CB-035
Process Gas and Vacuum Components
High purity gascontrol systemsDRY FINE SYSTEM
CB-035A 1
Opening Up the Future for Process Control
Philosophy is the Concept
Product cleanness is comprehensively controlled conducted under CKD's original UF philosophy: Incorporate comprehensive cleanness for all factors indispensable to product development, including design, evaluation, manufacturing methods, and actual manufacture.
Zero-particle, non-retention design product groups
Productdevelopment
Design
Evaluation
Manufacturing methods
Manufacture
Cleanness control
Part level control
PrProduct leoduct levelvelcontrcontrololProduct levelcontrol
High-purity gas control system optimum for semiconductor and liquid crystal manufacturing processes using process gas, vacuums, etc.
Consistent quality control, including parts and products, to ensure complete cleanness.CKD production
CKD incorporates comprehensive consistent quality control for all production stages from machining and assembly to inspection and packaging. This covers all levels including products and parts.Cleanness is important to quality, so we have established reliable quality by establishing company-wide quantitative standards for each type of impurity, including chemical residue, organic carbon levels, and specific oils.
Cleanliness control
Example of process gas valve and high vacuum valve production process
Chemical residueChemical residueChemical residue
Clean room
Secondary packingSecondary packing(Crate packing)
Primary packing
Productinspection
Assembly
Precision cleaning
Part inspection
Part machiningSpecific oilSpecific oilSpecific oil OrOrganic carbon leganic carbon levelvelOrganic carbon level
Intro 3
PT
1F Utility area
2F Clean room
Valve manifold box
Regulator box
2F
1F
Example of high purity gas control system use
High purity process in semiconductor manufacturing line
Purge gas line
Vacuuming line
Vacuuming line
Air supply line
To burnable gas scrubber
To combustible gas scrubber
P
Vacuum pump
Load lock chamber
Load lock chamber
Vacuum pump
Transfer chamber
Process chamber 1
Process chamber 2
Clean air supply to drive
Clean air supply system
Air operated valve for high vacuum
Integrated gas supply system
Process gas component
P
RC2000
Gas supply line IAGD3/IAGD4
OGDMGD
PGM AGD
AVB
AVB
AVB
AVB
AVB
PGM
IAGD4
IAGD4
FCS
Cage protection
AVB Vacuum gage
Intro 4
Selection guide
Precautions
Intro 5
Intro 9
Page
2
6
8
10
24
26
28
34
36
36
39
42
46
50
58
67
70
72
82
Guide to Electric catalog 148
Pro
cess
gas
val
ves
Othe
r gas
com
pone
nts
Hig
h v
acu
um
co
mp
on
ents
Regu
lator
Process Gas Components
Precautions
Air operated valve AGD012V
Air operated valve AGD112V/AGD21
2V
Air operated valves compatible with other variations
Manual valve OGD120V
Manual valve MGD120V
Manual valves compatible with other variations
Vacuum generator VG Series
Diaphragm type extremely small flow rate adjustment valve
Piston structure check valve
Precautions
Regulator for process gas PGM
Product guide
IAGD3
IAGD4
SEMI F86, F87 (1.125" size, C seal) compatible valve
Precautions
Inline clean filter FCS Series
Clean regulator RC2000 Series
High vacuum components
Precautions
Air operated valve AVB
Air operated valve AVB custom order
Air operated valve AVP
Manual valve MVB
Manual valve MVP
Leak valve FGL
High vacuum solenoid valve HVB
Vacuum delay solenoid valve HVL
88
92
106
112
118
120
122
126
134
Related products
Solenoid valve for operation MN3E0/MN4E0 Series
Solenoid valve for operation MN4GA/MN4GB Series
Clean exhaust filter FAC Series
Fiber tube (joint/tube)
140
140
141
142
INDEXIn
tegr
ated
gas
supp
ly s
yste
ms
Intro 5
Model No. Type/ClassificationWorking fluid
ConnectionCv flow factor
Page
Model No. Working fluidSupply fluid pressure
(MPa)Ultimate vacuum
(kPa(abs))Connection Page
Model No. Working fluidMaximum working pressure
(MPa)Set pressure range
(MPa)Connection Page
Process gas valve
0 0.1 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1.0
Air
op
erat
ed v
alve
Man
ual
val
veOt
her p
roce
ss g
as v
alve
sR
egu
lato
r
· Air operated valve· Metal diaphragm structure· 22.5 compact type
AGD012V
· Air operated valve· Metal diaphragm structure· Standard size
AGD112V/AGD21
2V
*Contact CKD for details on other joints such as 1/8-inch JXR.
Parts compatible with other variations
· Manual valve· Metal diaphragm structure· Handle open/close (90˚ snap action)
OGD120V
· Manual valve· Metal diaphragm
structure· Handle open/close (270˚ rotation)
MGD120V
Parts compatible with other variations
· Vacuum generator for process gas exhaust
· Diaphragm type extremely small flow rate adjustment valve· Piston structure check valve
VG
PGM
Pneumatic operated
2-port valve
Normally closed
Normally open
Inert gas
Process gas
1/4" JXR male joint
1/4" JXR female joint
Refer to the indicated
page for details.
Refer to the indicated
page for details.
1/4" JXR male joint
1/4" JXR female joint
1/4" double barbed joint
3/8" JXR male joint
3/8" JXR female joint
3/8" double barbed joint
Manual 2 port valve
Inert gas
Process gas
Inert gas
Process gas0.4 to 0.6
-0.07 to 0.21MPa (pressure range 30V)
0 to 0.21MPa (pressure range 30)
0 to 0.35MPa (pressure range 50)
0 to 0.42MPa (pressure range 60)
0 to 0.7MPa (pressure range 100)
1/4" JXR male joint
1/4" JXR female joint
1/4" double barbed joint
3/8" JXR male joint
3/8" JXR female joint
3/8" double barbed joint
IN1/4" JXR male joint
VAC.1/4" JXR female joint
VENT3/8" JXR male joint
Inert gas
Process gas1.0
13.3 or less
1/4" JXR male joint1/4" JXR female joint1/4" JXR male female joint1/4" JXR female male jointVarious integrated valve interfaces
1/4" JXR male joint
1/4" JXR female joint
1/4" double barbed joint
3/8" JXR male joint
3/8" JXR female joint
3/8" double barbed joint
0.1
0.26
0.6
0.26
0.6
0.26
0.6
0.1
0.26
0.6
0.26
0.6
P.6
P.8
P.10
P.24
P.26
P.28
P.34
P.36
P.42
*The pressure range in parentheses is psi.
*
High purity gas control systems
Selection guide <<Process Gas Components>>*Refer to Intro 7 to 8 in the introduction for the high vacuum component selection guide.
Intro 6
Model No.Seal connection
methodSize
Cv flow factorPage
Model No. Working fluidWorking pressure range
(MPa)FiltrationPort size Page
Model No. Working fluidMaximum working pressure
(MPa)Set pressure range
(MPa)Port size Page
Integrated gas supply system
Other gas components
0 0.1 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1.0
Inte
grat
ed g
as s
uppl
y sy
stem
sC
lean
filt
erC
lean
reg
ulat
or
IAGD3
IAGD4
· SEMI F86, F87 (1.125-inch size, C seal) compatible air operated valves and manual valves are also available. (Page 67)
FCS500/FCS1000
RC2000
CS seal
W seal
1.5 inches
Compressed air
Nitrogen
· Resin type
-0.095 to 0.99MPa
· Stainless steel type
-0.095 to 1.5MPa
(Compressed air)
-0.095 to 0.99MPa
(Nitrogen)
ø4 to ø12
R1/8 to R3/8
Rc1/8 to Rc3/8
0.1
0.26
1.5 inches
0.1
0.26
P.50
P.58
P.72
Nitrogen
Compressed air
1.0
(0.5 for low pressure)
0.05 to 0.7 (Standard)
0.02 to 0.2 (Low pressure)
Rc1/4
Rc3/8
Rc1/2P.82
· Inline clean filter
0.01 m
(Removal effect 99.99%)
Intro 7
Model No.Type/Classification
Working fluidPort size
Cv flow factor (orifice: ømm)PageVoltage
Valve for high vacuum
0 5 10 20 30 40 50 60 70 80 100
Air
op
erat
ed v
alve
Man
ual
val
veL
eak
valv
e
· Air-operated valve for high vacuum· Formed bellows· Aluminum body
· Air-operated valve for high vacuum· Formed bellows· Compact stainless steel body type
· Air-operated valve for high vacuum· Formed bellows
· Air-operated valve for high vacuum· Double O-ring shaft sealing type
· Manual valve for high vacuum· Formed bellows· Handle rotation
· Manual valve for high vacuum· Double O-ring shaft sealing type· Handle rotation
· Leak valve· Non-sliding type· Control unit 0 to 60 sec.
FGL121
Flange NW16
Flange NW25
Flange NW40
Flange NW50
Flange NW25
Flange NW40
Flange NW50
Flange NW80
1/4" tube
Flange NW25
Flange NW40
Flange NW50
Flange NW80
Flange NW25
Flange NW40
Flange NW50
Flange NW80
Flange NW100
1/4" tube
Flange NW25
Flange NW40
Flange NW50
Flange NW80
Flange NW25
Flange NW40
Flange NW50
1/4" double barbed joint
1/4" JXR male joint
ø16
ø24
ø40
ø50
ø24
ø5
ø24
ø40
ø50
ø80
ø40
ø50
ø24
ø40
ø50
ø80
ø24
ø40
ø50
ø80
ø24
ø5
ø40
ø50
ø80
ø100
P.92
P.96
P.100
P.106
P.112
P.118
P.120
P.122
Pneumatic operated
2-port valve
Normally closed
Normally open
Double acting
Vacuum
Inert gas
Manual 2 port valve
Vacuum
Inert gas
2 Port solenoid valve
Normally closed
Nitrogen
Pneumatic operated
2-port valve
Normally closed
Vacuum
Inert gas
DC 12V
DC 24V
Maximum flow rate 32 /min
Maximum flow rate 50 /min
AVB*1V
AVB**3
AVB**2
AVB* Custom order
AVP**2
MVB*0
MVP*0
High purity gas control systems
Selection guide <<High vacuum components>>*Refer to Intro 5 and 6 in the introduction for the process gas component selection guide.
Intro 8
Model No.Type/Classification
Working fluidPort size
Cv flow factor (orifice: ømm)PageVoltage
0 5 10 20 30 40 50 60 70 80 100
Hig
h v
acu
um
so
len
oid
val
ve
· Manual valve for high vacuum· Miniature
HVB112
· Manual valve for high vacuum
HVB41
· Manual valve for high vacuum
· Vacuum delay solenoid valve
HVL142
NPT1/8
1/4" VCR female joint
NPT1/4
1/4" VCR female joint
ø48 flange
ø52 flange
Rc1/8
1/4" double barbed joint
Flange NW10
Flange NW16
ø1.6
ø5
ø8
ø12
ø15
ø1.2
ø3
P.126
P.128
P.130
P.134
Direct acting 2 port
solenoid valve
Normally open
Air
Nitrogen
Direct acting 2 port
solenoid valve
Normally closed
Vacuum
Inert gas
AC100V
AC200V
DC 24V
AC100V
AC200V
DC 24V
HVB 15678
Intro 9
Safety PrecautionsAlways read before starting use
1
2
3
4
5
The safety cautions are ranked as "DANGER", "WARNING" and "CAUTION" in this section.
WARNING
When designing and manufacturing a device using CKD products, the manufacturer is obligated to check that device safety mechanical mechanism, pneumatic control circuit, or water control circuit and the system operated by electrical control that controls the devices is secured.It is important to select, use, handle, and maintain the product appropriately to ensure that the CKD product is used safely.Observe warnings and precautions to ensure device safety.Check that device safety is ensured, and manufacture a safe device.
This product is designed and manufactured as a general industrial machine part.It must be handled by an operator having sufficient knowledge and experience in handling.
Use this product in accordance of specifications.
Observe corporate standards and regulations, etc., related to the safety of device design and control, etc.
Observe warnings and cautions on the pages below to prevent accidents.
Do not handle, pipe, or remove devices before confirming safety.
Contact CKD when using the product outside the unique specifications range, when using it outdoors, and when using it under the conditions and environment below.Do not attempt to modify or additionally machine the product.
Use for special applications requiring safety including nuclear energy, railroad, aviation, ship, vehicle, medical equipment, equipment, or applications coming into contact with beverage or food, amusement equipment, emergency shutoff circuits, press machine, brake circuits, or for safeguard.Use for applications where life or assets could be adversely affected, and special safety measures are required.
Inspect and service the machine and devices after confirming safety of the entire system related to this product.Note that there may be hot or charged sections even after operation is stopped.When inspecting or servicing the device, turn off the energy source (air supply or water supply), and turn off power to the facility. Discharge any compressed air from the system, and pay enough attention to possible water leakage and leakage of electricity.When starting or restarting a machine or device that incorporates pneumatic components, make sure that the system safety, such as pop-out prevention measures, is secured.
ISO 4414, JIS B 8370 (pneumatic system rules), High Pressure Gas Maintenance Laws Occupational Safety and Sanitation Laws, and other safety regulations, corporate standards, and regulations.
DANGER: When a dangerous situation may occur if handling is mistaken leading to fatal or serious injuries, or when there is a high degree of emergency to a warning.
WARNING: When a dangerous situation may occur if handling is mistaken leading to fatal or serious injuries.
CAUTION: When a dangerous situation may occur if handling is mistaken leading to minor injuries or physical damage.
Note that some items described as "CAUTION" may lead to serious results depending on the situation.In any case, important information that must be observed is explained.
2
1
23
4
1
1
Process gas components
Precautions 2Valve for process gas 5Regulator for process gas 37Integrated gas supply system 45Other components for process gas 69
CONTENTS
Process gas components
1
2
Ensure sufficient space for installation, removal,piping, and wiring work.
Ensure sufficient space for maintenance and in-spection.
3. Ensuring space
CAUTION
Components for process gas
Safety PrecautionsAlways read before starting useRefer to Intro 9 for the general cautions.
WARNING
Incorrect selection and handling of devices maycause problems with this product and problemsin the user's system. Confirm that the regulatorspecifications and the user's system are compat-ible before use.
1. Confirming specifications
Do not use this product in a corrosive gas envi-ronment, or where the product may be subjectto chemicals, salt water, water, steam, etc.Use this product within the ambient temperaturerange given in specifications.
Incorrect installation and piping will cause prod-uct problems, may cause problems in the user'ssystem, and may cause death or serious injury.The user is responsible for ensuring that theoperator has read the instruction manual andfully understands the system.After installation, conduct an appropriate func-tion test to confirm that the product is correctlyinstalled.
2. Installation
WARNING
This product is processed with ultra-precisecleaning, and is assembled in a Class 10 superclean room. Open the clean pack in the packagebox in a clean environment immediately beforeinstallation.
If wetted areas (inside of body, or on the jointseal surface) are touched when the regulator isinstalled, impurities may adhere or the highlypure gas maybe contaminated. Do not touch wet-ted areas of the regulator during installation.
CAUTION
CAUTION
If dirt or burrs get on piping or in the area duringpiping, the valve seat or diaphragm seal may bedamaged and cause leaks from the valve seat.Carefully remove any dirt or burrs before install-ing the valve.
Check that the connection port direction is cor-rect when piping the product.
Pipe the product so that the pipe tension, com-pression, and bending, etc., are not applied tothe valve body.
Operation may fail if the piped tube is bent. Checkthat piping matches the required length.
Select the solenoid valve for drive connected tothe drive section to match specifications andapplication.
Use air or inert gas passed through a 5 m orhigher filtration capacity filter for operation air.
CAUTION
4. Piping
Confirm the compatibility of materials used forwetted area and the fluid used.Use the product within the fluid temperature andworking pressure range in specifications.
1. Working environment
Design & Selection
Installation & Adjustment
3
Components for process gas
Safety precautionsAlways read before starting useRefer to Intro 9 for the general cautions.
Installation & AdjustmentCheck that there is no dirt, scratches, or burrsget on the seal before tightening the joint in thefollowing procedures:
Tightening the jointJXR joint: for nickel, SUS316 gasket materialScrew in the nut with the fingers until the gasket contacts thebead section, and then tighten another 1/8 turn using a tool.(Contact CKD if other materials are to be used.)
Double barbed jointCheck that the front ferrule, back ferrule, and nut are properlyattached, and then insert the tube until it contacts the backof the product. Tighten the nut with the fingers, then tightenanother 1 1/4 turn with a tool.
After tightening the joint, always carry out a leakinspection and confirm that there are no leaksoccur.
TubeFront ferrule Back ferrule
Keep the baking temperature within the product'sspecified temperature range.Fully open the valve when baking.
CAUTION
5. Baking
When removing a valve that has been used fortoxic, combustible, or corrosive gas, fully purgethe product with inert gas such as nitrogen gas.
CAUTION
6. Purging
During use & Maintenance
WARNING
Always use this product within the specifiedrange.
Take care not to touch products with heaters withhands or body parts. Direct contact may causeburns.
1. Using this product
WARNING
Always carry out the work as specified in the in-struction manual.
Always turn the power off and release any fluidsor pressure before starting the work.
Completely purge the product with inert gas, etc.,so that the residual gas does not adversely af-fect the workers or devices in the area.
When work is completed, always carry out a leakinspection and confirm that there are no leaks exist.
Do not disassemble the process gas valve.The product warranty does not apply to a valvewhich has been disassembled without consentfrom CKD and then repaired and reused.
2. Maintenance/inspection
Do not step on valves, etc., or place heavy objectson them.
CAUTION
Bead
GasketHolder
1
2
4
5
Valve for process gas
Air operated valveAGD0 V 6AGD1 V·AGD2 V 8Parts compatible with other variations 10Manual valveOGD 0V 24MGD 0V 26Parts compatible with other variations 28Other valves for process gasVacuum generator VG 34Diaphragm type extremely small flow rate adjustment valve 36Piston structure check valve 36
CONTENTS
12
12
12
12
12
Valve for process gas
5
6
Continuous use possible up to 80
Zero particle generation realized with optimum seal structure and improved surface roughness
Electropolished finishspecifications
Slim 30 diameter actuator
High corrosion resistance and long lifeNi-Co alloy diaphragm (4 million cycles achieved *2 )
JXR joint connection *1
1/4-inch size male and female fittings
22.5mm compact body
*1: The JXR joint can be connected to the VCR joint.*2: Life when working fluid is inert gas within specified range, which
does not contain solids such as reaction products.
No. Parts nameMaterials for wetted areas
MaterialNi-Co alloyPCTFESUS316L
DiaphragmValve seatBody
1
2
3
AGD02VAGD01VWorking fluid
Working pressure range
Pa(abs)-MPa
Fluid temperature
Ambient temperature
Valve seat leakage
Pa·m3/s(He)
External leakage
Pa·m3/s(He)
Cv flow factor
Connection
Actuation
Operating pressure
MPa
Operating pressure connection port
Weight kg
Specifications
Saving space while maintaining basic operations
Descriptions
*1: Value for AGD01V-4RM (1/4-inch JXR male joint).
Inert gas/process gas
1.3 10-6 to 0.5
-10 to 80
-10 to 80
1.3 10-9 or less
2.8 10-12 or less
0.1
1/4" JXR male joint
1/4" JXR female joint
M5
0.22 *1
NC (normally closed)
0.4 to 0.6
NO (normally open)
0.4 to 0.5 (fluid temperature 60 )
0.4 to 0.45 (60 fluid temperature)
1 2 3
IN OUT
Air operated valve for process gas
AGD0 V Series Metal diaphragm Compact type
Precautions
Always read page 9 in the introduction
and pages 2 to 3 to ensure correct and
safe use of this product.
12
Model No. Actuation Cv flow factor
AGD01V NC Cv=0.1Model No. Actuation Cv flow factor
AGD02V NO Cv=0.1
7
AGD01V-4RM
AGD02V-4RM
Symbol Actuation
NC
NO
A
52
52
B
ø30
ø30
D
63
63
E
11
11
F
14
14
G
14
14
H
2-M4 depth 5
2-M4 depth 5
I
M5
M5
AGD01V-4R
AGD02V-4R
J
66
66
K
11
11
Dimensions
How to order
AGD0 4R1 V
A Actuation
B Connection
1
2
NC (normally closed)
NO (normally open)
ActuationA
Symbol Descriptions
ConnectionB
1/4" JXR male joint
1/4" JXR female joint
4RM
4R
Model No.
Symbol Actuation
NC
NO
Model No.
C
22.5
22.5
L
22.5
22.5
AGD0*V-4RM JXR male joint
AGD0*V-4R JXR female joint
IN OUT
A
I
E
C
B
D
G
F
H
IN OUT
L
J
K
AGD0 V SeriesAir operated valve for process gas
12
8
Working fluid
Working pressure range
Pa(abs)-MPa
Fluid temperature
Ambient temperature
Valve seat leakage
Pa·m3/s(He)
External leakage
Pa·m3/s(He)
Cv flow factor
Connection
Actuation
Operating pressure
MPa
Operating pressure connection port
Weight kg
Inert gas/process gas
1.3 10-6 to 1.0
-10 to 80
-10 to 80
1.3 10-9 or less
2.8 10-12 or less
Rc1/8
Specifications
1/4" JXR male joint
1/4" JXR female joint
1/4" double barbed joint
NC (normally closed)
NO (normally open)
NC : 0.4 to 0.6
NO : 0.4 to 0.5
0.35 *1
High corrosion resistance and long life Ni-Co alloy diaphragm(4 million cycles achieved *2 )
JXR joint connection *1
Standard (male and female) and double barbed joints
*1: The JXR joint can be connected to the VCR joint.*2: Life when working fluid is inert gas within specified range, which
does not contain solids such as reaction products.
3/8" JXR male joint
3/8" JXR female joint
3/8" double barbed joint
NC (normally closed)
NO (normally open)
NC : 0.4 to 0.6
NO : 0.4 to 0.5
0.88 *1
No. Parts nameMaterials for wetted areas
MaterialNi-Co alloyPCTFESUS316L
DiaphragmValve seatBody
1
2
3
Descriptions
*1: Value for AGD11V-4RM (1/4-inch JXR male joint) and AGD21V-6RM (3/8-inch JXR male joint).
Standard diaphragm valve V series created from a pursuit of contamination control
Continuous use possible up to 80
Zero particle generation realized with optimum seal structure and improved surface roughness
Valve dead space minimized
Electropolished finish specifications
AGD1*V AGD2*V
0.26 0.6
1 2 3
Model No. Actuation Cv flow factor
AGD11V NC Cv=0.26
AGD12V NO Cv=0.26
Precautions
Always read page 9 in the introduction and
pages 2 to 3 to ensure correct and safe
use of this product.
Air operated valve for process gas
AGD1 V Series
AGD2 V Series Metal diaphragm Standard
1212
Model No. Actuation Cv flow factor
AGD21V NC Cv=0.6
AGD22V NO Cv=0.6
9
Dimensions
AGD1*V-4RAGD2*V-6R JXR female joint
AGD1*V-4SAGD2*V-6S Double barbed joint
NCNONCNO
NCNONCNO
AGD11V-4RMAGD12V-4RMAGD21V-6RMAGD22V-6RM
AGD11V-4RAGD12V-4RAGD21V-6RAGD22V-6R
AGD11V-4SAGD12V-4SAGD21V-6SAGD22V-6S
ActuationModel No. Symbol
ActuationModel No. Symbol
A B C D E F G H I
27
35
27
35
67
86
14.3
16
18
20.2
18
20.2
2-M5 depth 6
2-M5 depth 8
57
76
ø41
ø55
70.6
83
14.3
16
Rc 1/8
Rc 1/8
J K LNCNONCNO
27
35
62
80
14.3
16
M N O
27.8
44.3
PActuationModel No. Symbol
AGD1*V-4RMAGD2*V-6RM JXR male joint
How to order
AGD1 4RM1 V
A Actuation
Model No.
B Connection
1
2
NC (normally closed)
NO (normally open)
ActuationA
Symbol Descriptions
ConnectionB
6R1 V
A Actuation
B Connection
AGD2
Model No.
4RM
4R
4S
1/4" JXR male joint
1/4" JXR female joint
1/4" double barbed joint
1
2
NC (normally closed)
NO (normally open)
ActuationA
Symbol Descriptions
ConnectionB
6RM
6R
6S
3/8" JXR male joint
3/8" JXR female joint
3/8" double barbed joint
IN OUT
A
I
G
F
HE
C
B
D
IN OUT
O
P
M
N
IN OUT
L
J
K
AGD1 V/AGD2 V SeriesAir operated valve for process gas
12
12
10
Body options (pages 10 to 21)Flow path directionNC/NO combinationConnectionPort shape combinationFluid temperature
Model Variations
Actuator options (pages 22 to 23)Valve opening adjustment functionAir indicatorMicroswitchProximity switchCylinder switch
AGD0*VAGD1*VAGD2*V
Air operated valve for process gas
Parts compatible with other variationsAGD**V Series
Custom order
C
D Connection
A Size
How to order
AGD 1 1 V 4 FRJ FFF
012
1/8"1/4"3/8"
AGD0
RJ R RM W S
12
NCNO
E Port shapecombination
F Fluid temperatureAGD1
AGD2
Model No.
SizeA
ActuationB
Symbol
Symbol
Descriptions
468
1/4"3/8"1/2"
RJR
RMWS
JXR female joint (with bearing)JXR female jointJXR male jointAutomatic welded jointDouble barbed joint
BlankMFFM
FFFFFMFMMMMMWWW
IN, OUT Same joint typeIN: Male OUT: FemaleIN: Female OUT: Male
abc female/female/femaleabc female/female/maleabc female/male/maleabc male/male/maleabc automatic welded jointabc *1
Port sizeC
ConnectionD
BlankF
80 standard180 valve seat PFA
Fluid temperatureF
Port shape combinationE
2 way valve
3-way separate flow valve
BlankMFFM
FFFFFMFMMMMMWWW
ConnectionD
2 way valve
3-way separate flow valve
*1 F: Female, M: Male, W: Automatic welded joint, all joints can be combined.
2-way valve, 3-way separate flow valve
Port size
B Actuation
11
B
C
E Connection
A Size
Flow path direction
NC/NOcombination
AGD V1 4 FY 111 RJ FFF
012
1/8"1/4"3/8"
AGD0
RJ R RM
YT
Selector typeDivider type
F Port shape combination
G Fluid temperature AGD1
AGD2
Model No.
SizeA
Flow path directionB
Symbol
Symbol
Descriptions
46
1/4"3/8"
11122122
V1 : NC V2 : NCV1 : NC V2 : NOV1 : NO V2 : NCV1 : NO V2 : NO
RJR
RM
JXR female joint (with bearing)JXR female jointJXR male joint
FFFMMM
abc female/female/femaleabc male/male/maleabc *2
NC/NO combinationC
Port sizeD
BlankF
80 standard180 valve seat PFA
Fluid temperatureG
ConnectionE
Port shape combinationF
FFFMMM
ConnectionE
*2: F: Female, M: Male, all joints can be combined.
