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Energy and Utility Savings With Vacuum and Abatement Systems
Jerome Boegner, Edwards Ltd.
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Energy/Water efficient solutionsfor EUV and Epitaxial CVD processes
Evolution of ATLAS for high H2 processes
ATLAS
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ATLAS - Combustion/wet abatement
• Burner/Washer system
• Unique “flameless” combustor– Reliability– Low NOx
• Proven PFC abatement performance
• World reference for the abatement of all Etch and CVD processes– Over 5,000 units in operation
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Latest generation EPI and EUV processes – EHS challen ges
Edwards developed innovative & greener solutions to reduce
Footprint, Energy & Water consumption
Evolution of ATLAS for high H2 applications
Hydrogen (H2)
Hydrogen chloride (HCl)
Key abatement challengesKey abatement optimization
targets
EUVup to 400slm
per toolNone
1- Full combustion of H 2
2- Cooling of the burner exhaust3- Maintain tool Uptime
EPI4 PC
up to 500slm per tool
up to 120slm per tool
1- Full combustion of H 2
2- Cooling of the burner exhaust3- Scrubbing of HCl & avoid corrosion4- Maintain high Uptime
1- Minimize water & fuel gas consumption
2- Reduce footprint
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Innovative solutions: ATLAS-Nova and ATLAS-Epi
Keep the StandardATLAS platform
No increasein footprint
Double H2 treatment capacity to 500slm
�Advanced inlet nozzle design�Modulated CDA/O2 injection�Up to 6 inlets
Double coolingCapacity &
Use anti-corrosion material
���� Increase water re-circulation rate���� PCW-fed heat exchanger
���� High efficiency spray tower& water spray nozzles
New ATLAS Solutions for High Hydrogen processes
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Utility savings EUV
0
5,000
10,000
15,000
20,000
25,000
30,000
35,000
40,000
Natural gas (m3) Water (m3)
ATLAS "Evolution" Standard ATLAS
New ATLAS for EUV & EPI – Footprint, Energy & Water
69% reduction
26,000m3/yr
25% reduction
4,000m3/yr
Up to 19 Tons/yr of Carbon saved
Utility savings Epi CVD
0
10,000
20,000
30,000
40,000
50,000
60,000
Natural gas (m3) Water (m3)
ATLAS "Evolution" Standard ATLAS
76% reduction
40,000m3/yr
39% reduction
15,000m3/yr
50% reduction in Footprint
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New ATLAS for EUV & EPI – Savings summary
Utility cost% m3/year % m3/year USD per year
EUV 69% 26,280 25% 4,205 $10,222
EPI 39% 14,717 76% 39,946 $14,372
Natural Gas Water
• Latest EPI and EUV process � severe abatement challenges– Hydrogen, exhaust cooling and corrosion
• The ATLAS abatement has evolved to deal efficiently with this type of process whilst achieving significant improvement in:– Sub-fab space utilization (50% footprint reduction)– Energy and water consumption– Operating cost
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Integrated vacuum and abatement
Use of Green Modes to reduce Energy and Utility consumption
Field data - Cost savings during the Ramp-up phase
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Idle Mode Communication to initiate Green Mode
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EZenith in a 40kwpm Foundry Fab (USA)
Idle mode triggers a Green modein the sub-fab equipment
~ 400 process tools
81% idle mode capable
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FabWorks Dry Pump Power Logging
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Three Chamber Etch Tool - Abatement Fuel savings
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A Summary Look at Four Examples
• Total expected annual savings is $5000 - $8,000 per tool– Verification will improve tracking– CVD tools with larger pumps and N2 will show larger savings– Continuous Improvement Plans will increase savings
• Savings expected to decrease as fab ramps
Utility General expectations
Etch 1 Etch 2 Etch 3 Etch 4
($/yr) ($/yr) ($/yr) ($/yr) ($/yr)
Pump Power $100-300 $280 $1293 $342 $64
On a per pump basis, Etch2 (with larger pumps) savings is higher. Etch 4 had low idle rates and uses highly efficient pumps. CVD pumps have N2 savings capabilities.
Atlas fuel $2000-$4000(total)
$3472 $5027
Higher idle time. Scrubber wastewater and process cooling water savings not counted.
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Conclusion – Benefits of Green Mode
• During the ramp-up phase savings between $5,000 and $8,000 per tool can be expected
• Savings will decrease when the fab is used to its full capacity– Decrease in idle time
• As more Green Mode data is collected, further savings will be reported, accounting for:– Abatement water, drain and cooling water savings– Pump process cooling water savings– Use of larger pumps in CVD– Continuous Improvement - allowing further reduction in pump
speed during idle period
• Full details can be found in the article from the Advanced Semiconductor Manufacturing Conference (ASMC), 2012 23rd Annual SEMI:
– “Green Mode: Equipment Interface to Reduce Semicondu ctor Sub-Fab Utility Consumption” byAdrienne Pierce, Edwards Vacuum, Inc., Santa Clara, CA USA