cognitive enterprise · cognitive enterprise . reinventing your fabs with ai. september 19, 2019....

COGNITIVE ENTERPRISEREINVENTING YOUR FABS WITH AI

Ryuhichiroh Hattori

IBM Industry Academy memberPartner, Global Center of Competence ElectronicsIBM Global Business Services

Cognitive Enterprise Reinventing your fabs with AI

September 19, 2019

Ryuhichiroh Hattori

IBM Industry Academy memberPartner, Global Center of Competence ElectronicsIBM Global Business Services

4Copyright © 2016 IBM All rights reserved. 4

CURRENT STATUS AT 300MM WAFER FABS ?

01 01 Current status at 300mm wafer fabs ?

04 Facility Management with AI

AGENDA

02 IBM Cognitive Enterprise

03 Cognitive Enterprise for 300mm wafer fabs

5

Smart Factory implementation has started at 300mm wafer fabs since 2000s,Sense & Respond workflow scenarios increased the level of automation, Leverage of AI and big data has been started, but it’s still limited.

200mm 300mm

IT

Automation

GEM

Intra-Bay(Cassette)

• GEM300

• AMHS(FOUP)

• ARHS(Reticle)

SECS

Inter-Bay(Cassette)

Real-time

Lot Single Wafer

EWR

NPW

Sense＆Respond

Workflow

Yield

Online

SPC

APC/FDC

Quality

Actual Data Collection

Spec Check

Static Routing

Proc Recipe

技術仕様管理

Status Ctl

Lot sch

Cycle time

MasterData

POP(By Lot)

1990s 2000s 2010s 2020s

APC/AEC I/F

・・・・・・

Dynamic Routing

・・・・・・

Dynamic EC

・・・・・・

・・・・・・

・・・・・・

Multi Lot/carrier

Planned Split/Merge

Master Data

POP(By Wafer)

EES APC/AEC IFDynamic EC

Smart Factory

Big DataIoTAI

Smart Factory ImplementationCognitive Enterprise

Cognitive Enterprise

Scalable AIDigitalTwinSimulation

Hybrid Cloud

Big DataData MiningMLVirtual Metrology

Scalable AIDigitalTwinSimulationHybrid Cloud

66

Internal Semiconductor Solution Development 2005 - 19

IBM Research © 2019 IBM Corporation

Production Planning and Scheduling(Manufacturing Operations users)

1. Range Break Optimization2. AMHS Load Estimation3. WIP Simulation 4. Maintenance Scheduling5. Capacitated Range Management6. Optimized Sector Scheduling7. Operations Simulation / Optimization

Yield Enhancement and Product Quality Control(Process, Integration, and Product Engineering users)

1. Manufacturing History Data Mining (Chamber signals)2. Large Scale Data Monitoring (Reduce SPC false alarms) 3. Trace Based Tool Stability & Matching4. Trace Based Wafer Diagnosis5. Trace Based Predictions (Virtual Metrology, Maintenance) 6. Wafer Performance Predictor7. Real Time FDC Enhancements8. Memory Array Failure Pattern Analysis9. Performance Based Chamber Matching10. Comprehensive trace data monitoring 11. Lithographic source anomaly detection12. Etch chamber state assessment13. Deposition virtual metrology

Comprehensive Trace Analysis Complementing FDC

Leverage of AI and big data is now shifting to “Trusted & Scalable AI” with comprehensive result from automation of AI and big data analytics execution.

7 7

IBM COGNITIVE ENTERPRISE



AGENDA



8

IBM Cognitive Enterprise

White paper downloadhttps://www.ibm.com/thought-leadership/institute-business-value/report/cognitive-enterprise

https://www.ibm.com/thought-leadership/institute-business-value/report/cognitive-enterprise

9 9

COGNITIVE ENTERPRISEFOR 300MM WAFER FABS



AGENDA



10

At 300mm wafer fabs in Chapter2

Scalable AI on hybrid cloud embedded in the business process of fab operations and engineer works

DigitalTwin of fabs is Trusted , Real-Time and Scalable data platform for AI

Mission critical CIM applications modernization tocloud applications on Hybrid cloud

Digital ReinventionTM at 300mm wafer fabs in Chapter2

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DigitalTwin of 300mm FabsReal-time runtime 300mm Fab

Real-time runtime 300mm FabReal-time runtime 300mm Fab

Physical 300mm Fabs

Mission critical CIM applications

analyze

monitor

simulate

Synchronize

Actions

• High speed simulation

• Deep learning• Big data

analytics

MES MESDB

MES MESDB

MES MESDB

Multiple Physical Fabs

Mission critical CIM applicationsmodernization to cloud

Trusted , Real-time and Scalable data platform for AI

Repository

DigitalTwin Data Platform

Local DigitalTwin

Local DigitalTwin

Local DigitalTwin

EnterpriseDigitalTwin

Big Data

Scalable AI platform on hybrid cloud

Private Cloud

IBM HPCaaS / Quantum

IBM Watson Cloud ServicesAWS Cloud ServicesGoogle Cloud Services


Open InnovationCollaboration

(eg. Eqp Suppliers)

