eng
Part Number: 541B208AAG
June, 2016Brooks® SLA58xx/SLAMfxx EtherCAT®
5.4.4 Setpoint Controller
Figure 5-9 Setpoint Controller Attributes
Setpoint Controller attributes Data Units DescriptionAlarm Enable Enable (1)
Disable (0)Enable/Disable the Setpointerror band Alarm
Warning Enable Enable (1)Disable (0)
Enable/Disable the Setpointerror band Warning
Alarm Settling Time Time:ms Time in milliseconds that thealarm condition needs to bepresent before the warning israised
Alarm Error Band To be specified in the selectedflow data units
Error band in fmUnits where analarm will occur when the pv(output) is outside of this band
Warning Settling Time Time:ms Time in milliseconds that thewarning condition needs to bepresent before the warning israised
Warning Error Band To be specified in the selectedflow data units
Error band in fmUnits where awarning will occur when the pv(output) is outside of this band
Data Type Real (202) Data type is fixed to RealData Units fmUnits
Table 5 2 Flow Data Units(fmUnits)
Setpoint controller data units
Control Mode fcControlModeTable 5 4 Setpoint ControlMode(fcControlMode)
The setpoint control is fixed tothe digital EtherCAT interface(future enhancement: analogsetpoint source)
Ramp Time Time:ms Time in milliseconds to reach anewly configured setpoint
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Section 5 Slave ConfigurationInstallation and Operation ManualX-DPT-EtherCAT-SLA58xx-SLAMFxx-Series-RevB-MFC-engPart Number: 541B208AAG
June, 2016 Brooks® SLA58xx/SLAMfxx EtherCAT®
5.4.4.1 Setpoint Controller Status
Figure 5-10 Setpoint Controller Status Attribute
5.4.5 Valve Actuator Attributes
Figure 5-11 Valve Actuator Attributes
Setpoint Controller statusattributes
Data Units Description
Status
b00000001 (0x01)b00000010 (0x02)
Setpoint Controller status bitmask
Setpoint Error Band AlarmSetpoint Error Band Warning
Valve Actuator attributes Data Units DescriptionAlarm Enable Enable (1)
Disable (0)Enable/Disable the high and lowValve Drive Alarm
Warning Enable Enable (1)Disable (0)
Enable/Disable the high and lowValve Drive Warning
Data Type Real (202) Data type is fixed to RealData Units vdUnits
Table 5 5 Valve Drive Data Units(vdUnits)
Valve Drive Data Units, fixed topercent.
Alarm Trip Point High To be specified in selected valvedrive data units (percent)
Valve Drive alarm high limit
Alarm Trip Point Low To be specified in selected valvedrive data units (percent)
Valve Drive alarm low limit
Warning Trip Point High To be specified in selected valvedrive data units (percent)
Valve Drive warning high limit
Warning Trip Point Low To be specified in selected valvedrive data units (percent)
Valve Drive warning low limit
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Section 5 Slave Configuration Installation and Operation ManualX-DPT-EtherCAT-SLA58xx-SLAMFxx-Series-RevB-MFC-eng
Part Number: 541B208AAG
June, 2016Brooks® SLA58xx/SLAMfxx EtherCAT®
Figure 5-12 Valve Actuator Status Attributes
5.4.6 Service Transfer Attributes
Figure 5-13 Service Transfer Attributes
5.4.7 Calibration Object Attributes
Figure 5-14 Calibration Object Attributes
Setpoint Controller statusattributes
Data Units Description
Status
b00000001 (0x01)b00000010 (0x02)b00000100 (0x04)b00001000 (0x08)
Valve Actuator status bit maskindicating high and low valve drivealarms and warnings.High Valve Drive AlarmLow Valve Drive AlarmHigh Valve Drive WarningLow Valve Drive Warning
Service Transfer attributes Data Units DescriptionPerform Zero 1 Refer to section 5.3.2.1
Flow Sensor Zero AdjustSelect Flow Gas Table 1…6 Selected process Gas PageFlow Full Scale Range Real Full scale range being the flow at
100%Flow Full Scale Range Units Table 5 2 Flow Data Units
(fmUnits)Data unit of the full scale range
Calibration Object attributes Data Units DescriptionLast Calibration Date Date Date at which the device was
calibrated
Next Calibration Due Date Date Date at which the device needed tobe calibrated
Run Hours Time:Hours Time that the device has observedflow in the range of 0 100%
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Section 5 Slave ConfigurationInstallation and Operation ManualX-DPT-EtherCAT-SLA58xx-SLAMFxx-Series-RevB-MFC-engPart Number: 541B208AAG
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5.4.8 Exceptions
5.4.8.1 Alarm- and Warning Details
The device, flow, temperature, setpoint controller and valve actuator relatedexceptions are collected in the alarm and warning detail byte sequences.
