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Micro-RDCMicroelectronics Research Development Corporation
4775 Centennial Blvd. Suite #130Colorado Spring, CO 80919
719-531-0805
8102 Menaul Blvd. NE, Suites A, C, & DAlbuquerque, NM 87110
505-294-1962
2491 NE Twin Knolls Drive, Suite #106Bend, OR 97701
541-382-9500
Microelectronics Research Development Corporation
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Micro-RDC Capabilities 2
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Micro-RDC Capabilities 3
Micro-RDC
� Employee Owned Small Business
� 27 Employees• 21 Technical• 6 Administrative
� Three Offices• Colorado Springs, CO• Albuquerque, NM• Bend, OR
Bend, OR
Colorado Springs, CO
Albuquerque, NM
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Micro-RDC Capabilities 4
Organizational Structure
PresidentJoe D. Cuchiaro
Board of DirectorsJoe D. CuchiaroDr. David Mavis
Open Seat
Proposals/Program Control
Jenny McGinnis
Design ScientistOregon OPP
Marty Denham
Senior Design Engineer
Dean Allum
VP ABQ OPPKeith Avery
Director HR/AccountingDiana Gault
Sr. Design EngineersPat McGuirk
Michael SibleyJohn Bailey
CFO/Karen VanCura
Chief EngineerPaul Eaton
Staff Engineers Jim Smith
John McIverErika Clausen
Customers
Director Test EngineeringStephen Philpy
Colorado Springs Office Manager
Dora Radcliff
Albuquerque Office Manager
Laura Trainor
Chief Scientist Design Engineering
Dr. David Mavis
Corporate Security/Facilities
Linda Schardt
Technicians Erik Smith
Richard FloydBill Boubong
Senior Design Engineers
Sasan ArdalanRobert Keezer
Staff Engineers Charlie Brown
Will Burke
Technicians Scott Denham
Colorado Springs Design
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Micro-RDC Capabilities 5
Micro-RDC Business Focus
� Radiation Effects Research and Development
� Radiation Test Services
� Design Services
� “Product” Development
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Micro-RDC Capabilities 6
Radiation Effects Research and Development
� Technology Characterization
� Mitigation Approaches
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Micro-RDC Capabilities 7
Radiation Effects Research and Development
� Radiation Effects on New Technologies� Total Ionizing Dose� Single Event Effects – Latch-Up, Upsets, Transients� Prompt Dose/Dose Rate – Latch-Up, Upsets
� Mitigation Approaches� Simulation� Transistor Design� Circuit Design� Engineered Substrates
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Micro-RDC Capabilities 8
Radiation Effects Research and Development
� Characterization Test Vehicles - Transistors
Transistor Array Drop-In
Vdd / VssPair for ESD
2x10 Probe Pad Array Drop-In
Gate connection(Horizontal M1)
Source connection(Vertical M2)
Drain connection(Vertical M2)
Body connection(Horizontal M1)
Gate
Drain
Source
Body (Vdd or Vss)
� Transistor arrays� Two dedicated test chip peripheries
� Total of 40 different geometries
� Full ESD gate protection for wire bonding
� Co60 TID testing
� Probe pad arrays� Three test chip core drop ins
� Total of 75 different geometries
� Simple diode gate protection for probing
� ARACOR TID testing
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Micro-RDC Capabilities 9
Radiation Effects Research and Development
� Characterization Test Vehicles - CircuitsSET Pulse Measuring
Multiple ArraysMultiple Configurations
Distributed SRAMIntegrated Test Chip
Delay ChainsTiming Validation
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Micro-RDC Capabilities 10
Radiation Effects Research and Development
� Model Development and Simulation� Collection dynamics must be established by circuit response
� Currents must decrease as voltages collapse (reduced E fields)� Pulse broadening will occur naturally (longer times will be needed to
clear a fixed charge from the substrate)
� New SPICE model reflects these dynamics� Equivalent Collection Model (ECM) designed to capture the effects of
node voltage collapse� Variational calculus to solve integral equation with variable limits:
� Note that I(t) is implicitly defined from an integral whose limit of integration varies according to the circuit response
� Recombination / diffusion included by damping Q(s) as function of time� Boundary condition Q(s=∞) likely dependent of Vdd
� Implement solely with standard SPICE elements
)Q()Q()I( :)I( )(
0∞==� s,sdt't't
st given for Solve
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Micro-RDC Capabilities 11
Radiation Effects Research and Development
� Transistor Design
Ringed Source NMOS for Edge LeakageSuppression (TID)
P+ Channel Stop for Latchup Suppression and for FOX Leakage
Suppression (TID,SEL)
Robust Metallization to support Primary
Photocurrents (DR,SEL)
Metal 1 Bridging Channel Stop
PMOS Sized for Optimum Gate Delay
P+ Substrate Taps Control Substrate Voltage (DR, SEL)
N+ Well Taps Control Well
Voltage (DR,SEL)
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Micro-RDC Capabilities 12
Radiation Effects Research and Development
� Design Hardening� Abutted substrate contacts on transistor sources provide
recombination� Gate isolated reverse biased junctions near critical nodes provide
hard rail collection diodes
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Micro-RDC Capabilities 13
Radiation Effects Research and Development
� Circuit Design� Data latch SEU/SET mitigation
� Temporal sampling to achieve both spatial and time redundancy� Variable sampling delay for hardness / performance tradeoff� Immune to multiple node strikes and transients on any node� Self scrubbing, does not integrate errors as normal TMR
� SRAM SEU mitigation� Conventional 4T storage with dual-port PMOS access� EDAC for single bit errors� Scrubbing to reduce multiple bit errors
CLOCK
OUTIN
MAJ
MUX
2�T
�T
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Micro-RDC Capabilities 14
STI
Epitaxial Silicon
Buried Oxide
Silicon Substrate
STI
Drain SourceBody
Gate
N-Well N-Well
N+ N+P+
Inversion Layer
STI STISTI
Epitaxial Silicon
Buried Oxide
Silicon Substrate
STI
Drain SourceBody
Gate
N-Well N-Well
N+ N+P+
Inversion Layer
STI STI
Radiation Effects Research and Development
� Substrate Engineering� New method under investigation
� Electric field induced inversion layer in place of HDBL � Can be located much closer to surface� Can remove charge through drift, rather than through diffusion
and recombination� Attractive for a number of reasons
� Uses standard CMOS processing� Requires no mask changes� Requires no process modifications
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Micro-RDC Capabilities 15
Radiation Effects Research and Development
� Engineered Substrates� Develop test methods to characterize
� Lateral diffusion� Digital SET pulse widths� Upset threshold LETs� Latchup� Dose-rate charge collection
� Design and layout reusable test chip suite (in order of attack)� SRAM with various critical node separations� Digital SET shift registers retargeted to Jazz 180 nm� Transient propagation circuits� Diffusion, latchup, photo-diode, photo-transistor structures� Basic transistors to monitor device parametric parameters
� Support design and development with 3d-device simulations� CFDRC
Figure 1. Layout of the entire test chip.
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Micro-RDC Capabilities 16
Radiation Test Services
� Technology Characterization
� Total Ionizing Dose
� Single Event Effects
� ELDRS
� Prompt Dose
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Micro-RDC Capabilities 17
Radiation Test Services
� Follow Mil Std 883 Practices� Total Ionizing Dose� Single Event Effects
� Latch-up� Upset� Transients
� Dose Rate/Prompt Dose� Latch-up� Upset
� Enhanced Low Dose Rate Effects (ELDRS)
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Micro-RDC Capabilities 18
Radiation Test Services
� Facilities� AFRL Cobalt 60, LEXR, Cesium, and Flash X-Ray� Longmire Laboratory� Berkeley Cyclotron� Texas A&M Cyclotron� Brookhaven National Lab – Tandem Van de Graaff� Indiana University Cyclotron� Etc.