DigitalTwin of 300mm Fabs is the Cognitive Enterprise platform for 300mm wafer fabs

Digital Twin simulationbased predictive decision

Privacy Preserving AI


SROM: AI for Microelectronic Manufacturing via Hybrid Cloud

SROM Powered AI Solutions for Microelectronic Manufacturing

and Development via Hybrid CloudSROM Differentiation

1. Complex Industrial Manufacturing Semantics2. Advanced AI & Machine Learning (GMM, LSTM, Cohort Analyses, …)3. Scalable Big Data Solution Platform

Microelectronic Analytics Expertise1. Detection of abnormal events & product quality2. Diagnoses of aberrant events & product3. Prediction of yield, quality, & throughput4. Operations optimization

SROM: Smarter Resources and Operations Management


Multi-Cloud Hybrid Cloud Deployment – AI ApplicationsCohort DiscoverySparse Gaussian Sparse Mixture Model

SROM (AI for Mfg)

• Anomaly detection

• Failure pattern analysis

• Root cause analysis

• Survival analysis

• Cohort analysis

• Process optimization

Deployment Mode

IBM Cloud Pak(Kubernetes [k8s])

Watson Studio Add On(docker containers)

Jupyter container

Spark container

Spark container

Spark container

Watson Cloud Services (e.g. Watson API, AI for Mfg)

Permanent shared mount SROM

Deploy trained model

Model deployment

container

AWS Cloud Services

Google Cloud Services

Azure Cloud Services

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DigitalTwin simulation based predictive decision support by AI on IBM cloud services (HPC/Quantum) will increase fabs operation efficiency

Common challenge at 300mm Semiconductor

manufacturers

• Complexity of dispatching WIP Lots across multiple Fabs becomes higher and higher.

• Advanced technology node increases uncertainty

• Difficult to predict near future fab output whether fabs can meet the business target (ex. monthly shipment target, on-time delivery ratio)

AI generates and executes multiple simulation cases and evaluates the results, then recommend actions.

SiView MES

Fab SimulatorIoT apps

Fab output & bottleneck prediction based on learning from simulations

AI

Fine-grained modelHigh speed parallel simulation by using public HPCaaS

SiView RTD

IBM HPC/QuantumCloud Services

DigitalTwin simulation based predictive decision support

Case1

Case2

DispatchingStrategy

ExecuteActionsrecommended by AIPhysical

FabsManagement decisions to commit shipment plan

Fab Simulator

Fab Simulator

Fab Simulator

SiView RTD

Case3

Case4

SiView RTD

SiView RTD

SiView RTD

1515

Autonomic operations

Adaptive operational processesand workflows will continuously learn and be autonomic

1616

FACILITY MANAGEMENT WITH AI



AGENDA



17

300mm Fabs Facility Management System is enhanced with Analytics and AI

Planning & Scheduling

Execution

Plan

Assist

Monitor Predict

APM(Asset Performance Management)

Decision Optimization

EAM (Enterprise Asset Management)

Maintenance Execution

APM enhances EAM foundation with Analytics and AI

18

DigitalTwin of 300mm FabsReal-time runtime 300mm Fab

Real-time runtime 300mm FabReal-time runtime 300mm Fab

Physical 300mm Fabs

EAM

analyze

monitor

simulate

• High speed simulation

• Deep learning• Big data

analytics

EAM EAMDB

Multiple Physical Fabs

Trusted , Real-time and Scalable data platform for AI

Repository

DigitalTwin Data Platform

Local DigitalTwin

Local DigitalTwin

Local DigitalTwin

EnterpriseDigitalTwin

Big Data

Scalable AI platform on hybrid cloud

Private Cloud

IBM HPCaaS / Quantum

IBM Watson Cloud ServicesAWS Cloud ServicesGoogle Cloud Services


Digital Twin simulationbased predictive decision

Privacy Preserving AI

Open InnovationCollaboration

(eg. Facility Suppliers)

DigitalTwin platform for Facility Management at 300mm fabs

APMSynchronize

Actions

Centralized Enterprise Asset Management for facilities of 300mm wafer fabs

Improved User Experience

Pervasive Interconnectivity

IoT devices (eg: Wearables)AI assistanceConversational UIAugmented reality

19 IBM Watson IoT / © 2019 IBM Corporation

What does the Future of Work look like for Technician ?