Access to the Bit-Map data requires Terminal Access through ‘cal204’or ‘checkMFC’ applications via the AWE Engine.
The Bitmasks are shown below:
Byte NR Bit 7 Bit 6 Bit 5 Bit 4 Bit 3 Bit 2 Bit 1 Bit 0
CommonExceptionDetailSize
0 0 0 0 0 0 0 1 0
CommonExceptionDetail 1stbyte
1 0 0 0 0 0 0 0 0
CommonExceptionDetail 2ndbyte
2 0 0 0 0 0 0 0 0
DeviceExceptionDetailsize
3 0 0 0 0 0 0 1 0
DeviceExceptionDetailsize
4 0 0
ValveAlarm/WarningHigh
ValveAlarm/WarningLow
FlowControlAlarm/Warning
FlowAlarm/WarningHigh
FlowAlarm/WarningLow
FlowSensorReadingnot valid
Manuf.ExceptionDetailSize
5 0 0 0 0
PressureControlAlarm/Warning
PressureAlarm/WarningHigh
PressureAlarm/WarningLow
PressureSensorReadingnot valid
Manuf.ExceptionDetail 1stbyte
6 0 0 0 0 0 0 0 1
Manuf.ExceptionDetail 2ndbyte
7 0 0 0 0
TempAlarm/WarningHigh
TempAlarm/WarningLow
0 0
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Section 5 Slave Configuration Installation and Operation ManualX-DPT-EtherCAT-SLA58xx-SLAMFxx-Series-RevB-MFC-eng
Part Number: 541B208AAG
June, 2016Brooks® SLA58xx/SLAMfxx EtherCAT®
5.4.8.2 Exception Status
The device, flow, temperature, setpoint controller, and valve actuator relatedexceptions are collected in the alarm and warning detail byte sequences.
The Bitmasks are shown below:
5.4.9 PDC (Product Description Code): I/O and Model Code
Please see the SLA 5800 Series Instruction/Operators manual for a complete andcomprehensive breakdown of the Product Description Code.
Bit 7 Bit 6 Bit 5 Bit 4 Bit 3 Bit 2 Bit 1 Bit 0
ExceptionStatus 0
Manufspecificwarning
Devicespecificwarning
Commonexceptionwarning
0Manufspecificalarm
Devicespecificalarm
Commonexceptionalarm
Communications I/O:
EtherCAT DeviceNET* RS 485 Profibus* FoundationFieldbus* None
E D, J, K, L, V S P,R,T F, M, N, Q A*I/O letter designation is dependent on the type of connector
Example Model Code(PDC):
SLA5850E1BAB1A2A1
•Base Model Number (Delta class) • • Certification
•Model Revision Level • • Output Enhancements
•Package/Finish specs. • • Power Supply Inputs
•Function (MFC, MFM, PC, etc.) • • Analog I/O Communications
•Body Size • • Valve Type
•Digital I/O Communications • • Valve Seat Material
• Mechanical Connections • • O Ring Material
V V V•••
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Section 5 Slave ConfigurationInstallation and Operation ManualX-DPT-EtherCAT-SLA58xx-SLAMFxx-Series-RevB-MFC-engPart Number: 541B208AAG
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5.4.10 Tables
Table 5-1 Valve Override Values (vdOverride)
Table 5-2 Flow Data Units (fmUnits)
Table 5-3 Temperature Data Units (tmUnits)
Table 5-4 Setpoint Control Mode (fcControlMode)
Table 5-5 Valve Drive Data Units (vdUnits)
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Section 5 Slave Configuration Installation and Operation ManualX-DPT-EtherCAT-SLA58xx-SLAMFxx-Series-RevB-MFC-eng
Part Number: 541B208AAG
June, 2016Brooks® SLA58xx/SLAMfxx EtherCAT®
THIS PAGE WASINTENTIONALLY
LEFT BLANK
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Section 6 TwinCAT® MasterInstallation and Operation ManualX-DPT-EtherCAT-SLA58xx-SLAMFxx-Series-RevB-MFC-engPart Number: 541B208AAG
June, 2016 Brooks® SLA58xx/SLAMfxx EtherCAT®
Figure 6-1 AUTO SETUP - PC Ethernet Master, Scanning for Compatible Devices
6 Beckhoff Automation: TwinCAT® (A PC Master Option)
6.1 Establishing a PC Ethernet Master (TwinCAT)
6.1.2 AUTO SETUP - PC Ethernet Master (TwinCAT)
In the Solution Explorer, Right click on“Devices”, under the I/O Icon.
From the drop down menu select”Scan” to automatically scan your PCfor EtherCAT compatible EthernetAdapters.
