process gas and vacuum components high purity gas control systems

CB-035

Process Gas and Vacuum Components

High purity gascontrol systemsDRY FINE SYSTEM

CB-035A 1

Opening Up the Future for Process Control

Philosophy is the Concept

Product cleanness is comprehensively controlled conducted under CKD's original UF philosophy: Incorporate comprehensive cleanness for all factors indispensable to product development, including design, evaluation, manufacturing methods, and actual manufacture.

Zero-particle, non-retention design product groups

Productdevelopment

Design

Evaluation

Manufacturing methods

Manufacture

Cleanness control

Part level control

PrProduct leoduct levelvelcontrcontrololProduct levelcontrol

High-purity gas control system optimum for semiconductor and liquid crystal manufacturing processes using process gas, vacuums, etc.

Consistent quality control, including parts and products, to ensure complete cleanness.CKD production

CKD incorporates comprehensive consistent quality control for all production stages from machining and assembly to inspection and packaging. This covers all levels including products and parts.Cleanness is important to quality, so we have established reliable quality by establishing company-wide quantitative standards for each type of impurity, including chemical residue, organic carbon levels, and specific oils.

Cleanliness control

Example of process gas valve and high vacuum valve production process

Chemical residueChemical residueChemical residue

Clean room

Secondary packingSecondary packing(Crate packing)

Primary packing

Productinspection

Assembly

Precision cleaning

Part inspection

Part machiningSpecific oilSpecific oilSpecific oil OrOrganic carbon leganic carbon levelvelOrganic carbon level

Intro 3

PT

1F Utility area

2F Clean room

Valve manifold box

Regulator box

2F

1F

Example of high purity gas control system use

High purity process in semiconductor manufacturing line

Purge gas line

Vacuuming line

Vacuuming line

Air supply line

To burnable gas scrubber

To combustible gas scrubber

P

Vacuum pump

Load lock chamber

Load lock chamber

Vacuum pump

Transfer chamber

Process chamber 1

Process chamber 2

Clean air supply to drive

Clean air supply system

Air operated valve for high vacuum

Integrated gas supply system

Process gas component

P

RC2000

Gas supply line IAGD3/IAGD4

OGDMGD

PGM AGD

AVB

AVB

AVB

AVB

AVB

PGM

IAGD4

IAGD4

FCS

Cage protection

AVB Vacuum gage

Intro 4

Selection guide

Precautions

Intro 5

Intro 9

Page

2

6

8

10

24

26

28

34

36

36

39

42

46

50

58

67

70

72

82

Guide to Electric catalog 148

Pro

cess

gas

val

ves

Othe

r gas

com

pone

nts

Hig

h v

acu

um

co

mp

on

ents

Regu

lator

Process Gas Components

Precautions

Air operated valve AGD012V

Air operated valve AGD112V/AGD21

2V

Air operated valves compatible with other variations

Manual valve OGD120V

Manual valve MGD120V

Manual valves compatible with other variations

Vacuum generator VG Series

Diaphragm type extremely small flow rate adjustment valve

Piston structure check valve

Precautions

Regulator for process gas PGM

Product guide

IAGD3

IAGD4

SEMI F86, F87 (1.125" size, C seal) compatible valve

Precautions

Inline clean filter FCS Series

Clean regulator RC2000 Series

High vacuum components

Precautions

Air operated valve AVB

Air operated valve AVB custom order

Air operated valve AVP

Manual valve MVB

Manual valve MVP

Leak valve FGL

High vacuum solenoid valve HVB

Vacuum delay solenoid valve HVL

88

92

106

112

118

120

122

126

134

Related products

Solenoid valve for operation MN3E0/MN4E0 Series

Solenoid valve for operation MN4GA/MN4GB Series

Clean exhaust filter FAC Series

Fiber tube (joint/tube)

140

140

141

142

INDEXIn

tegr

ated

gas

supp

ly s

yste

ms

Intro 5

Model No. Type/ClassificationWorking fluid

ConnectionCv flow factor

Page

Model No. Working fluidSupply fluid pressure

(MPa)Ultimate vacuum

(kPa(abs))Connection Page

Model No. Working fluidMaximum working pressure

(MPa)Set pressure range

(MPa)Connection Page

Process gas valve

0 0.1 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1.0

Air

op

erat

ed v

alve

Man

ual

val

veOt

her p

roce

ss g

as v

alve

sR

egu

lato

r

· Air operated valve· Metal diaphragm structure· 22.5 compact type

AGD012V

· Air operated valve· Metal diaphragm structure· Standard size

AGD112V/AGD21

2V

*Contact CKD for details on other joints such as 1/8-inch JXR.

