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Page 1: 3D s en sor testbeams at FNAL

3D sensor testbeams at FNAL

M. Arneodo, M. Obertino, M. Ruspa, A. Solano, A. Vilela Pereira

Page 2: 3D s en sor testbeams at FNAL

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FBK ATLAS09 (QUALIFICATION BATCH)

CMS pixel detectors

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Different wafer thicknesses: 200-230-250 m

Slim edge (200 m on two sides)

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Lots of wafers available, but …waiting for a general agreement with ATLAS about the use of CMS sensors

Expected low leakage current and high breakdown.


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