DESIGN OF A RF NEMS SWITCH MATRIX

DESIGN OF A RF NEMS SWITCHByTEJASVI VEERABHADRAIAHECE 581

OutlineHistoryApplication of MEMSMEMS FABRICATIONTypes of sensing and ActuationIntroduction to NEMSRF NEMS Switch and workingNEMS APPLICATIONSReferencesHistoryMEMS- Micro Electro Mechanical Systems1950s Richard Feynman, electrical motor "smaller than 1/64th of an inch

Application of MEMSPressure SensorsAccelerometerGyro meterThermal Ink-jet PrinterFuel InjectorOptical Switch'sBio-medical applicationMEMS FABRICATIONSilicon micro-machiningBulk micro-machining (~1960)Wafer bonding (glass ~1970, Si ~1985)Surface micro-machining (~1985)Deep-etching process (~1995)LIGA (~1978)Electroplating (~1950)Micro-EDM, Laser micromachining, Micro-stereo lithographyTypes of sensing and ActuationElectrostatic Sensing and ActuationThermal SensingPiezo-resistive SensorsPiezo-electric Sensing and actuationMagnetic ActuationIntroduction to NEMSNEMS- Nanoelectromechanical systemsChallenges to NEMSDetection of displacements for a 10nm diameter beam translates into a fraction of a nanometerNEMS transducer must ultimately be capable of resolving displacements in the 10^(-15)-10^(-12) m range Electrostatic transduction, the staple of MEMS, does not scale well into the domain of NEMS 10-18 farad.Optical methodsRF NEMS Switch

RF NEMS Switch Working

Dimensions

NEMS APPLICATIONS

NEM switched CapacitorReferenceshttp://en.wikipedia.org/wiki/Microelectromechanical_systemshttp://en.wikipedia.org/wiki/Nanoelectromechanical_systemsEugene Siew*, King Yuk Chan, Rodica Ramer, Andrew Dzurak.The School of Electrical Engineering and Telecommunications,The University of New South Wales, Sydney 2052, NSW Australia.Design of RF NEMS SWITCH MarrixRF MEMS and NEMS Technology, Devices,and Applications Peter Gammel, Georg Fischer, and Jrmie Bouchaud Bell labs Journals