How to order 2-station 3-way valve
D Port size
AGD0*V SeriesHow to order
12
Dimensions
AGD0*V 2 way valve Custom order
AGD0*V-4RJ (1/4" JXR female joint (with bearing) type)
AGD0*V-4S (1/4" double barbed joint type)
AGD0*V-4W (1/4" automatic welded joint type)
AGD0*V-4RJ- (1/4" JXR female (with bearing) - male combination type)
AGD0*V-4R- (1/4" JXR female - male combination type)
FMMF
FMMF
Operation port M5
Operation port M5
66
14
26
Figure shows AGD01V-4RJ-MF female joint (with bearing)
Female joint: 4R Male joint: 4RM
Figure shows AGD01V-4RJ female joint (with bearing)
Double barbed joint: 4S Welded joint: 4W
33 33 26
23.2 44
(57.4)2-M4 screw depth 5
ø30
22.5
63
14
11
AGD0*V Series
13
Dimensions
Custom order
AGD0*V-4RJ- (1/4" JXR female joint (with bearing) combination type)
AGD0*V-4R- (1/4" JXR female joint combination type)
AGD0*V-4RM-MMM (1/4" JXR male joint type)
AGD0*V-4W- (1/4" automatic welding joint combination type)
AGD0*V 3-way separate flow valve
66
14
66
33 33 48.7 22
52 44
<Main port>
<Branch port>
33
ø30
11
63
14
Operation port M5
2-M4 screw depth 5
a
a
c
c
b
b
a c
b
Female joint: 4R Male joint: 4RM
Figure shows AGD01V-4RJ-FFF female joint (with bearing)
Welded joint: 4W
Female joint: 4RJ- F (with bearing)
Male joint: - MFemale joint: 4R- F Welded joint: - W
22.5
AGD0*V SeriesAir operated valve for process gas
14
AGD01V- **-4RJ- (1/4" JXR female joint (with bearing) combination type)
AGD01V- **-4R- (1/4" JXR female joint combination type)
AGD01V- **-4RM-MMM (1/4" JXR male joint type)
Dimensions
AGD0*V 2-station 3-way valve Custom order
115
55
52.5 57.5
62.5
12
57.5
12115
55
18
18 25
57.5
57.5
12 12
V1 Operation port M5
<Y: Selector type>
<Other joint dimension>
<T: Divider type>
2-M5 screw depth 6
ø30ø30
a c a c
b bV2 Operation port M5
Figure shows AGD01V-Y11-4RJ-FFF female joint (with bearing)
Male joint: 4RM Female joint: 4R
Figure shows AGD01V-T11-4RJ-FFF female joint (with bearing)
18
18 25
2-M5 screw depth 6
V1 Operation port M5 V2 Operation port M5
V1
V2a c
b
V1 V2a c
b
AGD0*V Series
15
AGD1*V-4RJ (1/4" JXR female joint (with bearing) type)
AGD1*V-4W (1/4" automatic welded joint type)
AGD1*V-4RJ- (1/4" JXR female (with bearing) male combination type)
AGD1*V-4R- (1/4" JXR female - male combination type)
Dimensions
AGD1*V 2 way valve Custom order
FMMF
FMMF
Operation port Rc1/8
Operation port Rc1/8
70.6
18
28.5 35.3 35.3 28.5
55
18
2-M5 screw depth 6
ø41
14.3
67
Figure shows AGD11V-4RJ female joint (with bearing)
Welded joint: 4W
Figure shows AGD11V-4RJ-MF female joint (with bearing)
Female joint: 4R Male joint: 4RM
27
AGD1*V SeriesAir operated valve for process gas
16
AGD1*V-4RJ- (1/4" JXR female joint (with bearing) combination type)
AGD1*V-4R- (1/4" JXR female joint combination type)
AGD1*V-4RM-MMM (1/4" JXR male joint type)
AGD1*V-4W- (1/4" automatic welding joint combination type)
Dimensions
AGD1*V 3-way separate flow valve Custom order
70.6
18
ø41
35.3
67
14.3
27
18
Operation port Rc1/8
2-M5 screw depth 6
70.6
35.3 35.3 51 27.5
57 55
a c
a c
b
b
Figure shows AGD11V-4RJ-FFF female joint (with bearing)
Female joint: 4R
Female joint: 4RJ- F(with bearing)
Female joint: 4R- F Male joint: - M Welded joint: - W
Male joint: 4RM Welded joint: 4W
<Main port>
<Branch port>
a c
b
AGD1*V Series
17
AGD1*V SeriesAir operated valve for process gas
AGD11V- **-4RJ- (1/4" JXR female joint (with bearing) combination type)
AGD11V- **-4R- (1/4" JXR female joint combination type)
AGD11V- **-4RM-MMM (1/4" JXR male joint type)
Dimensions
AGD11V 2-station 3-way valve Custom order
V1 Operation port Rc1/8
65
18
18 30
2-M5 screw depth 6
67.5 62.5
67.5
14.3
62.5
14.3
125
65
14.3
62.5
14.3
62.5
125
V2 Operation port Rc1/8
Figure shows AGD11V-Y11-4RJ-FFF female joint (with bearing)
Male joint: 4RM Female joint: 4R
Figure shows AGD11V-T11-4RJ-FFF female joint (with bearing)
V1 Operation port Rc1/8 V2 Operation port Rc1/8
<Y: Selector type>
<Other joint dimension>
<T: Divider type>
a c
b
a c
b
18
18 30
2-M5 screw depth 6
V1
V2a c
b
V1 V2a c
b
18
AGD2*V-6RJ (3/8" JXR female joint (with bearing) type)
AGD2*V-6W (3/8" automatic welded joint type)
AGD2*V-8S (1/2" double barbed joint type)
AGD2*V-8RM (1/2" JXR male joint type)
AGD2*V-8R (1/2" JXR female joint type)
AGD2*V-8RJ (1/2" JXR female joint (with bearing) type)
AGD2*V-8W (1/2" automatic welded joint type)
Dimensions
AGD2*V 2 way valve Custom order
Operation port Rc1/8
2-M5 screw depth 6
ø55
35
69
1686
83
20.2
20.2
Figure shows AGD21V-6RJ female joint (with bearing)
Female joint: 8RJ (with bearing) Male joint: 8RMFemale joint: 8R
Double barbed joint: 8S Welded joint: 8W
Welded joint: 6W
83
37 68(84.5)
83 76
AGD2*V Series
19
AGD2*V-6RJ- (3/8" JXR female joint (with bearing) male combination type)
AGD2*V-6R- (3/8" JXR female - male combination type)
AGD2*V-8RJ- (1/2" JXR female joint (with bearing) male combination type)
AGD2*V-8R- (1/2" JXR female - male combination type)
Dimensions
AGD2*V 2 way valve Custom order
FMMF
FMMF
FMMF
FMMF
38 41.5
38 41.5
41.5
41.5 38
38
Operation port Rc1/8
Operation port Rc1/8
Figure shows AGD21V-6RJ-MF female joint (with bearing)
Figure shows AGD21V-8RJ-MF female joint (with bearing)
Female joint: 6R Male joint: 6RM
Female joint: 8R Male joint: 8RM
AGD2*V SeriesAir operated valve for process gas
20
Dimensions
AGD2*V 3-way separate flow valve Custom order
AGD2*V-6RJ- (3/8" JXR female joint (with bearing) combination type)
AGD2*V-6R- (3/8" JXR female joint combination type)
AGD2*V-6RM-MMM (3/8" JXR male joint type)
AGD2*V-6W- (3/8" automatic welded joint combination type)
· The 1/2-inch size is also available. The face-to-face distance is the same as the 3/8-inch size.
b
Operation port Rc1/8
83
20.2
2-M5 screw depth 6
63
41.5 41.5 61.5 34.5
76 69
<Main port>
<Branch port>
20.2
35
41.5
16
86
ø55
a c
Figure shows AGD21V-6RJ-FFF female joint (with bearing.)
Female joint: 6RJ- F (with bearing)
Female joint: 6R- F Male joint: - M Welded joint: - W
Female joint: 6R Male joint: 6RM Welded joint: 6W
a c
b
a c
b
AGD2*V Series
21
Dimensions
AGD21V 2-station 3-way valve Custom order
AGD21V- **-6RJ- (3/8" JXR female joint (with bearing) combination type)
AGD21V- **-6R- (3/8" JXR female joint combination type)
AGD21V- **-6RM-MMM (3/8" JXR male joint type)
Figure shows AGD21V-Y11-6RJ-FFF female joint (with bearing)
Figure shows AGD21V-T11-6RJ-FFF female joint (with bearing)
V1 Operation port Rc1/8 V2 Operation port Rc1/8 V1 Operation port Rc1/8 V2 Operation port Rc1/8
150
80
8016
75
7516
84
20.2
150
84
1675
20.2
36
1675
<Y: Selector type> <T: Divider type>
a c
b
a c
b
2-M5 screw depth 8 20.2
20.2
36
2-M5 screw depth 8
V1
V2a c
b
V1 V2a c
b
<Other joint dimension>
Male joint: 6RM Female joint: 6R
AGD2*V SeriesAir operated valve for process gas
22
AGD**V With valve opening adjusting mechanism
The flow rate when the valve is open is adjustable.
Dimensions
AGD**V Actuator option Custom order
AGD01V-
AGD02V-
AGD11V-
AGD12V-
AGD21V-
AGD22V-
C
ø30
ø30
ø41
ø41
ø55
ø55
B
11
11
14.3
14.3
16
16
AModel No.
85.5
85.5
100
100
119
119
Note: Keep the ambient temperature within -10 to 60 .Note: The push-in joint cannot be used with AGD01V or AGD02V.
The indicator projects when the valve is operating (during air pressurization), so valve operation can be confirmed visually.
AGD11V-
AGD12V-
AGD21V-
AGD22V-
C
ø41
ø41
ø55
ø55
B
14.3
14.3
16
16
AModel No.
100
100
119
119
Valve operation confirmation can be output from the microswitch when the valve is open.
MicroswitchD2JW-011-MD (OMRON)· DC 3-wire reed (NC, NO) lead length 0.3m· 30 VDC, 100mA rating resistance load
AGD11V-
AGD12V-
AGD21V-
AGD22V-
C
ø41
ø41
ø55
ø55
B
14.3
14.3
16
16
AModel No.
90
90
111
111
Operation portApplicable pipe diameter ø4C
C
AA
BB
C
AB
Operation port Rc1/8 Air indicator (Figure shows operating state)
Operation port Rc1/8
Microswitch
AGD**V With air indicator
AGD**V With microswitch
Opening adjusting dial
AGD**V Series
23
AGD**V With proximity switch
AGD**V With cylinder switch
* Contact your CKD representative for details on the actuator option model No., etc.
Dimensions
AGD**V Actuator option Custom order
Valve operation confirmation can be output from the proximity switch when the valve isopen.
Proximity switchEM-030 (KEYENCE)· DC 3-wire proximity (NO) lead length 2m· Power voltage 10.8 to 30 VDC· Current consumption 12mA or less
AGD11V-
AGD21V-
C
ø41
ø55
B
14.3
16
AModel No.
67
86
Valve operation confirmation can be output from the cylinder switch when the valve is open.
Cylinder switchSW-T3V (CKD)· DC 3-wire proximity (NO) lead length 1m· Power voltage 10 to 28 VDC· Current consumption 10mA or less (at 24V DC)
AGD11V-
C
ø41
B
14.3
AModel No.
78
Note: Keep the ambient temperature within -10 to 60 .
C
A
B
C
A
B
Proximity switch Operation port Rc1/8
Operation port Rc1/8
AGD**V SeriesAir operated valve for process gas
24
Continuous use possible up to 80
Stable inner seal performance achieved with nonrotating rod(Patent pending)
Zero particle generation realized with optimum seal structure and improved surface roughness
Valve dead space minimized
Electropolished finish specifications
Handle position and top indicator indicate whether the valve is open or closed.
Panel installation possible
Inner seal performance stabilized with spring
High corrosion resistant Ni-Co alloy diaphragm
JXR joint connection *1
Standard (male and female) and double barbed joints
OGD10V OGD20VWorking fluid
Working pressure range
Pa(abs)-MPa
Fluid temperature
Ambient temperature
Valve seat leakage
Pa·m3/s(He)
External leakage
Pa·m3/s(He)
Cv flow factor
Connection
Weight kg
Inert gas/process gas
1.3 10-6 to 1.0
-10 to 80
-10 to 80
1.3 10-9 or less
2.8 10-12 or less
Specifications
1/4" JXR male joint
1/4" JXR female joint
1/4" double barbed joint
3/8" JXR male joint
3/8" JXR female joint
3/8" double barbed joint
0.34 *1 0.69 *1
*1: The JXR joint can be connected to the VCR joint.
No. Parts nameMaterials for wetted areas
MaterialNi-Co alloyPCTFESUS316L
DiaphragmValve seatBody
1
2
3
Descriptions
0.26 0.6
*1: Value for OGD10V-4RM (1/4-inch JXR male joint) and OGD20V-6RM (3/8-inch JXR male joint).
Close the valve by turning the handle
1 2 3
Precautions
Always read page 9 in the introduction and
pages 2 to 3 to ensure correct and safe
use of this product.
Model No. Cv flow factor
OGD10V Cv=0.26Model No. Cv flow factor
OGD20V Cv=0.6
Manual valve for process gas
OGD 0V Series Metal diaphragm 90° rotation snap action type
12
25
Model No. A
57
76
B
37
47
C
82
104
D
27
35
E
36
48
F
24
27
G
14.3
16
H
18
20.2
J
2-M5 depth 6
2-M5 depth 8
I
18
20.2
K
ø20.5
ø26.5
OGD10V-4R-
OGD20V-6R-
L
70.6
83
M
14.3
16
N
27
35
OGD10V-4S-
OGD20V-6S-
O
62
80
P
14.3
16
Q
27
35
R
27.8
44.3
OGD10V-4RM-OGD20V-6RM- JXR male joint
Dimensions
Handle color
OGD10V-4R-OGD20V-6R- JXR female joint
OGD10V-4S-OGD20V-6S- Double barbed joint
How to order
A B
OGD10V 4RM
OGD20V 6RM
K
K
4RM
4R
4S
6RM
6R
6S
1/4" JXR male joint
1/4" JXR female joint
1/4" double barbed joint
3/8" JXR male joint
3/8" JXR female joint
3/8" double barbed joint
OGD10V OGD20V
•••
••••
••••
•••
K
R
B
Y
Black
Red
Blue
Yellow
Model No. Connection
C Handle color
ConnectionB
Handle colorC
Symbol Descriptions•Black (-K) •Red (-R)
•Blue (-B) •Yellow (-Y)
OGD10V-4RM-
OGD20V-6RM-
Symbol
Model No. Symbol Model No. Symbol
Model No.A
H
G
D
I
A
J
FB
E
C
IN OUT
KPanel mount
diameter
Pan
el m
ou
nt
thic
knes
s5m
m o
r le
ss
IN OUT
N
L
M
IN OUT
QR
O
P
OGD 0V SeriesManual valve for process gas
12
26
•Continuous use possible up to 80
• Zero particle generation realized with optimum seal structure and improved surface roughness
•Valve dead space minimized
•Electropolished finish specifications
•Handle shape ensures optimum inner sealing
•Panel installation possible
•Stopper prevents diaphragm d a m a g e f r o m e x c e s s i v e tightening
•JXR joint connection *1
Standard (male and female) and double barbed joints
•High corrosion resistant Ni-Co alloy diaphragm
*1: The JXR joint can be connected to the VCR joint.
No. Parts name
Materials for wetted areasMaterialNi-Co alloyPCTFESUS316L
DiaphragmValve seatBody
1
2
3
MGD10V MGD20V DescriptionsInert gas/process gas
1.3 10-6 to 1.0
-10 to 80
-10 to 80
1.3 10-9or less
2.8 10-12or less
Specifications
1/4" JXR male joint
1/4" JXR female joint
1/4" double barbed joint
3/8" JXR male joint
3/8" JXR female joint
3/8" double barbed joint
Manual valve incorporating basic air-operated valve performance
Working fluid
Working pressure range
Pa(abs)-MPa
Fluid temperature
Ambient temperature
Valve seat leakage
Pa·m3/s(He)
External leakage
Pa·m3/s(He)
Cv flow factor
Connection
Weight kg
*1: Value for MGD10V-4RM (1/4-inch JXR male joint) and MGD20V-6RM (3/8-inch JXR male joint).
0.26 0.6
0.29 *1 0.62 *1
1 2 3
Manual valve for process gas
MGD 0V Series Metal diaphragm 270° rotation type
12
Model No. Cv flow factor
MGD10V Cv=0.26Model No. Cv flow factor
MGD20V Cv=0.6
Precautions
Always read page 9 in the introduction and
pages 2 to 3 to ensure correct and safe
use of this product.
27
MGD10V-4R
MGD20V-6R
K
70.6
83
L
14.3
16
M
27
35
MGD10V-4S
MGD20V-6S
N
62
80
O
14.3
16
P
27
35
Q
27.8
44.3
MGD10V-4RM
MGD20V-6RM
A
57
76
B
ø38
ø38
C
74
86
D
27
35
E
36
48
F
14.3
16
G
18
20.2
H
18
20.2
J
ø20.5
ø20.5
I
2-M5 depth 6
2-M5 depth 8
MGD10V-4RMMGD20V-6RM•JXR male joint
Dimensions
MGD10V-4RMGD20V-6R•JXR female joint
MGD10V-4SMGD20V-6S•Double barbed joint
How to order
MGD10V 4RM
A Connection
Model No.
4RM
4R
4S
1/4" JXR male joint
1/4" JXR female joint
1/4" double barbed joint
ConnectionA
Symbol Descriptions
MGD20V 6RM
A Connection
Model No.
6RM
6R
6S
3/8" JXR male joint
3/8" JXR female joint
3/8" double barbed joint
ConnectionA
Symbol Descriptions
Note: The handle comes in standard silver and black, red, blue, and yellow Refer to Page 28 for the model no. (Dimensions are the same as following.).
Model No. Symbol
Model No. Symbol Model No. Symbol
B
JPanel mount
diameter
A
G
HI
D
F
E
C
Pan
el m
ou
nt
thic
knes
s5m
m o
r le
ss
IN OUT
M
K
L
IN OUT
QN
P
O
IN OUT
MGD 0V SeriesManual valve for process gas
12
28
Manual valve for process gas
Parts compatible with other variationsOGD*0V/MGD*0V Series
Custom order
Body options (pages 28 to 32)
•Connection
•Port shape combination
•Handle color
Model Variations
Safety specification options (page 33)
•Locking mechanism
•Double action mechanism
OGD10VOGD20VMGD10VMGD20V
How to order OGD-V, MGD-V Series options
SpecificationsRefer to specification pages for each series.
GD 1O K40V RJ MF
RJ R RM W SE Port shape
combination
F Handle color
Symbol
BlankMFFM
FFFFFMFMMMMMWWW
ConnectionD
2 way valve
3-way separate flow valve
D Connection
C Port size
B Size
A Model OM
Manual (snap action)Manual (round handle)
OGD1
12
1/4"3/8"
OGD2
MGD1
MGD2
Model No.
ModelA
SizeB
Symbol Descriptions
468
1/4"3/8"1/2"
RJR
RMWS
JXR female joint (with bearing)JXR female jointJXR male jointAutomatic welded jointDouble barbed joint
BlankMFFM
FFFFFMFMMMMMWWW
IN, OUT Same joint typeIN: Male, OUT: FemaleIN: Female, OUT: Male
abc female/female/femaleabc female/female/maleabc female/male/maleabc male/male/maleabc automatic welded jointabc / / *1
Port sizeC
ConnectionD
Port shape combinationE
2 way valve
3-way separate flow valve
KBYR
BlackBlueYellowRed
Handle colorF
*1 F: Female, M: Male, W: Automatic welded joint, all joints can be combined.
Handle color Black (-K) Red (-R)
Blue (-B) Yellow (-Y)
29
MGD10V SeriesManual valve for process gas
OGD10V Series
Dimensions
2 way valve Custom order
•OGD10V-4RJ-K (B, Y, R) (1/4" JXR female joint (with bearing) type)
•OGD10V-4W-K (B, Y, R) (1/4" automatic welded joint type)
•MGD10V-4RJ-K (B, Y, R) (1/4" JXR female joint (with bearing) type)
•MGD10V-4R-K (B, Y, R) (1/4" JXR female joint type)
•MGD10V-4RM-K (B, Y, R) (1/4" JXR male joint type)
•MGD10V-4W-K (B, Y, R) (1/4" automatic welded joint type)
•MGD10V-4S-K (B, Y, R) (1/4" double barbed joint type)
OGD10VMGD10V
•OGD10V-4RJ- -K (B, Y, R) (1/4" JXR female (with bearing) - male combination type)
•OGD10V-4R- -K (B, Y, R) (1/4" JXR female - male combination type)
•MGD10V-4RJ- -K (B, Y, R) (1/4" JXR female (with bearing) - male combination type
•MGD10V-4R- -K (B, Y, R) (1/4" JXR female - male combination type)
FMMF
FMMF
FMMF
FMMF
Figure shows OGD10V-4RJ-KFemale joint (with bearing)
Welded joint: 4W
Female joint (with bearing) Female joint: 4R Male joint: 4RM
Figure shows MGD10V-4RJ-KFemale joint (with bearing)
35.328.5 35.3 28.5
18
2-M5 screw depth 618
55
36
14.3
ø37
74
70.6
Pan
el m
ou
nt
thic
knes
s5m
m o
r le
ss
Panel mount diameter
ø20.5
27
14.3
2437
82
70.6
36
Panel mount diameter
ø20.5
Pan
el m
ou
nt
thic
knes
s5m
m o
r le
ss
27
30
MGD10V Series
OGD10V Series
Dimensions
3-way separate flow valve Custom order
•OGD10V-4RJ- -K (B, Y, R) (1/4" JXR female joint (with bearing) combination type)
•OGD10V-4R- -K (B, Y, R) (1/4" JXR female joint combination type)
•OGD10V-4RM-MMM-K (B, Y, R) (1/4" JXR male joint type)
•OGD10V-4W- -K (B, Y, R) (1/4" automatic welded joint combination type)
•MGD10V-4RJ- -K (B, Y, R) (1/4" JXR female joint (with bearing) combination type)
•MGD10V-4R- -K (B, Y, R) (1/4" JXR female joint combination type)
•MGD10V-4RM-MMM-K (B, Y, R) (1/4" JXR male joint type)
•MGD10V-4W- -K (B, Y, R) (1/4" automatic welded joint combination type)
OGD10VMGD10V
Figure shows OGD10V-4RJ-FFF-KFemale joint (with bearing)
Female joint: 4R Welded joint: 4WMale joint: 4RM
Female joint: 4RJ- F(with bearing)
Female joint: 4R- F Male joint: - M Welded joint: - W
Figure shows MGD10V-4RJ-FFF-KFemale joint (with bearing)
27.5
70.670.6
5135.3
5557
35.3
35.370.6
35.370.6
2-M5 screw depth 618
18
36
14.3
Pan
el m
ou
nt
thic
knes
s5m
m o
r le
ss
Panel mountdiameter
ø20.5
ø37
2414
.3P
anel
mo
un
t th
ickn
ess
5mm
or
less
74
82
37
Panel mountdiameter
ø20.5
36
<Branch port>
<Main port >
a c
b
a
a
c
c
b
b
27 27
a c
b
31
MGD20V SeriesManual valve for process gas
OGD20V Series
2 way valve Custom order
Dimensions
•OGD20V-6RJ-K (B, Y, R) (3/8" JXR female joint (with bearing) type)
•OGD20V-6W-K (B, Y, R) (3/8" automatic welded joint type)
•MGD20V-6RJ-K (B, Y, R) (3/8" JXR female joint (with bearing) type)
•MGD20V-6R-K (B, Y, R) (3/8" JXR female joint type)
•MGD20V-6RM-K (B, Y, R) (3/8" JXR male joint type)
•MGD20V-6W-K (B, Y, R) (3/8" automatic welded joint type)
•MGD20V-6S-K (B, Y, R) (3/8" double barbed joint type)
OGD20VMGD20V
•OGD20V-6RJ- -K (B, Y, R) (3/8" JXR female (with bearing) - male combination type)
•OGD20V-6R- -K (B, Y, R) (3/8" JXR female - male combination type)
•MGD20V-6RJ- -K (B, Y, R) (3/8" JXR female (with bearing) - male combination type)
•MGD20V-6R- -K (B, Y, R) (3/8" JXR female - male combination type)
FMMF
FMMF
FMMF
FMMF
Figure shows OGD20V-6RJ-KFemale joint (with bearing)
Welded joint: 6W Double barbed joint: 8S
Female joint: 6RJ (with bearing) Female joint: 6R Male joint: 6RM
Figure shows MGD20V-6RJ-Kfemale joint (with bearing)
·The 1/2-inch size is also available. The face-to-face distance is the same as the 3/8-inch size. (This does not apply to the double-barbed joint.)
·The 1/2-inch size is also available. The face-to-face distance is the same as the 3/8-inch size.
ø37
47
104
8583
Panel mountdiameter
ø20.5 Pan
el m
ou
nt
thic
knes
s5m
m o
r le
ss48
16
2748
16
Panel mountdiameter
ø26.5
35
Pan
el m
ou
nt
thic
knes
s5m
m o
r le
ss
(84.5)
83
372-M5 screw depth 820.2
20.2
69
41.5 3838 41.5
35
32
MGD20V Series
OGD20V Series
3-way separate flow valve Custom order
Dimensions
•OGD20V-6RJ- (3/8" JXR female joint (with bearing) combination type)
•OGD20V-6R- (3/8" JXR female joint combination type)
•OGD20V-6RM-MMM (3/8" JXR male joint type)
•OGD20V-6W- (3/8" automatic welded joint combination type)
•MGD20V-6RJ- (3/8" JXR female joint (with bearing) combination type)
•MGD20V-6R- (3/8" JXR female joint combination type)
•MGD20V-6RM-MMM (3/8" JXR male joint type)
•MGD20V-6W- (3/8" automatic welded joint combination type)
OGD20VMGD20V
Figure shows OGD20V-6RJ-FFFfemale joint (with bearing)
Female joint: 6R Welded joint: 6WMale joint: 6RM
Female joint: 6RJ- F(with bearing)
Female joint: 6R- F Male joint: - M Welded joint: - W
Figure shows MGD20V-6RJ-FFFfemale joint (with bearing)
·The 1/2-inch size is also available. The face-to-face distance is the same as the 3/8-inch size.
<Branch port>
<Main port >
a cb a
a
c
c
b
b
Panel mountdiameter
ø20.5 Pan
el m
ou
nt
thic
knes
s5m
m o
r le
ss48
ø37
8541.5
16
83
27
Pan
el m
ou
nt
thic
knes
s5m
m o
r le
ss48
Panel mountdiameter
ø26.5
47
104
41.5
83
76 6983
20.2
61.5 34.541.5
35
16
2-M5 screw depth 820.2
41.5
35
a c
b
33
Safety specification options Custom order
MGD10V With double action mechanismMGD10V With locking mechanism
Outline drawing
OGD*0VMGD10V
Malfunctions are eliminated by pushing and turning the handle (double action).
Contact your CKD representative for details on the model No., etc.
* Contact your CKD representative for details on the model No., etc.
Dimensions
Handle can be padlocked not to move. (1) Locked when valve open(2) Locked when valve closed(3) Locked when valve open/closed The following three are available:
* Contact your CKD representative for details on the model No., etc.
OGD10V-
OGD20V-
C
37
47
B
14.3
16
AModel No.
94
118
OGD*0V- With locking mechanism
A
C
B
MGD*0V SeriesManual valve for process gas
OGD*0V Series
34
Vacuum generator for process gas exhaust
VG Series Nozzle diameter: ø0.5
VG DescriptionsInert gas/process gas
0 to 80
Nitrogen, dry air
0.4 to 0.6
15 or less *1
13.3 or less
6 *1 *2
2.8 10-12 or less
3
0 to 80
0.2
Specifications
No. Parts nameMaterials for wetted areas
MaterialSUS316LSUS316LSUS316LSUS316LSUS316LFKM or Perfluoroelastomer
BodyNozzleSpacerDiffuserDiffuser holderO ring
1
2
3
4
5
6
•New nozzle: 1. Greatly reduces fluid consumption 2. Resists primary pressure fluctuations (Patent pending)
Model No.
VG-05FVG-05P
O ring material
FKMPerfluoroelastomer
•JXR joint connection *1
IN: 1/4" JXR male joint VAC.: 1/4" JXR female joint VENT: 3/8" JXR male joint
•Compact
VENTIN
VA
C
*1: The JXR joint can be connected to the VCR joint.
*1: At 0.5MPa pressurization (during operation)*2: When working fluid is air
Working fluid
Fluid temperature
Supply fluid
Supply fluid pressure MPa MPa
Supply fluid consumption /min(ANR)
Ultimate vacuum kPa(abs)
Discharge rate /min(ANR)
External leakage Pa·m3/s(He)
Withstanding pressure MPa
Ambient temperature
Port size
Weight kg
IN : 1/4" JXR male joint (Connectable with VCR joint)
VAC : 1/4" JXR female joint (Connectable with VCR joint)
VENT: 3/8" JXR male joint (Connectable with VCR joint)
Energy saving evacuation1 2 3 4 5
6
Precautions
Always read page 9 in the introduction and
pages 2 to 3 to ensure correct and safe
use of this product.
35
•Ultimate vacuum
•VG-05*
•Supply fluid consumption rate, discharge rate
Characteristics curve
How to order
Dimensions
Ult
imat
e va
cuu
m
Supply pressure
100
0 0.1 0.2 0.3 0.4 0.5 0.6 0.7 0.8
13.3kPa(abs)
10
1
(kPa(abs))
(MPa)
Co
nsu
mp
tio
n r
ate,
dis
char
ge
rate 20
10
15
5
0
Supply pressure
0 0.1
( /min(ANR))
0.2 0.3 0.4 0.5 0.6 0.7 0.8(MPa)
Consumption rate
Discharge rate
VG 05 F
A Nozzle diameter [mm]
Model No.
B O ring material
05 ø0.5
Nozzle diameter [mm]A
Symbol Descriptions
O ring materialB
F
P
FKM
Perfluoroelastomer
31.5
VAC.
VENTIN1/4" JXR male joint
1/4" JXR female joint
3/8" JXR male joint
26.5
32.5
VG Series
36
•Diaphragm type extremely small flow rate adjustment valve
•Piston structure check valve
· Wetted areas are all metal: Body (SUS316L) Diaphragm (Ni-Co alloy)
· Two maximum Cv flow factors are possible: 0.03 and 0.2
· Flow reaches to the maximum Cv flow factor when the handle is turned 10 times.
· Connection The JXR male joint, JXR female joint, and Double-barbed joint are available.
· The valve seat is Kalrez.
· Other wetted areas using SUS316L
· Cracking pressure is 23 kPa.
· Connection The JXR male joint and Double-barbed joint are available.
Diaphragm type extremely small flow rate adjustment valvePiston structure check valve
Custom order
37
Regulator for process gasRegulator for process gas
Precautions 39PGM 42
CONTENTS
37
38
39
Regulator for process gas PGM series
Component for process gas
Safety PrecautionsAlways read before starting useRefer to Intro 9 for the general cautions.
Completely loosen the pressure adjustment knobcounterclockwise (DEC) before supplying gas tothe regulator.Gradually open the supply valve inlet so the sup-ply valve can be shut immediately if any abnormalpressure rise or leak occurs.After supplying inlet pressure, check that no out-lets leak.Do not use this component as a shutoff valve.During use, a metallic noise may be heard, and out-let pressure may change violently (vibration). If thisoccurs, close the inlet supply valve immediately andstop use.
