training smarttest hlt560
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EPM, Wolfgang Flatau, 2007-08, Training SmartTest page 1© Pfeiffer Vacuum 2007
Leak Detector
SmartTestdesign and function
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The participant will be able to:
explain the design and the function
operate the unit
perform maintenance work
do troubleshooting
Course objectives
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Definition “ LEAK"
A LEAK is an untight spot in a container or line,through which gases, vapors, or even liquids flow
from an area where the pressure is higher to an area
where the pressure is lower.
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SI - Standard = mol/s (1mol = 6.025E23 particles)
Fluid technology = Nm/s, sccm, sccs
Vacuum technology = mbar l/s, Pa m3/s, Torr l/s,
atm cc/s
Air conditioning = g/a, oz/y
Concentration = ppm (no leak rate unit)
Leak rate units
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The leak rate is 1 mbar l/s if in an evacuated container
with a volume of 1 Liter, the pressure rises by 1 mbarper second , or if in a pressurized container with the
same volume, the pressure drops by 1 mbar per
second.
Definition of the unit "mbar l/s"
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A bicycle tube may have a maximum pressure
loss of 1000 mbar in 175 days.Volume = 1.5 liters
175 days = 1.5x107 seconds
Which is the maximumadmissible leak rate?
How do you test a bicycle
tube?
Example 1: Leak rate in mbar l/s
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Example 1
Result:
QL=[(p
2- p
1) * V] / t
s / lmbar 101,0101,5
1,51000
s
lmbar Q
4
7 L ∗∗=
∗
∗=
∗=
−
Bubble test
The leakrate should be not higher than 1x10-04 mbarl/s.
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Example 2: Leak rate in mbar l/s
A bicycle tube is pumped up to 3.0 bar.
The default leak rate is taken from example
Volume = 1.5 liters
1year = ca. 3.0 x 107 seconds
Leak rate = 1,0 E-04 mbar l/s
What is the pressure in the bicycle tube after 1
year?
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Example 2
bar mbar x p
mbar x p
lsslmbar x x p
tube
loss
loss
0.1100.1
100.2
***
5.1100.3*100.1
3
3
74
==
=
===
−
Volumen
Timerate Leak
ploss*
=
Result
The pressure in the bicycle tube is 1 bar after 1
year?
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Test object pressurized:
Pressure decay
Bubble test
He sniffing with SmartTest
Leak detection methods
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E1 E0 E-8 E-9 E-10 E-11 E-12E-3 E-4 E-5 E-6 E-7E-1 E-2
He sniffing with SmartTest
mbar l/s
Detection limits pressurized
Bubble test
Pressure decay
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Test object under vacuum:
Pressure increase
Gas type dependence ( Pirani gauge)
He leak test with SmartTest
Leak detection methods
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Detection limits vacuum
E1 E0 E-8 E-9 E-10 E-11 E-12E-3 E-4 E-5 E-6 E-7E-1 E-2
Pressure increase
Gas type dependence PiraniGas type dependence Pirani
He leak test with SmartTest
mbar l/s
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Sniffing methods
T e s t g a s
Integral
T e s t g a s
Local
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Vacuum methods integral
T e s t g a s
Test object evacuated
Test chamber pressurized
T e s t g a s
Test object pressurized
Test chamber evacuated
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T
e s t g a s
Test object evacuated
Vacuum method local
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SmartTest HLT 5xx
