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Page 1: Progress in InP-based Photonic Integration Technology€¦ · InP. Photonic Integration Conference Eindhoven 23 September 2015 14/33. Multi-Project Wafer run. Cost sharing in R&D

Progress in InP-based Photonic Integration Technology

Meint Smit

Page 2: Progress in InP-based Photonic Integration Technology€¦ · InP. Photonic Integration Conference Eindhoven 23 September 2015 14/33. Multi-Project Wafer run. Cost sharing in R&D

Outline

• Photonic Integration• An InP-based generic foundry approach• Application examples• IMOS: InP Membrane on Silicon• Nanolasers

Photonic Integration Conference Eindhoven 23 September 2015 2/33

Page 3: Progress in InP-based Photonic Integration Technology€¦ · InP. Photonic Integration Conference Eindhoven 23 September 2015 14/33. Multi-Project Wafer run. Cost sharing in R&D

Outline

• Photonic Integration• An InP-based generic foundry approach• Application examples• IMOS: InP Membrane on Silicon• Nanolasers

Photonic Integration Conference Eindhoven 23 September 2015 3/33

Page 4: Progress in InP-based Photonic Integration Technology€¦ · InP. Photonic Integration Conference Eindhoven 23 September 2015 14/33. Multi-Project Wafer run. Cost sharing in R&D

Tran

smit

Rec

eive

10-channel WDM transmitter & receiver unit

Courtesy: Infinera 4/33

Page 5: Progress in InP-based Photonic Integration Technology€¦ · InP. Photonic Integration Conference Eindhoven 23 September 2015 14/33. Multi-Project Wafer run. Cost sharing in R&D

Photonic Integrated CircuitTr

ansm

itR

ecei

ve

100Gb/s Transmit

100Gb/s Receive

5mm

5/33Courtesy: Infinera

Page 6: Progress in InP-based Photonic Integration Technology€¦ · InP. Photonic Integration Conference Eindhoven 23 September 2015 14/33. Multi-Project Wafer run. Cost sharing in R&D

InP Wafer (Indium Phosphide)

Photonic Integration Conference Eindhoven 23 September 2015 6/33

Page 7: Progress in InP-based Photonic Integration Technology€¦ · InP. Photonic Integration Conference Eindhoven 23 September 2015 14/33. Multi-Project Wafer run. Cost sharing in R&D

Moore’s law in Photonics

Page 8: Progress in InP-based Photonic Integration Technology€¦ · InP. Photonic Integration Conference Eindhoven 23 September 2015 14/33. Multi-Project Wafer run. Cost sharing in R&D

Global Photonics Market Development

Photonic ICs8/33

Page 9: Progress in InP-based Photonic Integration Technology€¦ · InP. Photonic Integration Conference Eindhoven 23 September 2015 14/33. Multi-Project Wafer run. Cost sharing in R&D

Outline

• Photonic Integration• An InP-based generic foundry approach• Application examples• IMOS: InP Membrane on Silicon• Nanolasers

Photonic Integration Conference Eindhoven 23 September 2015 9/33

Page 10: Progress in InP-based Photonic Integration Technology€¦ · InP. Photonic Integration Conference Eindhoven 23 September 2015 14/33. Multi-Project Wafer run. Cost sharing in R&D

Generic Integration Philosophy

Photonic Integration Conference Eindhoven 23 September 2015 10/33

Page 11: Progress in InP-based Photonic Integration Technology€¦ · InP. Photonic Integration Conference Eindhoven 23 September 2015 14/33. Multi-Project Wafer run. Cost sharing in R&D

What can you make withthese Basic Building

Blocks?

Photonic Integration Conference Eindhoven 23 September 2015 11/33

Page 12: Progress in InP-based Photonic Integration Technology€¦ · InP. Photonic Integration Conference Eindhoven 23 September 2015 14/33. Multi-Project Wafer run. Cost sharing in R&D

All kinds of passive devices …

AWG-demux

MMI-couplers and filters

ring filters

polarisation splitterspolarisation combiners

polarisation independentdifferential delay lines

MMI-reflectorsInPSiliconTriPleX

Photonic Integration Conference Eindhoven 23 September 2015 12/33

Page 13: Progress in InP-based Photonic Integration Technology€¦ · InP. Photonic Integration Conference Eindhoven 23 September 2015 14/33. Multi-Project Wafer run. Cost sharing in R&D

switches and modulators …

ultrafast switch

phase modulator

amplitude modulator

fast space switch

WDM crossconnectWDM add-drop

polarisation independent 2x2 switch

InPSilicon

Photonic Integration Conference Eindhoven 23 September 2015 13/33

Page 14: Progress in InP-based Photonic Integration Technology€¦ · InP. Photonic Integration Conference Eindhoven 23 September 2015 14/33. Multi-Project Wafer run. Cost sharing in R&D