Set pressure will increase when the pressure ad-justment knob is turned clockwise (INC).If the knob is turned counterclockwise (DEC)while gas is flowing, set pressure drops.The regulator does not have a relief function, soa vent must be provided when gas is not flowing.
Gradually open the inlet gas supply valve andsupply inlet pressure.Close outlet and inlet valves and wait for at leastten minutes. Check whether outlet pressure rises.
Turn the pressure adjustment knob clockwiseand adjust outlet pressure to within the adjust-ment pressure range. Wait at least ten minutesafter outlet pressure stabilizes and checkwhether outlet pressure rises.If outlet pressure continues to rise in steps and , an outlet leak exists.
If an outlet leak is found, discontinue use immedi-ately. Bleed gas, purge the regulator, then removeand replace it.
Regulator inletConfirm that the regulator pressure adjustmentknob is turned completely counterclockwise,then supply clean inert gas (N2, Ar, etc.) to theregulator inlet.Close the inlet supply valve after inlet pressurestabilizes.If inlet pressure gradually drops from the abovestate over time, a leak may exist in the regulator.Note that this applies when no outlet leak exists.
Regulator outletConfirm that the regulator pressure adjustmentknob is turned completely counterclockwise,then supply clean inert gas (N2, Ar, etc.) to theregulator inlet.Close the regulator outlet valve and set the pres-sure with the pressure adjustment knob.Completely close the regulator inlet supply valveafter inlet and outlet pressure stabilize.If inlet and outlet pressure both fluctuate greatlyfrom the above state over time, a leak may existin the regulator outlet.Note that this applies when no outlet leak exists.
If a leak is found, discontinue use immediately,and bleed gas. Purge pipes if necessary, then re-move and replace the regulator.
Design & Selection
Install a safety device if output pressure exceed-ing the regulator set pressure may cause damageor faulty operation of peripherals.
Pipe so fluid flows in the direction of the arrow.
During use
CAUTION
WARNING
1. Precautions for use
Adjusting knob
To increase pressure:Turn in clockwise direction (INC)
To decrease pressure:Turn in counterclockwisedirection (DEC)
2. Operation methods
CAUTION
3. Checking for outlet leaks
CAUTION
4. Checking air-tightness
CAUTION
3
4 23
1
2
1
2
3
1
2
3
4
40
Slim body· Easy to install, improved knob operability.· Sufficient space for harnesses, etc., when IGS is installed· Compatible with 1.125-inch size when IGS is installed
Sealing performance· Improved valve seat sealing reduces the occurrence of outlet leaks.
Clean level compatible with ultra-high-purity gas· Poppet sliding sections are reduced to minimize particle generation.· Metal seal specifications apply to all screws in wetted areas.· Long-life, highly corrosion- resistant Hastelloy C-22 used for diaphragm.· Electropolished finish specifications· Gas purging considered with reduced internal capacity and optimum flow path design.· High anticorrosion grades also available! (Option)
Vibration measures· New vibration prevention guards against vibration. (Patent pending)
Flow characteristics· Small pressure drop· Large flow realized with compact size!· Negative pressure control first realized with free poppet. (Patent pending)· Low sliding section members ensure smooth operation and reduce hysteresis!
Control of extremely small flow· Problems due to changes in the MFC output signal for extremely small flows less than several + sccm have been resolved.R
PGM-30V,30,50 PGM-H-60
PGM-100 PGM-H-100
0.00
0.05
0.10
0.15
0.20
0.25
0.30
0.35
0.40
0 10 20 30 40 50 60
P1=0.7MPaP1=0.5MPaP1=0.3MPa
0.00
0.05
0.10
0.15
0.20
0.25
0.30
0.35
0.40
0 20 40 60 80 100
P1=0.7MPaP1=0.5MPaP1=0.3MPa
Flow characteristics
0.00
0.60
0.50
0.40
0.30
0.20
0.10
0 20 40 60 80 100
P1=0.7MPaP1=0.5MPaP1=0.3MPa
0.00
0.60
0.50
0.40
0.30
0.20
0.10
0 10 20 30 40 50 60
P1=0.7MPaP1=0.5MPaP1=0.3MPa
IN OUT
Flow( /min(ANR))(N2) Flow( /min(ANR))(N2)
Flow( /min(ANR))(N2) Flow( /min(ANR))(N2)
Sec
on
dar
y p
ress
ure
(M
Pa)
Sec
on
dar
y p
ress
ure
(M
Pa)
Sec
on
dar
y p
ress
ure
(M
Pa)
Sec
on
dar
y p
ress
ure
(M
Pa)
High-performance regulatorincorporating CKD's abundant experience
PGM series
PGM Series
41
Flo
w s
erie
sF
low
ser
ies
20 /min
50 /min
-0.1 0 0.1 0.2 0.3 0.4 0.5 0.6 0.7 0.8
Secondary set pressure(MPa)
PGM-30V
PGM-30
PGM-50
PGM-100
PGM-H-60
PGM-H-100
PGM Series
Variety
Diverse connection variations
1/4" JXR female joint
1/4" JXR male joint
1/4" JXR male female joint
1/4" JXR female male joint
1.5" C seal
1.5" CS seal
1.5" W seal
1.125" C seal
1.125" W seal
Abundant pressure range variations
(JXR joint type)
( Circled section shows each
integrated valve interface)
42
Regulator for process gas
PGM Series Metal diaphragm
Specifications
-0.07 to 0.21 0 to 0.21 0 to 0.35
Inert gas/process gas
1.0
-5 to 40
1 10-9 or less
2.8 10-12 or less
1.5
-5 to 40
Electropolished finish
Various integrated valve (IGS) interface (PGM-*-1, 2, 3, 4, 5)
1/4" JXR joint (Connectable with VCR) (PGM-*4R, 4RM, 4MF, 4FM)
0.39(PGM-*-4)
0 to 0.42 0 to 0.7
Working fluid
Primary maximum working pressure MPa
Secondary set pressure MPa
Working fluid temperature
Valve seat leakage Pa·m3/s(He)
External leakage Pa·m3/s(He)
Withstanding pressure MPa
Ambient temperature
Wetted area surface treatment
Connection
Weight kg
JIS Symbol
PGM- 30V 30 50 100PGM-H- 60 100
Descriptions
PrecautionsAlways read page 9 in the introduction and page 39 to ensure correct and safe use of this product.
Flow characteristics Refer to Page 40.
Model No. Flow series Secondary set pressure
PGM-30V 20 /min -0.07 to 0.21MPaPGM-30 20 /min 0 to 0.21MPaPGM-50 20 /min 0 to 0.35MPaPGM-100 20 /min 0 to 0.7 MPa
Model No. Flow series Secondary set pressure
PGM-H-60 50 /min 0 to 0.42MPaPGM-H-100 50 /min 0 to 0.7 MPa
43
PGM Series
No. Parts nameMaterials for wetted areas
MaterialSUS316L
Hastelloy C-22
PCTFE
SUS316L or Hastelloy C-22 (option)
SUS316 or Ni-Co alloy (option)
Body
Diaphragm
Sheet
Poppet
Spring
1
2
3
4
5
4R S
How to order
Internal structure and parts list
PGM H
A Flow series
B Secondary set pressure
C Connection
D Option
30
Blank
H
20 /min
50 /min
Flow seriesA
Symbol Descriptions
Symbol Descriptions PGM PGM-H
Secondary set pressureB
Model No.
30V
30
50
60
100
-0.07 to 0.21MPa {-10 to 30psi}
0 to 0.21MPa {0 to 30psi}
0 to 0.35MPa {0 to 50psi}
0 to 0.42MPa {0 to 60psi}
0 to 0.7MPa {0 to 100psi}
ConnectionC
4R
4RM
4MF
4FM
1
2
3
4
5
1/4"JXR female joint
1/4"JXR male joint
1/4"JXR male female joint
1/4"JXR female male joint
1.125" C seal
1.5" C seal
1.5" CS seal
1.5" W seal
1.125" W seal
OptionD
SPoppet: Hastelloy C-22
Spring: Ni-Co alloy
IN OUT
*1: Listed flows are nominal. Confirm pressure conditions with the flow characteristics graph.*2: There is no gauge port.
1
2
3
4
5
44
PGM Series
ø28.6
85(M
AX
95)
11.2
18 30
70.6
IN OUT
4-M5 depth 718
29
ø28.6
85(M
AX
95)
11.2
18 30
70.6
IN OUT
4-M5 depth 718
29
ø28.6
99(M
AX
109)
6.5
21.7
4
28.5
IN OUT
4-ø4.721.74
28.5
7.75
ø28.6
104(
MA
X11
4)8
30.1
8
38
IN OUT
ø28.6
104(
MA
X11
4)8
IN OUT
ø28.6
104(
MA
X11
4)8
IN OUT
ø28.6
99(M
AX
109)
6.5
IN OUT
4-ø5.530.1838
30 39
4-ø5.52639
30 39
4-ø5.62639
21.8
28.5
4-ø4.420
28.5
7.75
PGM-*-4R(1/4"JXR female joint)
PGM-*-4RM(1/4"JXR male joint)
PGM-*-1(1.125"C seal)
Note: The flow path direction is indicated on the body by arrows.
PGM-*-2(1.5"C seal)
PGM-*-3(1.5"CS seal)
PGM-*-4(1.5"W seal)
PGM-*-5(1.125"W seal)
Dimensions
45
Integrated gas supply systemIntegrated gas supply system
Product guide 46IAGD3 (CS seal) 50IAGD4 (W seal) 60SEMI F86 and F87 (1.125 inch size, C seal) compatible valve 67
CONTENTS
45
46
Process gas regulator PGM Series Highly accurate pressure control
Compatible with both CS and W seals
Space saved usingblocks with filters
Gas line expansion is flexibly handled using rails
Integrated gas supply systemIAGD3/IAGD4 Series
Greatly improvingspace saving and maintenance.
This system was developed for use in the gas supply line ofsemiconductor manufacturing equipment. The SEMI standard surface-mounted air-operated valve and mass flow controller, etc., areintegrated compactly.
IntegratedGasSystem Series
Overview
Custom order
* This is a rail product.
PAT.
47
Main features
Integrated Gas System Series
Reduced footprint
· Footprint 50% of conventional
· Volume 36% of conventional
Increased corrosion resistance(zero contamination)
· Welded areas are reduced by 80%.Conventional causes of contamination are greatly reduced by reducing welded areas.
Improved purging
· The flow path is configured with little internal volume and dead volume.
· Purging is improved.
Standardization
· Standardized components are promoted.
Improved workability
· Components can be installed and removed from the top.
· With the rail model, gas line expansion is handled flexibly.
· Heating is simplified.
Improved reliability
· CS and W seals are used.
Existing gas jungle
Integrated gas supply system
48
History of integrated gas system
Integrated Gas System Series
1992 1994 1996 1998 2000 2002 2004
IAGDCS seal
IAGD2CS seal
IAGD3CS seal
IAGD4W seal
49
Flow of integrated gas supply system
Integrated Gas System Series
Layout
· The layout is based on the user's specifications and flowcharts.
· Device manufacturers and models are selected and prepared based on
the user's specifications.
· Components are positioned with jigs, and the base block is installed.
· Integrated devices are installed.
Layout drawing
Completion
MFCMFC
MFC
MFCMFCMFC
MFC
MFC
PTPTPTPTPT
C
C C CC CC CCCC C C CC CC CCCC Flowchart
Partspreparation
Assembly 1
Assembly 2
Inspection
50
Integrated gas supply system componentsAir operated valve for IAGD3
Integrated Gas System Series
IAGD3
MAGD3-0 MAGD3-1DescriptionsWorking fluid
Working pressure range Pa(abs)-MPa
Fluid temperature
Ambient temperature
Valve seat leakage Pa·m3/s(He)
External leakage Pa·m3/s(He)
Cv flow factor
Connection
Operating pressure MPaNC
NO
Operating pressure connection port
Body
Diaphragm
Sheet
Inert gas/process gas
1.3 10-6 to 0.7
-10 to 80
-10 to 80
1.3 10-9
5.0 10-10
CS seal (nominal 6.35)
0.4 to 0.6
0.4 to 0.5
M5
SUS316L
Ni-Co alloy
PCTFE
Specifications
0.1 0.26M
ater
ial
F Check valve
G Pressurizingdirection
C
D Actuation (V2)
E Actuation (V3)
A
B
How to order
MAGD3 1 A1 2 C04A
MAGD3 Air operated valve for IAGD3Series
Valve shape
SeriesA
Symbol Descriptions
<Example of model number>MAGD3-03A-12C-A
Series: Air-operated valve for IAGD3Valve shape: 1/8 inch size 3-station block
A type valve (3-port)Actuation (V1): NCActuation (V2): NOActuation (V3): Without V3With check valvePressurizing direction:
(a)port pressurizing (for MFC primary side)
A
B
C
D
E
F
G
02A
03A
04A
11C
11D
11F
2-station block A type valve (3-port)
3-station block A type valve (3-port)
4-station block A type valve (4-port)
1-station block C type valve (2-port)
1-station block D type valve (2-port)
1-station block F type valve (3-port)
Valve shape
0.1
0.26
Cv flow factorB
1
2
3
4
NC
NO
NC (with proximity sensor (energized when valve closed))
NO (with proximity sensor (energized when valve opened))
Actuation (V1)C
1
2
3
4
NC
NO
NC (with proximity sensor (energized when valve closed))
NO (with proximity sensor (energized when valve opened))
Actuation (V2)D
1
2
Blank
NC
NO
No V3
Actuation (V3)E
A
B
port pressurizing (for MFC primary side)
port pressurizing (for MFC secondary side)
Pressurizing directionG
C Check valve
Check valveF
Actuation (V1)
a
a
b
Note 1: Select the pressurizing direction only when using (B)valve O3A or O4A.
Note 2: Installation bolts, gasket, actuator, and drive air joint are not included, and must be purchased separately.
Note 3: Consult with the CKD Sales Office if a valve with air joint for actuator drive is required.
G
B
51
a b
cd
a c b
d
da bc
V1 V3 V2
V1 V3 V2
V1 V3 V2
MAGD3-04A-111C-A
MAGD3-04A-112C-B
656.5 65.5
30 3973
.8 90.8
16
159.5
1-station block 2-station block 3-station block 4-station block
63.5 1692.5
30 39
6.5
90.8
a c b
V1 V2
V1 V2
a b
c
30 39
92 166.5121
73.8 90
.8
a c b
V2V1
V1 V2
a c b
V1 V2
MAGD3-03A-11C-A
MAGD3-03A-11C-B
a b
c
MAGD3 SeriesDimensions
Dimensions
MAGD3-11C
MAGD3-11D
MAGD3-11F
MAGD3-02A-1*
MAGD3-02A-3*
MAGD3-03A-11C
MAGD3-03A-3* C-A
MAGD3-04A-11* C
MAGD3-04A-31* C-A
MAGD3-04A-132C-A
30 3949.5
897
12.7
6.5
2639
30 398
8930 39
296.5 1658
2898
a c b
a b
c
30 39
6.5 63.5 1692.5
114
a c b
V1 V2
V1 V2
a b
c
92 166.5121
30 3973
.8 90.8 11
4
a c b
V2
V1
V1 V2
a
b
c
c
a
d
b
da bc
V1 V3
V2
V1 V3 V2
159.5
73.8
656.5 65.5 16
30 3911
4
90.8
a
d
b
c
ad
bc
V3 V2
V1
V1 V3 V2
159.565.5656.5
3930
16
90.8
73.8
114
The check valve direction is reversed
for MAGD3-O3A-3* C-B.
52
Components for integrated gas supply systemManual valve for IAGD3
Integrated Gas System Series
IAGD3
MOGD3-11 DescriptionsWorking fluid
Working pressure range Pa(abs)-MPa
Fluid temperature
Ambient temperature
Valve seat leakage Pa·m3/s(He)
External leakage Pa·m3/s(He)
Cv flow factor
Connection
Body
Diaphragm
Sheet
Inert gas/process gas
1.3 10-6 to 0.7
-10 to 80
-10 to 80
1.3 10-9
5.0 10-10
0.26
CS seal (nominal 6.35)
SUS316L
Ni-Co alloy
PCTFE
Specifications
Mat
eria
l
C
D Pressurizing direction
E Others
A
B
How to order
MOGD3 K S1A11C
MOGD3 Manual valve for IAGD3series
valve shape
seriesA
Symbol Descriptions
<Example of model number>MOGD3-11C-KA-S1
Series: Manual valve for IAGD3Valve shape: 1-station block C type valve (2-port)Handle color: BlackPressurizing direction: port pressurizingOthers: With handle lock (only when valve is closed)
Note 1: Installation bolts and gasket are not included, and must be purchased separately.
A
B
C
D
E
11C
11D
1-station block C type valve (2-port)
1-station block D type valve (2-port)
valve shapeB
K
R
B
Y
G
Handle color Black
Handle color Red
Handle color Blue
Handle color Yellow
Handle color Green
Handle colorC
A
B
port pressurizing
port pressurizing
Pressurizing directionD
S1
Blank
With handle lock (only when valve is closed)
No key
OthersE
Handle color
a
b
a
53
MOGD3 SeriesDimensions
Dimensions
MOGD3-11C-* A
MOGD3-11C-KA-S1
MOGD3-11C-* B
MOGD3-11F-* A
MOGD3-11D-* A
MOGD3-11F-* B
12.7
18
810
4
49.5
6.5
3930
a b
20
b a
12.78
104
49.5
6.5
39 30
18
20
a b
39
26
30
39
968
30
12.7
811
6.6
49.5
6.5
39
18
a b
20
a
a
b
b
c
c
105
28
5829 16 6.5
3930
ab c
b a
c
105
2858
16 29 6.530 39
54
Components for integrated gas supply systemFlow adjusting valve for IAGD3
Integrated Gas System Series
IAGD3
MFGD3-11D-1 MFGD3-11D-4 DescriptionsWorking fluid
Working pressure range Pa(abs)-MPa
Fluid temperature
Ambient temperature
Valve seat leakage Pa·m3/s(He)
External leakage Pa·m3/s(He)
Cv flow factor (max.)
Connection
Body
Diaphragm
Inert gas/process gas
1.3 10-6 to 0.7
-10 to 80
-10 to 80
1/100 or less of maximum Cv flow factor
5.0 10-10
CS seal (nominal 6.35)
SUS316L
Ni-Co alloy
Specifications
0.03 0.2M
ater
ial
* The product has a cover.
C
A
B
How to order Dimensions
MFGD3 111D
series
valve shape
<Example of model number>
MFGD3-11D
MFGD3-11D-1Series: Flow adjusting valve for IAGD3Valve shape: 1-station block D type valve (2-port)Cv flow factor (max.): 0.03
Note 1: Installation bolts and gasket are not included, and must be purchased separately.
A
B
C
Cv flow factor(max.)
MFGD3 Flow adjusting valve for IAGD3
seriesA
Symbol Descriptions
11D 1-station block D type valve (2-port)
valve shapeB
1
4
Cv flow factor (max.) 0.03
Cv flow factor (max.) 0.2
Cv flow factor (max.)C12
7
8
39
26
30 39
55
Components for integrated gas supply systemCheck valve for IAGD3
Integrated Gas System Series
IAGD3
MCGP3-01D Descriptions
Working fluid
Working pressure range Pa(abs)-MPa
Fluid temperature
Ambient temperature
Valve seat leakage Pa·m3/s(He)
External leakage Pa·m3/s(He)
Cv flow factor (max.)
Connection
Body
Sheet
Spring
Gasket
Inert gas/process gas
1.3 10-6 to 0.7
-10 to 80
-10 to 80
4.7 10-8
5.0 10-10
0.25
CS seal (nominal 6.35)
SUS316L
Kalrez
SUS316-WPA
PTFE
Specifications
Mat
eria
l
C
A
B
How to order Dimensions
MCGP3 01D 023 KA
Series
Shape
<Example of model number>
MCGP3-01D-023-KA
MCGP3-01D-023-KASeries: Check valve for IAGD3Shape: 1-station block D type valve (2-port)Cranking pressure: 2.3kPa Sheet material: Kalrez
Note 1: Installation bolts and gasket are not included, and must be purchased separately.
A
B
C
D
Cranking pressure (2.3kPa)
D Sheet material (Kalrez)
( )1-station block D type valve (2-port)
39
26
30 3960
.3
8
56
Components for integrated gas supply systemOther components for IAGD3
Integrated Gas System Series
IAGD3
Model No.Gasket set (Bolt length 16 mm)
Gasket set (Bolt length 20 mm)Gasket set (Bolt length 30 mm)Gasket set (Bolt length 35 mm)
Gasket set (Bolt length 40 mm)
Gasket set (Bolt length 45 mm)
IAGD3-SEAL
IAGD3-SEAL-L20IAGD3-SEAL-L30IAGD3-SEAL-L35
IAGD3-SEAL-L40
IAGD3-SEAL-L45
Applicable partsMAGD3-11CMAGD3-11DMOGD3-11CMOGD3-11DMFGD3-11DMCGP3
MAGD3-11FMAGD3-02AMOGD3-03AMOGD3-04ABypass block (for 26 mm pitch between surfaces)Bypass piping block (for 79.8 mm pitch between MFC surfaces)Sealing flangeSEC-7330* -* -792B(STEC MFC)SEC-7340* -* -792B(STEC MFC)SEC-F730* -* -792B(STEC MFC)SEC-F740* -* -792B(STEC MFC)SEC-4400-792B(STEC MFC)FC-785X* B(AEJ MFC)FC-795* T-B(AEJ MFC)FC-D985* T-B1(AEJ MFC)FC-D985* Y-B1(AEJ MFC)FC-985* T-B1(AEJ MFC)FC-985* Y-B1(AEJ MFC)IFLOW FC* SS CS SEALDB9-T(Mykrolis MFC)FC-2979(Mykrolis MFC)SEC-7350* -* -792B(STEC MFC)SEC-7355* -* -792B(STEC MFC)SEC-F750* -* -792B(STEC MFC)FC-785* T-B(AEJ MFC)FC-785* Y-B(AEJ MFC)FC-786* T-B(AEJ MFC)FC-786* Y-B(AEJ MFC)FC-796* T-B1(AEJ MFC)FC-D986* Y-B1(AEJ MFC)FC-986* T-B1(AEJ MFC)FC-986* Y-B1(AEJ MFC)
Gasket set (2 hexagon socket head cap bolts, 1 C-ring, 1 gasket retainer)
Name
Model No. NameMaintenance tool set IAGD3-MAINTENANCE
Maintenance tool ( )1 each: Installer set, torque wrench, hexagon wrench bit with magnet, hexagon wrench ball bit, extension bar
Note 1: The required number of gasket sets is determined by the number of CS seals.Note 2: Contact CKD for details on applicable parts.
See the Instruction Manual for details on use.
Material C ring: SUS316L, SUS304-WPB (Non-wetted area)Gasket retainer: SUS304Hexagon socket head cap bolt: SCM435 (Special treatment)
57
IAGD3 SeriesOther components
Top mount block Bypass block
(for 26 mm pitch between surfaces)
Mount base B-1
Bypass piping block(for 79.8 mm pitch between MFC surfaces)
Mount base E-5
Sealing flange
Mount base F-1
Base block
39
3028
39
26
92.8
79.8
30 38
28
1328
38
30
28
16
15
24 30 3815
16 6
45
14
20 15 6.5
24 18
1530 38
16
2436 443015
28
15
58
Components for integrated gas supply systemAir operated valve for IAGD4
Integrated Gas System Series
IAGD4
MAGD4-0 MAGD4-1 DescriptionsWorking fluid
Working pressure range Pa(abs)-MPa
Fluid temperature
Ambient temperature
Valve seat leakage Pa·m3/s(He)
External leakage Pa·m3/s(He)
Cv flow factor
Connection
Operating pressure MPa NC
NO
Operating pressure connection port
Body
Diaphragm
Sheet
Inert gas/process gas
1.3 10-6 to 0.7
-10 to 80
-10 to 80
1.3 10-9
5.0 10-10
W seal (nominal 6.35)
0.4 to 0.6
0.4 to 0.5
M5
SUS316L
Ni-Co alloy
PCTFE
Specifications
0.1 0.26M
ater
ial
C
D Actuation (V1)
E Actuation (V2)
A
B
How to order
MAGD4 W 1 202A
MAGD4
MAGD4A
Air operated valve for IAGD4
Air operated valve for IAGD4
(Upgraded version type, MAGD4A-11D only)
Series
Valve shape
SeriesA
Symbol Descriptions
<Example of model number>MAGD4-02A-W-12
Series: Air operated valve for IAGD4Valve shape: 2-station block D type valve (3-port)Seal shape: W seal (nominal 6.35)Actuation (V1): NCActuation (V2): NO
Note 1: Installation bolts, gasket, actuator, and drive air joint are not included, and must be purchased separately.
Note 2: Consult with the CKD Sales Office if a type with installation bolts is required.
A
B
C
D
E
01D
01X
01Y
02A
11D
1-station block D type valve (2-port)
1-station block X type valve (3-port)
1-station block Y type valve (3-port)
2-station block A type valve (3-port)
1-station block D type valve (2-port)
Valve shape
0.1
0.26
Cv flow factorB
W W seal (nominal 6.35)
Seal shapeC
1
2
3
4
5
6
NC
NO
NC (with proximity sensor (energized when valve closed))
NO (with proximity sensor (energized when valve opened))
NC (with proximity sensor (energized when valve opened))
NO (with proximity sensor (energized when valve closed))
Actuation (V1)D
1
2
3
4
5
6
NC
NO
NC (with proximity sensor (energized when valve closed))
NO (with proximity sensor (energized when valve opened))
NC (with proximity sensor (energized when valve opened))
NO (with proximity sensor (energized when valve closed))
Actuation (V2)E
Seal shape
59
a c
b
ca
b
30 39
3913 13
65.8
8
a c
b
a
b
c
30 3989
8
(124
.2)
3913 13
a c
b
ca
b
30 39
7360
54.5
6.5
79.5
31
a c
b
a c
b
30 39
7360
54.5
6.5
102.
7(1
37.9
)
31
MAGD4 SeriesDimensions
Dimensions
1-station block MAGD4-01D
MAGD4-01Y
MAGD4-02A
(With proximity sensor)
(With proximity sensor)
MAGD4-01X
MAGD4A-11D
(With proximity sensor)
(With proximity sensor)
(With proximity sensor)
2-station block
30 39
2613
63.5
8
30 39
2613
86.7
8
(121
.9)
a c
b
a c
b
V1 V2
30 39
6.591.5
69.5
3179
.5
78.5
a c
b
a c
b
V1
V2
6.5 78.591.5
30 39
69.5
3179
.510
2.7
(137
.9)
30
2639
398
97.7
811
2.5
30 39
2639
(147
.7)
60
Components for integrated gas supply systemManual valve for IAGD4
Integrated Gas System Series
IAGD4
MOGD4-01 MOGD4-11 DescriptionsWorking fluid
Working pressure range Pa(abs)-MPa
Fluid temperature
Ambient temperature
Valve seat leakage Pa·m3/s(He)
External leakage Pam3/s(He)
Cv flow factor
Connection
Body
Diaphragm
Sheet
Inert gas/process gas
1.3 10-6 to 0.7
-10 to 80
-10 to 80
1.3 10-9
5.0 10-10
W seal (nominal 6.35)
SUS316L
Ni-Co alloy
PCTFE
Specifications
0.1 0.26M
ater
ial
C
D Handle color
E Others
A
B
How to order
MOGD4 W S111D KA
MOGD4 Manual valve for IAGD4Series
Valve shape
SeriesA
Symbol Descriptions
<Example of model number>MOGD4-11D-W-KA-S1
Series: Manual valve for IAGD4Valve shape: 1-station block D type valve (2-port)Seal shape: W seal (nominal 6.35)Handle color: BlackOthers: With handle lock (only when valve is closed)
Note 1: Installation bolts and gasket are not included, and must be purchased separately.
Note 2: Consult with the CKD Sales Office if a type with installation bolts is required.
A
B
C
D
E
11D
01X
01Y
1-station block D type valve (2-port)
1-station block X type valve (3-port)
1-station block Y type valve (3-port)
Valve shape0.26
0.1
Cv flow factorB
K
R
B
Y
G
Handle color Black
Handle color Red
Handle color Blue
Handle color Yellow
Handle color Green
Handle colorD
S1
Blank
With handle lock (only when valve is closed)
No key
OthersE
W W seal (nominal 6.35)
Seal shapeCSeal shape
61
MOGD4 SeriesDimensions
Dimensions
MOGD4-01D
MOGD4-11D-W-* A
MOGD4-01X
MOGD4-11D-W-* A-S1
30 39
2639
810
0
39 30
3926
(125
)
116.
68
26
30 3985
8
1373
30 39
a c
b54.5
606.5
101
3131
a
b
c
62
Components for integrated gas supply systemFlow adjusting valve for IAGD4
Integrated Gas System Series
IAGD4
MFGD4-11D-W-1 MFGD4-11D-W-4 DescriptionsWorking fluid
Working pressure range Pa(abs)-MPa
Fluid temperature
Ambient temperature
Valve seat leakage Pa·m3/s(He)
External leakage Pa·m3/s(He)
Cv flow factor (max.)