1 Unit HLT 5xx
2 Cart to SmartTest
3 Backing pump
1
2
3
Modular concept
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Type overview
SmartTest
SmartTest HLT 550
HLT 560
HLT 570
Rotary vane pump
without Backing pump
Diaphragm pump
SmartTest
Dry pump TS 620
SmartTest
SmartTest
HLT 565
HLT 572
HLT 575SmartTest
Rotary vane pump
UNO 5
UNO 30 M
Dry pump XtraDry 150-2
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The leak detector SmartTest
1 Test port
2 Instrument operation
3 Inlet air filter
4 Connection for
external backing pump
1 2
3
4
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Instrument operation
1 START / STOP – button
2 ZERO – button
3 Softkeys with
changeable meaning
4 Display
12
3
4
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V4
V1
V3
V6
V5
V2
P2
P1
Disign
1 Test port
2 Pressure at Test port
3 Clibrated leak
4 Vent of sniff connection
5 Backing pump
6 Fore vacuum pressure
7 Turbo drag pump
8 Mass spectrometer
1
2
3
7
4
6
8
5
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Mass spectrometer
M > 4
M < 4
M = 4
3 12
5
9
11
8
7
6
410
1 Cathode 1
2 Anode
3 Cathode 2
4 Shielding
5 Extractor
6 Shielding
7 Magnetical field
8 Suppressor
9 Shielding10 Faraday cup
11 Pre amplifier
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Ionsource
Gas inlet
Pre amplifier
Magnet
Magnetic field
+
+
+
+
+
+
Principle of measurement
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V4
V1
V3
V6
V5
V2
P2
P1
START/STOP pressedPressure value P2
1000
15
0,5
5
mbar
0
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V4
V1
V3
V6
V5
V2
P2
P1
Pump fore vacuum
P2 > 15 mbar
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V4
V1
V3
V6
V5
V2
P2
P1
Measure „ Counter flow“
P2 < 15 mbar
P2 > 5 mbar
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V4
V1
V3
V6
V5
V2
P2
P1
Measure "Twin-Flow low"
P2 < 5 mbar
P2 > 0.5 mbar
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V4
V1
V3
V6
V5
V2
P2
P1
Sniffing „ Twin-Flow low“
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V4
V1
V3
V6
V5
V2
P2
P1
Calibration
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Running Up
The run-up of the turbo pump is visualized in percentage via
bar graph.
Details Menu with selected system data
Sprache, Language Direct link to the menu Language
Idioma
Setup Settings of the operating parameters
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Details
For l ine pressure p1 Present fore-vacuum pressure
Rotation speed Present rotation of the turbo pump
TMP current Present consumption of the turbo pump
Emission „ On“ if the rotation >= 1450 Hz , p1 < 10 mbar
and the filament test was okay
Filament Active filament 1 or 2
Vent TMP The filament and the turbo pump
will switch „ off“ automatically
The menu “ Vent TMP” will displayed only if the menu
„ Maintenace enable at „ Yes“ .
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Venting TMP (1)
The turbo pump is switch „ off“ and the leak detector is waiting
unti l the rotation speed of the turbo pump < 150 Hz.
Restart Stops the automatic venting procedure of the turbopump and leads back to the run up mode of the unit.
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Venting TMP (2)
The rotation speed of the turbo pump
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Venting TMP (3)
The turbo pump is vented and the leak detector can be switched off.
Vent TMP Vents the turbo pump again
Restart Stops the automatic venting procedure of the turbo
pump and leads back to the run up mode of the unit.
