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Page 1: College of Engineering | UMass Amherstn-p-n BIPOLAR TRANSISTOR n— epitaxial layer n+ layer p— silicon substrate Field oxide Deep-trench isolation p+ Sidewall oxide spacer n + reach-through
Page 2: College of Engineering | UMass Amherstn-p-n BIPOLAR TRANSISTOR n— epitaxial layer n+ layer p— silicon substrate Field oxide Deep-trench isolation p+ Sidewall oxide spacer n + reach-through
Page 3: College of Engineering | UMass Amherstn-p-n BIPOLAR TRANSISTOR n— epitaxial layer n+ layer p— silicon substrate Field oxide Deep-trench isolation p+ Sidewall oxide spacer n + reach-through
Page 4: College of Engineering | UMass Amherstn-p-n BIPOLAR TRANSISTOR n— epitaxial layer n+ layer p— silicon substrate Field oxide Deep-trench isolation p+ Sidewall oxide spacer n + reach-through
Page 5: College of Engineering | UMass Amherstn-p-n BIPOLAR TRANSISTOR n— epitaxial layer n+ layer p— silicon substrate Field oxide Deep-trench isolation p+ Sidewall oxide spacer n + reach-through
Page 6: College of Engineering | UMass Amherstn-p-n BIPOLAR TRANSISTOR n— epitaxial layer n+ layer p— silicon substrate Field oxide Deep-trench isolation p+ Sidewall oxide spacer n + reach-through
Page 7: College of Engineering | UMass Amherstn-p-n BIPOLAR TRANSISTOR n— epitaxial layer n+ layer p— silicon substrate Field oxide Deep-trench isolation p+ Sidewall oxide spacer n + reach-through
Page 8: College of Engineering | UMass Amherstn-p-n BIPOLAR TRANSISTOR n— epitaxial layer n+ layer p— silicon substrate Field oxide Deep-trench isolation p+ Sidewall oxide spacer n + reach-through
Page 9: College of Engineering | UMass Amherstn-p-n BIPOLAR TRANSISTOR n— epitaxial layer n+ layer p— silicon substrate Field oxide Deep-trench isolation p+ Sidewall oxide spacer n + reach-through
Page 10: College of Engineering | UMass Amherstn-p-n BIPOLAR TRANSISTOR n— epitaxial layer n+ layer p— silicon substrate Field oxide Deep-trench isolation p+ Sidewall oxide spacer n + reach-through
Page 11: College of Engineering | UMass Amherstn-p-n BIPOLAR TRANSISTOR n— epitaxial layer n+ layer p— silicon substrate Field oxide Deep-trench isolation p+ Sidewall oxide spacer n + reach-through
Page 12: College of Engineering | UMass Amherstn-p-n BIPOLAR TRANSISTOR n— epitaxial layer n+ layer p— silicon substrate Field oxide Deep-trench isolation p+ Sidewall oxide spacer n + reach-through
Page 13: College of Engineering | UMass Amherstn-p-n BIPOLAR TRANSISTOR n— epitaxial layer n+ layer p— silicon substrate Field oxide Deep-trench isolation p+ Sidewall oxide spacer n + reach-through
Page 14: College of Engineering | UMass Amherstn-p-n BIPOLAR TRANSISTOR n— epitaxial layer n+ layer p— silicon substrate Field oxide Deep-trench isolation p+ Sidewall oxide spacer n + reach-through

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