A pop up box appears reminding theuser that “Not all devices can befound automatically”. Select “OK”.
Figure 6-2 AUTO SETUP - PC Ethernet Master, I/O Devices Found
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Section 6 TwinCAT® Master Installation and Operation ManualX-DPT-EtherCAT-SLA58xx-SLAMFxx-Series-RevB-MFC-eng
Part Number: 541B208AAG
June, 2016Brooks® SLA58xx/SLAMfxx EtherCAT®
Figure 6-3 AUTO SETUP - Pop-Up Screens
Figure 6-4 AUTO SETUP - Proper Communications: Master and Slave (Beckhoff Automation: TwinCAT)
In the TwinCAT Solution Explorer display to the right, “Device 2”represents the EtherCAT Master.
“Box 1 (GF04x SPI Slave)” represents the Slave device. (In thisexample the slave is a single GF 40 device) .
Inputs: Attribute(s) reported from the Slave device to theMaster. (e.g. “Sensor Flow AI MF”)
Outputs: An explicit attribute change sent from the Masterto the Slave device. (e.g. “Controller Setpoint”)
Add to Watch: Puts the data stream into a separate windowwhich provides the user with real time monitoringcapability.
Master
Slave
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Section 6 TwinCAT® MasterInstallation and Operation ManualX-DPT-EtherCAT-SLA58xx-SLAMFxx-Series-RevB-MFC-engPart Number: 541B208AAG
June, 2016 Brooks® SLA58xx/SLAMfxx EtherCAT®
6.2 MANUAL SETUP - PC Ethernet Master (TwinCAT)
Figure 6-5 MANUAL SETUP - PC Ethernet Master, Scanning for Compatible Devices
Sometimes when you Right click on“Devices” and select “Scan”, youmay receive a response of: “No NewI/O Devices Found”.
If you receive this reply fromTwinCAT, you must set up theEthernet connectionmanually byinstalling it.
From the ‘TwinCAT’ drop down tablocated in the main toolbar, select“Show Realtime EthernetCompatible Devices”.
Figure 6-6 MANUAL SETUP - Pop-Up Screen
A pop out screen appears (similar tothis one) that displays all of theEthernet Adapters that were found byTwinCAT on your PC.
Some of the adapters are listed under“Compatible” and others may belisted under “Incompatible. Thedifference is the current status of theEthernet Device Driver.
Click on the Ethernet Adapter thatrepresents a LAN connection for yourPC. Then click on the “Install” buttonand follow on screen instructions.
Note: EtherCAT operates on anavailable LAN connection and is notcurrently suitable for wireless internetoperation. Selecting the WirelessEthernet Adapter would not work inthis case.
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Section 6 TwinCAT® Master Installation and Operation ManualX-DPT-EtherCAT-SLA58xx-SLAMFxx-Series-RevB-MFC-eng
Part Number: 541B208AAG
June, 2016Brooks® SLA58xx/SLAMfxx EtherCAT®
6.3 CoE Online Attributes - Making Changes (Beckhoff Automation: TwinCAT)
Figure 6-7 CoE Online: Changing the Active Gas Page (and other device attributes)
Figure 6-8 CoE Attributes - Pop-Up Screen
Assuming that you are alreadyconnected to the device using eitherTwinCAT or EtherCAT configurator,click once on the gf 40 box so thatthere is a display screen on the rightwith menu tabs (General, EtherCAT,Process Data, Startup, CoE Online,Online).
The tab we are interested in is “CoEOnline”…. Please click on that tab.
You are presented with a table thatlists all of the device attributes with atitle header of: “Index”, “Name”,“Flags”, and “Value”.
You will notice that under the “Flags”title: RW is Read/Write. RO is ReadOnly. Only those attributes with anRW flag can be changed.
You change the attribute ‘Value’ bydouble clicking on the attribute. Youwill get a pop up window to enter thenew information. After you click ‘OK’,verify that the attribute did indeedchange.
The attribute for gas page is Index:B000:03 “Select Gas Table”(withBechhoff “EtherCAT Configurator”)
Just enter in the new gas pagenumber here and click ‘OK’.
Installation and Operation ManualX-DPT-EtherCAT-SLA58xx-SLAMFxx-Series-RevB-MFC-engPart Number: 541B208AAGJune, 2016 Brooks® SLA58xx/SLAMfxx EtherCAT®
Installation and Operation ManualX-DPT-EtherCAT-SLA58xx-SLAMFxx-Series-RevB-MFC-eng
Part Number: 541B208AAGJune, 2016Brooks® SLA58xx/SLAMfxx EtherCAT®
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Visit www.BrooksInstrument.com for the terms and conditions of our limited warranty.
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