All kinds of lasers …

Fabry-Perot lasers

picosecond pulse laser

multiwavelength lasers

tunable DBR lasers

ring lasers

InP

Photonic Integration Conference Eindhoven 23 September 2015 14/33

Page 16: Progress in InP-based Photonic Integration Technology€¦ · InP. Photonic Integration Conference Eindhoven 23 September 2015 14/33. Multi-Project Wafer run. Cost sharing in R&D

Chip cost in different fab models

1 10 100 1,000 10,000 100,000 1,000,000 10,000,000

Chip volume (mm2)

Chip cost / mm2

Vertical Custom GenericCleanroom

Process

Design

1 10 100 1k 10k 100k 1M 10M1

1k

1M

1BEntry costs

1995 2005 2015

Photonic Integration Conference Eindhoven 23 September 2015 16/33

Page 17: Progress in InP-based Photonic Integration Technology€¦ · InP. Photonic Integration Conference Eindhoven 23 September 2015 14/33. Multi-Project Wafer run. Cost sharing in R&D

Outline

• Photonic Integration• An InP-based generic foundry approach• Application examples• IMOS: InP Membrane on Silicon• Nanolasers

Photonic Integration Conference Eindhoven 23 September 2015 17/33

Page 18: Progress in InP-based Photonic Integration Technology€¦ · InP. Photonic Integration Conference Eindhoven 23 September 2015 14/33. Multi-Project Wafer run. Cost sharing in R&D

Photonic ICs : variety of applications

Photonic Integration Conference Eindhoven 23 September 2015 18/33

Page 19: Progress in InP-based Photonic Integration Technology€¦ · InP. Photonic Integration Conference Eindhoven 23 September 2015 14/33. Multi-Project Wafer run. Cost sharing in R&D

Variable rep rate laser

14 GHz 220 MHz

SA Gain MZM SOA

• High quality variable repetition rate short pulse source for biophotonic applications

• 109MHz – 14GHz repetition rate achieved

X Guo et al, ISLC, San Diego, 2012

Photonic Integration Conference Eindhoven 23 September 2015 19/33

Page 20: Progress in InP-based Photonic Integration Technology€¦ · InP. Photonic Integration Conference Eindhoven 23 September 2015 14/33. Multi-Project Wafer run. Cost sharing in R&D

Pulse compressor for bio-imaging (Oclaro)

time

wavelength

or

Rep rate50 GHz

50 GHz

6x6 mm

S. Tahvili et al.ECIO 2012

AWG

20

x 50

GH

z

phasemodulator amplifier R

in

out

Photonic Integration Conference Eindhoven 23 September 2015 20/33

Page 21: Progress in InP-based Photonic Integration Technology€¦ · InP. Photonic Integration Conference Eindhoven 23 September 2015 14/33. Multi-Project Wafer run. Cost sharing in R&D

Widely tunable PIC laser with AMZI filters*

Single mode

∆ L1 ∆ L3∆ L2

φ2

SOA AR2x1

1x2φ4

2x1φ6φ5φ1 φ32x1 1x2 2x1 1x2

Ring geometry: LRING=18mm

∆λ = 71.8 nm (∆f = 8.5 THz)

Erwin Bente, Sylwester Latkowski et al.,ICTON 2014

Photonic Integration Conference Eindhoven 23 September 2015 21/33

Page 22: Progress in InP-based Photonic Integration Technology€¦ · InP. Photonic Integration Conference Eindhoven 23 September 2015 14/33. Multi-Project Wafer run. Cost sharing in R&D

8×8×8λ Switching Matrix

8inputswith 8λ perinput

8outputs

Stabile et al., Opt Express, 22, 1, 435-442, 2014Stabile et al., J. Lightw. Techn., 32, 2, 201-207, 2014

• Arbitrary connection of eight input wavelengths to eight outputs• Dynamic and simultaneous multi-path routing demonstrated• OSNR of 30dB / 0.1nm• Chip size 7x15mm

136 SOAs8 AWGs48 MMIs

192 in total

Photonic Integration Conference Eindhoven 23 September 2015 22/33

Page 23: Progress in InP-based Photonic Integration Technology€¦ · InP. Photonic Integration Conference Eindhoven 23 September 2015 14/33. Multi-Project Wafer run. Cost sharing in R&D

Rx-PIC: 100-channel spectrometer : sensing

• Design:• 11 AWGs• 100 PDs

6 mm

8 mm

Photonic Integration Conference Eindhoven 23 September 2015 23/33

Page 24: Progress in InP-based Photonic Integration Technology€¦ · InP. Photonic Integration Conference Eindhoven 23 September 2015 14/33. Multi-Project Wafer run. Cost sharing in R&D