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Micro-RDC Capabilities 19
Radiation Test Services
� Variable Delay Temporal Latch � Shift register immune to upset if transient width < ∆∆∆∆T filtering delay� Vary ∆∆∆∆T with current starved delay chain� Measure error cross section as function of ∆∆∆∆T
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Micro-RDC Capabilities 20
Radiation Test Services
� Least-Squares Fit Data Analysis� Mathematical statement of the problem
� Data:� Parameters:� Function:� Minimize Chi-Squared of the fit to the data:� Solve:
� Generic least squares fitting method� Linearize:� Iterate:
� ���� Best fit parameters that minimize ΧΧΧΧ2
� ���� Parameter uncertainties that reflect the data uncertainties
[ ]2
22 ),y(
1� −=Χ
iii
i
axy�
σ
1,niy ii =± ,σ1,mja j = ,
st variableindependenxax ii = ),,y(�
1,mjdad
j
==Χ ,0
2
][αδβ ⋅= a��
[ ]k
i
i
i
ik a
yaxy i
∂∂−=� ),y(
12
�
σβ
k
i
j
i
i ijk a
yay
∂∂
∂∂=� 2
1σ
α
1][][ and ][ where, −=⋅=+→ αεεβδδ�����
aaaa
ja
jjja ε=∆
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Micro-RDC Capabilities 21
Radiation Test Services
� Typical ELDRS Data
-10
-8
-6
-4
-2
0
1 10 100
Dose (krad)
Del
Tem
p (C
)
HDR GrHDR BiasLDR GrLDR Bias
AD590 average change in °C vs. dose for high and low dose rate irradiation at two biases
Data from RLP Researchand NAVSEA/Crane
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Micro-RDC Capabilities 22
Radiation Test Services
� Test Hardware� FPGA Test Board
� Standard test platform� Custom daughter card� Leverage existing code� Used for multiple tests
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Micro-RDC Capabilities 23
Design Services
� Custom ASIC Development
� Circuit Design
� System Design
� High Density Packaging
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Micro-RDC Capabilities 24
Design Services
� Research and Design of Integrated Circuits� In-house CAD tools
• PC Based Design, Layout, and Simulation
� Access to advanced CAD tools via AFRL SEAMS center• Workstation Based Design, Layout, and Simulation
� Foundry Flexible
� Circuit Design for Responsive Space� SPA-U/S � ASIMs� Flex Circuit Module
� Advanced Packaging� Multi-Chip Modules� Chip-on-Board
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Micro-RDC Capabilities 25
Design Services
� Memory Development
1K X 72
256 X 72
64 X 72
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Micro-RDC Capabilities 26
Design Services
� IO Development� IO Pad Pitch is 64 microns� Staggered Pad Layout� Effective Staggered Pad Pitch
is 32 microns� Annular Gates for All NFET’s
and PFET’s
Primary ESD Diodes
Secondary ESD Diodes
Output NFETs
Output PFETs
Pad Opening is52 microns
Level Shift and Control
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Micro-RDC Capabilities 27
Design Services
� Responsive Space Design Support
8031
mem
ory
map
Processor(ex. 8031)
Bypass storage
Non-volatile memory: (XTEDS) Time
synchronizationstate machine
Test bypass engine state
machine
Power mgt
x-interface (ex. “U” =
USB)
Dig
ital
Use
r in
/ou
tpu
t
An
alo
g
Use
r in
pu
t
An
alo
g
Use
r o
utp
ut
Po
wer
Use
r o
utp
ut
Mis
c.U
ser
in/o
utp
ut
Test bypass
SPA-x
Non-volatile memory:
program/data
RAM memory
Appliqué Sensor Interface Module (ASIM)
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Micro-RDC Capabilities 28
Design Services
� Key AT Technologies� eFuses
� Must be only destructively readable (i.e. damaging the component).� Antifuses and other programmable ROMs possible.
