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© 2012
MEMS Everywhere: Making the world more sensitive!
Semicon Taiwan 2012 – baron@yole.fr
© 2012 • 2
MEMS Sensor & Actuator Applications
• The application scope for MEMS sensors and actuators is broad
but highly fragmented!
• Gyroscopes
• Accelerometers
• Magnetometers
• Fusion sensor
combos & IMUs
• Pressure
-sensors
• TPMS
modules
• Oscillators /
Resonators
• RF-MEMS
switches
• FBAR / BAW
filters
• SAW filters
• Micro-
mirrors
• Micro-
bolometers
• Ink-jet MEMS
modules
• Microfluidic &
Bio-chips
• µ-Displays,
MEMS
• Auto-focus
actuators
• Humidity
sensors
• Silicon
microphones
Voice /
Sound
Pressure
monitoring Motion /
position
Projecting /
receiving Light
RF related
functions Managing
fluids
Emerging
MEMS…
Sensing applications
© 2012 • 3
Inkjet printheads
An Expanding Array of Products maturity of selected MEMS devices
with expected CAGR to 2015
Microdisplay / 110%
Auto Focus / 348%
Silicon oscillators Energy harvesting
Development Decline
MEMS Speakers
Microphones / 11%
BAW duplexers
Emerging Mature
Accel/Gyro combos for mobile / 80%
9/10DOF inertial combos / 105%
Optical MEMS for projection / 6%
MEMS mirrors picoprojectors
Optical MEMS switch / 19%
RF-MEMS for radio front end module / 171%
Microbolometers / 12%
Automotive TPMS
Accel / Gyro combos (ESC…) / 49%
© 2012 • 4
$0M
$5 000M
$10 000M
$15 000M
$20 000M
$25 000M
2010 2011 2012 2013 2014 2015 2016 2017
MEMS Market forecast 2009-2017 value (in M$)
Oscillators
RF MEMS
Microdispensers (microfluidics)
Microfluidics for IVD
Microfluidics for Research
Other optical MEMS
Projection systems
Micro displays
PIR & Thermopiles
Microbolometers
Inertial combos
Digital Compass
Gyroscopes
Accelerometers
Microphones
Pressure Sensors
InkJet Heads
Other
Continued Strong Growth 2011-2017 Forecast (in US$M)
Yole Developpement © March 2012
© 2012 • 5
• Mobile applications are driving >50% of the volume with a CAGR ~ 13%
– Telecom and medical will grow ~20% in the next 5 years
– Industrial also significant with growth of ~13% expected
$0M
$5 000M
$10 000M
$15 000M
$20 000M
$25 000M
2009 2010 2011 2012 2013 2014 2015 2016 2017
Re
ven
ues
(in
M$
)
MEMS Market Value Evolution (in $M)
Telecom
Medical
Industrial
Aeronautics
Defense
Consumer
Automotive
Yole Developpement © March 2012
Consumer Market Builds Dominance
© 2012 • 6
TOP 30 MEMS Players Global ranking
91
3
90
7
76
2
73
8
36
2
33
6
28
4
27
9
26
1
25
5
25
1
25
0
23
7
17
4
15
3
15
0
14
4
14
4
13
6
12
1
11
0
10
2
90
77
76
75
62
56
55
51
$0
$200
$400
$600
$800
$1 000
$1 200
US$
M
2011 TOP 30 MEMS Players Yole Développement March 2012 Yole Developpement © April 2012
© 2012 • 7
2011 MEMS Ranking – 2011/2010 CAGR TOP 30 Ranking
-40%
-20%
0%
20%
40%
60%
80%
100%
2011/2010 CAGR Ranking TOP 30 MEMS Players
Yole Developpement © April 2012
© 2012 • 8
TOP 30 MEMS Foundries Global ranking
24
5
49
47
37
26
24
23
20
17
16
15
15
12
12
9
9
8
7
7
6
4
4
4
3
2
2
$0
$50
$100
$150
$200
$250
US$
M
2011 MEMS Foundries Ranking Yole Développement March 2012
Yole Developpement © April 2012
© 2012 • 9
Putting the “Smart” in Smart Phones consumer mobile devices driving demand
MEMS & sensors in mobile phone
© 2012 • 10
2011-2017 Market Overview Application trends
$500M
2012-2015 CAGR (in value)
Market $300M $100M $20M
150%
-15%
100%
Gyros.
Magnetometers
Combos A+M
Accel.