Parts compatible with other variations

· Manual valve· Metal diaphragm structure· Handle open/close (90˚ snap action)

OGD120V

· Manual valve· Metal diaphragm

structure· Handle open/close (270˚ rotation)

MGD120V

Parts compatible with other variations

· Vacuum generator for process gas exhaust

· Diaphragm type extremely small flow rate adjustment valve· Piston structure check valve

VG

PGM

Pneumatic operated

2-port valve

Normally closed

Normally open

Inert gas

Process gas

1/4" JXR male joint

1/4" JXR female joint

Refer to the indicated

page for details.

Refer to the indicated

page for details.

1/4" JXR male joint


1/4" double barbed joint

3/8" JXR male joint



Manual 2 port valve

Inert gas

Process gas

Inert gas

Process gas0.4 to 0.6

-0.07 to 0.21MPa (pressure range 30V)

0 to 0.21MPa (pressure range 30)




1/4" JXR male joint



3/8" JXR male joint



IN1/4" JXR male joint

VAC.1/4" JXR female joint

VENT3/8" JXR male joint

Inert gas

Process gas1.0

13.3 or less

1/4" JXR male joint1/4" JXR female joint1/4" JXR male female joint1/4" JXR female male jointVarious integrated valve interfaces

1/4" JXR male joint



3/8" JXR male joint



0.1

0.26

0.6

0.26

0.6

0.26

0.6

0.1

0.26

0.6

0.26

0.6

P.6

P.8

P.10

P.24

P.26

P.28

P.34

P.36

P.42

*The pressure range in parentheses is psi.

*

High purity gas control systems

Selection guide <<Process Gas Components>>*Refer to Intro 7 to 8 in the introduction for the high vacuum component selection guide.

Intro 6

Model No.Seal connection

methodSize

Cv flow factorPage

Model No. Working fluidWorking pressure range

(MPa)FiltrationPort size Page

Model No. Working fluidMaximum working pressure

(MPa)Set pressure range

(MPa)Port size Page


Other gas components

0 0.1 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1.0

Inte

grat

ed g

as s

uppl

y sy

stem

sC

lean

filt

erC

lean

reg

ulat

or

IAGD3

IAGD4

· SEMI F86, F87 (1.125-inch size, C seal) compatible air operated valves and manual valves are also available. (Page 67)

FCS500/FCS1000

RC2000

CS seal

W seal

1.5 inches

Compressed air

Nitrogen

· Resin type

-0.095 to 0.99MPa

· Stainless steel type

-0.095 to 1.5MPa

(Compressed air)

-0.095 to 0.99MPa

(Nitrogen)

ø4 to ø12

R1/8 to R3/8

Rc1/8 to Rc3/8

0.1

0.26

1.5 inches

0.1

0.26

P.50

P.58

P.72

Nitrogen

Compressed air

1.0

(0.5 for low pressure)

0.05 to 0.7 (Standard)

0.02 to 0.2 (Low pressure)

Rc1/4

Rc3/8

Rc1/2P.82

· Inline clean filter

0.01 m

(Removal effect 99.99%)

Intro 7

Model No.Type/Classification

Working fluidPort size

Cv flow factor (orifice: ømm)PageVoltage

Valve for high vacuum

0 5 10 20 30 40 50 60 70 80 100

Air

op

erat

ed v

alve

Man

ual

val

veL

eak

valv

e

· Air-operated valve for high vacuum· Formed bellows· Aluminum body

· Air-operated valve for high vacuum· Formed bellows· Compact stainless steel body type

· Air-operated valve for high vacuum· Formed bellows

· Air-operated valve for high vacuum· Double O-ring shaft sealing type

· Manual valve for high vacuum· Formed bellows· Handle rotation

· Manual valve for high vacuum· Double O-ring shaft sealing type· Handle rotation

· Leak valve· Non-sliding type· Control unit 0 to 60 sec.

FGL121

Flange NW16

Flange NW25

Flange NW40

Flange NW50

Flange NW25

Flange NW40

Flange NW50

Flange NW80

1/4" tube

Flange NW25

Flange NW40

Flange NW50

Flange NW80

Flange NW25

Flange NW40

Flange NW50

Flange NW80

Flange NW100

1/4" tube

Flange NW25

Flange NW40

Flange NW50

Flange NW80

Flange NW25

Flange NW40

Flange NW50


1/4" JXR male joint

ø16

ø24

ø40

ø50

ø24

ø5

ø24

ø40

ø50

ø80

ø40

ø50

ø24

ø40

ø50

ø80

ø24

ø40

ø50

ø80

ø24

ø5

ø40

ø50

ø80

ø100

P.92

P.96

P.100

P.106

P.112

P.118

P.120

P.122

Pneumatic operated

2-port valve

Normally closed

Normally open

Double acting

Vacuum

Inert gas

Manual 2 port valve

Vacuum

Inert gas

2 Port solenoid valve

Normally closed

Nitrogen

Pneumatic operated

2-port valve

Normally closed

Vacuum

Inert gas

DC 12V

DC 24V

Maximum flow rate 32 /min

Maximum flow rate 50 /min

AVB*1V

AVB**3

AVB**2

AVB* Custom order

AVP**2

MVB*0

MVP*0

High purity gas control systems

Selection guide <<High vacuum components>>*Refer to Intro 5 and 6 in the introduction for the process gas component selection guide.

