deal-grove data sheet - chris mack · deal-grove model: , - for (111) silicon table and gra phs...
TRANSCRIPT
![Page 1: Deal-Grove Data Sheet - Chris Mack · Deal-Grove Model: , - For (111) silicon Table and Gra phs from S. Campbell, Fabrication Engineering at the Micro - and Nanoscale, 3rd edition](https://reader033.vdocument.in/reader033/viewer/2022052805/605d26c2d1f9711c673bb8f7/html5/thumbnails/1.jpg)
Deal-Grove Model: ���� � ���� � �� � �, �
� ����
�
- For (111) silicon
Table and Graphs from S. Campbell, Fabrication Engineering at the Micro- and Nanoscale, 3rd
edition.