Connection
Body
Diaphragm
Inert gas/process gas
1.3 10-6 to 0.7
-10 to 80
-10 to 80
1/100 or less of maximum Cv flow factor
5.0 10-10
W seal (nominal 6.35)
SUS316L
Ni-Co alloy
Specifications
0.03 0.2
* The product has a cover.
Mat
eria
l
D
A
B
How to order Dimensions
MFGD4 W 111D
Series
Valve shape
C Seal shape
<Example of model number>
MFGD4
MFGD4-11D-W-1Series: Flow adjusting valve for IAGD4Valve shape: 1-station block D type valve (2-port)Seal shape: W seal (nominal 6.35)Other: Cv flow factor (max.) 0.03
Note 1: Installation bolts and gasket are not included, and must be purchased separately.
Note 2: Consult with the CKD Sales Office if a type with installation bolts is required.
A
B
C
D
Cv value (max.)
MFGD4 Flow adjusting valve for IAGD4
SeriesA
Symbol Descriptions
11D 1-station block D type valve (2-port)
Valve shapeB
1
4
Cv flow factor (max.) 0.03
Cv flow factor (max.) 0.2
Cv flow factor (max.)D
W W seal (nominal 6.35)
Seal shapeC8
131.
4
30 39
26
39
63
Components for integrated gas supply systemCheck valve for IAGD4
Integrated Gas System Series
IAGD4
MCGP4-01D MCGP4-F DescriptionsWorking fluid
Working pressure range Pa(abs)-MPa
Fluid temperature
Ambient temperature
Valve seat leakage Pa·m3/s(He)
External leakage Pa·m3/s(He)
Cv flow factor (max.)
Connection
Body
Sheet
Spring
Gasket
Inert gas/process gas
1.3 10-6 to 0.7
-10 to 80
-10 to 80
4.7 10-8
5.0 10-10
0.25
W seal (nominal 6.35)
SUS316L
Kalrez
SUS316-WPA
PTFE
Specifications
Mat
eria
l
C
A
B
How to order Dimensions
MCGP4 01D 023 KA
Series
Shape
<Example of model number>
MCGP4-F* MCGP4-01D
MCGP4-01D-W-023-KASeries: Check valve for IAGD4Shape: 1-station block D type valve (2-port)Seal shape: W seal (nominal 6.35)Cracking pressure: 2.3 kPaSheet material: Kalrez
Note 1: Installation bolts and gasket are not included, and must be purchased separately.
Note 2: Consult with the CKD Sales Office if a type with installation bolts is required.
A
B
C
D
E
Seal shape
MCGP4 Check valve for IAGD4
SeriesA
Symbol Descriptions
01D
F1
F2
1-station block D type valve (2-port)
Flow direction JXR joint side to W seal side
Flow direction W seal side to JXR joint side
ShapeB
023 Cracking pressure 2.3 kPa
Cracking pressureDD Cracking
pressure
E Sheetmaterial
KA Sheet material Kalrez
Sheet materialE
W
L
W seal (nominal 6.35)
1/4 inch JXR male joint
Seal shapeC
W
30 39
18
8
47
30 39
26
39
8
67
1/4 inch JXR male
64
Components for integrated gas supply systemOther components for IAGD4
Integrated Gas System Series
IAGD4
DescriptionsWorking fluid
Filtration m
Particle trapping rate
Maximum working pressure MPa
Fluid temperature
External leakage Pa·m3/s(He)
Connection
Materials for wetted areas
Inert gas/process gas
0.003
Particles 0.003 m or larger: 99.9999999% and over (at 30 /min)
0.97
-10 to 80
3.0 10-10
W seal (nominal 6.35)
SUS316L
Specifications
Dimensions
0.1
0.09
0.08
0.07
0.06
0.05
0.04
0.03
0.02
0.01
0
Pre
ssu
re lo
ss (
MP
a)
Flow characteristics Primary pressure P1 = 0.2 MPa (references data)
0 10 20 30 40 50
Flow rate ( /min) 2016 30 39
39
13
146
Features
Performance equivalent to top mounted filter. Outstanding gas replacement and dry down characteristics.
Space saving (Entire length of the integrated unit can be shortened.)
* Contact the CKD Sales Office for details on the model, etc.
65
Components for integrated gas supply systemOther components for IAGD4
Integrated Gas System Series
IAGD4
Model No. NameW seal gasket (nominal 6.35) IAGD4-UGF-6.35GR
Gasket
Model No. NameMaintenance tool set IAGD4-MAINTENANCE
Maintenance tool
Model No. NameHexagon socket head cap bolt
for W seal (M5 X 12, 4 pieces)
Hexagon socket head cap bolt
for W seal (M5 X 35, 4 pieces)
Hexagon socket head cap bolt
for W seal (M5 X 40, 4 pieces)
Hexagon socket head cap bolt
for W seal (M5 X 43, 4 pieces)
IAGD4-BOLT-M5 12-4
IAGD4-BOLT-M5 35-4
IAGD4-BOLT-M5 40-4
IAGD4-BOLT-M5 43-4
Applicable partsMAGD4-01D
MAGD4A-11D
MOGD4-11D
MFGD4-11D
MCGP4-01D
MCGP4-F*
Bypass block (for 26 mm pitch between surfaces)
Bypass piping block (for 79.8 mm pitch between MFC surfaces)
Sealing flange
SEC-G111* -W-1.5 (STEC MFC)
MAGD4-01X
MAGD4-02A
MOGD4-01X
FC-785(AEJ MFC)
FC-786(AEJ MFC)
FC-985(AEJ MFC)
SEC-7330* -800A(STEC MFC)
SEC-7340* -800A(STEC MFC)
SEC-F730* -800A(STEC MFC)
SEC-F740* -800A(STEC MFC)
SEC-7350* -800A(STEC MFC)
SEC-F750* -800A(STEC MFC)
FC-986(AEJ MFC)
W seal mounting bolt
(1 each: torque driver, torque driver bit, tweezers (gasket mounting tool))
Contact CKD for details on applicable parts.
See the Instruction Manual for details on use.
66
30 39
25
39
26
(55.
4)30 39
79.8
92.4
13
30
39
8
IAGD4 SeriesOther components
Top mount block By-pass block (For 26 mm pitch between surfaces)
Base block 1 (20.6 mm between surfaces)
By-pass piping block(For 79.8 mm pitch between MFC surfaces)
Base block 5 (14.0 mm between surfaces)
Sealing flange
1/4 inch JXR male flange
Base block
20
20.6
32.6
16 30 39
2030 39
1426
16
2016 30 39
6
17
49.224.8
1/4 inchJXR male
12
67
Components for integrated gas supply systemSEMI F86, F87 (1.125-inch size, C seal) compatibleair-operated valve, manual valve
Integrated Gas System Series
DescriptionsWorking fluid
Working pressure range Pa(abs)-MPa
Fluid temperature
Working ambient temperature
Valve seat leakage Pa·m3/s(He)
External leakage Pa·m3/s(He)
Wetted area surface treatment
Connection
Inert gas/process gas
1.3 10-6 to 0.86
-40 to 80
-40 to 80
1 10-10 or less
2.8 10-12 or less
Electropolished finish specifications
SEMI F86, F87 compatible
MAGD · MMGD
Specifications
Features
Cv= 0.3 realized with 1.125 inch compact body. Outstanding valve sealing Push-in joint for 1/8-inch tubing integrated in actuator operation port. (Air-operated valve) LOTO mechanism integrated to prevent incorrect operation (manual valve)
68
69
Other gas componentsOther gas components
Precautions 70Inline clean filter FCS 72Clean regulator RC2000 82
CONTENTS
69
70
Use within the product's specific specificationrange.
Do not use this product in an atmosphere con-taining organic solvents or chemicals, etc., orwhere these may come in contact with the prod-uct.Failure to observe this may damage the polyamide housing.Use stainless steel in these environments.
This product is for industrial use and not for usein devices or circuits for medical equipment ordevices that involve human life.
Confirm the working circuit and working fluid.Install a dryer, air filter, or oil mist filter on the primary side toremove any moisture and oil and to prevent filter performancefrom being compromised.
Do not exceed the maximum working pressureor maximum pressure difference.Failure to observe this may damage the product or elementmembrane.
Do not let fluids exceed the maximum flow.Failure to observe this may cause filtration to drop or damagethe element membrane.
This device cannot be used as an absolute filter.Filtration is 99.99% within specified conditions.
Design & Selection
Open the product in a clean room.The product is packaged in a clean room, and should beopened just before piping it in the clean room.
Avoid installing this product where it may be sub-jected to direct sunlight.
Flush and clean pipes before use.Any dirt or foreign matter in piping decreases product perfor-mance.
Check that foreign matter does not enter whenscrewing in pipes or joints.Check that pipe thread swarf or sealing agent does not enterwhen screwing in pipes or joints. Product performance maydecrease if there is dirt or foreign matter in piping.
Confirm the flow direction indicated by the arrowand connect the product correctly.Product life is shortened if installed reversed.
Pipe so that excessive force is not applied to theproduct.Check that force such as pulling, compression, bending, orexternal force from the tube is not applied to the product whenpiping or installing.
Use appropriate piping tubing.Use CKD soft nylon or urethane tubing.Consult with CKD regarding the use of fluorine resin tubing,etc.
Insert piping tubing securely into the push-in jointbefore use.
Avoid installing where vibration or impact ispresent.
Use the connection's width across flats when pip-ing.When connecting R thread or Rc thread piping, place a wrenchacross the connection's width across flats, then pipe. Avoidfixing the connection in other places.Tighten pipes with theappropriate torque.
Tighten pipes with the appropriate torque.
Do not supply sudden high pressure when sup-plying compressed air the first time after connect-ing pipes.The connected pipe may be dislocated and piped tubing maycome off.
Performance may decrease if the filter element isclogged. Regularly inspect and replace the ele-ment.
Inspect regularly for cracks, scratches, and otherdeterioration in the clear resin.Cracks, scratches, and other deterioration may result in dam-age. Replace with a new part or SUS.
Do not disassemble or modify the product.
Stop the fluid supply and confirm that there is noresidual pressure before maintenance.
Read instructions and precautions included withthe product before use or maintenance.
Check that vibration, impact, and external forcecaused by vibrating tubing is not applied to theproduct during use.
Installation & Adjustment
During use & Maintenance
Other gas components
Safety PrecautionsAlways read before starting use
Inline clean filter FCS Series
CAUTION
CAUTION
CAUTION
M5Rc1/8, R1/8Rc1/4, R1/4Rc3/8, R3/8
1 to 1.5
3 to 5
6 to 8
13 to 15
Tightening torque N·mSet screw
WARNING
71
Clean regulator RC2000 Series
Other gas components
Safety PrecautionsAlways read before starting useRefer to Intro 9 for the general cautions.
Use within the product's specific specificationrange.
Install a safety device where an output pressureexceeding the regulator's set pressure valuecould result in damage or faulty operation of sec-ondary side devices.
Check the working circuit and working fluid.Malfunctions may result if fluids containing solids or not speci-fied fluids flow. Connect a filter to the primary side of the prod-uct to prevent the entry of solid matter.
WARNINGThe line may vibrate depending on work and pip-ing conditions.Lower primary pressure if the line vibrates.
Secondary pressure flows to the primary sidewhen primary pressure is released.Other devices may malfunction if secondary fluids flow to theprimary side. Provide a circuit that maintains the pressure.
Set secondary side pressure of the regulator to85% or less of the primary side, or else the pres-sure drop could increase.
CAUTION
Design & Selection
Installation
Open the product in a clean room.This product is packed in a double layer in a clean room. Openthe first layer, and take the product into the clean room. Openthe second layer just before piping.
Flush and clean pipes before use.Any dirt or foreign matter in piping decreases product perfor-mance.
Check that foreign matter does not enter whenscrewing in pipes or joints.Check that pipe thread swarf or sealing agent does not enterwhen screwing in pipes or joints. Product performance maydecrease if there is dirt or foreign matter in piping.
Confirm the flow direction indicated by the arrowand connect the product correctly.The RC2000 does not function correctly if installed reversed.
Tighten pipes witht h e a p p ro p r i a t etorque.
(Right table is rec-ommended torque)
Sufficient maintenance spaceEnsure sufficient space for maintenance and inspection.
Plug the pressure gauge connection port usingthe pressure gauge and pipe plug.
Avoid installing where vibration or impact ispresent.
If nuts for panel installation are loosened, nutsfunction as a jack making it easier to remove theknob. When installing the knob, install nuts first.
CAUTIONSet screw Tightening torque N·m
M5
Rc1/8
Rc1/4
Rc3/8
Rc1/2
1.0 to 1.5
3 to 5
6 to 8
13 to 15
16 to 18
During use & Maintenance
Release the lock before adjusting pressure.Operating the pressure adjustment knob while locked mayresult in damage.
Adjust pressure in the direction of pressure rise.Pressure cannot be set correctly if adjusted downward.
Non-relief pressure cannot be reduced unless sec-ondary pressure is consuming pressure.
Read instructions and precautions included withthe product before use or maintenance.
CAUTION
72
Specifications
Working fluid
IN side diameter (*1)
OUT side diameter (*2)
Withstanding pressure MPa
Withstanding differential pressure MPa
Working pressure range MPa
Working temperature range
Filtration rating
Treating flow rate /min (ANR) Note 1
Product mass g
Body
Material Case
Element
Assembly/inspection/packing
Cleaning
JIS symbol
Compressed air, nitrogen
Selection from ø4, ø6, ø8, R1/8, R1/4
1.5
0.5 (0.2 for 45 to 50 )
-0.095 to 0.99 Note 2
5 to 50
0.01 (removal efficiency 99.99%)
50 (80 for H88A, 8AH8 type)
45
Polyamide, aluminum (alumite treatment)
Transparent polyamide
Polypropylene + urethane
Integrated manufacture in clean room
Degreasing and cleaning
2.25 (compressed air), 1.5 (nitrogen)
0.5
-0.095 to 1.5 (compressed air), -0.095 to 0.99 (nitrogen)
5 to 45
Stainless steel
Stainless steel
Rc1/4
Rc1/4
80
100
Rc1/8
Rc1/8
50
100
Selection from ø4, ø6, ø8
1.5
0.5 (0.2 for 45 to 50 )
-0.095 to 0.99 Note 2
5 to 50
50 (80 for H8H8 type)
45
Polyamide
Transparent polyamide
DescriptionsStandard element resin type Male thread pipe type P9 element stainless steel type
FCS500-(*1)(*2) FCS500-(*1)(*2)FCS500-88-P90FCS500-88-P94
FCS500-66-P90FCS500-66-P94
Relationship of working temperature and maximum working pressure for the resin
element and male thread piping filter
0.6
0.7
0.8
0.9
1
1.1
5 10 15 20 25 30 35 40 45 50
Temperature ( )
Max
. wor
king
pre
ssur
e (M
Pa)
Usable range
Not available
0
0.01
0.02
0.03
0.04
0.05
0.06
0.07
0.08
0.09
0.1
0 0.01 0.02 0.03 0.04 0.05 0.06 0.07 0.08 0.09 0.1 0.11 0.12
Air flow rate (m3/min [ANR])
Pre
ssu
re lo
ss (
MP
a)
Pre
ssu
re lo
ss (
MP
a)
0
0.01
0.02
0.03
0.04
0.05
0.06
0.07
0.08
0.09
0.1
0 0.01 0.02 0.03 0.04 0.05 0.06 0.07 0.08 0.09 0.1 0.11 0.12
Air flow rate (m3/min [ANR])
0.1MPa0.1MPa
0.7MPa0.7MPa
0.5MPa0.5MPa0.3MPa0.3MPa 0.1MPa0.1MPa 0.5MPa0.5MPa0.3MPa0.3MPa
0.7MPa0.7MPa
0.1MPa
0.7MPa
0.5MPa0.3MPa 0.1MPa 0.5MPa0.3MPa
0.7MPa
•FCS500-H8H8 •FCS500-H88A •FCS500-8AH8
•FCS500-88-P90·P94•FCS500-H4H4 •FCS500-H6H6 •FCS500-H46A
•FCS500-66-P90·P94 (products including ø4, ø6 joint, R1/8, Rc1/8 connection.)
Note 1: Initial flow at 0.7 MPA primary pressure and 0.03 MPa pressure decrease.Note 2: Maximum working pressure differs with based on the working temperature. Check the maximum with the graph showing the relationship of the working temperature and maximum working pressure.
Flow characteristics
Inline clean filter
FCS500 SeriesPort size: Rc1/8, Rc1/4, R1/8, R1/4
Push-in joint ø4, ø6, ø8
73
How to order
B OUT side port size
A IN side port size
Note 1: Two set screws (M2.5x25) and two flat washers are included with the product. These are not included when 6A or 8A is selected for the IN or OUT connection bore size.Note 2: When using male thread piping for both IN and OUT sides, check that piping does not apply lateral load or bending torque when installing.
FCS500
FCS500-B(One bracket, 2 set screw (M4 X 6))
H4 H4•Resin type
•Bracket discrete model No.
IN side port sizeA
ø4
ø6
ø8
R1/8
R1/4
H4
H6
H8
6A
8A
B Attached
A
C
Port size
Clean room specifications
Model No.(Clean room specifications)(Oil-prohibited specifications)
FCS500 88 B P90•Stainless steel type
Model No.(Clean room specifications)(Oil-prohibited specifications)
Structure/treatment Material restriction
Copper-based, silicon-based, halogen-based
(Fluorine, chlorine, oxalic) unacceptable.
Use of stainless steel,
oil treatment prohibited
Use of stainless steel,
oil treatment prohibitedP90
P94
Port sizeA
IN side/OUT side port size Rc1/8
IN side/OUT side port size Rc1/4
66
88
Note: "P94" is custom order.
OUT side port sizeB
ø4
ø6
ø8
R1/8
R1/4
H4
H6
H8
6A
8A
AttachedB
None
Bracket, set screw
Blank
B
Clean room specificationsC
FCS500 Series
How to order
74
OUTIN
OUTIN
1 26
6
3
4
5
1 2
4
5
Internal structure and parts list
•Parts list
•Resin type
•Stainless steel type
Body
Pin
Pin
O ring
Cartridge joint
1
2
3
4
5
6
Element
Housing
Filter
Potting material
Brass (nickeling)
Nitrile rubber
Polyamide
Transparent polyamide
Polypropylene
Urethane
Stainless steel
Stainless steel
Polypropylene
Urethane
Fluoro rubber (for clean room specifications P90)
Nitrile rubber (for specifications P94)
No. Parts name Standard element resin type
P9*elementstainless steel type
Polyamide
Aluminum (alumite treatment)
Transparent polyamide
Polypropylene
Urethane
Stainless steel
Stainless steel
Male thread pipe type
Fluoro rubber
FCS500 Series
75
41.6
15.82-2.8
IN side Port size ø4 ø6 ø8
OUT side port size ø4 ø6 ø8
A 21
20
ø18
OUTIN
Port size ø4 ø6 ø8
Port sizeR1/8R1/4
ø1
8
A
A
IN(OUT)
IN
OUT(IN)
OUT
25
23
40
ø4.5
OUT sidePort sizeRc1/8Rc1/4IN side
Port sizeRc1/8Rc1/4
18
60
OUTIN
1
ø21
20
IN side port sizeR1/8R1/4
OUT side port sizeR1/8R1/4 25
23
ø18
Dimensions
•Resin type Port size IN side (cartridge joint) - OUT side (cartridge joint)
•Male thread pipe type Port size Cartridge joint - male thread
Port size Male thread - male thread
•Stainless steel type
Port size
model No.
A dimension
H8H8
87
8AH8
H88A
76
8A8A
65
H68A
8AH6
75
H66A
6AH6
72
H6H8
H8H6
86
FCS500 (standard element, resin type/male thread pipe type)H6H6
85
6A6A
58.5
6A8A
8A6A
62
H48A
H86A
6AH8
8AH4
73
H46A
6AH4
69.5
H4H8
H8H4
84
H4H6
H6H4
83
Model No.H4H4
80.5
FCS500 Series
Dimensions
76
Inline clean filter
FCS1000 Series Port size: Rc1/4, Rc3/8, R1/4, R3/8 Push-in joint ø8, ø10, ø12
Specifications
Working fluid
IN side diameter (*1)
OUT side diameter (*2)
Withstanding pressure MPa
Withstanding differential pressure MPa
Working pressure range MPa
Working temperature range
Filtration rating
Treating flow rate /min (ANR)
Body
Material Case
Element
Assembly/inspection/packing
Cleaning
JIS symbol
Select from Rc1/4, Rc3/8
2.25 (compressed air), 1.5 (nitrogen)
-0.095 to 1.5 (compressed air), -0.095 to 0.99 (nitrogen)
Stainless steel
Stainless steel
Select from push-in joint ø8, ø10, ø12,
R1/4, R3/8, Rc1/4, Rc3/8
1.5
-0.095 to 0.99
Polyamide
Transparent polyamide
DescriptionsResin type Stainless steel type (custom order)
FCS1000-(*1)(*2)FCS1000-(*1)(*2)-P90FCS1000-(*1)(*2)-P94
Compressed air, nitrogen
0.5
5 to 45
0.01 (removal efficiency 99.99%)
300 to 400 Note 1
Polypropylene + urethane
Integrated manufacture in clean room
Degreasing and cleaning
0
0.02
0.04
0.06
0.08
0.1
0
0.02
0.04
0.06
0.08
0.1
0
0.02
0.04
0.06
0.08
0.1
0 0.2 0.4 0.6 0.8 1 0 0.2 0.4 0.6 0.8 1 0 0.2 0.4 0.6 0.8 1
•FCS1000-H8H8
•FCS1000-8A8A•FCS1000-H10H10
•FCS1000-10A10A
•FCS1000-88
•FCS1000-88-P90/P94
•FCS1000-H12H12
•FCS1000-1010
•FCS1000-1010-P90/P94
P1=0.3 P1=0.5 P1=0.1 P1=0.3 P1=0.5 P1=0.7 P1=0.1 P1=0.3 P1=0.5 P1=0.7
P1=0.7P1=0.1
Air flow rate (m3/min [ANR]) Air flow rate (m3/min [ANR]) Air flow rate (m3/min [ANR])
Pre
ssu
re lo
ss (
MP
a)
Pre
ssu
re lo
ss (
MP
a)
Pre
ssu
re lo
ss (
MP
a)
Note 1: Initial flow at 0.7 MPa primary pressure and 0.03 MPa pressure decrease. (This varies based on connection bore size.)
Flow characteristics
77
How to order
B OUT side port size
A IN side port size
Note 1: Two set screws (M3x40), two flat washers, and two spring washers are included with the product.
FCS1000 H8 H8•Resin type
•Element for replacement model No. (One element, two O-lings)
·For resin type : FCS1000-E ·Stainless steel type
For P90 : FCS1000-E-P90 (custom order)
For P94 : FCS1000-E-P94 (custom order)
IN side port sizeA
ø8
ø10
ø12
R1/4
R3/8
Rc1/4
Rc3/8
H8
H10
H12
8A
10A
8
10
B OUT side port size
A
C
IN side port size
Clean room specifications
Model No.(Clean room specifications)(Oil-prohibited specifications)
FCS1000 P90•Stainless steel type (custom order)
Model No.(Clean room specifications)(Oil-prohibited specifications)
Structure/treatment Material restriction
Copper-based, silicon-based, halogen-based
(fluorine, chlorine, oxalic) unacceptable.
Use of stainless steel,
oil treatment prohibited
Use of stainless steel,
oil treatment prohibitedP90
P94
IN side port sizeA
Rc1/4
Rc3/8
8
10
OUT side port sizeB
ø8
ø10
ø12
R1/4
R3/8
Rc1/4
Rc3/8
H8
H10
H12
8A
10A
8
10
OUT side port sizeB
Rc1/4
Rc3/8
8
10
Clean room specificationsC
8 8
FCS1000 Series
How to order
78
3 1
2
4
3
55
1
2
4
55
Internal structure and parts list
•Parts list
•Resin type •Stainless steel type
1
2
3
4
5
No. Parts name Resin type Stainless steel type
Element
Housing
Filter
Potting material
Body
Plug
O ring
Cartridge joint
(Port size ø8, ø10, ø12)
Adaptor
(Port size Rc1/4, Rc3/8, R1/4, R3/8)
Transparent polyamide
Polyamide
Polyamide
Nitrile rubber
Brass (nickeling)
Nitrile rubber
Aluminum
(Alumite treatment)
Stainless steel
Stainless steel
Fluoro rubber (for clean room specifications P90)
Nitrile rubber (for clean room specifications P94)
Stainless steel
Polypropylene
Urethane
FCS1000 Series
79
86
OUTIN
34
33
4-4.4
4-3.
46.
6Set screw (M3 40)
40
39
A
B
Port size ø8 ø10 ø12
A Port sizeRc1/4Rc3/8
23
23
Port sizeR1/4R3/8
A
23
23
IN OUT
95
73
IN side port sizeRc1/4Rc3/8
ø4023
23
OUT side port sizeRc1/4Rc3/8
Dimensions
•Resin type
· Push-in joint (ø8, ø10, ø12)
· R screw (R1/4, R3/8)
· Rc screw (Rc1/4, Rc3/8)
•Stainless steel type
H8
H10
H12
8A
10A
8
10
Port size A Bø17.5
ø17.5
ø19.5
12
14.5
16
24
24
11
11
Connection model No.ø8 push-in joint
ø10 push-in joint
ø12 push-in joint
R1/4
R3/8
Rc1/4
Rc3/8
FCS1000 Series
Dimensions
80
Particle occurrence data
Particle occurrence is detected from the regulator and 2-port solenoid valve, etc.
Particles generated at the regulator and 2-port solenoid valve, etc., are removed by FCS.
0500
100015002000250030003500
0 20000 40000 60000 80000 100000Valve operational cycle [time]
0500
100015002000250030003500
0 20000 40000 60000 80000 100000Valve operational cycle [time]
[Piece/min]
[Piece/min]
Regulator
Regulator
2 port solenoidvalve
2 port solenoidvalve
Pneumaticssources
Particle counter
Particlecounter
Vacuum pump
Pre-filter(5 m) Oil mist
filter
Measuringchamber
Measuringchamber
Vacuum pump
Particle number"0"
FCS
Example of applications and working circuits
•Application 1. Use as a precision filtration filter to filter air and N2 gas and provide clean air.
•Application 2. Use a vacuum break filter to flush the vacuum break circuit and provide clean air.
* See the catalogs below for products listed on working circuit. [Pneumatic, Vacuum and Auxiliary Components] (Catalog No.CB-024S) [High Purity Chemical Liquid System Component] (Catalog No.CB-031)
Vacuum
3 port valve
Inline clean filterFCS
For air
Air dryerSD
Air filterF3000
Oil mist filter
M3000
CleanregulatorRC2000
Airoperated
valveAMD
Inline clean filterFCS
For nitrogen
Par
ticl
e n
um
ber
(Total
numb
er mo
re tha
n 0.1
m)
Par
ticl
e n
um
ber
(Total
numb
er mo
re tha
n 0.1
m)
FCS Series
81
Flow rate: 500 /min (ANR) *1Port size : Rc1/4, Rc3/8
Elbow type push-in joint reduces space when piping.Flow rate: 50 to 80 /min (ANR) *1Port size : ø4, ø6, ø8 L type push-in joint
FCS500 FCS500 L type joint type
FCS1000 stainless steel large flow rate type
*1 Initial flow at 0.7 MPa primary pressure and 0.03 MPa pressure decrease.Contact the CKD Sales Office for other connections and bore sizes.
Custom orderThese products are custom-made. Contact the CKD Sales Office for details.
FCS500 FCS500 Integrated connection type
FCS500 large flow rate type
This integrated connection has no sealed members and is perfect for leakage testers.Flow rate: 10 /min (ANR) *1Port size : R1/8
FCS500 Series increased flow specificationsFlow rate: 100 to 120 /min (ANR) *1Port size : ø6, ø8 push-in joint, R1/8, R1/4
82
A B
How to order
C D
Port sizeA
Rc1/4
Rc3/8
Rc1/2
(Custom order)
81015
RC2000 8 LN P90GY49B3E1
Model No.(Clean room
specifications)(Oil-prohibitedspecifications)
Clean room specificationsD
Treatment
Use of stainless steel, oil treatment prohibitedP90
Option Note 1B
0.05 to 0.7MPa
0.02 to 0.2MPa
Relief type
Non-relief type
Blank
L
Blank
N
Pressure range Note 2Reliefmechanism
Attachment (attached) Note 1, 3C
No attachments
Pressure gauge (G49D-6- -P94)
Pressure gauge (G49D-6- -P90)
L type bracket
Joint (for exhaust treatment)
BlankGY49GZ49
B3E1
Note 1: When selecting multiple options or adjustments, indicate the model symbol in order from the top. If there is no symbol for the option or attachment, delete the hyphen "-". Example: RC2000-8-P90Note 2: If "No symbol" is selected for the pressure range, the 1.0 MPa pressure gauge (pressure gauge model: G49D-6-P10-P9*) is used. If "L" is selected for the pressure range, the 0.2 MPA pressure gauge (pressure gauge model: G49D-6-P02-P9*) is used.Note 3: Two pipe plugs (R1/8) are included with the product. If a pressure gauge is selected as an attachment, one plug is included.
Note 1: When using the standard with a set pressure of 0.4 MPa or less, check that the primary pressure difference for the set pressure is within 0.5 MPa. When using the low pressure type, check that the primary pressure difference for the set pressure is within 0.3 MPa.