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Ready to start
Display
internal test leak
Start the calibration
SettingsMode, Mass,
Last calibrationFilter
Background signal
Setup main menu
Start the regeration
Direct link to the
menu Mode & Mass
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Measured value display
Analog
anddigital
Graphic
Changedisplay mode
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Activate Zero
0
10
20
30
40
50
t1
t
ZERO
Leak rate
Displayed leak rate
Measured leak rate
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Zero at falling back ground
0
10
20
30
40
50
t2
t
t1
Leak rate
Measured leak rate
Displayed leak rate
Subrtraction value
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Deactivate Zero
0
10
20
30
40
50
t3
t
ZERO
> 3 s
Leak rate
Measured leak rate
Displayed leak rate
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Setup main menu
View Display configuration
Access control Set access control
Language Selection the language
Info Information
Calibration settings Setting for the calibration
User settings Configuration of the user parameters
Maintenance & Service Menus Maintenance & Service
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View
Contrast Settings for display contrast
Units Settings for leak rate and pressure
Time & Date Setting for time and date
Display range Configuration of the display range
Lower display limit Setting for lower display limit
Background Setting for Display background signal
at ready to start
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Contrast
Setting contrast range 0 – 99
Invert display normal / invert display
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Units
Unit Leak rate mbar*l/s, Pa*m3/s, Torr*l/s
sccm, sccs, atm*cc/s,
ppm, g/a, oz/yr (only selectable in „ Sniffing“ mode)
Unit Pressure mbar, Pa, atm, Torr
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Time & Date
Date Setting of the actual date
Time Setting of the actual time (24 hours format)
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Display range
Scale linear Display linear
logarithmic Display logarithmic
2…9 Number of decades in
log. Display
Range automatic Automatic range selection
manual Manual range selection
Time axis 16…960 Time axis, time in seconds
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Lower display limit
Lower display limit for unit mbar*l/s
1E-12 mbar*l/s
1E-11 mbar*l/s
1E-10 mbar*l/s1E-09 mbar*l/s
This setting limits the display of the leak rate downwards in
the measuring mode. It is only effective for the vacuum mode.
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Background at „ Ready to start“
yes Background displayed
at „ Ready to Start“
no Background not displayed
at „ Ready to Start“
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Maintenance enable
Yes Menu „ Maintenance & Service“
is enabled
No Menu „ Maintenance & Service“is disabled
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Calibration enabled
Yes Calibration at „ Ready to Start“ enabled
No Calibration at „ Ready to Start“ disabled
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Change device PIN
New PIN 0000 – 9999 New device PIN
New PIN (verify) 0000 – 9999 New device PIN
(repeat for confirmation)
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Change menu PIN
New PIN 0000 – 9999 New menu PIN
New PIN (verify) 0000 – 9999 New menu PIN
(repeat for confirmation)
L
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Language
The fol lowing languages are available for operation:
Language
Francais French
Deutsch German Operating language
Espanol Spanish
English English
I f ti
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Information
Settings Display menu parameters
System data Display system data
Vacuum diagram Display vacuum diagram
Error list Display the last 12 errors
Calibration history Display the last 12 calibrations
S tti
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Settings
Display of the current parameter settings in 4 pages.
S t d t
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System data
Display of the system data/components in 4 pages.
Vacuum diagram
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Vacuum diagram
Vacuum diagram with the current states of valves, turbo pump
and emission.
Leak rate and pressure values P1, P2 are displayed.
Error list
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Error list
List of the last 12 errors in following format:
Date / Time / Error no. / Remark
Calibration history
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Calibration history
List of the last 12 Calibration in following format:
Date / Time / Location / Test gas / Calibration factors
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User Settings
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User Settings
Mode & Mass Operation mode and detected mass
Filter & Zero Filter and zero settings
Alarm Alarm sett ings
Interfaces Interface settings
Parameter save / load Sets of parameter, factory settings
Monitor ing funct ions Diverse funct ions can be monitored
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Filter & Zero
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Filter & Zero
Filter without No leak rate filter static Filter with fixed time constant
dynamic Filter with dynamic adaptation of time constant
Zero with Start Zero is executed immediately after the
2s…5 min specif ied time.
enabled Manual Zero releaseddisabled Manual Zero locked
constant Manual Zero released and the zero value is retained
after pressing STOP. Automatic BG -tracing is locked.
MS-BG
sub- On Internal background is subtracted at START
traction Off Internal background is not subtracted at START
Alarm
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Alarm
Mode prop. leak rate Acoustic signal proportional to the bar displaytrigger alarm A mult i-frequency signal is generated as soon
0… 4.5 min as the leak rate exceeds the setpoint value.
