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Progress in InP-based Photonic Integration Technology
Meint Smit
Outline
• Photonic Integration• An InP-based generic foundry approach• Application examples• IMOS: InP Membrane on Silicon• Nanolasers
Photonic Integration Conference Eindhoven 23 September 2015 2/33
Outline
• Photonic Integration• An InP-based generic foundry approach• Application examples• IMOS: InP Membrane on Silicon• Nanolasers
Photonic Integration Conference Eindhoven 23 September 2015 3/33
Tran
smit
Rec
eive
10-channel WDM transmitter & receiver unit
Courtesy: Infinera 4/33
Photonic Integrated CircuitTr
ansm
itR
ecei
ve
100Gb/s Transmit
100Gb/s Receive
5mm
5/33Courtesy: Infinera
InP Wafer (Indium Phosphide)
Photonic Integration Conference Eindhoven 23 September 2015 6/33
Moore’s law in Photonics
Global Photonics Market Development
Photonic ICs8/33
Outline
• Photonic Integration• An InP-based generic foundry approach• Application examples• IMOS: InP Membrane on Silicon• Nanolasers
Photonic Integration Conference Eindhoven 23 September 2015 9/33
Generic Integration Philosophy
Photonic Integration Conference Eindhoven 23 September 2015 10/33
What can you make withthese Basic Building
Blocks?
Photonic Integration Conference Eindhoven 23 September 2015 11/33
All kinds of passive devices …
AWG-demux
MMI-couplers and filters
ring filters
polarisation splitterspolarisation combiners
polarisation independentdifferential delay lines
MMI-reflectorsInPSiliconTriPleX
Photonic Integration Conference Eindhoven 23 September 2015 12/33
switches and modulators …
ultrafast switch
phase modulator
amplitude modulator
fast space switch
WDM crossconnectWDM add-drop
polarisation independent 2x2 switch
InPSilicon
Photonic Integration Conference Eindhoven 23 September 2015 13/33
All kinds of lasers …
Fabry-Perot lasers
picosecond pulse laser
multiwavelength lasers
tunable DBR lasers
ring lasers
InP
Photonic Integration Conference Eindhoven 23 September 2015 14/33
Multi-Project Wafer run
Cost sharing in R&D phase
Photonic Integration Conference Eindhoven 23 September 2015 15/33
Chip cost in different fab models
1 10 100 1,000 10,000 100,000 1,000,000 10,000,000
Chip volume (mm2)
Chip cost / mm2
Vertical Custom GenericCleanroom
Process
Design
1 10 100 1k 10k 100k 1M 10M1
1k
1M
1BEntry costs
1995 2005 2015
Photonic Integration Conference Eindhoven 23 September 2015 16/33
Outline
• Photonic Integration• An InP-based generic foundry approach• Application examples• IMOS: InP Membrane on Silicon• Nanolasers
Photonic Integration Conference Eindhoven 23 September 2015 17/33
Photonic ICs : variety of applications
Photonic Integration Conference Eindhoven 23 September 2015 18/33
Variable rep rate laser
14 GHz 220 MHz
SA Gain MZM SOA
• High quality variable repetition rate short pulse source for biophotonic applications
• 109MHz – 14GHz repetition rate achieved
X Guo et al, ISLC, San Diego, 2012
Photonic Integration Conference Eindhoven 23 September 2015 19/33
Pulse compressor for bio-imaging (Oclaro)
time
wavelength
or
Rep rate50 GHz
50 GHz
6x6 mm
S. Tahvili et al.ECIO 2012
AWG
20
x 50
GH
z
phasemodulator amplifier R
in
out
Photonic Integration Conference Eindhoven 23 September 2015 20/33
Widely tunable PIC laser with AMZI filters*
Single mode
∆ L1 ∆ L3∆ L2
φ2
SOA AR2x1
1x2φ4
2x1φ6φ5φ1 φ32x1 1x2 2x1 1x2
Ring geometry: LRING=18mm
∆λ = 71.8 nm (∆f = 8.5 THz)
Erwin Bente, Sylwester Latkowski et al.,ICTON 2014
Photonic Integration Conference Eindhoven 23 September 2015 21/33
8×8×8λ Switching Matrix
8inputswith 8λ perinput
8outputs
Stabile et al., Opt Express, 22, 1, 435-442, 2014Stabile et al., J. Lightw. Techn., 32, 2, 201-207, 2014
• Arbitrary connection of eight input wavelengths to eight outputs• Dynamic and simultaneous multi-path routing demonstrated• OSNR of 30dB / 0.1nm• Chip size 7x15mm
136 SOAs8 AWGs48 MMIs
192 in total
Photonic Integration Conference Eindhoven 23 September 2015 22/33
Rx-PIC: 100-channel spectrometer : sensing
• Design:• 11 AWGs• 100 PDs
6 mm
8 mm
Photonic Integration Conference Eindhoven 23 September 2015 23/33
Multiwavelength transmitter : optical access network
K. Lawniczuk, PTL 2014
Tx = 10 Gbps per channelLinewidth = 275 kHz
Photonic Integration Conference Eindhoven 23 September 2015 24/33
Optical THz Source : detection of Water Vapour
SN
R [d
B]
Water Vapour A
bsorption [a.u.]
Soares, IPRM 2013
Photonic Integration Conference Eindhoven 23 September 2015 25/33
Outline
• Photonic Integration• An InP-based generic foundry approach• Application examples• IMOS: InP Membrane on Silicon• Nanolasers
Photonic Integration Conference Eindhoven 23 September 2015 26/33
IMOS concept
• Power efficiency
• Speed
• Functionality
• Packaging
Photonic Integration Conference Eindhoven 23 September 2015 27/33
Basic building blocks
Low loss waveguide2.5 dB/cm
Efficient polarization converter
High performance wavelength (de)multiplexer
Photonic Integration Conference Eindhoven 23 September 2015 28/33
Laser design
BCB
p-InP
i-Q 1.58
i-InP
SiO2
i-InP
n-InP
p+-InP
p+-InGaAs
Ti/Pt/Au
passive
active
n+-Q1.25
300
250
400
100
700
400
dimensions in nm
Cross-section: Laser design with DBR reflectors:
Photonic Integration Conference Eindhoven 23 September 2015 29/33
Ring laser
• Performance:• 150 mA threshold current for ring
laser with 300µm SOA (49 kA/cm2)• ~1 % differential quantum efficiency• 0.2 mW optical power in fiber
0
5
10
15
20
25
30
35
40
45
0 100 200 300 400 500 600
Peak
pow
er in
fibe
r [µW
]
Current [mA]
-90
-80
-70
-60
-50
-40
1480 1490 1500 1510 1520 1530 1540
Opt
ical
pow
er [d
Bm/n
m]
Wavelength [nm]
Photonic Integration Conference Eindhoven 23 September 2015 30/33
Outline
• Photonic Integration• An InP-based generic foundry approach• Application examples• IMOS: InP Membrane on Silicon• Nanolasers
Photonic Integration Conference Eindhoven 23 September 2015 31/33
Nanolaser
Photonic Integration Conference Eindhoven 23 September 2015 32/33
Conclusions and Outlook
Acknowledgements
EuroPIC, PARADIGM, NRC Photonics, MEMPHIS, IOP PD, STW
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