Working fluid
Max. working pressure MPa
Withstanding pressure MPa
Working temperature range
Set pressure range MPa
Port size (IN/OUT)
Pressure gauge port size
Product mass kg
Metal
Wetted areas materials Resin
Rubber
Assembly/inspection/packing
Cleaning (wetted areas)
JIS symbol
SpecificationsModel No. RC2000-8-P90 RC2000-10-P90 RC2000-15-P90
Compressed air, nitrogen
1.0 (0.5 for low pressure)
1.5
5 to 60
Standard: 0.05 to 0.7Note 1
Low pressure: 0.02 to 0.2
Rc3/8
Rc1/8
0.45
SUS316
PTFE
FKM
Integrated manufacture in clean room
Precision cleaning
Rc1/4 Rc1/2
0.47 0.59
Overview FeaturesThe stainless steel RC2000 Series has specificationsprohibiting oil, making this suitable for controlling the pressure of clean air and N2 used in semiconductor manufacturing and liquid crystal equipment. This regulator is also suitable for air (N2) exhaust because it is compact and accommodates a large flow.
•Specifications prohibiting oilAll parts are precisely cleaned (wetted) and are integrallyproduced from assembly to packaging in a clean room. Nogrease is used in wetted areas.
•Compact with large flowA large flow of 0.8 m3/min is realized with a compactness of 50 mm face to face.(Flow at 0.7 MPa primary pressure, 0.5 MPa set pressure, 0.1 MPa pressure decrease)
•Reversible when back pressure is not appliedSecondary pressure is reversed to the primary side when primarypressure is purged.This safety-oriented product leaves no pressure on thesecondary side.
Clean regulator
RC2000 Series Port size: Rc1/4, R3/8, R1/2
83
* A mesh filter is installed on the IN side of RC2000-8-P90 and RC2000-10-P90.
Internal structure and parts list
Flow characteristics
•RC2000-8-P90
•RC2000-15-P90
•RC2000-10-P90Primary pressure 0.7MPa
0
0.1
0.2
0.3
0.4
0.5
0.6
0.7
0 0.5 1 1.5 2Air flow rate m3/min (ANR)
Primary pressure 0.7MPa
0
0.1
0.2
0.3
0.4
0.5
0.6
0.7
0 0.5 1 1.5 2Air flow rate m3/min (ANR)
Primary pressure 0.7MPa
0
0.1
0.2
0.3
0.4
0.5
0.6
0.7
0 0.5 1 1.5 2Air flow rate m3/min (ANR)
Pressure characteristicsFlow characteristics (low pressure)
•RC2000-*-L-P90
Air flow rate m3/min (ANR)
Secondary side flow rate 25L/minSet pressure 0.2MPa
0
0.1
0.2
0.3
0 0.2 0.4 0.6 0.8 10
0.1
0.2
0.3
0 0.2 0.4 0.6 0.8 1Primary pressure MPa
Setpoint
Primary pressure 0.3MPa
Sec
on
dar
y p
ress
ure
(M
Pa)
Sec
on
dar
y p
ress
ure
(M
Pa)
Sec
on
dar
y p
ress
ure
(M
Pa)
Sec
on
dar
y p
ress
ure
(M
Pa)
Sec
on
dar
y p
ress
ure
(M
Pa)
IN OUT
No.1
2
3
4
5
6
7
8
9
10
11
12
13
14
Parts nameCover
Pressure adjusting screw assembly
Spring
Diaphragm
Valve
O ring
Plate
Screw
Knob
Mounting nut
Body
Bottom cap
Bottom rubber
Spring
Material (treatment)PA66
Steel, SUS, FKM, POM
Steel
SUS316, FKM, SUS303
SUS316, FKM
FKM
SUS304
Steel (nickel plating)
POM
Zinc die casting (nickel plating)
SUS316, FKM, PTFE
SUS316
FKM
SUS316
3
4
5
6
7
1
2
8
11
10
12
9
14
13
RC2000 SeriesFlow characteristics
84
RC2000 Series
Dimensions
Model No.RC2000-8
RC2000-10
RC2000-15
ARc1/4
Rc3/8
Rc1/2
B
50
58
C
25.5
27.5
D
27
29
E
95
99
F
21
23
Attachment
•L type bracket (-B3) Part model No. : RC2000-B3
•Joint (-E1) Part model No. : RC2000-E1 Model No.
Working fluid
Fluid temperature
Ambient temperature
Applicable tube
RC2000-E1Compressed air, nitrogen
5 to 60
5 to 60
Urethane tube
ItemMetal part
Rubber part
Material (treatment)Brass (nickeling)
NBR
32
Attachment(Joint: for exhaust treatment)
38
OUT
Dim
ensi
on
wh
en
op
erat
ing
kn
ob
E3
CD
F
12
Pressure gauge port size2-Rc1/8
IN
B3659
Exhaust treatment port sizeM5
Attachment(L type bracket)
Port size2-A
Attachment(Pressure gauge)
ø31
Panel cut dimensionPanel plate thickness: Max. 4mm
28
54
68
6.5
1624.5
2
M5 0.8
7 (opposite side of hexagon) Tube O.D. ø6
ø9
15.3
2.5
85
RC2000 SeriesPressure gauge
Pressure gauge
Specifications How to order
Dimensions
Working fluid
Fluid temperature
Ambient temperature
Accuracy Note 1
Shape
Display section diameter
Material
Pressure range MPa
Port size R
Weight g
Model No. G49D-P9*Compressed air, nitrogen
5 to 60
5 to 60
JIS class 3 equivalent ( 3%FS)
DT type (back side screw, stock section 4 squares)
ø43
SUS316
SCS14 (SUS316 equivalent)
Steel (chrome plated)
Glass
0 to 0.2
0 to 1.0
1/8
90
Model No.A
Pressure gaugeG49DPort sizeB
R1/86Pressure display (MPa)C
0 to 0.2
0 to 1.0
P02P10
G49D 6 P02 P90
Bourdon tube
Stock
Housing
Lens
Note 1: The indication accuracy guaranteed temperature is 20 15 .
43.527.5
46.5
ø43
ø2 hole
R1/8
P90 is clean assembly/clean packing.P94 is clean packing.
D Clean room specifications
P90P94
Structure/treatment Material restriction
Copper-based, silicon-based, halogen-based (fluorine, chlorine, oxalic) unacceptable.
Use of stainless steel, oil treatment prohibitedUse of stainless steel, oil treatment prohibited
86
87
High vacuum componentsHigh vacuum components
Precautions 88Air operated valve for high vacuumAVB*1V 92AVB**3 96AVB**2 100AVB* Custom order 106AVP**2 112Manual valve for high vacuumMVB*0 118MVP*0 120Leak valve (Vacuum break valve)FGL11/21 122High vacuum solenoid valveHVB112 126HVB41 128HVB51/61/71/81 130Vacuum delay solenoid valveHVL12/42 134
CONTENTS
87
88
Incorrect installation and piping will cause productproblems, may cause problems in the user's sys-tem, and may cause death or serious injury. The useris responsible for ensuring that the operator hasread the instruction manual and fully understandsthe system.After installation, conduct an appropriate functiontest to confirm that the product is correctly installed.
The vacuum valve is basically designed so all ports can be usedas connection ports to the vacuum pump. However, with somemodels (below), the port for connection to the vacuum pump islimited to one direction.
High vacuum components
Safety PrecautionsAlways read before starting useRefer to Intro 9 for the general cautions.
The high-vacuum component is designed for the control of gas (inert gas, air, vacuum). If used with other media (active gas, fluids,solids, etc.), the product may not function correctly or the performance may drop significantly.
Design & Selection
1. Working media
Electric shock: Solenoid valve electric wiring con-nection (bare live section)
There is a risk of electric shock of the solenoid valve (HVB/HVL) electric wiring connections (bare live section) aretouched.Always disconnect the power supply before starting disas-sembly inspection.Do not touch the live sections with wet hands.
Continuous energized use of solenoid valveWhen the solenoid valve HVB51/61/71/81 are continuouslyenergized and used, and then the power is turned off, thevalve may not open even when reenergized.Check the conditions in Table 2 before using the valve in acontinuous energized state.
1. Solenoid valve
2. Direction when connecting pipes (some models)
High-temperature warning during energizing ofsolenoid valve's coil (some models)
The solenoid valve (HVB/HVL) coil heats when energized. Mod-els using the H Class specification coil (some HVB models) getespecially hot when energized.A risk of burns exists if touched directly.
Precautions for wiring solenoid valveAs a guide, use a wire having a nominal cross-section of0.5 mm2 or larger. Check that excessive force is not ap-plied to leads.Use the product within the allowable voltage range. Useexceeding the tolerable voltage range may cause malfunc-tions or damage coils.Provide an appropriate circuit breaker, such as a fuse, onthe control circuit side to protect electrical equipment.Using a switch circuit that does not generate contact chat-tering improves solenoid valve durability.If the electric circuit is not susceptible to the solenoid surge,provide measures by inserting a surge absorber parallel tothe solenoid.
3. Solenoid valve
<<Table 2>> Conditions for continuous energizing
HVB51-12F-3
HVB51-12F-5
HVB61-12F-3
HVB71-15F-3
HVB71-15F-5
HVB81-15F-3
HVB81-15F-5
ModelDifferential pressure
(MPa)
*1
Allowable continuousenergizing time
*2
De-energized timeto restarting
*3
Differential pressurefor restarting
Continuous energizing working conditions
-0.1 and over to 0.1
0.1 to 0.2
-0.02 and over to 0.0
0.0 to 0.1
-0.1 and over to 0.2
0.2 to 0.3
-0.1 and over to 0.15
-0.02 and over to 0.1
-0.1 and over to 0.2
0.2 to 0.3
-0.1 and over to 0.0
0.0 to 0.1
*1: Continuous energizing time which allows restarting immediately after continuous energizing*2: De-energizing time required after energizing for time shown in *1*3: Differential pressure allowing restarting immediately after energizing for time longer than *1
1. Installation
Installation & Adjustment
WARNING
If the vacuum pump is connected to a not designated portwhen using models in Table 1, problems such as sealing faultsor malfunction may occur.
CAUTION
During use
CAUTION
CAUTION
CAUTION
Continuous energizing possible
25min and over
Continuous energizing possible
25min and over
Continuous energizing possible
30min and over
Continuous energizing possible
Continuous energizing possible
Continuous energizing possible
120min and over
Continuous energizing possible
90min and over
1
2
3
4
5
10min
10min
10min
60min
40min
-0.1 to 0.1MPa
-0.02 to 0.0MPa
-0.1 to 0.2MPa
-0.1 to 0.2MPa
-0.1 to 0.0MPa
<<Table 1>> Models with limited vacuum pump connection port
ModelAVP712-50KAVB812-80KAVP812-80K
FGL (all models)HVB51-12F-5HVB71-15F-5
Vacuum pump connection portBottom port (Refer to Fig. 1)Bottom port (Refer to Fig. 1)Bottom port (Refer to Fig. 1)
OUT portA portA port
Side port
Bottom port
<<Fig. 1>>
89
Correctly connect leads accordingto the color coding. Always turn offthe power for the electrical circuit onthe connection side before startingthis wire.
Fig. 1 Example of T2 basic circuit
Fig. 2 Example (1) of T3 basic circuit(When switch power supply andload power supply are the same)
Fig. 3 Example (2) of T3 basic circuit(when switch power supply andload power supply are different)
Provide a contact protection circuitto prevent switch damage and short-ened life.
When connecting to an inductionload (relay, solenoid valve), a surgevoltage will occur when the switchis turned off. Provide the protectivecircuit shown in Fig. 4.When connecting to a capaciousload (capacitor), a rush current willoccur when the switch is turned on.Provide the protective circuit shownin Fig. 5.If the lead is longer than 10 m, pro-vide the protective circuit shownin Fig. 6 and 7 (for T2) or Fig. 8 (forT3).
Fig. 4 Example of using surge absorbingelement for induction loadUse Hitachi VO6C diode or equivalent.
2 Output circuit protection
1 Connecting leads 3 Connecting to a programmablecontroller (sequencer)
Fig. 5 Example of current limiting resis-tance R inserted in capacious load.In this case, the resistance R ( )must satisfy the following expres-sion:
Fig. 6 Choke coilL=several hundred H to several mHSurpassing high-frequency charac-teristics
Wire near switch (within 2m)
Fig. 7 Rush current limiting resistanceR = Largest resistance acceptablefor load circuit wiringWire near switch (within 2m)
Fig. 8 Electric power noise absorp-tion circuitC1=20 to 50 F Electrolytic ca-pacitor (withstand voltage 50Vand over)C2=0.01 to 0.1 F Ceramic ca-pacitorRush current limiting resistanceR1 = 20 to 30R2 = Largest resistance accept-able for load circuit wiringWire near switch (within 2m)
Connection differs according to the pro-grammable controller model. Connectas shown in Fig. 9 to 13.
Fig. 9 Example of T2 connection tosource load input (with externalpower supply)
Fig. 10 Example of T2 connection tosource load input (with inte-grated power supply)
Fig. 11 Example of T2 connection tosink input
Fig. 12 Example of T3 connection tosource load input (with exter-nal power supply)
Fig. 13 Example of T3 connection tosource load input (with inte-grated power supply)
The T3 switch cannot be connected to asink input programmable controller.
Precautions
Brown
Black
Blue
Load
Switch
ICR
Brown
Black
BlueSwitch
0.05= R( )
V
L
Brown
Blue
Switch
LoadBelow 2m
R
Brown
Blue
Switch
LoadBelow 2m
C1 R1
R2
C2Brown
Blue
BlackSwitch
Below 2m
24VDC COM
COMBlue
Brown
Input
term
inalSwitch
Programmablecontroller
BlackExternalpower
24V DC
COMBlue
Brown
Inpu
t ter
min
al
Switch
Programmablecontroller
Black
Externalpower
Switch
Switch
Blue Brown
Blue Brown
Programmablecontroller
Input
termi
nal
Switch
Switch
Blue Brown
Programmablecontroller
Input
termi
nal
COM
BlueBrown
Programmablecontroller
Input
termi
nal
COM
Switch
Switch
10 to 30V DC
LoadBrown
Blue
Switch
DC power supply for switch and load10 to 28V DC
Brown
Blue
BlackSwitch
Load
DC power supplyfor load30VDC or less
Brown
Blue
BlackSwitch
Load
Proximity switch T2H, T2V, T3H, T3V, NAB-C2, C3
90
If the surrounding area contains astrong magnetic field or large current(large magnet, spot welder, etc.), use astrong magnetic field proof switch.When installing a cylinder with a switchnearby in parallel, or if a magnetic bodymoves very close to the cylinder, mu-tual interference may occur and may ad-versely affect detection accuracy.(Contact CKD for details on the strongmagnetic field proof switch.)
The lead's minimum bending radius is9 mm and over. Pay special attention towiring so that repeated bending strainand tensile strength are not applied tothe lead. Connect an elastic lead speci-fications cylinder switch with higherelasticity at movable sections.(Contact CKD for details on the elastic-ity lead specifications cylinder switch.)
When several 2-wire switches areconnected in parallel, leakage currentincreases in proportion to the num-ber of connected units. Check theload specifications and determine thenumber of switches to be connected.Note that switch light may dim or maynot light.With the 2-wire proximity switch,when one switch is changing from onto off, voltage at both ends of theswitch connected in parallel drops tothe internal voltage drop value whenthe switch is turned on and will beless than the load voltage range.Other switches will not turn on. Checkthe input specifications of the pro-grammable controller, which is theconnection load, before starting use.The 3-wire proximity switch has anextremely small leakage current value(10 A or less), so no problem occursunder normal conditions.
When connecting several 2-wireswitches serially, the switch voltagedrop will be the total voltage drop ofall connected switches.The voltage applied to the load sideis the voltage obtained by subtract-ing the voltage drop at switches frompower voltage. Check the input speci-fications of the programmable con-troller, which are load specifications,and determine the number ofswitches to be connected.When connecting several 3-wire prox-imity switches serially, switch voltagedrop will be the total voltage drop ofall connected switches, as with the2-wire.Current that flows to the switch willbe the total of connected switch cur-rent consumption and load current,as shown below. Thus, Check the loadspecifications and determine thenumber of switches to be connectedso that the switch's maximum loadcurrent is not exceeded.Switches light only when all-switchesare on.
Fig.14
N0.n
Brown
Brown
Brown
Black
Blue
Black
Black
Blue
Blue
Sw
itch
N0.2
Sw
itch
N0.1
Sw
itch
Lo
ad
Currentconsumption
Currentconsumption
Load current
Load current + current consumption
Load current + current consumption 2
Load current + current consumption (n-1)
Currentconsumption
DC power supply for switch and load
4 Magnetic environment
5 Protecting the lead
Parallel connection6
PrecautionsProximity switch T2H, T2V, T3H, T3V, NAB-C2, C3
Serial connections7
91
Fig. 3
Fig. 4
Use the following or equivalent relays. OMRON: MY Fuji Electric: HH5 Tokyo electricity: MPM Matsushita Electric Works: HC
When connecting several TO switchesserially, switch voltage drop will be thetotal voltage drop of all connectedswitches. If one TO is used to check theoperation and another T5 switch is used,the voltage drop will be equivalent to oneTO switch (approx. 2.4 V). The Lampslight only when all of the switches areon.
There is no limit when connecting mul-tiple switches in parallel. However, whenTO switches are connected, the switchmay dim or may not light.
Provide the contact protection circuitshown in Figs. 1 and 2. When connect-ing an inductive load, such as a relay,surge voltage will be generated whenthe switch turns off.Provide a protection circuit when con-necting a capacitive load (capacitor),because rush current will be gener-ated when the switch turns on.When the wiring length increases, wir-ing capacity is reached and rush cur-rent generated. This may damage theswitch or reduce life, so provide thecontact protection circuit shown inFigs. 3 and 4 if wiring length exceedsthe values given in Table 1.Table 1
Fig. 1 When using capacitor, resistor
Fig. 2 When using diode
Avoid using this switch in areas with astrong magnetic field or large current(large magnet, spot welder, etc.). Wheninstalling a cylinder with a switch nearbyin parallel, or if a magnetic body movesvery close to the cylinder, mutual inter-ference may occur and may adverselyaffect detection accuracy.(Contact CKD for details on the strongmagnetic field proof switch.)
The lead's minimum bending radius is9 mm and over. Pay special attention towiring so that repeated bending strainand tensile strength are not applied tothe lead.Connect an elastic lead specificationscylinder switch with higher elasticity atmovable sections. (Contact CKD for de-tails on the elasticity lead specificationscylinder switch.)
Connect the switch lead in parallel to theload instead of connecting it directly tothe power. When using TO, observepoints and below.
When using for DC purposes, connectso that the brown wire comes to the
side and the blue wire comes to the side.The switch will function when con-nected in reverse, but the switch willnot light.When connected to the AC relay or pro-grammable controller input, if semi-waverectification is conducted with that circuit,the switch may not light. The switch willlight when the lead's polarity is reversed.
Do not use a load that exceeds maxi-mum switch contact capacity. Note thatwith the TO switch, the switch may notlight if the load is less than the ratedcurrent value.
1 Magnetic environment 5 Contact protection
6 Relay
7 Serial connection
8 Parallel connection
2 Protecting the lead
Connecting the lead3
4 Contact capacity
V
C R
Brown line Blue lineSwitch
AppliedvoltageACDC
Load
Capacitor resistance
User wiring
Protective circuit (spark quenching circuit)Recommended value C capacitor 0.033 to 0.1 F
R resistor 1 to 3OKAYA Electric Industries XEBIKI or equivalent product
Brown line Blue line
AppliedvoltageDC
User wiring
Protective circuitGeneral rectifying diodeHITACHI V06C or equivalent product
V
Switch
Load
LV
Brown line Blue line
Below 2mSwitch
AppliedvoltageACDC
Load
Choke coilL = several hundred H to several mHSurpassing high-frequency characteristicsWire near switch (within 2m)
RV
Brown line Blue line
Below 2mSwitch
AppliedvoltageACDC
Load
Rush current limiting resistanceR = Largest resistance acceptable for load circuit wiringWire near switch (within 2m)
1 2
1
2
PrecautionsReed switch TOH, TOV, T5H, T5V
+
-
VoltageDCAC
Wire length50m10m
92
Air operated valve for high vacuum
AVB 1V Series Formed bellows type Aluminum body type
4567
Model No. Actuation Orifice
AVB41V NC ø16
AVB51V NC ø24
AVB61V NC ø40
AVB71V NC ø50
Precautions
Always read page 9 in the introduction and the precautions on page 88 to 91 to ensure
correct, safe use of this product.
Working media
Installation
Direction when connecting piping
Proximity switch, reed switch
Much smaller and lighter with aluminum body
Wetted areas (flow path) have no sliding sections that may generate particles.
The aluminum body and dedicated actuator reduce the weight by approx. 1/3 of the conventional product (SUS body).
The compact body uses less space than the conventional model (AVB**3).
There is no dead space where gas may get trapped.(Body has no welded parts.)
Low dust generation
Light weight (Average 60% lighter than conventional product)
30% lower total height
No gas trapsMaterial: SUS316LDurability: 1 million times (*1)
*1 Life when working media is inert gas within specified range, which does not contain solids such as reaction products.
The vacuum pump can be connected to either port.
A reed switch (proximity, reed) can be connected to confirm the operation.(The switch rail kit is required for retrofitting.)
The bellows can be attached and removed easily using a hexagon wrench. This greatly reduces "washing" and
"replacement" processes.
Miniature switch mountable
Long-life formed bellows
Usable with back pressure
Quick attachment and removal
93
Descriptions
Working fluidWorking pressure range Pa(abs)Maximum working differential pressure MPaValve seat leakage Pa·m3/s(He)External leakage Pa·m3/s(He)Withstanding pressure MPaFluid temperatureAmbient temperatureOrifice mmConductance Note 1 /sConnectionControl pressure MPaWeight kgJIS symbol
Specifications
AVB41V AVB51V AVB61V AVB71V
Note 1: The conductance is the theoretical calculation value at the molecular flow range, and is not the actual measurement value.
Descriptions
Applications
Power voltage
Load voltage/current
Power consumptionInternal voltage dropLightLeakage current
Lead wire length Note 2
Maximum impactInsulation resistanceWithstand voltageAmbient temperature rangeProtective structure
20M or more when measured with 500V DC meggerNo failure when 1000V AC is applied for 1 minute
-10 to +60IEC Standard IP67, JIS CO920 (water-tight type), oil-resistant
Switch specifications
T2H/T2VProgrammable
controller–
10 to 30V DC,5 to 20mA Note 3
–4V or less
1mA or lessStandard 1m (oil-resistant
vinyl cabtire cord2-conductor 0.2mm2)
T3H/T3VRelay, programmable
controller10 to 28V DC
30V DC or less,100mA or less
10mA or less at 24VDC (ON)0.5V or less
Illuminating diode (lights when ON)10 A or less
Standard 1m (oil-resistantvinyl cabtire cord
3-conductor 0.2mm2)
TOH/TOVRelay, programmable
controller–
12/24V DC 5 to 50mA100V AC 7 to 20mA
–2.4V or less
0
T5H/T5VProgrammable controller, relay,
IC Circuit (without light), serial connection–
12/24V DC 50mA or less100V AC 20mA or less
–0V–0
Proximity switch Reed switch
Note 2: 3 m and 5 m leads are available as options.Note 3: The maximum load current 20 mA above is at 25 . If the switch's working ambient temperature is higher than 25 , load current will be lower than 20 mA (5 to 10 mA at 60 ).Note 4: The switch rail kit is required for retrofitting (See page 94).Note 5: See page 89 to 91 for other precautions for using the switches.
Vacuum and inert gas
1.3 10-6 to 1 105
0.1
1.3 10-10 or less
1.3 10-11 or less
0.3
5 to 60
0 to 60
0.4 to 0.6
ø16
5
NW16
0.45
ø24
13
NW25
0.50
ø40
47
NW40
1.15
ø50
80
NW50
1.20
980m/s2 294m/s2
Standard 1m (oil-resistantvinyl cabtire cord
2-conductor 0.2mm2)
AVB 1V Series
Air operated valve for high vacuum
4567
94
How to order
<Example of model number>
4567
Orifice ø16
Orifice ø24
Orifice ø40
Orifice ø50
Reed
Proximity
2 wire
Symbol Descriptions
Model No.
AVB T5H
AVB61V-40K-T5H3-HModel: AVB61V air operated valve for high vacuum (NC type)
25K5 1V 3 H
A
:
:
:
:
:
Orifice ø40
NW40
T5H (axial lead wire)
3m
Detect when valve is open
Series
Connection
Switch model No.
Switch lead wire length
Switch quantity
<Example of model number>
AVB71V-R-T3V-RModel: Switch rail kit for AVB71V
:
:
:
:
AVB71V
T3V (radial lead wire)
1m
Detect when valve is closed
Series
ActuationNC
<How to order switch rail kit>
AVB TOH4 1V R 3 D
Switch rail kit
Series
16K25K40K50K
NW16
NW25
NW40
NW50
Only AVB41V is available
Only AVB51V is available
Only AVB61V is available
Only AVB71V is available
B Connection
BlankHRD
Without switch
Detect when valve is open
Detect when valve is closed
Detect when valve is open/closed
E Switch quantity
Blank35
1m(standard)
3m
5m
D Switch lead wire length
BlankT0HT5HT0VT5VT2HT3HT2VT3V
Without switch
Axial lead wire
Radial lead wire
Axial lead wire
Radial lead wire
C Switch model No.
3 wire
2 wire
3 wire
4567
AVB41V
AVB51V
AVB61V
AVB71V
Reed
Proximity
2 wire
Symbol DescriptionsA Series
HRD
Detect when valve is open
Detect when valve is closed
Detect when valve is open/closed
D Switch quantity
Blank35
1m (standard)
3m
5m
C Switch lead wire length
T0HT5HT0VT5VT2HT3HT2VT3V
Axial lead wire
Radial lead wire
Axial lead wire
Radial lead wire
B Switch model No.
3 wire
2 wire
3 wire
A
ConnectionB
Switch model No.C
Switch lead wire lengthD
Switch quantityE
A
B
C
D
E
SeriesA
Switch model No.B
Switch lead wire lengthC
Switch quantityD
Series
Switch model No.
Lead wire length
Switch quantity
A
B
C
D
AVB 1V Series4567
95
Internal structure and parts list
No. MaterialParts name1
2
3
4
5
6
7
8
9
10
11
12
13
Cylinder (magnet integrated)
Ring
Hexagon socket head screw
O ring
Body
Bellows
O ring
Valve disk B
O ring
Plain washer
Spring washer
Hexagon socket head bolt
Rod
A5056
SUSXM7
FKM
A6063-0
SUS316L
FKM
SUS316L
FKM
SUS304
SUS304
SUSXM7
SUS316L
AVB41V
AVB51V
AVB61V
AVB71V
ø30(NW16)
ø40(NW25)
ø55(NW40)
ø75(NW50)
Model No. A40
50
65
70
B106
116
157.5
163
C7
7
17
17
D25
25
35.5
35.5
EM5
M5
Rc1/8
Rc1/8
Gø38.6
ø38.6
ø58.8
ø58.8
Fø60
ø60
ø88
ø88
H
Switch rail
Switch
Dimensions Appearance when switch is mounted
The entire switch rail is removed in maintenance, so the switch position need not be adjusted after assembly.<PAT.P >
AIR
OP
ER
AT
ED
VA
LVE
MA
INO
PE
RA
TE
MA
DE
IN
JA
PA
N
OR
IFIC
ES
ER
IAL
for
VA
CU
UM
MO
DE
L
CK
D C
orpo
ratio
n
1
2
3
4
5
6
7
8
9
10
11
12
13
E
DA
CB
BA
G
HF
AVB 1V Series
Air operated valve for high vacuum
4567
96
Air operated valve for high vacuum
AVB *3 Series Formed bellows type Stainless steel body compact type
5678
Model No. Actuation Orifice
AVB513 NC ø24
AVB613 NC ø40
AVB713 NC ø50
AVB813 NC ø80
Model No. Actuation Orifice
AVB523 NO ø24
AVB623 NO ø40
AVB723 NO ø50
AVB823 NO ø80
Miniature switch mountableA reed switch (proximity, reed) can be connected to confirm the operation.(Retrofitting possible)
No gas trapsThe integrated blister creates a streamlined, smooth flow path.There is no dead space where gas may get trapped.
Low dust generationWetted areas (flow path) have no sliding sections that may generate particles.
25% lower total heightThe compact body uses less space than the conventional model (AVB**2).
Long-life formed bellowsSpecial stainless steel material (ASL350)Durability: 1 million times (*1)
*1 Life when working media is inert gas within specified range, which does not contain solids such as reaction products.
Usable with back pressureThe vacuum pump can be connected to either port.
Short installation/removal time one-fifth the conventionalThe bellows can be attached and removed easily using a hexagon wrench. This greatly reduces "washing" and "replacement" processes.
Compact with improved maintenance
Contact CKD for the following custom orders:
1. Different flange surface length
2. Different flange types
3. Valve heating
4. Different O-ring materials at wetted areas
5. Slow exhaust
6. Straight piping
Precautions
Always read page 9 in the introduction and
the precautions on page 88 to 91 to ensure
correct, safe use of this product.