An alarm delay t ime can be entered.
set point A tone with the frequency proport ional to the
0… 4,5 min leak rate is emitted as soon as the leak rate
exceeds the setpoint value. An alarm delay t ime can be entered.
pinpoint Acoustic signal proportional to the leak rate
between 0,1 and 10*setpoint value
Setpoint 1E-12…9,9E+2 Alarm setpoint value
Warn limit 1…100 % Warning limit as percentage of setpoint value
Interfaces
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Interfaces
Analog output Output of the analog signal
Compact gauge Compact gauge settings
Control location Selection of the control location
Relay Relay settings
Serial port Selection of port and protocol
Bypass option Bypass option settings
Analog output
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g p
Channel 1 off Channel is off(0V)Pressure p1 Output pressure p1
Pressure p2 Output pressure p2
LR mantissa Output leak rate mantissa, l inear from 0…10 V
LR exponent Output leak rate exponent as a step function
LR linear Output leak rate linear, linear from 0…10 V
LR log. Output leak rate logarithmic, upper limit 10VPressure p(ext) Output external pressure
Channel 2 see channel 1
Scale upper limit upper limi t(=10V) for setting „ LR log“
1E-11…1E+06 and “LR linear”
V / decade 0.5, Volt per decade for setting „ LR log“
1, 2, 2.5, 5, 10
Compact gauge
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p g g
Full scale 0.1, 1, 10,100, 1000, 2000, 5000,(only for linear gauges) 10000, 50000 mbar
Type APR, CMR, PCR, PKR, TPR
Setpoint value Setpoint value for relay output
1E-10…9,9E+02
Pressure p(ext) Current pressure value p(ext)
Press. internal Inlet pressure determined with
P2 source internal gauge
external Inlet pressure determined with
external gauge
Control location
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Local Controlled by START, STOP and ZERO keys
Local and Control led by START, STOP and ZERO keys
RS232/RS485 and via RS232/RS485 interface
RS232/RS485 Controlled via RS232/RS485 interface
PLC Controlled via digital input
ALL Controlled by START, STOP and ZERO keys,
via digi tal input and via RS232/RS485 interface
Relay
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y
Relay 1,2Off Relay is always dropped-out.
START Relay is active when V2 is open.
STOP Relay is active when V6 is open.
START/STOP Relay is active when „ START“ is pressed and
is dropped-out when „ STOP“ is pressed.
Ready Relay is active in measure.Setpoint Relay is active when leak rate exceeds setpoint.
On Relay is always active.
Warning limit Relay is active when leak rate exceeds warn limit.
Pressure setpoint Relay is active when pressure exceeds setpoint.
Serial ports
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Port RS 232 Control via RS 232RS 485 Control via RS 485
Protocol Pfeiffer Pfeiffer interface protocol
HLT 2xx HLT 2xx interface protocol
(selected commands)Binary Diagnosis interface protocol
(only for internal use)
Address 1…255 Bus-address of SmartTest
in Pfeifer protocol
Bypass option
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Mode No bypass No bypass option selected
Quick pump The optional Backing pump is ready
for the pumping down process without
being active in the measuring mode.
Partial flow The optional Backing pump is readyfor the pumping down process and the
measuring mode.
Internal on / off Delay time for the act ivat ion of the internal
evacuation Backing pump is enabled / disabled.
delay
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Load parameters
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View Displays values of parameter set
Parameter set „PARA SET“ 1,2 .(4 pages)
Load Loads the parameter set „ PARA SET“ 1 or 2.
Save parameters
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The current parameter setting will be saved after pressing
the button „ Save“ in „ PARA SET 1“ or „ PARA SET 2“ .
Load factory settings
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The factory settings will be loaded after pressing the button „ OK“ .
Monitoring functions
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Flow Settings for the flow control
(sniffing mode only)
Contamination Settings of the protection against
protection helium contamination
Min. Volume & Beep Settings of minimal volume and beep
Valves Settings valve V1, V3 and V4
Evacuation time Settings for evacuation time and vent mode
& Vent
Calibration request Enables and disables request for a cal ibration
Flow
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EPM, Wolfgang Flatau, 2007-08, Training SmartTest page 78© Pfeiffer Vacuum 2007
Flow min „ Flow too low“ appears when the current
1…40 sccm value falls below this threshold
Flow max „ Flow too high“ appears when the current
10…50 sccm value exceeds t this threshold
Current flow Current flow of the sniffer line (measure mode)
These settings only take place in “ sniff ing mode” .