Intro 8

Model No.Type/Classification

Working fluidPort size

Cv flow factor (orifice: ømm)PageVoltage

0 5 10 20 30 40 50 60 70 80 100

Hig

h v

acu

um

so

len

oid

val

ve

· Manual valve for high vacuum· Miniature

HVB112

· Manual valve for high vacuum

HVB41

· Manual valve for high vacuum

· Vacuum delay solenoid valve

HVL142

NPT1/8

1/4" VCR female joint

NPT1/4

1/4" VCR female joint

ø48 flange

ø52 flange

Rc1/8


Flange NW10

Flange NW16

ø1.6

ø5

ø8

ø12

ø15

ø1.2

ø3

P.126

P.128

P.130

P.134

Direct acting 2 port

solenoid valve

Normally open

Air

Nitrogen

Direct acting 2 port

solenoid valve

Normally closed

Vacuum

Inert gas

AC100V

AC200V

DC 24V

AC100V

AC200V

DC 24V

HVB 15678

Intro 9

Safety PrecautionsAlways read before starting use

1

2

3

4

5

The safety cautions are ranked as "DANGER", "WARNING" and "CAUTION" in this section.

WARNING

When designing and manufacturing a device using CKD products, the manufacturer is obligated to check that device safety mechanical mechanism, pneumatic control circuit, or water control circuit and the system operated by electrical control that controls the devices is secured.It is important to select, use, handle, and maintain the product appropriately to ensure that the CKD product is used safely.Observe warnings and precautions to ensure device safety.Check that device safety is ensured, and manufacture a safe device.

This product is designed and manufactured as a general industrial machine part.It must be handled by an operator having sufficient knowledge and experience in handling.

Use this product in accordance of specifications.

Observe corporate standards and regulations, etc., related to the safety of device design and control, etc.

Observe warnings and cautions on the pages below to prevent accidents.

Do not handle, pipe, or remove devices before confirming safety.

Contact CKD when using the product outside the unique specifications range, when using it outdoors, and when using it under the conditions and environment below.Do not attempt to modify or additionally machine the product.

Use for special applications requiring safety including nuclear energy, railroad, aviation, ship, vehicle, medical equipment, equipment, or applications coming into contact with beverage or food, amusement equipment, emergency shutoff circuits, press machine, brake circuits, or for safeguard.Use for applications where life or assets could be adversely affected, and special safety measures are required.

Inspect and service the machine and devices after confirming safety of the entire system related to this product.Note that there may be hot or charged sections even after operation is stopped.When inspecting or servicing the device, turn off the energy source (air supply or water supply), and turn off power to the facility. Discharge any compressed air from the system, and pay enough attention to possible water leakage and leakage of electricity.When starting or restarting a machine or device that incorporates pneumatic components, make sure that the system safety, such as pop-out prevention measures, is secured.

ISO 4414, JIS B 8370 (pneumatic system rules), High Pressure Gas Maintenance Laws Occupational Safety and Sanitation Laws, and other safety regulations, corporate standards, and regulations.

DANGER: When a dangerous situation may occur if handling is mistaken leading to fatal or serious injuries, or when there is a high degree of emergency to a warning.

WARNING: When a dangerous situation may occur if handling is mistaken leading to fatal or serious injuries.

CAUTION: When a dangerous situation may occur if handling is mistaken leading to minor injuries or physical damage.

Note that some items described as "CAUTION" may lead to serious results depending on the situation.In any case, important information that must be observed is explained.

2

1

23

4

1

1

Process gas components

Precautions 2Valve for process gas 5Regulator for process gas 37Integrated gas supply system 45Other components for process gas 69

CONTENTS

Process gas components

1

2

Ensure sufficient space for installation, removal,piping, and wiring work.

Ensure sufficient space for maintenance and in-spection.

3. Ensuring space

CAUTION

Components for process gas

Safety PrecautionsAlways read before starting useRefer to Intro 9 for the general cautions.

WARNING

Incorrect selection and handling of devices maycause problems with this product and problemsin the user's system. Confirm that the regulatorspecifications and the user's system are compat-ible before use.