� Key Structures that disintegrate upon known reverse engineering efforts.� Key focus: Apply in-depth understanding of nano-scale IC technology to
effectively prevent reverse engineering of critical keys.� Ciphers
� Maximal Length Linear Feedback Shift Registers (LFSRs)• Sufficiently large N or effectively large N required for sufficient entropy.• Complex LFSR-based scramblers that obfuscate tap sequences.
� Other, included Blowfish, Twofish, and other Block Ciphers� Cost-effective NVRAM
� Ability to determine that a series of unauthorized attempts have been made to determine stored keys.
� NVRAM (after several attempts) completely locks part out forever.� Automation Tool Flow enhancements� RHBD Techniques
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Micro-RDC Capabilities 29
“Product” Development
� Structured ASIC
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Micro-RDC Capabilities 30
“Product” Development
� Structured ASIC Goals� Current Options for Radiation Hardened Parts
� Custom/Standard Cell ASIC Design� Rad-Hard by Process Foundry
� RHBD on Structured ASIC� Use radiation hardening by design (Micro-RDC)� Leverage commercial foundry� Leverage commercial structured ASIC
• Existing Architecture (ViASIC ViaMask)• Existing Tool Set (ViASIC ViaPath)
� Reduce design cycle� Reduce fabrication cost
Provide Rad-Hard Devices in Timely Manner at Reasonable Cost
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Micro-RDC Capabilities 31
“Product” Development
� Structured ASIC Reticle
18mm
21mm
10.42 X 18
10.42 X 8.92
5.13 X 4.38
5.13 X 4.38
5.13 X 4.38
Reliability Test Coupon
2.49 X 2.12
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Micro-RDC Capabilities 32
“Product” Development
Block Memory: ~15mm² per MbitSERDES: 1.125 GHz Physical Layer OnlyPLL/DLL: 100MHz – 1.25GHz LVDS IO: Number of transceiver pairs is TBD. CMOS IO: 2.5V standard input, output, bi-direct, etc.
Embedded Block
Memory (bits)Structrued ASIC Chip Size and Features
Chip Size (mm²) MacrosLogic
(EquivalentGates)
IO
Large
Medium
Small
X-Small
187.56
92.95
22.47
4.85
SERDES, PLL/DLL
SERDES, PLL/DLL
None
None
1828710
906227
219077
47334
?
?
None
None
2532060
1254776
303337
65540
LVDS, CMOS~330 Regular
~600 Staggered
LVDS, CMOS~200 Regular
~375 Staggered
LVDS, CMOS~120 Regular
~200 Staggered
CMOS~50 Regular
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Micro-RDC Capabilities 33
“Product” Development
� Roadmap
07 08 09 10 11 12 13 14 15 16 17 18 19
90nm Bulk
SASICRev 6 45nm SOI SASIC
Rev 7SOI
Demo
SASICRev 4
SASICRev 5Demo
TestChip
DemoChip
SASICRev 1
ImprovedSERDES
Analog
SASICRev 2
SASICRev 3
ViaPathTool
IOUpdate
65nm Bulk
SOIR&D
SERDES
Analog
IO
TechnologyPorting
SASICRev 8
SASICRev 9Demo 32nm SOI
TechnologyPorting
ViaPathTool
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Micro-RDC Capabilities 34
“Product” Development
� Product Flow
Customer Sales/Mktg
MRDC ViASIC
ViaPath Tool
KCP
IBM
Pkg/Qual
Inputs:ConceptVHDL/VerilogViaPath GDSII
Outputs:Bare DiePackaged PartsQualified Parts
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Micro-RDC Capabilities 35
Summary
� Tightly held employee owned company� Leaders in Radiation Effects
� Research, Mitigation, Test, and Data Analysis
� Single Event Transient Pioneers� Developing Broad-based Test Capability� Design Capability
� IC’s, Circuits, Systems
� Leveraging R&D Into “Products”� Structured ASIC