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Valves
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EPM, Wolfgang Flatau, 2007-08, Training SmartTest page 81© Pfeiffer Vacuum 2007
Twin-Flow high enable Valve V4 opensdisable Valve V4 always closed
0,01… 0,5 Threshold value when
mbar V4 opens
Twin-Flow low enable Valve V3 opens
disable Valve V3 always closed
0,1… 5 mbar Threshold value whenV3 opens
Counterflow enable Valve V1 opens
disable Valve V1 always closed
0,1… 25 mbar Threshold value when
V1 opens
Evacuation time & vent
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EPM, Wolfgang Flatau, 2007-08, Training SmartTest page 82© Pfeiffer Vacuum 2007
Maximum 1 s…30min This is the threshold for maximumevacuation t ime inf ini tely pump down t ime before this process
will stopped.
Vent with Stop Inlet is vented automatically after Stop.
manual Inlet can be vented in „Ready to Start“
by pressing the „ Vent“ softkey.
no Venting of the inlet is locked.
Regeneration Start-Stop-cycles with short range intended for
the reduction of a raised helium background.
Regeneration
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EPM, Wolfgang Flatau, 2007-08, Training SmartTest page 83© Pfeiffer Vacuum 2007
Automated Start-Stop-cycle with short range intended
for the reduction of a raised helium background.
An active “ Regenerat ion” will be announced in the display
and stops after 60 minutes automatically.
This funct ion can be deactivate in general with the STOP
key or with STOP in the setting “ Venting with STOP” menu.
The “ Regeneration” can only be successful activated
in the setting “ Venting with STOP” menu!
Calibration request
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EPM, Wolfgang Flatau, 2007-08, Training SmartTest page 84© Pfeiffer Vacuum 2007
Yes The request for calibration comes up:
- 30 min after switching HLT „ On“
- temperature of HLT has changed
more than 5°C
No The request for calibration does not come up.
Maintenance & Service
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EPM, Wolfgang Flatau, 2007-08, Training SmartTest page 85© Pfeiffer Vacuum 2007
Burn- in Automatic start-stop cycle
Maintenance intervals Displays the current operating hours
components of the components fore pump,
turbo pump and ion source
View Maintenance List of maintenance intervals
intervals list
Service Access to menu Service
The maintenance menu can only be chosen when the maintenance
is enabled under Setup / Access control / Maintenance enabled.
Burn-In
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EPM, Wolfgang Flatau, 2007-08, Training SmartTest page 86© Pfeiffer Vacuum 2007
Start without Automatic start-stop cycle
Calibration without calibration
Start with Automatic start-stop cycle
Calibration with calibration
You can see in the display when the Burn–In is activated.
The Burn-In can be deactivated with the STOP key.
Burn-In activ
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EPM, Wolfgang Flatau, 2007-08, Training SmartTest page 87© Pfeiffer Vacuum 2007
Run time Time in minutes since activating
the Burn-In function
Cal factor min. Calibration factor low
Cal factor max. Calibration factor high
Anode pot . min. Anode potent ial low Anode pot . max. Anode potent ial h igh
Stop Deactivate the Burn-In
This menu is available when the Burn-In is active.
(Setup / Maintenance & Service / Burn-In)
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Maintenance interval list
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EPM, Wolfgang Flatau, 2007-08, Training SmartTest page 89© Pfeiffer Vacuum 2007
List of the last 12 Maintenance in following format:
Date / Time / Component / Operating hours
Service
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EPM, Wolfgang Flatau, 2007-08, Training SmartTest page 90© Pfeiffer Vacuum 2007
The service menu is available after entering the Service-PIN.
This menu offers more information an settings for the service
engineers.
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