Multiwavelength transmitter : optical access network

K. Lawniczuk, PTL 2014

Tx = 10 Gbps per channelLinewidth = 275 kHz

Photonic Integration Conference Eindhoven 23 September 2015 24/33

Page 25: Progress in InP-based Photonic Integration Technology€¦ · InP. Photonic Integration Conference Eindhoven 23 September 2015 14/33. Multi-Project Wafer run. Cost sharing in R&D

Optical THz Source : detection of Water Vapour

SN

R [d

B]

Water Vapour A

bsorption [a.u.]

Soares, IPRM 2013

Photonic Integration Conference Eindhoven 23 September 2015 25/33

Page 26: Progress in InP-based Photonic Integration Technology€¦ · InP. Photonic Integration Conference Eindhoven 23 September 2015 14/33. Multi-Project Wafer run. Cost sharing in R&D

Outline

• Photonic Integration• An InP-based generic foundry approach• Application examples• IMOS: InP Membrane on Silicon• Nanolasers

Photonic Integration Conference Eindhoven 23 September 2015 26/33

Page 27: Progress in InP-based Photonic Integration Technology€¦ · InP. Photonic Integration Conference Eindhoven 23 September 2015 14/33. Multi-Project Wafer run. Cost sharing in R&D

IMOS concept

• Power efficiency

• Speed

• Functionality

• Packaging

Photonic Integration Conference Eindhoven 23 September 2015 27/33

Page 28: Progress in InP-based Photonic Integration Technology€¦ · InP. Photonic Integration Conference Eindhoven 23 September 2015 14/33. Multi-Project Wafer run. Cost sharing in R&D

Basic building blocks

Low loss waveguide2.5 dB/cm

Efficient polarization converter

High performance wavelength (de)multiplexer

Photonic Integration Conference Eindhoven 23 September 2015 28/33

Page 29: Progress in InP-based Photonic Integration Technology€¦ · InP. Photonic Integration Conference Eindhoven 23 September 2015 14/33. Multi-Project Wafer run. Cost sharing in R&D

Laser design

BCB

p-InP

i-Q 1.58

i-InP

SiO2

i-InP

n-InP

p+-InP

p+-InGaAs

Ti/Pt/Au

passive

active

n+-Q1.25

300

250

400

100

700

400

dimensions in nm

Cross-section: Laser design with DBR reflectors:

Photonic Integration Conference Eindhoven 23 September 2015 29/33

Page 30: Progress in InP-based Photonic Integration Technology€¦ · InP. Photonic Integration Conference Eindhoven 23 September 2015 14/33. Multi-Project Wafer run. Cost sharing in R&D

Ring laser

• Performance:• 150 mA threshold current for ring

laser with 300µm SOA (49 kA/cm2)• ~1 % differential quantum efficiency• 0.2 mW optical power in fiber

0

5

10

15

20

25

30

35

40

45

0 100 200 300 400 500 600

Peak

pow

er in

fibe

r [µW

]

Current [mA]

-90

-80

-70

-60

-50

-40

1480 1490 1500 1510 1520 1530 1540

Opt

ical

pow

er [d

Bm/n

m]

Wavelength [nm]

Photonic Integration Conference Eindhoven 23 September 2015 30/33

Page 31: Progress in InP-based Photonic Integration Technology€¦ · InP. Photonic Integration Conference Eindhoven 23 September 2015 14/33. Multi-Project Wafer run. Cost sharing in R&D

Outline

• Photonic Integration• An InP-based generic foundry approach• Application examples• IMOS: InP Membrane on Silicon• Nanolasers

Photonic Integration Conference Eindhoven 23 September 2015 31/33

Page 32: Progress in InP-based Photonic Integration Technology€¦ · InP. Photonic Integration Conference Eindhoven 23 September 2015 14/33. Multi-Project Wafer run. Cost sharing in R&D

Nanolaser

Photonic Integration Conference Eindhoven 23 September 2015 32/33

Page 33: Progress in InP-based Photonic Integration Technology€¦ · InP. Photonic Integration Conference Eindhoven 23 September 2015 14/33. Multi-Project Wafer run. Cost sharing in R&D

Conclusions and Outlook

Page 34: Progress in InP-based Photonic Integration Technology€¦ · InP. Photonic Integration Conference Eindhoven 23 September 2015 14/33. Multi-Project Wafer run. Cost sharing in R&D

Acknowledgements

EuroPIC, PARADIGM, NRC Photonics, MEMPHIS, IOP PD, STW