the measurement and characterisation of mst devices (mems) npl, monday 27 february 2006
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The Measurement and Characterisation of MST Devices (MEMS)
NPL, Monday 27 February 2006
CEMMNT
• Centre of Excellence for Metrology in Micro and Nano Technology
• NPL, QinetiQ, Taylor Hobson, SEIC, Coventor
• Collaboration to enable technology transfer and implement best practice for characterisation of MNT
Current technology limitations
• High aspect ratio devices– No suitable techniques for dimensional
measurements, sidewall properties– Destructive testing required
• 3D components– Surface measurement techniques not suitable for
complex 3D forms– Ra values usually not required - form of structures is
important
Current technology limitations
• In-process measurements– Lack of suitable apparatus– System engineering solutions sought
• No traceability between techniques – Optical methods providing differing data to
probe measurements– Lack of standards, calibration samples
Some solutions
• New technogies for measurement– Raman stress/crystallinity measurements– New probe instruments– SNOM
• Standards - NPL– Software measurement standards– Areal artefacts - grids, sinusoids, star patterns
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