![Page 1: iEUVI Mask TWG October 6, 2013ieuvi.org/TWG/Mask/2013/MTG100613/12_backside... · IEUVI Mask TWG_LT_100613_R3.pptx Author: Masashi Sunako Created Date: 10/2/2013 7:42:10 PM](https://reader035.vdocument.in/reader035/viewer/2022063020/5fe18450e0c5247a8e3bde7e/html5/thumbnails/1.jpg)
iEUVI Mask TWG October 6, 2013
![Page 2: iEUVI Mask TWG October 6, 2013ieuvi.org/TWG/Mask/2013/MTG100613/12_backside... · IEUVI Mask TWG_LT_100613_R3.pptx Author: Masashi Sunako Created Date: 10/2/2013 7:42:10 PM](https://reader035.vdocument.in/reader035/viewer/2022063020/5fe18450e0c5247a8e3bde7e/html5/thumbnails/2.jpg)
1
Issue on Backside of EUV mask
EUV Mask
Defect
Overlay error
Scanner stage
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Defect map (after chucking)
2
Total count > 10,000 defects
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Height measurement (1)
3
Height: 10um Width: 20um
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Height measurement (2)
4
Height: 1.1um Width: 18um
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5
Lasertec “BASIC” Inspection Measurement Removal (*)
EUV Mask EUV Mask EUV Mask
After
(*) under feasibility study
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Dual Pod Handling
6
EUV mask backside is Inspected and measured on Inner pod to reduce a possibility of particle adder
Inner Pod
Outer base
EUV Mask
Inner base
Outer Pod
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Inspection capability
7
0.4um PSL on CrN
Capture rate 99.9%
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8
Comparison with AFM
BASIC: 0.383um AFM: 0.379um
BASIC series 3D image
Profile for height
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Example of defetct removal
9
53um
Height: 17um
Before After
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Thank you very much for your attention.
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T. Suzuki et al., “High Magnification Review Function for defect location accuracy improvement with EUV Actinic Blank Inspection Tool”, Session 5: Mask Inspection Tools on Tue, Oct. 8, 11:40 am
ABI tool development update