cleaning for ultra- high vacuum (uhv) · outline of presentation zuhv limiting factors zwhy do we...
TRANSCRIPT
Cleaning for Ultra-High Vacuum (UHV)
Keith MiddlemanVacuum Science Group
ASTeCCCLRC Daresbury Laboratory
Outline of Presentation
UHV Limiting Factors
Why Do We Need To Clean for Accelerators?
Methods to Reduce Outgassing
SRS Cleaning Procedure
Methods of Testing
Search for New Cleaning Solvents
Limiting Factors for achieving UHV
Material ChoiceGas Sources
Contaminant: prevents vacuum system reaching required base pressure or introduces unwanted species into the residual gas.Outgassing: The outgassing rate is the time-dependent rate at which gases and vapours are released under vacuum. This limits the ultimate pressure achievable and can introduce contamination into the vacuum system.
Why Clean for Accelerator Vacuum Systems?
UHV Total Pressures Required ~ 1x10-9 mbarMaintain Satisfactory Lifetime Stored Electron Beam
Electron Scatter ∝ Atomic Number2
Low presence of high mass speciesHydrocarbons < 0.1% Pump Lubricants < 0.01%
Stimulated desorptionElectron or Ion induced - Major gas sourceDesorption Yield (Number of molecules per incident photon)
Maintain Clean In-Vacuum SurfacesPrevent Particle Target PoisoningMaintain Efficient Optical Properties for EM Radiation Transport
Methods to Reduce Outgassing
Bakeout - If the pressure is not low enough we can reduce the thermal outgassing rates by reducing the surface coverage N or the temperature T.
Beam Cleaning
Passivation Oxide films Nitride coatings (TiN, BN) Active films (NEG coatings)
Methods to Reduce Outgassing
Ultrasonic Cleaning - widely used
Glow discharge
Electropolishing
SRS Cleaning Procedure
EX-SITU BAKEOUT
Leak check (< 10-10
Bake to 250°C for 24 hours
Record RGA scan
Effective pre-treatment ensures outgassingare reduced to < 10l s-1 cm-2
CLEANING PROCEDURE
Hot water jet with detergentSurface stripping with alumina beadsUltrasonic wash in hot Triklone
Vapour Wash in hot TrikloneRinse with de-min waterImmerse in hot alkaline bath of P3-Almeco 36 at 60°CRinse in de-min waterDry in warm, dust free air, bag and seal.
mbar l s-1)
rates -11 mbar
Cleaning FacilitiesWater Jet and Detergent Phase
Cleaning FacilitiesVapour wash
Testing - Is it ‘Clean’?
Surface Analysis Techniques (Detailed Surface Composition)
AES - Auger Electron Spectroscopy
SIMS - Secondary Ion Mass Spectrometry
Scanning Electron Micrograph
Phenomenological Testing (Surface Vacuum Performance)Measure Total Outgassing Rates - Total Pressure Gauge
Measure Partial Pressures - RGA
Stimulated Desorption (Friction, Electron or Ion Induced, Thermal)
Replacement of 1,1,2-Trichloroethylene
Why Change? - Reclassification of 1,1,2-Trichloroethylene (TrikeTM)
What is important to us? - Thermal outgassing and ESD
Throughput method of measuring outgassing rates
CA
PPQ ⋅−
=21
Comparative Tests - existing procedure proven for 20 years
Outgassing Measurement Facility
Thermal Outgassing Results
Experiment Information Thermal Outgassing Rate Q (mbar l s-1cm-2)
Blank Run 9.3E-14 No Contamination Cleaned with Trike 7.9E-13 Full Contamination. Cleaned with Trike 9.3E-13 Full Contamination. Cleaned with Lenium 2.8E-12 Full Contamination. Cleaned with Leksol 9.3E-14 Full Contamination. Cleaned with Novec HFE 7.5E-13 Full Contamination. Cleaned with IPA 7.5E-13 Full Contamination. Cleaned with Micro 90 3.7E-13 Full Contamination. Cleaned with Lancerclean 4.6E-12
RGA Data - Thermal Outgassing
Acceptable UHV ScanHydrocarbon < 0.1%Pump lubricants < 0.01%
Unacceptable UHV ScanHydrocarbon ~ 25%Pump lubricants ~ 5%
RGA Data - Electron Stimulated Desorption
Desorption Yield ~ 10-3 molecules / e-
Desorption Yield ~ 4 molecules / e-
Summary
Accelerators (storage rings) require UHV
Need to minimise thermal outgassing and stimulated desorption
Requires a detailed cleaning recipe
Phenomenological Testing