Combos A+G
Combos 9DOF
Microdisplays
BAW filters
BAW duplexers
Psensors
Other emerging MEMS
Micromirrors
50%
2011-2017 Market Trends for MEMS in cell phones and tablets
Arrows show market size evolution from 2011 (start of arrow) to 2017 (end of arrow)
AF
Oscillators / resonators
RF MEMS switches / capacitors
Microphones 10%
© 2012 • 11
Key MEMS suppliers to cell phone makers (as of May 2012)
For Nokia:
• ST Micro, Analog Devices (MEMS
acceleros)
• ST Micro (MEMS gyros)
• AKM, Aichi MI (magnetos)
• Knowles, ST Micro (MEMS microphones)
For Samsung:
• ST Micro, Bosch Sensortec, Kionix
(MEMS acceleros)
• ST Micro, InvenSense (MEMS gyros)
• AKM (magnetos)
• Knowles (MEMS microphones)
• TriQuint, Avago (BAW filters)
• Wispry (RF-MEMS antenna tuner)
• TI (micromirrors)
For Apple:
• ST Micro (MEMS acceleros)
• ST Micro (MEMS gyros)
• AKM (magnetos)
• Knowles, AAC Acoustics (MEMS microphones)
• TriQuint, Avago (BAW filters)
For LG:
• Bosch Sensortec,
Kionix, Freescale (MEMS
acceleros)
• InvenSense (MEMS gyros)
• Knowles (MEMS
microphones)
• TriQuint (BAW filters)
For ZTE:
• Kionix, Freescale
(MEMS acceleros)
• InvenSense (MEMS
gyros)
• TriQuint, Avago (BAW
filters)
For RIM:
• Bosch Sensortec,
Freescale (MEMS
acceleros)
• InvenSense
(MEMS gyros)
• TriQuint (BAW
filters)
For HTC:
• InvenSense (MEMS gyros)
• Avago, TriQuint (BAW
filters)
For Motorola:
• Kionix, ST Micro (MEMS acceleros)
• InvenSense (MEMS gyros)
• AKM (magnetos)
• Knowles, Wolfson (MEMS
microphones)
• TriQuint, Avago (BAW filters)
Nokia 27%
Samsung 21%
Apple 6%
LG 4%
ZTE 4%
RIM 3%
HTC 3%
Motorola 2%
SonyEricsson 2%
Huawei 2%
Others, Counterfeit
& Unlicenced 26%
2011 Cell Phone Market Shares (in volume) - Total = 1511M units -
Source Yole développement, IDC, Gartner © May 2012
© 2012 • 12
Penetration Rate: Replacement power of incumbency
0%
5%
10%
15%
20%
25%
30%
35%
40%
45%
50%
2002 2003 2004 2005 2006 2007 2008 2009 2010 2011 2012e 2013e 2014e 2015e 2016e 2017e
Pe
net
rati
on
in m
ob
ile p
ho
ne
s an
d t
able
ts (
%)
Silicon microphones penetration - % (historical data)
BAW filters penetration - % (historical data)
Yole développement © May 2012
© 2012 • 13
Penetration Rate: New Function Acceptance = takeoff
0%
10%
20%
30%
40%
50%
60%
70%
80%
2002 2003 2004 2005 2006 2007 2008 2009 2010 2011 2012e 2013e 2014e 2015e 2016e 2017e
Pe
net
rati
on
in m
ob
ile p
ho
ne
s an
d t
able
ts (
%)
Magnetometer penetration - % (historical data)MEMS gyroscopes penetration - % (historical data)MEMS accelerometers penetration - % (historical data)
Yole développement © May 2012
© 2012 • 14
The Growing Billion Unit Club
0
500
1000
1500
2000
2500
3000
MEMS cumulative shipments by selected companies (Munits)
Knowles microphones Avago FBAR shipments Freescale MEMS
ST MEMS Bosch MEMS SiTime MEMS oscillators
Poly. (Knowles microphones) Poly. (Avago FBAR shipments) Linéaire (Freescale MEMS)
Poly. (ST MEMS) Poly. (Bosch MEMS) Linéaire (SiTime MEMS oscillators)
Yole développement © May 2012
© 2012 • 15
“Alpha” MEMS Companies Top 4 suppliers have >50% market share
in 5 different MEMS markets
© 2012 • 16
2009-2011 market shares evolutions ST is growing, Avago decrease InvenSense appears
© 2012 • 17
•MEMS timing devices
•MEMS switch / variable capacitors
•BAW filters
•BAW duplexers
•Accelerometers
•Magnetometers
•Gyroscopes
•6 to 9DOF inertial combos
•Auto-Focus
•Microdisplay
•Micro-mirror for
picroprojectors
•Energy harvesting
•Environmental sensors
(temperature, humidity…)
•Micro fuel cells
•Microspeakers
•Touchscreen
•Joystick
•…
Global MEMS Market for Mobile Phones / Tablets Breakdown by product category
•Silicon microphones
•Pressure sensors
© 2012 • 18
2011 market shares for discrete inertial sensors
© 2012 • 19
Motion sensors Still the hottest sensors in mobile devices
• Market for motion sensors in mobile devices is both
large and still quickly expanding
