ESPROS Photonics CorporationKey Technology of the 21st Century
High Speed, Backside Illuminated 1024x1 Line Imager with Charge Domain Frame Store in Espros Photonic CMOSTM Technology
IISW2013 Snowbird, UTJune 15th, 2013
Martin Popp, Beat De Coi, Dieter Huber, Pascal Ferrat, Markus Ledergerber
Espros Photonics AG, Sankt Galler Strasse 135, CH-7320 Sargans, Switzerland
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Our Goal
Provide high performance yet cost efficient solutions for special imaging applications
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Our approach
Base material
Adapted CMOS process
Wafer thinning,BS processing
Packaging
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The application
Key requirements:1024 pixels: 7.5µm x 120µm Single analog video out up to 50klines/sHigh-speed frame store: burst rate 500klines/s
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The product
130
0µm
7960µm
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The product
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The Pixel: Fill factor
Position of light source
Scan point light source across pixel field:No dips in summed intensity observed==> 100% fill factor
Output pixel i
Output pixel i+1
Sum of outputs: Not dips
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The Pixel: QE & resolution
450 550 650 750 850 950 10500
0.1
0.2
0.3
0.4
0.5
0.6
0.7
0.8
0.9
1
measured QE
wavelength [nm]
abso
lute
qu
antu
m e
ffici
ency
Geometrical aspect ratio of pixel in Si:7.5µm (pitch) / 50µm (height) = 1:7
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Resolution vs. wavelength
300 400 500 600 700 800 9002
2.5
3
3.5
4
4.5
5
5.5
6
0.01
0.1
1
10
100
s_pix [µm]
Linear (s_pix [µm])
Absorption length in Si [µm]
Wavelength [nm]
sigma_pix [nm]
Abs
orp
tion
len
gth
[µ
m]
Spatial resolution is constant over wide wavelength range→ high-res NIR imaging becomes possible
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Frame store: Resolution
No impact on resolution by charge collection close to frame store
Sub-pixel are a
90µ
mF
rame store
(shielded) 60 µ
m
Effective optical sensitive height: 12
0µm
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Frame store: Parasitic light sensitivity
No impact by illumination in FS area up to 7x max. signal amplitudeLimiting factor: charge spill-over
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Summary
CMOS-CCD technology with backside illumination
High-QE over broad wavelength range
Application example: Line imager
Charge domain frame store
Constant PSF from blue to NIR
Other applications can be adressed
Thank you!
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more Info … ESPROS Photonics AGMarket ing & Sales St . Gallerst rasse 135
CH-7320-Sargans Main +41 58 411 03 00 Fax +41 58 411 03 01 [email protected] www.espros.ch
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