Working media
Installation
Direction when connecting piping
Proximity switch, reed switch
Model No. Actuation Orifice
AVB533 Double acting ø24
AVB633 Double acting ø40
AVB733 Double acting ø50
AVB833 Double acting ø80
97
Working fluidWorking pressure range
Pa(abs)Maximum working differential pressure MPaValve seat leakage
Pa·m3/s(He)External leakage
Pa·m3/s(He)Withstanding pressure MPaFluid temperatureAmbient temperatureOrifice mmStroke mmConductance Note 1 /sConnectionControl pressure MPa
Weight kg
JIS symbol
Vacuum and inert gas
1.3 10-6 to 1 105
0.1
1.3 10-9 or less
1.3 10-9 or less
0.35 to 600 to 60
0.4 to 0.6
Specifications
AVB5 3 AVB6 3 AVB7 3 AVB8 3123
123
123
123
ø24
10
13
NW25
1.1
1.1
1.0
ø40
20
52
NW40
1.9
1.9
1.6
ø50
22
80
NW50
3.6
3.5
3.2
ø80
32
242
NW80
7.9
7.8
7.3
NCNO
Double acting
NC
Note 1: The conductance is the theoretical calculation value at the molecular flow range, and is not the actual measurement value.
Descriptions
Descriptions
Applications
Power voltageLoad voltage/current
Power consumption
Internal voltage dropLightLeakage currentLead wire length Note 2
Maximum impactInsulation resistanceWithstand voltageAmbient temperature rangeProtective structure
20M and over when measured with 500VDC megger
No failure when 1000VAC is applied for 1 minute
-10 to + 60
IEC Standard IP67, JIS CO920 (water-tight type), oil-resistant
Switch specifications
T2H/T2VProgrammable
controller–
10 to 30V DC,5 to 20mA Note 3
–
4V or less
1mA or lessStandard 1m (oil-resistant
vinyl cabtire cord 2-conductor 0.2mm2)
T3H/T3VRelay, programmable
controller10 to 28V DC
30V DC or less,100mA or less
10 mA or less at24 VDC (on)0.5V or less
Illuminating diode (lights when ON)10 A or less
Standard 1m (oil-resistantvinyl cabtire cord
3-conductor 0.2mm2)
TOH/TOVRelay, programmable
controller–
12/24V DC 50mA or less1OOV AC 7 to 20mA or less
–
2.4V or less
0
T5H/T5VProgrammable controller, relay,
IC Circuit (without light), serial connection–
12/24V DC 50mA or less1OOV AC 20mA or less
–
0V–0
Note 2: 3 m and 5 m leads are available as options.Note 3: The maximum load current 20 mA above is at 25 . If the switch's working ambient temperature is higher than 25 , load current will be lower than 20 mA (5 to 10 mA at 60 ).Note 4: See page 89 to 91 for other precautions for using the switches.
980m/s2 294m/s2
NO Double acting
Standard 1m (oil-resistantvinyl cabtire cord
2-conductor 0.2mm2)
Proximity switch Reed switch
AVB *3 Series
Air operated valve for high vacuum
5678
98
Model No.
••••••
<Example of model number >
AVB613-40K-T5H3-HModel: AVB613 high vacuum air operated valveA SeriesB ActuationC ConnectionD Switch model No.
E Lead wire lengthF Switch quantity
AVB 6 1 3 - 40K - T5H 3 - H
How to order
T*H type(Axial lead wire)
T*V type(Radial lead wire)
Appearance when switch is mounted
5678
Orifice ø24
Orifice ø40
Orifice ø50
Orifice ø80
Reed
Proximity
2 wire
Symbol DescriptionsA Series
25K40K50K80K
NW25
NW40
NW50
NW80
Only AVB5*3 is available
Only AVB6*3 is available
Only AVB7*3 is available
Only AVB8*3 is available
C Connection
BlankHRD
Without switch
Detect when valve is open
Detect when valve is closed
Detect when valve is open/closed
F Switch quantity
Blank35
1m(standard)
3m
5m
E Switch lead wire length
123
NC (normally closed)
NO (normally open)
Double acting
B Actuation
BlankT0HT5HT0VT5VT2HT3HT2VT3V
Without switch
Axial lead wire
Radial lead wire
Axial lead wire
Radial lead wire
D Switch model No.
3 wire
2 wire
3 wire
SeriesA
ActuationB
ConnectionC
Switch model No.D
Switch lead wire lengthE
Switch quantity(Detecting position)
F
: Orifice ø40: NC (normally closed): NW40:T5H(Axial lead wire)
: 3m: Detect when valve is open
AVB *3 Series5678
99
Internal structure and parts list
Dimensions
NC type/Double acting
Switch model No.
AVB**3-*K- * * *
1
2
3
4
5
6
7
8
9
10
11
12
13
14
15
No. Parts name MaterialCompact cylinderCylinder adapterBellows assemblyO ringBody assemblyParallel pinO ringValve disk BO ringPlain washerSpring washerHexagon socket head boltSpring holder BSpringSpring holder A
A5056ASL350/SUS316LFKMSUS316LSUS301FKMSUS316LFKMSUS304SUS304SUS304C3604SWOSC-V (Electrodeposition coating)C3604
AVB5*3AVB6*3AVB7*3AVB8*3
Aø40(NW25)ø55(NW40)ø75(NW50)ø114(NW80)
B50557090
C505570105
D151.5(162.5)170.5(181.5)
208258
E37
44.552
64.5
F8
10.51113
G10151515
HRc1/8Rc1/4Rc1/4Rc3/8
I7786
112137
Dimensions in parentheses under symbol D are for NO.
(NC cross-section)
NO
Model No. Symbol
C L O S E
O P E NC L O S E
O P E N
A
C
A
B
D
G2-H
EF
I
I
13
14
15
1
2
3
4
5
6
7
8
9
10
11
12
AVB *3 Series
Air operated valve for high vacuum
5678
100
Model No. Actuation Orifice
AVB512 NC ø24
AVB612 NC ø40
AVB712 NC ø50
AVB812 NC ø80
AVB21 NC ø 5
Model No. Actuation Orifice
AVB522 NO ø24
AVB622 NO ø40
AVB722 NO ø50
AVB822 NO ø80
Model No. Actuation Orifice
AVB532 Double acting ø24
AVB632 Double acting ø40
AVB732 Double acting ø50
AVB832 Double acting ø80
Air operated valve for high vacuum
AVB *2 Series Formed bellows type
5678
Pilot-operated solenoid valve installable
Long-life formed bellowsSpecial stainless steel material (ASL350)Durability: 1 million times (*1)
*1 Life when working media is inert gas within specified range, which does not contain solids such as reaction products.
Low dust generationWetted areas (flow path) have no sliding sections that may generate particles.
Usable with back pressureThe vacuum pump can be connected to either port.
(Excluding AVB812)
Miniature switch mountableA reed switch (proximity) can be connected to confirm the operation.(Retrofitting possible)
AVB21 is:Ideal for leak valves
Ultra-compact with 5mm orifice
Long-life, low dust generation
Precautions
Always read page 9 in the introduction and
the precautions on page 88 to 91 to en-
sure correct, safe use of this product.
Working media
Installation
Direction when connecting piping
Proximity switch, reed switch
101
AVB21-8T AVB5 2 AVB6 2 AVB7 2 AVB8 2
Working fluidWorking pressure range
Pa(abs)Maximum working differential pressure MPaValve seat leakage
Pa·m3/s(He)External leakage
Pa·m3/s(He)Withstanding pressure MPaFluid temperatureAmbient temperatureOrifice mmStroke mmConductance Note 1 /sConnectionControl pressure MPaWeight kgJIS symbol
Vacuum and inert gas
1.3 10-6 to 1 105
0.1
1.3 10-9 or less
1.3 10-9 or less
0.35 to 600 to 60
0.3 to 0.5
Specifications123
123
123
123
1.3 10-6 to 2.5 105
0.250.1
(Back pressure notavailable for NC type)
241513
NW25
1.4
53-
1/4" tube
0.25
402052
NW40
2.5
502280
NW50
3.3
8032
242NW80
9.9
Descriptions
Applications
Power voltageLoad voltage/CurrentPower consumptionInternal voltage dropLightLeakage currentLead wire length Note 2Maximum impactInsulation resistanceWithstand voltageAmbient temperature rangeProtective structure
294m/s2
100M and over when measured with 500VDC meggerNo failure when 1000VAC is applied for 1 minute
-10 to +60IEC Standard IP67, JIS CO920 (water-tight type), oil-resistant
Switch specifications
NAB-C2Programmable
controller-
10 to 30V DC, 5 to 30mA-
4V or less
1mA or less1m (oil resistant vinyl round code 2-conductor 0.2mm2)
NAB-C3Programmable controller, relay,IC circuit, small solenoid valve
10 to 28V DC30V DC, 150mA or less
15mA or less at 24V DC (when ON)0.5V or less
10 A or less1m (oil resistant vinyl round code 3-conductor 0.15mm2)
Proximity switch
(Custom order)
Note 1: The conductance is the theoretical calculation value at the molecular flow range, and is not the
actual measurement value.
Electrical specificationsRated voltageApparentpowerPowerconsumptionHeat resistance class
100V AC(50/60Hz), 110V AC(60Hz), 200V AC(50/60Hz), 220V AC(60Hz), 24V DC3.9VA(50Hz), 3.1VA(60Hz)9.2VA(50Hz), 7.9VA(60Hz)2.0W(50Hz), 1.7W(60Hz)
4.0WB
Note 2: 3 m and 5 m leads are available as options.
Descriptions
NC NO Double acting
YXX Y
X
(Excluding AVB812)
(AVB812)
When holdingWhen starting
ACDC
Illuminating diode (lights when ON)
Bottom port
Side port
Side port
Bottom port
AVB**2-*K
AVB21-8T
AVB *2 Series
Air operated valve for high vacuum
5678
102
Model No.
Method forAVB21 omitted
<Example of model number >
AVB512-25K-2C-HC23-DC24VModel: AVB512 high vacuum air operated valve
SeriesNote 1Note 2
AVB 5 1 25K 2C C2 3H DC24V
How to order
25678
1/4"
25A
40A
50A
80A (Custom order)
Symbol DescriptionsA Series
8T25K40K50K80K
1/4" tube
NW25
NW40
NW50
NW80
Only AVB21 is available
Only AVB5*3 is available
Only AVB6*3 is available
Only AVB7*3 is available
Only AVB8*3 is available
C Connection
BlankHRD
Without switch
Detect when valve is open
Detect when valve is closed
Detect when valve is open/closed
E Switch quantity (Detecting position)
BlankAC100VAC200VDC24V
Without solenoid valve
AC100V(50/60Hz), AC110V(60Hz)
AC200V(50/60Hz), AC220V(60Hz)
DC24V
H Rated voltage
Blank35
1m (standard)
3m
5m
G Switch lead wire length
BlankC2C3
Without switch
Proximity 2 wire
Proximity 3 wire
F Switch type
Blank2C2G
Without solenoid valve
Grommet coil
DIN terminal box
D Coil
123
NC (normally closed)
NO (normally open)
Double acting
B Actuation
Note on model No. selection
Note 1: AVB2 is available only for the AVB21-8T.(There is no option setting.)
Note 2: The cylinder switch and solenoid valve are not used for the AVB2 type. Only NC is used for activation.
Note 3: If 2 (NO) is selected for B Actuation, it is basically not possible to retrofit the solenoid valve. Designate the solenoid valve at purchase.
Note 4: The D Coil setting is used only when 1 (NC) or 2 (NO) is selected for B Actuation.(The solenoid valve option is not used for the double-acting valve.)
2 - - - -
A
ActuationNote 3
B
ConnectionC
CoilNote 4
D
Switch quantity(Detecting position)
E
Switch typeF
Lead wire lengthG
Rated voltageH
A
B
C
D
E
F
G
H
SeriesActuationConnectionCoilSwitch quantitySwitch typeLead wire lengthRated voltage
: 25A: NC (normally closed): NW25: Grommet coil: Detect when valve is open: Proximity 2 wire: 3m: 24V DC
AVB *2 Series5678
103
ø6.35 (1/4")
ø6.
35 (
1/4"
)
20
36
ø33
ø30
ø45
1520
449
104
AVB21-8T
Internal structure and parts list
Dimensions
NC
AVB21-8TNC
No. Parts name MaterialCylinderRingBellows ringBellowsValve disk BBodyPipeO ringValve disk A
C3604SUS304SUS316LSUS304SUS304SUS304FKMFKM/SUS304
1
2
3
4
5
6
7
8
9
1
2
3
4
5
6
7
8
9
AVB *2 Series
Air operated valve for high vacuum
5678
104
Internal structure and parts list
Dimensions
AVB**2-*KNC/NO/Double acting
AVB**2-*KNC/NO/Double acting(The drawing below shows the NC cross-section.)
*1. The external seal differs slightly for AVB7 and AVB8. (The 3 O-ring seal is shown at left.)
No. Parts name MaterialCylinder (magnet integrated)Bellows adaptorO ring (*1)BodyFormed bellowsRodRod pieceValve disk AO ringValve disk B
SUS316FKMSUS316ASL350SUS316SUS304SUS316FKMSUS316
1
2
3
4
5
6
7
8
9
10
AVB5*2-25KAVB6*2-40KAVB7*2-50KAVB8*2-80K
A193233271359
B188228266354
øC40(NW25)55(NW40)75(NW50)114(NW80)
D50557095
E50557098
F637878115
G15
15.515.515.5
øH48.660.576.3118
The options (pilot-operated solenoid valve, cylinder switch) and dimensions are available upon request.The solenoid valve option is not used for double-acting valve.
Model No. Symbol
F
øC
E
BA
øC
D øH
G
X port (NC)Y port (NO, double acting)
Y port (NC)X port (NO, double acting)
1
3
4
2
5
6
7
8
9
10
AVB *2 Series5678
105
MEMOMEMOMEMO
106
Specifications
Dimensions
ø24
ø1 to 3
10
2
13
NW25
Working fluid
Working pressure range Pa(abs)
Maximum working differential pressure MPa
Valve seat leakage Pa·m3/s(He)
External leakage Pa·m3/s(He)
Withstanding pressure MPa
Fluid temperature
Ambient temperature
Large flow orifice mm
Small flow orifice Note 3 mm
Main valve stroke mm
Small flow valve stroke mm
Conductance (main valve) Note 1 /s
Connection
Control pressure MPa
JIS symbol
Descriptions AVB513-X*Vacuum and inert gas
1.3 10-6 to 1.0 105
0.1
1.3 10-9 or less
1.3 10-9 or less
0.3
5 to 60
0 to 60
ø40
ø1 to 3
20
2
52
NW40
0.4 to 0.6
AVB613-X*
ø50
ø1 to 4
22
2
80
NW50
AVB713-X*
Note 1: The conductance is the theoretical calculation value at the molecular flow range, and is not the actual measurement value.Note 2: Contact CKD for details on specifications with the switch.Note 3: Contact CKD for details on small flow orifice diameters.Note 4: The bellows cannot be replaced for this customized order.
ø40(NW25)
ø55(NW40)
ø75(NW50)
50
55
70
50
55
70
180.5
177.5
216.5
AVB513-X*
AVB613-X*
AVB713-X*
Model No. A B C DBy-passing port(By-passing open/close valve)
MO
DE
L
OR
IFIC
E
SE
RIA
LO
PE
RA
TE
MA
IN
VA
LV
EO
PE
RA
TE
DA
IRV
AC
UU
Mfo
r
Co
rpo
rati
on
CK
DJA
PA
NIN
MA
DE
C
A
A
B
DSlow exhaust (internal bypass valve) compatible
Control exhaust rates in two steps1-actuator slow exhaust valve25A/40A/50A
NC NC
Air operated valve for high vacuum
AVB Series Custom orderContact the CKD Sales Office for details.
Custom order
107
Specifications
Dimensions
ø24
10
13
NW25
ø40
20
52
NW40
ø50
22
80
NW50
ø80
32
242
NW80
Working fluid
Working pressure range Pa(abs)
Maximum working differential pressure MPa
Valve seat leakage Pa·m3/s(He)
External leakage Pa·m3/s(He)
Withstanding pressure MPa
Fluid temperature
Ambient temperature
Orifice (main flow path) mm
Stroke (Main valve) mm
Conductance (main valve) Note 1 /s
Connection
Control pressure MPa
JIS symbol
Descriptions AVB513-X* AVB613-X* AVB713-X* AVB813-X*Vacuum and inert gas
1.3 10-6 to 1.0 105
0.1
1.3 10-9 or less
1.3 10-9 or less
0.3
5 to 60
0 to 60
0.4 to 0.6
ø40(NW25)
ø55(NW40)
ø75(NW50)
ø114(NW80)
50
55
70
90
50
55
70
105
151.5
170.5
208
258
AVB513-X*
AVB613-X*
AVB713-X*
AVB813-X*
Model No. A B C D131.5
127
165.5
191.5
E117.5
130.5
175.5
202
F
AGD11V-
AGD21V-
By-pass valve
1/4"
3/8"
By-pass pipe
Note 1: The conductance is the theoretical calculation value at the molecular flow range, and is not the actual measurement value.Note 2: Contact CKD for details on specifications with the main valve switch.Note 3: A bypass valve with flow control is available.
OPEN
CLOSE
D
F
F
EE
AC
AC
B
A
D
B
A
Slow exhaust (external bypass valve) compatible
Control exhaust rates in two steps2-actuator (bypass) slow exhaust valve25A/40A/50A
AVB513-X* AVB 13-X*678
NC NC
AVB**3 Series
Air operated valve for high vacuum
108
Specifications
Dimensions
ø24
10
13
NW25
NC NO Double acting
ø40
20
52
NW40
ø50
22
80
NW50
ø80
32
242
NW80
Working fluid
Working pressure range Pa(abs)
Maximum working differential pressure MPa
Valve seat leakage Pa·m3/s(He)
External leakage Pa·m3/s(He)
Withstanding pressure MPa
Fluid temperature
Ambient temperature
Orifice mm
Stroke mm
Conductance Note1 /s
Connection
Control pressure MPa
JIS symbol
Descriptions AVB5 3-X* AVB6 3-X* AVB7 3-X* AVB8 3-X*Vacuum and inert gas
1.3 10-6 to 1.0 105
0.1
1.3 10-9 or less
1.3 10-9 or less
0.3
5 to 60
0 to 60
0.4 to 0.6
ø40(NW25)
ø55(NW40)
ø75(NW50)
ø114(NW80)
130
140
210
250
130(138)
155(163)
191
241
AVB5 3-X*
AVB6 3-X*
AVB7 3-X*
AVB8 3-X*
Model No. A B C
Note 1: The conductance is the theoretical calculation value at the molecular flow range, and is not the actual measurement value.Note 2: Contact CKD for details on specifications with the switch.
Note 1: Dimensions in parentheses under symbol C are for NO.Note 2: Values for symbol C are maximum and differ based on the operation port direction.
123
123
123
123
123123123123
Straight flange compatible
Ideal for installation on straight piping sectionsStraight flange valve25A/40A/50A/80A
B
A
A
C
45°
Control port side
AVB**3 Series
109
Valve heater compatible
Prevent reaction byproducts from adhering to the valveJacket heater valve40A/50A/80A
Thermostat HeaterThermocoupleinstallation possible
(With heat insulating material)
AVB**3 Series
Air operated valve for high vacuum
110
Model No. Actuation Orifice
AVB932 Double acting ø100
Long-life formed bellowsSpecial stainless steel material (ASL350)Durability: 1 million times (*1)
*1 Life when working media is inert gas within specified range, which does not contain solids such as reaction products.
Low dust generationWetted areas (flow path) have no sliding sections that may generate particles.
Usable with back pressureThe vacuum pump can be connected to either port.
Large bore size type
AVB932-X0070
Working fluidWorking pressure range
Pa(abs)Maximum workingdifferential pressure MPaValve seat leakage
Pa·m3/s(He)External leakage
Pa·m3/s(He)Withstanding pressure MPaFluid temperatureAmbient temperatureOrifice mmStroke mmConductance Note 1 /sConnectionControl pressure MPaWeight kgJIS symbol
Vacuum and inert gas
1.3 10-6 to 1 105
0.1
1.3 10-9 or less
1.3 10-9 or less
0.35 to 600 to 60
10050
372NW100
0.3 to 0.518
Specifications
Note 1: The conductance is the theoretical calculation value at the molecular flow range, and is not the actual measurement value.Note 2: Contact CKD for details on specifications with the switch.
Descriptions
AVB**2 Series
Large bore size type
Precautions
Always read page 9 in the introduction
and the precautions on page 88 to ensure
correct and safe use of this product.
•Working media
•Installation
•Direction when connecting piping
Custom order
111
E
A
BD
C
A
G
F
2-H
Dimensions
AVB932-X0070
Model No.
AVB932-X-*
A
ø134(NW100)
B
115
C
135
D
424
E
ø185
F
13
G
107.5
H
Rc3/8
Symbol
AVB932-X* SeriesAir operated valve
112
Air operated valve for high vacuum
AVP *2 Series
•Double O-ring shaft seal
5678
•Pilot-operated solenoid valve installable
•Long-life, high sealingOutstanding life and external sealing are attained with the double O-ring seal and grease container.Durability: 500,000 times (*1)
*1 Life when working media is inert gas within specified range, which does not contain solids such as reaction products.
•Miniature switch mountableA reed switch (proximity) canbe connected to confirm the operation. (Retrofitting possible)
•Usable with back pressureThe vacuum pump can be connected to either port.
(Excluding AVP712/812)
AVP21 only
•Ideal for leak valves
•Ultra-compact with 5mm orifice
Double O-ring shaft seal with outstanding reliability and maintenance
Precautions
Model No. Actuation Orifice
AVP512 NC ø24
AVP612 NC ø40
AVP712 NC ø50
AVP812 NC ø80
AVP21 NC ø 5
Model No. Actuation Orifice
AVP522 NO ø24
AVP622 NO ø40
AVP722 NO ø50
AVP822 NO ø80
Model No. Actuation Orifice
AVP532 Double acting ø24
AVP632 Double acting ø40
AVP732 Double acting ø50
AVP832 Double acting ø80
(Custom order)
Always read page 9 in the introduction
and the precautions on page 88 to 91 to
ensure correct, safe use of this product.
•Working media
•Installation
•Direction when connecting piping
•Proximity switch, reed switch
113
Vacuum and inert gas
1.3 10-6 to 2.0 105
1.3 10-9 or less
1.3 10-8 or less
0.35 to 600 to 60
0.3 to 0.5
Specifications
AVP21-8T AVP5 2 AVP6 2 AVP7 2 AVP8 2123
123
123
123
1.3 10-6 to 2.5 105
0.25
1.3 10-6 to 1.5 105 1.3 10-6 to 1.0 105
1.3 10-6 to 1.0 105
1.3 10-6 to 1.0 105
53
1/4" tube
0.25
402052
NW40
2.6
241513
NW25
1.6
502280
NW50
3.8
8032
242NW80
10.4
Descriptions
Applications
Power voltageLoad voltage/currentPower consumptionInternal voltage dropLightLeakage currentLead wire length Note 4Maximum impactInsulation resistanceWithstand voltageAmbient temperature rangeProtective structure
Switch specifications
NAB-C2Programmable
controller
10 to 30V DC, 5 to 30mA
4V or less
1mA or less1m (oil resistant vinyl round code 2-conductor 0.2mm2)
Proximity switch
(Custom order)
Electrical specificationsRated voltageApparentpowerPowerconsumptionHeat resistance class
100V AC(50/60Hz), 110V AC(60Hz), 200V AC(50/60Hz), 220V AC(60Hz), 24V DC3.9VA(50Hz), 3.1VA(60Hz)9.2VA(50Hz), 7.9VA(60Hz)2.0W (50Hz), 1.7W (60Hz)
4.0WB
Note 4: 3 m and 5 m leads are available as options.
Note 1: For AVP822: 1.3 10-6 Pa to 1.5 105 Pa For AVP832: 1.3 10-6 Pa to 2 105 Pa. Note that when using the AVP822 with a barotropic setting, the range is 1.3 10-6 Pa to 1.0 105 Pa.Note 2: The back pressure type is not used for AVP712 and AVP812.Note 3: The conductance is the theoretical calculation value at the molecular flow range, and is not the actual measurement value.
NC
NO
Double acting
Working fluid
Working pressure range Note 1 Pa(abs)
Maximum working differential pressure Note 2
MPaValve seat leakage
Pa·m3/s(He)External leakage
Pa·m3/s(He)Withstanding pressure MPaFluid temperatureAmbient temperatureOrifice mmStroke mmConductance Note 3 /sConnectionControl pressure MPaWeight kgJIS symbol
Descriptions
Baratropic: 1.3 10-6 to 1.0 105
Back pressure: 1.3 10-6 to 1.0 105
NC: 0.15
NO: 0.15Double acting: 0.2
NC: 0.1
NO: 0.1Double acting: 0.2
NC: 0.1(Back pressure not available)NO: 0.1Double acting: 0.2
NC: 0.1(Back pressure not available)NO: 0.15Double acting: 0.2
When holdingWhen starting
ACDC
Illuminating diode (lights when ON)
NAB-C3Programmable controller, relay,IC circuit, small solenoid valve
10 to 28V DC30V DC, 150mA or less
15mA or less at 24V DC (when ON)0.5V or less
10 A or less1m (oil resistant vinyl round code 3-conductor 0.15mm2)
294m/s2
100M and over when measured with 500VDC meggerNo failure when 1000VAC is applied for 1 minute
-10 to +60IEC Standard IP67, JIS CO920 (water-tight type), oil-resistant
NC NO Double acting(Excluding AVP712, AVP812)
X
(AVP712, AVP812)Bottom port
Side port
X
Y X Y
Side port
Bottom port
AVP21-8T
AVP**2-*K
AVP *2 Series
Air operated valve for high vacuum
5678
114
Model No.
Method for AVP21 omitted
SeriesNote 1Note 2
<Example of model number >
AVP612-40K-2C-HC23-DC24VModel: AVP612 high vacuum air operated valve
AVP 6 1 2 - 40K - 2C - H C2 3 - DC24V
How to order
25678
1/4"
25A
40A
50A
80A (custom order)
Symbol DescriptionsA Series
8T25K40K50K80K
1/4" tube
NW25
NW40
NW50
NW80
Only AVP21 is available
Only AVP5*2 is available
Only AVP6*2 is available
Only AVP7*2 is available
Only AVP8*2 is available
C Connection
BlankHRD
Without switch
Detect when valve is open
Detect when valve is closed
Detect when valve is open/closed
E Switch quantity (detecting position)
BlankAC100VAC200VDC24V
Without solenoid valve
AC100V(50/60Hz), AC110V(60Hz)
AC200V(50/60Hz), AC220V(60Hz)
DC24V
H Rated voltage
Blank35
1m (standard)
3m
5m
G Switch lead wire length
BlankC2C3
Without switch
Proximity 2 wire
Proximity 3 wire
F Switch type
Blank2C2G
Without solenoid valve
Grommet coil
DIN terminal box
D Coil
123
NC (normally closed)
NO (normally open)
Double acting
B Actuation
Note on model No. selection
A
ActuationNote 3
B
ConnectionC
CoilNote 4
D
Switch quantity(Detecting position)
E
Switch typeF
Lead wire lengthG
Rated voltageH
Note 1: AVP2 is available only for the AVP21-8T. (There is no option setting.)
Note 2: The cylinder switch and solenoid valve are not used for the AVP21 type. Only NC is used for activation.
Note 3: If 2 (NO) is selected for B Actuation, it is basically not possible to retrofit the solenoid valve. Designate the solenoid valve at purchase.
Note 4: The D Coil setting is used only when 1 (NC) or 2 (NO) is selected for B Actuation. (The solenoid valve option is not used for the double-acting valve.)
: 40A: NC (normally closed): NW40: Grommet coil: Detect when valve is open: Proximity 2 wire: 3m: 24V DC
A
B
C
D
E
F
G
H
SeriesActuationConnectionCoilSwitch quantitySwitch typeLead wire lengthRated voltage
AVP *2 Series5678
115
1
ø33
ø30
ø4536
20
Side port
ø6.35(1/4") ø6.
35(1
/4")
1520
449
104
Bottom port
2
3
4
5
6
7
8
9
10
11
No. Parts name MaterialCylinderRodRingO ring holderGrease containerValve disk BBodyPipeO ringO ringValve disk A
SUS304C3604SUS304SUS304SUS304SUS304SUS304FKMFKMFKM/SUS304
1
2
3
4
5
6
7
8
9
10
11
AVP21-8T
Internal structure and parts list
Dimensions
NC
AVP21-8TNC
*The cylinder switch and solenoid valve are not available for the AVP21 type. Only NC is available for actuation.
AVP *2 Series
Air operated valve for high vacuum
5678
116
1
3
4
2
5
6
7
8
9
10
11
12
F
G
øH
øC
E
BA
øC
D
Y port (NC)X port (NO, double acting)
X port (NC)Y port (NO, double acting)
Side port
Bottom port
No. Parts name MaterialCylinder (magnet integrated)O ring holderO ring (*1)BodyO ring holderO ringGrease containerValve rodRod pieceValve disk AO ringValve disk B
SUS316FKMSUS316A5056FKMSUS304SUS316SUS304SUS316FKMSUS316
1
2
3
4
5
6
7
8
9
10
11
12
AVP5*2-25KAVP6*2-40KAVP7*2-50KAVP8*2-80K
A193233271359
B188228266354
øC40(NW25)55(NW40)75(NW50)114(NW80)
D50557095
E50557098
F637878115
G15
15.515.515.5
øH48.660.576.3118
Internal structure and parts list
Dimensions
AVP**2-*KNC/NO/Double acting
AVP**2-*KNC/NO/Double acting
*1. The external seal differs slightly for AVP7 and AVP8. (The 3 O-ring seal is shown at left.)
