Micro-Electro-Mechanical-Systems (MEMS) devices bring some of the

miniaturization that was portrayed in the 1966 classic film “Fantastic Voyage” to

reality. These tiny machines are being used as pumps, motors and sensors for a

variety of different applications. USM Electrical Engineering Professor Mustafa

Guvench has recently designed and fabricated a MEMS resonator for use in gas

sensing and frequency control applications. Ordinarily these types of devices can

be tested utilizing micro-manipulated electro-probing, however given the unique

and varied environmental conditions of the potential applications; a new means of

testing will need to be developed as part of chip research and development.

The scope of this project is the packaging and testing of the resonator at high

temperatures and under exposure to different gases and concentrations of gases.

Once successful tested under these conditions, the MEMS resonators will provide a

very inexpensive, reliable and miniature means of testing and monitoring

atmospheric conditions. Potential uses may include many health and safety uses,

as well as space exploration and defense applications.

Micro-Electro-Mechanical-Systems (MEMS) devices bring some of the

miniaturization that was portrayed in the 1966 classic film “Fantastic Voyage” to

reality. These tiny machines are being used as pumps, motors and sensors for a

variety of different applications. USM Electrical Engineering Professor Mustafa

Guvench has recently designed and fabricated a MEMS resonator for use in gas

sensing and frequency control applications. Ordinarily these types of devices can

be tested utilizing micro-manipulated electro-probing, however given the unique

and varied environmental conditions of the potential applications; a new means of

testing will need to be developed as part of chip research and development.

The scope of this project is the packaging and testing of the resonator at high

temperatures and under exposure to different gases and concentrations of gases.

Once successful tested under these conditions, the MEMS resonators will provide a

very inexpensive, reliable and miniature means of testing and monitoring

atmospheric conditions. Potential uses may include many health and safety uses,

as well as space exploration and defense applications.

Electrical Engineering Department

Presenter: Robert MacKinnon Jr. Advisor: Professor Mustafa Guvench

Coauthor: Joshua Ward

Electrical Engineering Department

Presenter: Robert MacKinnon Jr. Advisor: Professor Mustafa Guvench

Coauthor: Joshua Ward

Frequency Response of a

SOI-MEMS Resonator

Magnitude(yellow) & Phase(blue)

MEMS wire bonding diagram

SOI- MEMS chip, size 5 mm x 5 mm wire

bonded to a 44-pin J-LDCC gold package

MEMS Test Setup:

HP 54504A Digital Oscilloscope

HP 5335A Universal Counter

HP 4194A Spectrum Analyzer

KI 213 Programmable Source

Virtual temperature controller

Wire bonding machine

Design of a Test System and Packaging of SOI-MEMS Resonators for Design of a Test System and Packaging of SOI-MEMS Resonators for High Temperature CharacterizationHigh Temperature Characterization