process control list mw fei long

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Ref no. Date 2002-11-17 Page 1/1 General process control list – Mask washing Hua Fei, CPT-3, 34RF mk 2 Author Hounian Chen E. Keetels General Process control list Process Item Spec* Control frequency, record Utilities Demi water pressure 30 C Compressed air pressure - process air - control air 6.0 + 0.5 bar 6.0 + 0.5 bar 6.0 + 0.5 bar 1x / shift, Util. Check list 1x / shift, Util. Check list 1x / shift, Util. Check list Water spraying Water pressure gun side Water pressure view side 1.2 + 0.2 bar 0.8 + 0.2 bar 2x / shift, Proc. Check list 2x / shift, Proc. Check list US vibration US generator ok? Water flow skimmer Water flow central Water flow bottom 800 + 50 l/h 1200 + 100 l/h 1500 + 100 l/h 2x / shift, Proc. Check list 2x / shift, Proc. Check list 2x / shift, Proc. Check list 2x / shift, Proc. Check list Mask drying Air temperature drying tunnel 130 + 5 C 2x / shift, Proc. Check list

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Introduction

Ref no.

Date2002-11-17

Page1/1

General process control list Mask washing

Hua Fei, CPT-3, 34RF mk 2AuthorHounian Chen

E. Keetels

General Process control list

ProcessItemSpec*Control frequency, record

UtilitiesDemi water pressure 30 (C

Compressed air pressure

- process air

- control air6.0 + 0.5 bar

6.0 + 0.5 bar

6.0 + 0.5 bar1x / shift, Util. Check list

1x / shift, Util. Check list

1x / shift, Util. Check list

Water sprayingWater pressure gun side

Water pressure view side1.2 + 0.2 bar

0.8 + 0.2 bar2x / shift, Proc. Check list

2x / shift, Proc. Check list

US vibrationUS generator ok?

Water flow skimmer

Water flow central

Water flow bottom800 + 50 l/h

1200 + 100 l/h

1500 + 100 l/h2x / shift, Proc. Check list

2x / shift, Proc. Check list

2x / shift, Proc. Check list

2x / shift, Proc. Check list

Mask dryingAir temperature drying tunnel130 + 5 (C2x / shift, Proc. Check list

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