The options (pilot-operated solenoid valve, cylinder switch) and dimensions are available upon request.The solenoid valve option is not used for double-acting valve.
Model No. Symbol
AVP *2 Series5678
117
M E M OM E M O
118
Manual valve for high vacuum
MVB 0 Series
•Formed bellows •Handle
567
Custom order
Model No. Actuation Orifice
MVB70 Manual ø50
Model No. Actuation Orifice
MVB50 Manual ø24
MVB60 Manual ø40
•Long-life formed bellowsSpecial, stainless steel material (ASL-350) provided. Corrosion resistance is outstanding.
•Low dust generationWetted areas (flow path) have no sliding sections that may generate particles.
•Handle
•Usable with back pressureThe vacuum pump can be connected to either port.
MVB60 MVB70MVB50
Working fluid
Working pressure range Pa(abs)
Maximum working differential pressure MPa
Valve seat leakage Pa·m3/s(He)
External leakage Pa·m3/s(He)
Withstanding pressure MPa
Fluid temperature
Ambient temperature
Orifice mm
Stroke mm
Valve structure
Connection
Weight kg
JIS symbol
Vacuum and inert gas
1.3 10-6 to 1 105
0.1
1.3 10-9 or less
1.3 10-9 or less
0.3
5 to 60
0 to 60
ø40
20
Formed bellows
NW40
2.4
Specifications
ø24
15
NW25
1.4
ø50
22
NW50
3.2
Descriptions
Air-operated valve (AVB**2) performance is incorporated in the manual valve.
Precautions
Always read page 9 in the introduction
and the precautions on page 88 to ensure
correct, safe use of this product.
•Working media
•Installation
•Direction when connecting piping
119
C
C
B
B
A
E
D
1
2
3
4
5
6
7
11
12
15
13
14
18
10
9
8
16
17
No. Parts name Material No. Parts name MaterialHexagon socket set screwHandleManual rodAdaptorBellows assemblyO ringBody assemblyE snap ringSpring washer
SUS304
SUS303A2011ASL350,SUS316FKMSUS304SUS304SUS304
123456789
RodSpring washerC snap ringValve disk AO ringRod pieceValve disk BFlat headed cross cut screwCross headed bolt
SUS316SUS304SUS304SUS316FKMSUS304SUS316SUS304SUS304
101112131415161718
How to order
SymbolModel No.MVB50MVB60MVB70
Fully open175205252
Fully closed160185230
C
ø40(NW25)ø55(NW40)ø75(NW50)
B
505570
D
636378
E
ø48.6ø60.5ø79
Series
Manual
MVB
MVB*0
Dimensions
Internal structure and parts list
567
Orifice ø24
Orifice ø40
Orifice ø50
Symbol DescriptionsA Series
25K40K50K
25A (Only MVB50 is available)
40A (Only MVB60 is available)
50A (Only MVB70 is available)
B Connection
5 0 25K
A
A
ConnectionB
MVB 0 Series
Manual valve for high vacuum
567
120
Manual valve for high vacuum
MVP 0 Series
•Double O-ring seal •Handle
567
Custom order
Model No. Actuation Orifice
MVP50 Manual ø24
MVP60 Manual ø40
Model No. Actuation Orifice
MVP70 Manual ø50
Long-life, high sealingOutstanding life and external sealing are attained with the double O-ring seal and grease
container.
Usable with back pressureThe vacuum pump can be connected to either port.
Handle
Air-operated valve (AVP**2) performance is incorporated in the manual valve.
MVP50 MVP60 MVP70
Working fluid
Working pressure range Pa(abs)
Maximum working differential pressure MPa
Valve seat leakage Pa·m3/s(He)
External leakage Pa·m3/s(He)
Withstanding pressure MPa
Fluid temperature
Ambient temperature
Orifice mm
Stroke mm
Valve structure
Connection
Total height: values in parentheses apply for closed valves mm
Face-to-face dimensions mm
Weight kg
JIS symbol
Vacuum and inert gas
1.3 10-6 to 2 105
0.2
1.3 10-9 or less
1.3 10-8 or less
0.3
5 to 60
0 to 60
ø40
20
O ring shaft seal
NW40
185(205)
55
2.5
Specifications
ø24
15
NW25
160(175)
50
1.4
ø50
22
NW50
230(252)
70
3.7
Descriptions
PrecautionsAlways read page 9 in the introduction
and the precautions on page 88 to ensure
correct, safe use of this product.
•Working media
•Installation
•Direction when connecting piping
121
E
D
C
B
C
B
A
1
2
3
4
5
6
7
8
9
10
11
12
13
14
15
21
16
17
18
19
20
Performance class
No. Parts name MaterialHexagon socket set screwHandleManual rodAdaptorO ring holderO ringBody assemblyE snap ringSpring washerValve rodSpring washer
SUS304
SUS303A2011SUS316FKM
SUS304SUS304SUS316SUS304
1
2
3
4
5
6
7
8
9
10
11
No. Parts name MaterialC snap ringRod pieceValve disk AO ringO ring holderO ringGrease shieldValve disk BFlat headed cross cut screwCross headed bolt
SUS304SUS304SUS316FKMA5056FKMSUS304SUS316SUS304SUS304
12
13
14
15
16
17
18
19
20
21
SymbolModel No.MVP50MVP60MVP70
Fully open175205252
Fully closed160185230
C
ø40(NW25)ø55(NW40)ø75(NW50)
B
505570
D
636378
E
ø48.6ø60.5ø79
How to order
Manual
MVP 40K0
Internal structure and parts list
567
Orifice ø24
Orifice ø40
Orifice ø50
Symbol DescriptionsA Performance class
25K40K50K
25A Only MVB50 is available
40A Only MVB60 is available
50A Only MVP70 is available
B Connection
MVP*0
Dimensions
6
A
A
ConnectionB
MVP 0 Series
Manual valve for high vacuum
567
122
Precautions
Leak valve (Vacuum break valve)
FGL 1 Series
•Non-sliding •Control range: 0 to 60 seconds
12
Control the vacuum break time.Chamber vacuum break time is controlled by controlling the time to attain maximum flow.
Residue-free structureThe flow path from in to out is straight and smooth.
Highly corrosion resistantStainless steel (SUS316L, high corrosion resistance) is used for the flow path, including the body.
Control flow rates with optimum modeFine flow rate and time adjustment are not required.
Non-sliding valveWear particles do not form because no sliding sections are used.
Selective connectionThe double-barbed joint and JXR male joint are available.
Model No. Actuation Maximum flow rate Voltage
FGL11 NC 32 /min 12,24V DCModel No. Actuation Maximum flow rate Voltage
FGL21 NC 50 /min 12,24V DC
Solve all particle suspension problems with this valve.
What are leak valves?
Conventional Using leak valve
Most semiconductor manufacturing equipment wafer treatment processes are conducted in a vacuum chamber. When the wafer is loaded and unloaded, the chamber must be momentarily changed from the vacuum to atmospheric pressure. The gas introduced into the chamber could make accumulated particles suspended, which can get on the wafer and decrease yield.This vacuum break valve controls vacuum break time by changing the flow proportionately with time. This prevents particles from being suspended and improves throughput.
Principle of operation
Internal structure
When the current passed to the coil is increased, attraction force F applied to the plunger increases, displacing the coil to where it is balanced with leaf spring load f supporting the plunger, causing the valve opening to fluctuate.The flow curve (Fig.1) is attained by continuously changing the current with the internal controller.
Always read page 9 in the introduction
and the precautions on page 88 to ensure
correct, safe use of this product.
•Working media
•Installation
•Direction when connecting piping
123
FGL 1 SeriesLeak valve (Vacuum break valve)
12
Nitrogen
0.15
1.3 10-6 to 1 105
0.5
1.3 10-9
0.99
10 to 30
10 to 30
Free
12V, 24V DC
12V, 24V DC
FGL11-4S FGL11-4RM FGL21-4S FGL21-4RMDescriptionsWorking fluid
Primary pressure
MPa
Secondary pressure
range Pa(abs)
Max. flow rate /min
Valve seat leakage cm3/min or less
External leakage
Pa·m3/s(He)
Withstanding pressure MPa
Fluid temperature
Ambient temperature
Connection
Installation position
Power consumption W
Power voltage
Operation signal, pressure signal
1/4"
Double barbed joint
1/4"
JXR male joint Note 1
1/4"
Double barbed joint
1/4"
JXR male joint Note 1
Note 1: The JXR joint can be connected to the VCR joint.
Specifications
32 50
8 10
How to order
FGL 4RM DC12V1 321 015
Series
Model No. NC Adjusted pressure 0.15 MPa
1
2
SeriesA
Symbol Descriptions
4RM
4S
1/4" JXR male joint
1/4" Double barbed joint
ConnectionB
32
50
Flow rateC
DC12V
DC24V
DC12V
DC24V
VoltageD
A
ConnectionB
Flow rateC
VoltageD
32 /min Only FGL11 is available
50 /min Only FGL21 is available
Small (flow of 32 /min)
Large (flow of 50 /min)
124
Internal structure and parts list
Dimensions
FGL 1-4RM12 FGL 1-4S1
2
FGL 1-4RM12
FGL 1-4S12
No. Parts name MaterialO ringCoil assemblyPlunger assembly
FKM1
2
3
OrificeO ringO ring
SUS316LFKMFKM
4
5
6
FGL11-4S-32-015FGL21-4S-50-015
A117129
B1925
øD3850
C105113
E(46.5)(46.5)
FGL11-4S-32-015FGL21-4S-32-015
A117129
B1925
D7078
F(46.5)(46.5)
C105113
øE3850
No. Parts name Material
Model No. Symbol
Model No. Symbol
FLOW
øD
E
B
IN OUT
C
A
1/4 " JXR male joint
øE
B
IN OUT
C
D
A
1/4 " Double barbed joint
F
61
5
2 3 4
61
5
2 3 4
FGL 1 Series12
FGL11-4RM
FGL21-4S
125
FGL 1 SeriesLeak valve (Vacuum break valve)
12
Piping
The leak valve has a maximum 0.5 cm3/min valve seat leak, so use a separate gas valve on the IN side.
Cable connection
Contact input DC voltage input
Connect the included cable to the leak valve as shown below.The contact input or DC voltage input is selected based on the connection.
Control signal and flow characteristics
The leak valve operates with the operation signal (SIGNAL) and pressure signal (PRESSURE).When SIGNAL turns ON, the maximum flow is reached with preset time T and the valve closes when SIGNAL turns OFF.Assist mode is used if needed.Assist mode keeps chamber pressure negative to prevent ambient atmosphere from entering when the gate is opened.Assist mode is entered by turning PRESSURE ON while SIGNAL is ON and adjusting the flow from maximum flow to assist flow.
126
Vacuum/inert gas (Note 1)1.3 10-6 to 3 105
0.31.0 10-9 or less1.0 10-9 or less
0.50.2
5 to 550 to 55
1.60.0960
Vertical installation with coil facing upward
100/200V AC (50/60Hz), 24V DCRated voltage 10%
4.0B70
HVB112-6N-* HVB112-8R-* (Custom order)DescriptionsWorking fluidWorking pressure range Pa(abs)Maximum working differential pressure MPaValve seat leakage Pa·m3/s(He)External leakage Pa·m3/s(He)Withstanding pressure MPaBack pressure (Note 2) MPaFluid temperature Ambient temperatureOrifice mmCv flow factorFrequency times/min or lessPort sizeInstallation positionWeight kg
JIS symbol
Electrical specificationsRated voltageAllowable voltage fluctuationPower consumption WHeat resistance classTemperature rise K
Specifications
Note 1: Robustness may drop markedly depending on dryness.Note 2: Pressurizing from the A port with the B port released to atmosphere is possible.
Model No. Actuation Orifice
HVB112 NC 1.6 HVB112 N.C. 1.6
NPT1/8 1/4 inch VCR female
0.15 0.24
Easy maintenanceThis simple structure has few
points.
Special packing incorporatedFKM packing has outstanding
seal life.
Highly corrosion resistantStainless steel (SUS303) is used for the body. (The VCR joint is SUS316.)
High-vacuum holdingVacuum holding is stable with little leakage.
No beatingThe DC coil eliminates beating.
Back pressure usable (reverse vacuum)
Space-saving miniature solenoid valve.
A
B
High vacuum solenoid valve
HVB112 Series
PrecautionsAlways read page 9 in the introduction
and the precautions on page 88 to ensure
correct and safe use of this product.
Working media
Installation
Direction when connecting piping
Solenoid valve
127
Internal structure and parts list
Dimensions
HVB112
With VCR joint (customized order)
How to order
HVB 6N AC100V112 5
Note: The old HVB11-6N-5 is equivalent to HVB112-6N-5.
Note: The line diode is not included with the DC specifications.
Port sizeA VoltageB
Orifice ø1.6
Model No.
No. Parts name Material
Core assembly
Plunger assembly
Coil assemblyCore BO ringSpringBody
SUS316SUS405
SUS405FKM
SUM22FKMSUS304SUS303
1
2
3
4
5
6
7
6N
8R
NPT1/8
1/4" VCR female joint (custom order)
Port sizeA
Symbol Descriptions
AC100V
AC200V
DC24V
AC100V(50/60Hz)
AC200V(50/60Hz)
DC24V
VoltageB
54ø
25 15
7
54
ø25
68
300
2-NPT 1/8
Line diode(DC does not have a line diode.)
Line diode(DC does not have a line diode.)
2-M4 0.7 depth 6
2-1/4" VCR female joint
A port B port
B port
7
2-M4 0.7 depth 6
15
A port
B portA port
1
2
3
4
5
6
7
HVB112 SeriesInternal structure and parts list
128
Vacuum, inert gas (Note 1)1.3 10-6 to 3 105
0.31.0 10-9 or less1.0 10-9 or less
0.50.2
5 to 550 to 55
5
30
Vertical installation with coil facing upward
100/200V AC (50/60Hz), 24V DCRated voltage 10%
14B80
HVB41-8N-* HVB41-8R-* (custom order)DescriptionsWorking fluidWorking pressure range Pa(abs)Maximum working differential pressure MPaValve seat leakage Pa·m3/s(He)External leakage Pa·m3/s(He)Withstanding pressure MPaBack pressure (Note 2) MPaFluid temperatureAmbient temperatureOrifice mmCv flow factorFrequency times/min or lessPort sizeInstallation positionWeight kg
JIS symbol
Electrical specificationsRated voltageAllowable voltage fluctuationPower consumption WHeat resistance classTemperature rise K
Specifications
Note 1: Robustness may drop markedly depending on dryness.Note 2: Pressurizing from the A port with the B port released to atmosphere is possible.
Model No. Actuation Orifice
HVB41 NC 5
NPT1/4 (with O-ring seat) 1/4 inch VCR female
0.79 0.86
0.470.67
A
B
High-function solenoid valve based on comprehensive results and experience. Easy maintenance
This simple structure has few points.
Special packing incorporatedFKM packing seal has outstanding seal life.
Highly corrosion resistantStainless steel (SUS303) is used for the body. (The VCR joint is SUS316.)
No beatingThe DC coil eliminates beating.
High-vacuum holdingVacuum holding is stable with little leakage.
Back pressure usable (reverse vacuum)
High vacuum solenoid valve
HVB41 Series
PrecautionsAlways read page 9 in the introduction and
the precautions on page 88 to ensure
correct and safe use of this product.
Working media
Installation
Direction when connecting piping
Solenoid valve
129
Internal structure and parts list
Dimensions
HVB41
How to order
HVB 8N AC100V41 5 3H
Orifice ø5
Model No.
8N
8R
NPT1/4 (with O-ring seat)
1/4inch VCR female joint (custom order)
ConnectionA
Symbol Descriptions
AC100V
AC200V
DC24V
AC100V(50/60Hz)
AC200V(50/60Hz)
DC24V
VoltageC
Blank
3H
3K
B
None
Square terminal box with light G1/2
Square terminal box G1/2
Installation plate
OptionB
No. Parts name MaterialCoil assemblyCore assembly
Plunger assembly
SpringO ringBodyCushion plate
SUS405SUS403SUS316LSUS405FKMPET
SUS304FKMSUS303PET
1
2
3
4
5
6
7
ConnectionA OptionB VoltageC
Terminal box
Installation plate
With VCR joint (customized order)
ø25
2-NPT1/4
42
0.540
0.5
14
55
8484
28 (300)
ø45
46110
70
30 18
4 ø5.5
2 ø6
8t2
584618
91
61
45
G1 2-B
A
18
2-M5 depth 8
N
50
2-1/4" VCR female joint
B port A port
14
3482
18
2-M5 depth 8
B port A port
B port A port
1 7
2
3
4
5
6
HVB41 SeriesInternal structure and parts list
130
High vacuum solenoid valve
HVB 1 Series5678
Easy maintenanceThis simple structure has few component parts.
Special packing incorporatedFKM packing has outstanding seal life.
Highly corrosion resistantStainless steel (SCS13) is used for the body.
No beatingThe DC coil eliminates beating.
High-vacuum holdingVacuum holding is stable with little leakage.
Back pressure use permissible (reverse vacuum)
Note that reverse vacuum
is not used with
HVB51-12F-5 or
HVB71-15F-5.
Model No. Actuation Orifice
HVB51 NC 8,12HVB61 NC 8
Model No. Actuation Orifice
HVB71 NC 12,15HVB81 NC 12,15
Large flow solenoid valve with different series and options
PrecautionsAlways read page 9 in the introduction and
the precautions on page 88 to ensure
correct and safe use of this product.
Working media
Installation
Direction when connecting piping
Solenoid valve
131
HVB 1 SeriesHigh vacuum solenoid valve
5678
Specifications
14.3B80
19B80
28H
130
AC:32.5 DC:40H
130
Note 1: Product life may drop markedly depending on dryness.Note 2: Pressurizing from port A with port B released to atmosphere is possible. (Note that reverse vacuum is not used with HVB51-12F-5 or HVB71-15F-5.)
HVB51- HVB51- HVB61- HVB71- HVB71- HVB81- HVB81-12F-3 12F-5 12F-3 15F-3 15F-5 15F-3 15F-5
1.3 10-6
to 1 105
0.1
0.02
154.34.7
1.3 10-6
to 3 105
0.3
0.1
81.82.1
1.3 10-6
to 1 105
0.1
0.02
122.73.2
Vacuum and inert gas (Note 1)
1.0 10-9 or less
0.5
5 to 550 to 55
10
Vertical installation with coil facing upward
100/200V AC (50/60Hz), 24V DCRated voltage 10%
1.3 10-6
to 2 105
0.2
0.1
81.82.1
1.3 10-6
to 1.5 105
0.15
1.0 10-9 or less
0.1
123.23.6
1.3 10-6
to 3 105
0.3
0.1
123.23.6
1.3 10-6
to 1 105
0.1
0.1
154.34.7
Descriptions
Working fluidWorking pressure range
Pa(abs)Maximum working differential pressure MPaValve seat leakage
Pa·m3/s(He)External leakage
Pa·m3/s(He)Withstanding pressure MPaBack pressure (Note 2) MPaFluid temperatureAmbient temperatureOrifice mm
Cv flow factor
Frequency times/min or lessPort sizeInstallation positionWeight kg
JIS symbol
Electrical specificationsRated voltageAllowable voltage fluctuationPower consumption WHeat resistance classTemperature rise K
ø48 flange
1.15
ø52 flange
1.9
StraightRadial
A
B
1HVB AC100V12F 3H5 3
Note 1: Symbol C 5 is not used for the HVB61.Note 2: Symbol D 3H, 3K, 3HF, and 3KF are not used for HVB61
or 81 AC voltage specifications.Note 3: The old HV-12-2F is equivalent to HVB51-12F-5.Note 4: The old HV-15-2F is equivalent to HVB71-15F-5.
How to order
SeriesA
ConnectionB
OrificeC
OptionD
VoltageE
Model No. 5678
Small
Large
SeriesA
Symbol Descriptions
12F15F
Flange ø48 Only HVB51, 61 is availableFlange ø52 Only HVB71, 81 is available
ConnectionB
Blank3H3KF
3HF3KF
NoneSquare terminal box with light G1/2 Note 2Square terminal box G1/2 Note 2With companion flangeSquare terminal box with light G1/2 + companion flange Note 2Square terminal box G1/2 + companion flange Note 2
OptionD
3
5
ø8 for HVB51, 61ø12 for HVB71, 81ø12 for HVB51ø15 for HVB71, 81 Note 1
OrificeC
AC100VAC200VDC24V
AC100V(50/60Hz)AC200V(50/60Hz)DC24V
VoltageE
Note on model No. selection
132
HVB 1 Series5678
HVB* 1
Internal structure and parts list
Dimensions
ActuationNCNCNCNCNCNCNC
HVB51-12F-3HVB51-12F-5HVB61-12F-3HVB71-15F-3HVB71-15F-5HVB81-15F-3HVB81-15F-5
A B C D E F G H I d J60606070707070
118118118139139139139
52525255555555
49494954545454
40404042.442.442.442.4
4-M44-M44-M44-M54-M54-M54-M5
105105105110110110110
84848489898989
48484852525252
812 812151215
32
33
K
77
100
Note: The line diode is included only with HVB61 and HVB81 AC specifications. A terminal box cannot be assembled for this series.Note: Part of the internal structure differs for the HVB* 1-* * F-3.
Terminal box
Note: This is used as the bolt through holes.
1
2
3
4
5
6
7
8
9
No. Parts name MaterialCore ACoilPlunger assemblySpringCore BO ringBodyO ringBase cover
SUS405
SUS405,FKMSUS304SUS403FKMSCS13FKMSUS304
Model No. Symbol
Line diode
2 ø5.8(HVB71/81)2 ø4.5(HVB51/61) I
E
F
D
B
J
dC
A
K
61
45
G
H
I
B port A port
B port A port
1
2
3
4
5
6
7
8
9
ø34
ø24
3
ø34
ø24
3
133
HVB 1 SeriesDimensions
5678
Dimensions
ActuationNCNCNCNCNCNCNC
HVB51-12F-3HVB51-12F-5HVB61-12F-3HVB71-15F-3HVB71-15F-5HVB81-15F-3HVB81-15F-5
a b c d Mounting bolt O ring
48
52
40 ±0.2
42.4±0.2
4.8
5.8
M4-14
M5-14
Companion flange dimensions Straight piping Radial pipe
+0.5 0
+0.5 0
17.3
21.7
JIS B2401V-24
JIS B2401V-24
Installation bolts and applicable O-rings are included when the companion flange is ordered.
Companion flange dimensions
Model No. Symbol
(JIS G3459)Stainless steel pipe for piping
4-d
C0.58
a b c WeldedB port A port B port
A port
134
Vacuum delay solenoid valve
HVL 2 Series Solenoid valve with OFF delay
14
Delay leakUsing the CR circuit, the vacuum is broken in a several second (0 to 10 seconds) interval when power stops. (0 to 8 seconds only for HVL12 AC)
Easy time settingTime is easily set with a screwdriver.
SeparableThe circuit and valve can be separated and installed.
High vacuumThis valve has high-vacuum holding, with a valve seat and external leakage of 1.3x10-9 Pa·m3/s(He) or less.
Free pressure directionConnection to the vacuum is
made from either port.
Highly corrosion resistantThe body is of SUS303 and the valve seat of FKM.
Selective connectionThe Rc1/8 or 1/4-inch double-barbed joint and NW10.16 vacuum clamp joint are used.
Model No. Port size Orifice Voltage
HVL12 Rc1/8,1/4 Double barbed joint/NW10/NW16 1.2 24V DC/100V AC/200V ACHVL42 Rc1/8,1/4 Double barbed joint/NW10/NW16 3.0 24V DC/100V AC/200V
Prevent oil from rising when service is momentarily interrupted.
Main applications
Use as a delay vacuum solenoid valve (HVL Series)
Prevent oil from rising during momentary service interruption
Usually, after the machine stops, piping between the chamber and pump is released into the atmosphere at valve (1) to prevent oil from entering pipes. To protect the chamber (maintain vacuum, prevent contamination), piping must be released into the atmosphere after valve (2) is completely closed.
Chamber
If the pipe is not released into the atmosphere when the pump stops...
If valve (1) opens before valve (2) completely closes... Rising of oil is prevented and the chamber protected by using the HVL Series!!
Valve (1)
[Vacuum break valve] (HVL)
Pump
Valve (2)
[Isolation valve]Chamber
Valve (1)
Pump
Valve (2)
Oil rises
Chamber
Valve (1)
Pump
Valve (2)
* Chamber is contaminated* Vacuum drops
Power ON
OFFAt service interruption
Valve (2) Open
Close
Time T until valve (2) completely closes
Valve (1) Open
Close
<Fig. 3> <Fig. 4>
<Fig. 1> <Fig. 2>
Power ON
OFFAt service interruption
Valve (2) Open
Close
Time T until valve (2) completely closes
Set HVL Series delay time (see page 135) longer than time T
HVL series Open(Valve (1))
Close
<Fig. 5>
135
HVL 2 SeriesHow to order
14
Precautions
HVL12 HVL42Descriptions
Working fluid
Working pressure range
Pa(abs)
Valve seat leakage
Pa·m3/s(He)
External leakage
Pa·m3/s(He)
Withstanding pressure MPa
Fluid temperature
Ambient temperature
Orifice mm
Installation position
Frequency
Port size
Cv flow factor
Delay time
Rated voltage
Allowable voltage fluctuation
Power consumption W
JIS symbol
Air, nitrogen (Note 1)
1.3 10-6 to 2.0 105
1.3 10-9 or less
1.3 10-9 or less
0.5
5 to 50
0 to 50
Free
0.5 times/minute or less
Rc1/8 and 1/4" double barbed joint, NW10.16 vacuum clamp joint
24V DC, 100V AC and 200V AC (HVL42: 100/200 VAC power common, used accordingly by connecting)
Rated voltage 10%
Specifications
1.2
0.05
AC:0 to 8sec,DC:0 to 10sec
4
3.0
0.3
AC/DC:0 to 10sec
11
Note 1: Robustness may drop markedly depending on dryness.
A
B
2HVL AC100V4S1 56
How to order
SeriesA
A port connectionNote 1
B
B port connectionNote 1
C
VoltageD
Model No. 14
Orifice 1.2Orifice 3.0
SeriesA
Symbol Descriptions
64S
10K16K
Rc1/81/4" double barbed jointNW10 vacuum clamp jointNW16 vacuum clamp joint
A port connection Note 1B
DC 24VAC100VAC200VAC100V/AC200V
DC 24VAC100VAC200VAC100/200VFor both powers Note 2
VoltageD
64S
10K16K
Rc1/81/4" double barbed jointNW10 vacuum clamp jointNW16 vacuum clamp joint
B port connection Note 1C
Note on model No. selection
Only HVL42 is available
Only HVL12 is available
Only HVL42 is available
Note 1: When the type designated A port and B port are the same, designate only one.Example: When A port and B port are
both Rc1/8:HVL12-6-5-voltage (correct)HVL12-66-5-voltage (incorrect)
Note 2: Power is used accordingly by connecting.
Always read page 9 in the introduction and
the precautions on page 88 to ensure cor-
rect and safe use of this product.
Working media
Installation
Direction when connecting piping
Solenoid valve
136
HVL 2 Series14
No. Parts name MaterialSocketO ringWasherCore assemblyCoil assemblyPlunger assembly
O ringSpringBody
SUS303FKMSUS304SUS316L,SUS405PBT
SUS405,FKM,PTFE
FKMSUS304SUS303
1
2
3
4
5
6
7
8
9
No. Parts name MaterialSocketO ringWasherCore assembly
Coil assemblyPlunger assembly
O ringSpringBody
SUS303FKMSUS301-CSP
SUS403,SUS316L,SUS405
Class B nylon mold
SUS405,FKM,PTFE
FKMSUS304SUS303
1
2
3
4
5
6
7
8
9
HVL42-6-5
HVL12-6-5
Internal structure and parts list
9
8 7 6 5 4 3 2 1
1
2
3
4
5
6
7
98
A port
B port
A port
B port
137
A7890
B11.511.5
D7676
C2859
E5162
F14.514.5
A132152
B116136
D3030
C9
20
E88
103
F123138
G102105
H3537
HVL42-6-5
HVL12-6-5
Dimensions
DC
Model No. Symbol
Model No. SymbolHVL42-DC24VHVL42-AC100,200V
HVL12-DC24VHVL12-AC100,200V
+DELAY ADJ.
A
B
A
B
G
21122
H
7 37
F
E
D
C
CD
E
F
43
2-Rc 1/8A port
B port
R3.5
4
2-M4
8 61 4-M4 AC
B port
A port
HVL 2 SeriesDimensions
14
138
M E M OM E M O
139
Related productsRelated products
Operation solenoid valveMN3E0/MN4E0 140MN4GA/MN4GB 140Clean exhaust filterFAC 141Fiber tube (joint/tube)Fiber tube 142
CONTENTS
139
140
MN3EO/MN4EO/MN4GA/MN4GB Series
MN3EO/MN4EO Series(3, 4 port valve and two 3 port valves integrated type)
(Catalog No. CC-691)
Extra compact (height 39.5 mm) high-performance block manifoldCompact and space savingA 40 mm or less valve height is realized with a 10 mm coil width. (CKD conventionalpart: 46 mm)A footprint of equipment is reduced. The product can be installed anywhere.Environment protectionEnvironment-friendly halogen-free leads are used for internal wiring. (T30 type D sub-connector)High performance·12 ms response has balanced A port and B port (CKD data value using type with two built-in 3-port valves)·No more bothersome connection Use of connectors enables wiring to be completed during assembly.
