Download - Process Control List MW Fei Long
Introduction
Ref no.
Date2002-11-17
Page1/1
General process control list Mask washing
Hua Fei, CPT-3, 34RF mk 2AuthorHounian Chen
E. Keetels
General Process control list
ProcessItemSpec*Control frequency, record
UtilitiesDemi water pressure 30 (C
Compressed air pressure
- process air
- control air6.0 + 0.5 bar
6.0 + 0.5 bar
6.0 + 0.5 bar1x / shift, Util. Check list
1x / shift, Util. Check list
1x / shift, Util. Check list
Water sprayingWater pressure gun side
Water pressure view side1.2 + 0.2 bar
0.8 + 0.2 bar2x / shift, Proc. Check list
2x / shift, Proc. Check list
US vibrationUS generator ok?
Water flow skimmer
Water flow central
Water flow bottom800 + 50 l/h
1200 + 100 l/h
1500 + 100 l/h2x / shift, Proc. Check list
2x / shift, Proc. Check list
2x / shift, Proc. Check list
2x / shift, Proc. Check list
Mask dryingAir temperature drying tunnel130 + 5 (C2x / shift, Proc. Check list