– Driven by the increase of the attach rate (even
gyroscopes are now accepted in the market)
– And by the global increase of the smartphone and
tablet market
• Market for discrete inertial sensors is predicted to
decrease from 2014
– Discrete MEMS accelerometer maturates
– Discrete gyroscopes and magnetometers still growing
for a few years
– However technical evolutions are still observed:
towards 1x1mm² accelerometers and 2x2mm²
gyroscopes within a few years
• Global market will stabilize after 2014
– Continuous growth in volume, but prices will keep
decreasing
– Combo sensors will grow: each element will be more
mature, integration is combo will lead to cost reduction
0
200
400
600
800
1000
1200
1400
1600
1800
2000
2009 2010 2011 2012e2013e2014e2015e2016e2017e
Mar
ket
($M
)
Motion sensors for mobile phones and tablets - 2009-2017 market ($M)
MEMS accelerometers MEMS gyroscopes
Magnetometers Combos accelerometers magnetometers
Combos accelerometers gyroscopes Combos 9DOF
Yole développement © May 2012
© 2012 • 20
Key elements of a MEMS microphone module
Note: some elements described here can be optional or redundant depending
on the exact design choices made by each MEMS module manufacturer
Substrate (PCB laminate, Ceramic, Leadframe)
Die attach material
MEMS die
Wire-bond interconnect
Encapsulation (metal lead, molding compound, PCB)
ASIC die
Glob-top material
MEMS microphone module (Source Knowles Acoustics)
© 2012 • 21
Microphones for mobile applications Value chain estimation in 2017
2012 market: $508M, 1421 Munits 2017 market: $829M, 3227Munits
MEMS manufacturing
$130M - $140M
ASIC manufacturing
$100M - $110M
Assembly & packaging
$210M - $230M
Final test, yield losses
$25M - $40M
Gross Margin
$300M -
$320M
MEMS die, test, dicing
(with foundry overhead if
any) 16,5%
ASIC die, test, dicing (with
foundry overhead if
any) 11,6%
Final packaging 25,2% Final test &
yield losses 3,6%
Gross margin (Cost of sales,
G&A, R&D, Operational
margin) 43,0%
MEMS Microphone Cost Structure in 2012
© 2012 • 22
2011 Key MEMS Player Activity Estimate
outsourced packaging assembly,
test & calibration
MEMS
foundries IDMs OSATs
WLP
houses
BE & Test
houses Substrate
houses Fabless /
Fab-light
* R
eve
nu
e e
stim
ate
s r
ela
ted
to
ME
MS
~
$0.2B
~
$8B
~
$2B
~
$1B
~ $0.4B
ASIC
foundrie
s
~
$0.4B
© 2012 • 23
Next WAVE of emerging MEMS…
Sensirion Humidity Sensor
AudioPixel microspeaker
NextInput SoftTouch
interface
TI temperature sensor versus a
competing thermopile sensor Polight MEMS autofocus
Samsung Galaxy Beam features
TI DLP
Sand 9 MEMS Oscillator DelfMEMS switch
Oscillators + micromirrors + displays +
switches & variable capacitors + temperature
sensors + AF + microspeakers + other
emerging MEMS
From $13M to $2.3B market (2017)
(in cell phones and tablets)
Wispry antenna tuner on
cell phone board
Implantable pressure sensor (from Sensimed)
© 2012 • 24
Conclusion & Perspectives
• After 3 relatively flat years, MEMS sales jumped 25% in 2010 and the 2011
market kept increasing
– Consumer market has the strongest influence on the MEMS industry
• Inertial combos will account for more than 1/3 of the global inertial MEMS
market in 2017
• It is now challenging for newcomers to enter the mobile market
– Newcomers can target new applications, in this case they need to create a new
market
– For existing applications there are already several solid suppliers and prices are
already low. The only possibility for newcomers is to introduce radical changes
• High volume MEMS is not limited to 3 categories of MEMS (inertial, BAW,
microphones)
– SiTime: the first player to pass the 100M units barriers for those emerging MEMS
markets
– Who’s next?
© 2012 • 25
Thank you very much for your attention!
Visit us during Semicon’Taiwan 2012 @ Booth #1327
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