Specifications
Working fluid
Actuation
Valve structure
Working pressure MPa
Rated voltage V
Power consumption W
C[dm3/(s·bar)]
b
Descriptions
Electrical specifications
Compressed air
Pilot operated
Soft spool
0.2 to 0.7
0.5 to 0.54
0.08 to 0.16
DC12, 24
0.6
MN3E0 MN4E0
Note 1: Conversion for effective sectional area S and acoustic velocity conductance C is S 5.0xC.
Flowcharacter-istics
MN4GA/MN4GB Series(3, 5 port valve block manifold)
(Catalog No. CB-23S)
User and eco-friendly next-generation block manifoldEcologyPaint-less: Particles are not generated by peeling paint.Indication of material names: Material names are stamped on key components tofacilitate recycling, etc.SafetyMisoperation prevention incorporated in connection keyEase-of-useReduced wiring compliance: Serial (compact slave station OPP4)Piping connection: Direct piping type, base piping typeTAG nameplates availableFlexibilityMixed blocks compatible with MN4G1 and 2 mountingReliabilityResponsiveness 12 ms 2 ms. (CKD data value for 4G1 series)Life 60,000,000 times and over (with clean air at 0.5 MPa pressure)
Specifications
Working fluid
Actuation
Valve structure
Working pressure MPa
Rated voltage DC
V AC
Power consumption W DC12, 24
Apparent power VA AC100V
Descriptions
Electrical specifications
Compressed air
Pilot operated
Soft spool
0.2 to 0.7
0.66 to 2.3
0.10 to 0.30
12, 24
100
0.55(0.6)
1.0(1.2)
MN3G MN4G
C[dm3/(s·bar)]
b
Note 1: Conversion for effective sectional area S and acoustic velocity conductance C is S 5.0xC.Note 2: Values in parentheses apply when a light is installed.
Flowcharacter-istics
Operationsolenoid valve
141
FAC Series
(Catalog No. CC-755)
Revolutionary exhaust for clean rooms.
FAC Series
Clean exhaust filter
Working fluid
Max. working pressure MPa
Min. working pressure MPa
Withstanding pressure MPa
Working temperature range
Port size
Product mass g
Filtration rating m
Secondary cleanness
Maximum processing rate /min(ANR)
Specifications (FAC10/FAC100/FAC200)
Model No. FAC10 FAC100 FAC200Compressed air
0.1
0
0.3
R1/8, R1/4
65
0.01 (removal efficiency 99.99% and over)
100% of 0.1 m and larger particles removed Note 1
100
5 to 45
2
R3/8, R1/2
85
200
5 to 40
Working fluid
Max. working pressure MPa
Min. working pressure MPa
Withstanding pressure MPa
Working temperature range
Port size
Product mass g
Filtration rating m
Secondary cleanness
Maximum processing rate /min(ANR)
Specifications (FAC300)
Model No. FAC3000Compressed air
0.1
0
0.3
5 to 45
Rc3/8, Rc1/2
290
0.01 (removal efficiency 99.99% and over)
100% of 0.1 m and larger particles removed Note 1
600
Note 1: Flow rate conditions at 28.3 /min (ANR) when measuring.
Note 1: Flow rate conditions at 28.3 /min (ANR) when measuring. For FAC10, 10 /min (ANR) applies.
ø4 ø6 ø8 ø10 ø12
4 10 20 35 50
Precise filtration
0.01 m filtration, 99.99% removal
High secondary cleanness
100% of 0.1 m and larger particles are removed
*Measurement conditions: 28.3 /min (ANR) flow
Cost reducing and space saving
Work, cost, and space required for conventional external exhaust piping are eliminated.
Simplified piping
All external exhaust piping is eliminated by installing the plug on the cylinder and the
silencer on the switching valve, simplifying piping.
Silencer
Exhaust noise is suppressed to 60 dB (A) or less.
Ample variations
Three types: plug, silencer, and modular. Four flow rate series: 10, 100, 200, and 600 /
min (ANR) are available.
142
Specifications
•Fiber tube
Working fluid
Working pressure range (20 ) (Note 2)
Working temperature range
Outer diameter inner diameter mm
Inner diameter accuracy mm
Outer diameter accuracy mm
Durometer hardness
Min. bending radius (JIS B 8381) mm
Min. installation radius mm
Burst pressure (20 ) MPa
Volume resistivity /cm
Material
Color
•Push-in joint (standard)
Model No. Antistatic type UP-9402-F1 Clean type EH-5802
Compressed air (Note 1)
-10 to 60 (to be unfrozen)
ø1.8 ø1.2
0.1
0.1
-100kPa to 1.0MPa
HDD 58
5
7
3.8
-
Special polyolefin
Black/Transparent
-100kPa to 0.8MPa
HDA 94
4
4
2.5
1010 to 1012
Antistatic urethane
Note 1: Contact CKD for other working fluids.Note 2: Refer to "Relation of usable temperature and pressure (normal breaking)"
for the usable pressure range.Note 3: Yellow and red are available as customized orders.
Working fluid
Working pressure range
Working temperature range
Applicable tube
•Push-in joint (clean type)
Model No. PG Series
Compressed air (Note 1)
-100kPa to 1.0MPa
-10 to 60 (to be unfrozen)
Fiber tube (UP-9402-F1, EH-5802) Note 2
Note 1: Contact CKD for other working fluids.Note 2: Fiber tube for barbed joints (UP-9102-F1) cannot be used.Note 3: This joint is sold in sets of 10.
Working fluid
Working pressure range
Working temperature range
Lubricant
Applicable tube
Model No. CG Series
Clean air (Note 1)
-100kPa to 1.0MPa
-10 to 60 (to be unfrozen)
Oil-prohibition
Fiber tube (UP-9402-F1, EH-5802) Note 2
Note 1: This joint uses rubber EPDM, and cannot be used with fluids containing mineral oils.Contact CKD for other working fluids.
Note 2: Fiber tube for barbed joints (UP-9102-F1) cannot be used.Note 3: This joint is sold in single sets.
Black/white/transparent/transparent blue/transparent green/yellow (Note 3)/red (Note 3)
This new ultra-thin tube greatlyimproves usability with enlargedbore size and push-in joint.
New outer grasping diameter incorporatedBore size enlarged from ø1.0 to ø1.2, increasing flow by 3-foldSmall tube volume saving energy and spaceSeries for clean models uses highly corrosion-resistant materialPush-in joint, standard PG series, and clean CG series available
Joint/Tube
(Catalog No. CC-784)
Fiber tube R
Fiber tube® for push-in joint
143
Fiber tube R
Descriptions UP-9102-20-*-F1Working fluid
Working pressure range (20 ) (Note 1)
Working temperature range
Outer diameter inner diameter
Inner diameter accuracy
Outer diameter accuracy
Min. bending radius (JIS B 8381)
Min. installation radius
Burst pressure (20 )
Volume resistivity
Material
Color
Compressed air
-100kPa to 0.7MPa
-10 to 60 (to be unfrozen)
1.8 1.0
0.1
0.1
2
4
2.1 (reference value)
1 10 8 or less (black) 1 10 12 or less (colors other than black)
Conductive urethane
Black/White/Transparent/Transparent blue/Transparent green/Yellow (Note 2)/Red (Note 2)
Specifications
•Tube
mm
mm
mm
MPa
·cm
Descriptions PTN*Port size
Working fluid
Working pressure range
Working temperature range
Applicable tube
Effective sectional area
Flow rate (Note 3)
M3, M5, R1/8, ø3.2 (Note 4), ø4 (Note 4), ø6 (Note 4)
Compressed air
-100kPa to 0.7MPa
-10 to 60 (to be unfrozen)
UP-9102-20-*-F1
Straight, barbed nipple: 0.3 Elbow: 0.2
Straight, barbed nipple: 20 Elbow: 13
•Dedicated joint
mm2
/min(ANR)
Note 1: Refer to "Relation of usable temperature and pressure (normal breaking)" for the usable pressure range.
Note 2: Customized order.Note 3: Flow rate is atmospheric pressure conversion at 0.5 MPa.Note 4: Applicable tube: Soft nylon tube (FH-3224, F-1504, F1506) Urethane tube (U-9504, U-9506)
Ultra-thin tube for free piping.This ultra-thin tube is as thin and flexible as leads.
Outer diameter of 1.8, minimum bending radius of 4 mm
Electric resistance is 1 177 ·cm, and prevents electrostatic discharge.
Ideal for fine-speed cylinder piping
Wide variety of tube colors and joints
Joint/Tube
(Catalog No. CB-024S)
Fiber tube®
144
M E M OM E M O
145
System lineupSystem lineup
High Purity Chemical Liquid System 146Pneumatic components for clean room specification 146
CONTENTS
145
146
System lineup
Pneumatic components for clean room specification
Catalog No.CB-033A
Regulator
Flow rate sensor
Solenoid valve for air blow
Needle valve Final filter
Main line filter
Filter
Differential pressure gauge
Pressure gauge
Oil removing filter
Exhausttreatment
Model circuit for clean blow system
Accurately producing ultra clean air
Inside clean room
Clean air blow is ensured by installing a final
filter at the end.
Use in different applications and clean room levels
Responding to advanced needs for semiconductor manufacturing process control
High-purity chemical liquid system componentCatalog No.CB-031A
•Industry's top results and reliability
•Realizing high quality with integrated production from
design to assembly and packaging in advanced
specification super clean rooms
•Diverse joint variations
Responding to advanced needs for semiconductor manufacturing process control
High Purity Chemical Liquid System Component General Catalog
WET FINE SYSTEM
Pneumatic cylinderElectric driven sliderDirectional switching
valveF.R.unit
Auxiliary componentsElectronics components
Valve for air blow
1
Pneumatic components for clean room specification
147
System lineup
Circuit configuration for air-operated device
Zero particle generation with vacuum and exhaust treatment
Switching valve
Switchingvalve
Inside clean room
Cylinder
Switchingvalve
Cylinder
Cylinder
Exhaust treatment
Screw air compressor
Main line filter
Refrigeratingdryer
Filter
Differential pressure gauge
Differential pressure gauge
Pressuregauge
Exhaust treatment
Vacuum treatment
Vacuum treatment
Flow control valve
Flow control valve
Flow control valve
Flow control valve
Oil removing filter
Oil removing filter
Filter
Switchingvalve
Cylinder
Standard cylinder
Guided cylinder
Regulator
Exhaust treatment
Vacuum treatment
Low-dust generating exhaust treatment
Low-dust vacuum treatment
P71 Series P51 Series
P7 Series P5 Series
P72 Series P52 Series
P73 Series P53 Series
Guided cylinder
Standard cylinder
A double rod packing is incorporated. Dust is exhausted outside the clean room from the pipe connected to the relief port at the middle section.
As with standard cylinders, double rod packing is used. Dust is exhausted outside the clean room from the pipe connected to the relief port at the middle section.Low dust generating grease is used at the sliding section (piston rod, guide rod).
As with the standard type cylinder, a relief port is provided at the sliding section of the piston rod on outer rod packing. Dust is vacuumed from this port and forcibly sucked out and exhausted.Low dust generating grease is used at the sliding section (piston rod, guide rod)
A relief port is provided at the sliding section of the piston rod on outer rod packing. Dust is vacuumed from this port and forcibly sucked out and exhausted.
148
The electronic catalog, which aims to make CAD designing more efficient, is provided on a CD-ROM as a pneumatic and control component related CAD database which focuses on the designers needs.Please contact your CKD Sales person or your nearest sales office to order this CD.
1. Searching from the catalogIf there is a CAD mark ( ) in the catalog, the CAD data is registered. Search for the registered file using the applicable product model, listed on the following page, as a key. Input "CAD data file name" from the CAD software to call out the drawing.
2. Searching from the CD-ROMOpen kensaku.exe, List.txt (for DXF) on the CD-ROM, and search for the registered file name using the applicable product Model No. as a key. The drawings can then be called out by inputting the "CAD data file name" from the CAD software.
1 DXF
•DXF data can be downloaded from the CKD internet website. http:/ /www.ckd.co.jp/
Guide to CKD Electronic Catalog(CAD DATA)
Using and ordering the electronic catalog
Searching the electronic catalog file name
Compatible CAD types
149
CAD Electronic CatalogFile list
Product Model No.File name
DXFFolder name
Process Gas Components
agd0_v_4rm.dxfagd0_v_4r.dxfagd1_v_4rm.dxfagd1_v_4r.dxfagd1_v_4s.dxfagd2_v_6rm.dxfagd2_v_6r.dxfagd2_v_6s.dxf
AGDAGD0*V-4RMAGD0*V-4RAGD1*V-4RMAGD1*V-4RAGD1*V-4SAGD2*V-6RMAGD2*V-6RAGD2*V-6S
•Air operated valve AGD
Product Model No.File name
DXFFolder name
ogd10v_4rm.dxfogd10v_4r.dxfogd10v_4s.dxfogd20v_6rm.dxfogd20v_6r.dxfogd20v_6s.dxf
OGDOGD10V-4RMOGD10V-4ROGD10V-4SOGD20V-6RMOGD20V-6ROGD20V-6S
•Manual valve OGD
Product Model No.File name
DXFFolder name
mgd10v_4rm.dxfmgd10v_4r.dxfmgd10v_4s.dxfmgd20v_6rm.dxfmgd20v_6r.dxfmgd20v_6s.dxf
MGDMGD10V-4RMMGD10V-4RMGD10V-4SMGD20V-6RMMGD20V-6RMGD20V-6S
•Manual valve MGD
Product Model No.File name
DXFFolder name
rc2000_8.dxfrc2000_10.dxfrc2000_15.dxfrc2000_f .dxf
RC2000RC2000-8RC2000-10RC2000-15RC2000 accessory (joint, bracket, G49D)
•Clean regulator RC2000
Product Model No.File name
DXFFolder name
fcs500_h4.dxffcs500_h6.dxffcs500_h8.dxffcs500_6a.dxffcs500_8a.dxffcs500_h_6a.dxffcs500_h_8a.dxffcs500_p9.dxf
FCS00FCS500-H4FCS500-H6FCS500-H8FCS500-6AFCS500-8AFCS500-H*6AFCS500-H*8AFCS500-P9, bracket
•Inline clean filter FCS
The "Electronic catalog file list" is for"CAD DATA Electric catalog (English) 2004".
150
CAD Electronic Catalog
High vacuum components
Product Model No.File name
DXFFolder name
fgl11_4rm.dxffgl11_4s.dxffgl21_4rm.dxffgl21_4s.dxf
FGLFGL11-4RMFGL11-4SFGL21-4RMFGL21-4S
•Leak valve FGL
Product Model No.File name
DXFFolder name
avp_b_21.dxfavp_b_51.dxfavp_b_52_3_.dxfavp_b_61.dxfavp_b_62_3_.dxfavp_b_71.dxfavp_b_72_3_.dxfavp_b_81.dxfavp_b_82_3_.dxfavb51_3_3.dxfavb523.dxfavb61_3_3.dxfavb623.dxfavb7_3.dxfavb8_3.dxf
AVP_AVBAVP(B)21AVP(B)51AVP(B)52(3)AVP(B)61AVP(B)62(3)AVP(B)71AVP(B)72(3)AVP(B)81AVP(B)82(3)AVB51(3)3AVB523AVB61(3)3AVB623AVB7*3AVB8*3
•Air operated valve AVP/AVBThe "Electronic catalog file list" is for"CAD DATA Electric catalog (English) 2004".
151
M E M OM E M O
152
M E M OM E M O
Subject to the conditions below, CKD Corporation ("CKD") warrants the first end user (the"Buyer") that CKD's products are free from defects in material and workmanship.
CKD will, at CKD's option, either repair or replace a defective product, including lowesttransportation costs but not including installation or any other similar charges, provided that (1)the buyer notifies CKD in writing of the claimed defect within 18 months from the date Buyerreceived the product, (2) provides a complete explanation of the defect, the application of theproduct, and such other information concerning use of the product as CKD may request, and(3) returns the product to CKD in accordance with CKD's specific written instructions andauthorization obtained from CKD prior to return of the product, and CKD's inspection confirmsthat the product was defective.
This warranty applies only if the product was used and applied correctly under normaloperating conditions and good engineering practice; was installed, operated and maintained inaccordance with all instructions issued or published by CKD; was used within stated pressure,media and operating limitations published by CKD and in effect on the date of shipment; andwas not subject to abuse, misuse or unauthorized modification.
THIS WARRANTY IS THE ONLY AUTHORIZED CKD WARRANTY AND IN LIEU OF ALLOTHER WARRANTIES, EXPRESSED OR IMPLIED, INCLUDING ANY IMPILIEDWARRANTY OF MERCHANTABILITY OR FITNESS FOR A PARTICULAR PURPOSE,notwithstanding any disclosure to CKD of the use to which the product is to be put. TheBuyer's SOLE AND EXCLUSIVE REMEDY on any claim of any kind for any loss or damagearising out of the manufacture, sale, delivery or use of CKD's products shall be for the repair orreplacement of any defective products as provided herein.
IN NO EVENT SHALL CKD BE LIABLE FOR BUSINESS INTERRUPTIONS, LOSS OFPROFITS, PERSONAL INJURY, COSTS OF DELAY OR FOR ANY OTHER SPECIAL,INDIRECT, INCIDENTAL OR CONSEQUENTIAL LOSSES, COSTS OR DAMAGES. Thereare no warranties, expressed or implied, made by CKD other than the warranty against defectsin material and workmanship set forth above, and CKD neither assumes nor authorizes anyother person or firm to assume for it any other obligations or liability.
CKD shall not be liable for any trouble, malfunction and damages of CKD products caused,directly or indirectly, by disaster or any other causes not attributable to CKD's responsibility.CKD also shall not be responsible for any trouble, malfunction and damages of CKD Productscaused by the lack or malfunction of safety circuit or structure or function that should becommonly equipped in the Buyer's equipment in which the CKD products were used.
CKD MAINTAINS A POLICY OF ONGOING PRODUCT DEVELOPMENT ANDINPROVEMENT. WE THEREFORE RESERVE THE RIGHT TO CHANGE DIMENSIONS,SPECIFICATIONS AND DESIGN WITHOUT NOTICE.
CKD WARRANTY
●Specifications are subject to change without notice.
U.S.A CKD USA CORPORATION ● HEADQUARTERS 4080 Winnetka Avenue, Rolling Meadows, IL 60008 USA
● CINCINNATI OFFICE 1420 Jamike Drive, Erlanger, KY 41018 USA
● AUSTIN OFFICE 8403 Cross Park Drive, Suite 3G, Austin, TX 78754, USA
● SAN JOSE OFFICE 48501 Warm Spring Boulevard, Suite 114 Fremont, CA 94539 USA
EUROPE CK EUROPE BRANCH De Fruittuinen 28 Hoofddorp 2132NZ The Netherlands
Malaysia M-CKD PRECISION SDN.BHD. ● HEADQUARTERS Lot No.6,Jalan Modal 23/2, Seksyen 23, Kawasan, MIEL, Fasa 8, 40300 Shah Alam,Selangor Darul Ehsan, Malaysia
● JOHOR BAHRU OFFICE 116&118 Jalan Rosmerah 2/17, Taman Johor Jaya, 81100 Johor Bahru, Malaysia
● MELAKA OFFICE No.B-10, Ground Floor, Bachang Permai, Jalan Tun Fatimah Batu Berendam 75350 Melaka, Malaysia
● PENANG OFFICE No.2678, Ground Floor, Jalan Chain Ferry, Taman Inderwasih, 13600 Prai, Penang, Malaysia
Thailand CKD THAI CORPORATION LTD. ● SALES HEADQUARTERS-BANGKOK OFFICE Suwan Tower, 14/1 Soi Saladaeng 1, North Sathorn Rd., Bangrak, Bangkok 10500 Thailand
● LAEMCHABANG OFFICE 53/67, 69 Moo 9, Tungsukla, Sriracha, Chonburi 20230 Thailand
● NAVANAKORN OFFICE 176/4-6, Moo 13, Paholyothin Rd., Klongneung, Klongluang, Prathumthani 12120 Thailand
● RAYONG OFFICE 125/32 M.Charoen Nakorn, T.Maptapud, Rayong 21150, Thailand
● LAMPHUN OFFICE 133 Moo 4, Banklang Muang, Lamphun, 51000, Thailand
● KORAT OFFICE 982/3-4 Mittraphab Rd., Naimuang, Muang, Nakhonratchasima 30000, Thailand
Singapore CKD SINGAPORE PTE LTD. 705 Sims Drive #03-01/02, Shun Li Industrial Complex, 387384 Singapore
Taiwan 日商喜開理股 有限公司台湾分公司 CKD CORPORATION TAIWAN BRANCH 中華民国台湾省台北市中山北路二段96號嘉新大楼第14楼1405室 Rm.1405, 14F, No.96, Sec.2, Chung Shan N.Rd., Taipei, Taiwan, R.O.C.
China 喜開理(上海)機器有限公司 CKD (SHANGHAI) CORPORATION ● 営業部/上海事務所(SALES HEADQUARTERS / SHANGHAI OFFICE) 中国上海市浦東新区張楊路188号 湯臣商務中心3楼304室 Room 304, 3'rd Floor, Tomson Business Center, No.188, ZhangYang Road, PuDong, ShangHai, 200120, China
● 北京事務所(BEIJING OFFICE) 中国北京市復興路戊12号 恩菲科技大廈1015室 En-Fei-Ke-Ji Bdg. Room #1015, Fu-xing-Lu-Wu 12, Beijing,100038, China
● 天津事務所(TIANJIN OFFICE) 中国天津市南開区白堤路148号 Bai-Di-Lu, 148, Nankai-Qu, Tianjin, 300193, China
● 無錫事務所(WUXI OFFICE) 中国江蘇省無錫市中山路389号吟春大廈1708室 Room 1708, Yin-Chun Bdg., Zhongshan Road No.389, Wuxi, Jiangsu Province, 214001,China
● 南京事務所(NANJING OFFICE) 中国南京市山西路57号杰源山西路商務中心502室 Room 502, Jieyuan Shanxi Road Business Center No.57, Shanxi Road, Nanjing, 210009, China
● 重慶事務所(CHONGQING OFFICE) 中国重慶市石橋舗楡洲路8号秦興科技広場1634号 Taixing Keji Square Room 1634, Yuzhou Road No. 8 Shiqiaopu, ChongQing, 400039, China
● 成都事務所(CHENGDU OFFICE) 中国四川省成都市西玉龍街210号成都外貿大廈22楼2207号 Chengdu Waimao Bdg. 22F, Room #2207, Xi-Yu-Long-Jie 210, Chengdu city, Sichuan Prov., 610015, China
● 西安事務所(XIAN OFFICE) 中国陜西省西安市労働南路296号西北民航大廈610号 Xi-bei-min-hang Bldg. Room #610, Lao-dong-nan-lu 296, Xian city, Shangxi Prov., 710082, China
● 深 事務所(SHENZHEN OFFICE) 中国広東省深 市華富路1006号航都大廈7B単元 HangDu Building 7B, No.1006 HuaFu Road, Shenzhen, 518031, China
● 広州事務所(GUANGZHOU OFFICE) 中国広東省広州市環市東路339号広東国際大酒店A楼24C Guangdong Guoji Dajiudian A-24C, No.339, Huanshidong-Lu, Guangzhou City, Guangdong, 510098 China
● 大連事務所(DALIAN OFFICE) 中国遼寧省大連市西崗区新開路99号大連珠江国際大廈808室 DaLian ZhuJiang GuoJi-Bld. Room #808, XinKai-Lu 99, DaLian city, LiaoNing Province, 116011, China
● 長春事務所(CHANG CHUN OFFICE) 中国吉林省長春市長春一汽越野路16号単元4楼中門16-1 16-1Dan Yuan 4-Lou Zhong Men, 16, Chang Chun Yi Qi Yue Ye Lu, Chang Chun City, JiLin Province, 130011, China
● 杭州事務所(HANGZHOU OFFICE) 中国浙江省杭州市分暉路108号浙江省出版印刷大廈410室 Zhejiangsheng Chuban Yinshua Daxia Room 410, No.108, Fenhui-Lu, Hangzhou City, Zhejiang, 310004 China
Korea CKD KOREA CORPORATION Room No.1105, 11th FL, The Korea Teachers Pention B/L. 27-2, Yoido-Dong, Youngdeungpo-Gu, Seoul, 150-742, Korea
日商喜開理股 有限公司台湾分公司 CKD CORPORATION TAIWAN BRANCH PHONE +886-(0)2-2523-0374 FAX +886-(0)2-2523-5081
M-CKD PRECISION SDN.BHD. ● HEADQUARTERS PHONE +60-(0)3-5541-1468 FAX +60-(0)3-5541-1533 ● JOHOR BAHRU OFFICE PHONE +60-(0)7-352-9129 FAX +60-(0)7-352-9144 ● MELAKA OFFICE PHONE +60-(0)6-286-9989 FAX +60-(0)6-288-2700 ● PENANG OFFICE PHONE +60-(0)4-399-9611 FAX +60-(0)4-390-9811
CKD USA CORPORATION ● HEADQUARTERS PHONE +1-847-368-0539 FAX +1-847-788-0575 ● CINCINNATI OFFICE PHONE +1-859-283-2776 FAX +1-859-283-2785 ● AUSTIN OFFICE PHONE +1-512-821-9900 FAX +1-512-821-9903 ● SAN JOSE OFFICE PHONE +1-510-659-9245 FAX +1-510-659-9485
CKD UK REPRESENTATIVE PHONE +44-(0)121-4219330 FAX +44-(0)121-4220475
CKD CORPORATION EUROPE BRANCH PHONE +31-(0)23-5541490 FAX +31-(0)23-5541491
CKD BELGIUM REPRESENTATIVE PHONE +32-(0)2-541-4768 FAX +32-(0)2-541-4702
CKD CO.,LTD.,o.s.CZECH OFFICE PHONE +420-321-612-001 FAX +420-321-800-000
CKD KOREA CORPORATION PHONE +82-(0)2-783-5201~5203 FAX +82-(0)2-783-5204
OVERSEAS DPT. SALES DIV. 2-250 Ouji Komaki, Aichi 485-8551, Japan PHONE+81-(0)568-74-1338 FAX+81-(0)568-77-3461
CKD THAI CORPORATION LTD. ● SALES HEADQUARTERS-BANGKOK OFFICE PHONE +66-(0)2-267-6300 FAX +66-(0)2-267-6305 ● LAEMCHABANG OFFICE PHONE +66-(0)38-330-133 FAX +66-(0)38-330-079 ● NAVANAKORN OFFICE PHONE +66-(0)2-909-2158 FAX +66-(0)2-909-1168 ● RAYONG OFFICE PHONE +66-(0)38-608-549 FAX +66-(0)38-609-299 ● LAMPHUN OFFICE PHONE +66-(0)53-582-116 FAX +66-(0)53-582-079 ● KORAT OFFICE PHONE +66-(0)4424-8860 FAX +66-(0)4424-8862
喜開理(上海)機器有限公司 CKD(SHANGHAI) CORPORATION ● 営業部 / 上海事務所 SALES HEADQUARTERS / SHANGHAI OFFICE PHONE +86-(0)21-58798266 FAX +86-(0)21-58797507 ● 北京事務所 / BEIJING OFFICE PHONE +86-(0)10-63951008 FAX +86-(0)10-63957378 ● 天津事務所 / TIANJIN OFFICE PHONE +86-(0)22-27492788 FAX +86-(0)22-27483916 ● 無錫事務所 / WUXI OFFICE PHONE +86-(0)510-2753506 FAX +86-(0)510-2750156
● 南京事務所 / NANJING OFFICE PHONE +86-(0)25-86633426 FAX +86-(0)25-83733596 ● 重慶事務所 / CHONGQING OFFICE PHONE +86-(0)23-68610533 FAX +86-(0)23-68631161 ● 成都事務所 / CHENGDU OFFICE PHONE +86-(0)28-86624906 FAX +86-(0)28-86620216 ● 西安事務所 / XIAN OFFICE PHONE +86-(0)29-88793422 FAX +86-(0)29-88709982 ● 深 事務所 (SHENZHEN OFFICE) PHONE +86-(0)755-83646644 FAX +86-(0)755-83646699
● 広州事務所 (GUANGZHOU OFFICE) PHONE +86-(0)20-83313461 FAX +86-(0)20-83313462 ● 大連事務所 / DALIAN OFFICE PHONE +86-(0)411-83779312 FAX +86-(0)411-83779313 ● 長春事務所 / CHANG CHUN OFFICE PHONE +86-(0)431-2909875 FAX +86-(0)431-2909875 ● 杭州事務所 (HANGZHOU OFFICE) PHONE +86-(0)571-85800055 FAX +86-(0)571-85800054
CKD SINGAPORE PTE. LTD. PHONE +65-6744-2623 FAX +65-6744-2486
:Distributors
2006.3.CCC