Execute work orders more efficiently and complete tasks right the first time - safely

Use voice to check and execute work orders

Capture pictures of findings using phone

AI guidance to ask questions regarding issues

Connect with remote expert

Continual training of AI knowledge base

Digital assistant to ask questions

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Technician of the Future….is here today

IBM Watson IoT / © 2019 IBM Corporation

Location Intelligence

IoT Platform & Wearables

Reimagined UX

Mobile

Technician of the Future

Reimagined core user experiences for different personasMaximo WorkCenters

Connected and disconnected native mobile supportAnywhere Mobile

AI-powered digital assistant for the field technicianEquipment Maintenance Assistant

AR-enabled interaction between an expert and field techMaximo Augmented Collaboration

Worker InsightsEnsure your employees are safe wherever they are

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Work Execution Work Center

Focus on the work you need to know about now, no matter what device you have in your hands

Quickly report on items and materials used

IBM Watson IoT / © 2019 IBM Corporationc

22 IBM Watson IoT / © 2019 IBM Corporationc

Ask questions in natural language

Quickly retrieve passages and documents from structured and

unstructured sources

Generate measurable businessvalue

????

???

??

Standardize your repair processes

Customer Satisfaction

Reduce mean time to repair and improve

first time fix, reducing repair costs

Equipment Maintenance Assistant Studio

Equipment Maintenance Assistant An AI assistant for your field service teams

23 IBM Watson IoT / © 2019 IBM Corporation

How our technology differsfrom off-the shelf solutions

Technician and expert views

Launched from a Maximo Work order

Session details saved in the Maximo Work order for self guidance

Technician viewExpert view

Builds AR content for complex environments with peer guidance

Technician view

Maximo Augmented CollaborationBringing expertise in real-time to the jobsite

IBM Watson IoT / © 2019 IBM Corporationc23

24 IBM Watson IoT / © 2019 IBM Corporationc

Worker Insights SaaS on IBM Cloud

WearablesSensors

Real-time and historical dashboard(Senior Management / Executive View)

Dashboard / KPI’s / Monitoring

Supervisor Mobile App

Maximo HSE Integration

Maximo Worker Insights Overview

WorkerMobile App

Partner Edge

Gateways

IoT Platform

&

ExtensibleIndustryAnalytics

Edge

EdgeWeather

&3rd Party Data

Hazard Detection

2525

IBM Garage

25Think

Envision Future StateEstablish & Pr ior it ize Id ea BacklogBui ld PrototypeProve PrototypeBui ld POCProve POC

Design Thinking WorkshopEnd User Testing

Bui ld PrototypeBui ld POCUse CasesPlaybacks

Def ine Value Dr iversProve PrototypeProve POCCompet it ive AnalysisOp erat ing Model Assessment

TransformArchitect MVPBui ld MVP & IteratePlaybacksUse Cases Story Backlog

Design MVPProve HypothesisEnd User TestingIncorporate Feedback

Bui ld MVP & IterateMVP Runbook

Prove Hypothesis Red esigned Bus iness ModelBus iness Canvas ModelTarget Op erating Model

ThriveCont inuous Dep loymentMVP1MVP2Prod uction ArchitecturePlaybacksStory log up d ated

End User TestingDesign Op timizationIdea Log updated

Dep loyArchitectureSecur ity & Comp liance

Value Forecast & PlanValue to Cap abil i ty MapEnterpr ise Change Ad op tion PlanDigi tal L abor & Change Management Plan

IBM Engagement Model

The practices, architectures and toolchains cover the entire product lifecycle from inception through capturing and responding to customer feedback and market changes.

SUMMARY• Semiconductor 300mm wafer fabs has implemented Smart Factory

since 2000s and the level of automation has become higher and higher by continuous addition of event driven automation scenario on workflow engine. Leverage of AI and big data analytics has been started at most of 300mm wafer fabs, but it’s still limited to get big benefit.

• “Trusted & Scalable AI” is key direction of AI for massive usage of AI.

• 300mm wafer fabs are also ready to move to Digital Reinvention Chapter-2 Cognitive Enterprise transformation.

• DigitalTwin platform is key business platform and it consists ofDigitalTwin data platform and Scalable AI platform on hybrid cloudon top of modernized mission critical applications on hybrid cloud.

• Facility management at 300mm wafer fabs is also ready to move to Chapter-2 Cognitive Enterprise on DigitalTwin platform with improved user experience to support technicians by pervasive interconnectivity with AI / expert assistance.

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QUESTIONS AND FURTHER DISCUSSION ?

Email [email protected]

Phone +81 50 3150 5458

LinkedIn https://www.linkedin.com/in/ryuhichiroh-hattori-11374028/

cognitive enterprise · cognitive enterprise . reinventing your fabs with ai. september 19, 2019....

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