1. Confirming specifications

Do not use this product in a corrosive gas envi-ronment, or where the product may be subjectto chemicals, salt water, water, steam, etc.Use this product within the ambient temperaturerange given in specifications.

Incorrect installation and piping will cause prod-uct problems, may cause problems in the user'ssystem, and may cause death or serious injury.The user is responsible for ensuring that theoperator has read the instruction manual andfully understands the system.After installation, conduct an appropriate func-tion test to confirm that the product is correctlyinstalled.

2. Installation

WARNING

This product is processed with ultra-precisecleaning, and is assembled in a Class 10 superclean room. Open the clean pack in the packagebox in a clean environment immediately beforeinstallation.

If wetted areas (inside of body, or on the jointseal surface) are touched when the regulator isinstalled, impurities may adhere or the highlypure gas maybe contaminated. Do not touch wet-ted areas of the regulator during installation.

CAUTION

CAUTION

If dirt or burrs get on piping or in the area duringpiping, the valve seat or diaphragm seal may bedamaged and cause leaks from the valve seat.Carefully remove any dirt or burrs before install-ing the valve.

Check that the connection port direction is cor-rect when piping the product.

Pipe the product so that the pipe tension, com-pression, and bending, etc., are not applied tothe valve body.

Operation may fail if the piped tube is bent. Checkthat piping matches the required length.

Select the solenoid valve for drive connected tothe drive section to match specifications andapplication.

Use air or inert gas passed through a 5 m orhigher filtration capacity filter for operation air.

CAUTION

4. Piping

Confirm the compatibility of materials used forwetted area and the fluid used.Use the product within the fluid temperature andworking pressure range in specifications.

1. Working environment

Design & Selection

Installation & Adjustment

3

Components for process gas

Safety precautionsAlways read before starting useRefer to Intro 9 for the general cautions.

Installation & AdjustmentCheck that there is no dirt, scratches, or burrsget on the seal before tightening the joint in thefollowing procedures:

Tightening the jointJXR joint: for nickel, SUS316 gasket materialScrew in the nut with the fingers until the gasket contacts thebead section, and then tighten another 1/8 turn using a tool.(Contact CKD if other materials are to be used.)

Double barbed jointCheck that the front ferrule, back ferrule, and nut are properlyattached, and then insert the tube until it contacts the backof the product. Tighten the nut with the fingers, then tightenanother 1 1/4 turn with a tool.

After tightening the joint, always carry out a leakinspection and confirm that there are no leaksoccur.

TubeFront ferrule Back ferrule

Keep the baking temperature within the product'sspecified temperature range.Fully open the valve when baking.

CAUTION

5. Baking

When removing a valve that has been used fortoxic, combustible, or corrosive gas, fully purgethe product with inert gas such as nitrogen gas.

CAUTION

6. Purging

During use & Maintenance

WARNING

Always use this product within the specifiedrange.

Take care not to touch products with heaters withhands or body parts. Direct contact may causeburns.

1. Using this product

WARNING

Always carry out the work as specified in the in-struction manual.

Always turn the power off and release any fluidsor pressure before starting the work.

Completely purge the product with inert gas, etc.,so that the residual gas does not adversely af-fect the workers or devices in the area.

When work is completed, always carry out a leakinspection and confirm that there are no leaks exist.

Do not disassemble the process gas valve.The product warranty does not apply to a valvewhich has been disassembled without consentfrom CKD and then repaired and reused.

2. Maintenance/inspection

Do not step on valves, etc., or place heavy objectson them.

CAUTION

Bead

GasketHolder

1

2

5

Valve for process gas

Air operated valveAGD0 V 6AGD1 V·AGD2 V 8Parts compatible with other variations 10Manual valveOGD 0V 24MGD 0V 26Parts compatible with other variations 28Other valves for process gasVacuum generator VG 34Diaphragm type extremely small flow rate adjustment valve 36Piston structure check valve 36

CONTENTS

12

12

12

12

12

Valve for process gas

5

6

Continuous use possible up to 80

Zero particle generation realized with optimum seal structure and improved surface roughness

Electropolished finishspecifications

Slim 30 diameter actuator

High corrosion resistance and long lifeNi-Co alloy diaphragm (4 million cycles achieved *2 )

JXR joint connection *1

1/4-inch size male and female fittings

22.5mm compact body

*1: The JXR joint can be connected to the VCR joint.*2: Life when working fluid is inert gas within specified range, which

does not contain solids such as reaction products.

No. Parts nameMaterials for wetted areas

MaterialNi-Co alloyPCTFESUS316L

DiaphragmValve seatBody

1

2

3

AGD02VAGD01VWorking fluid

Working pressure range

Pa(abs)-MPa

Fluid temperature

Ambient temperature

Valve seat leakage

Pa·m3/s(He)

External leakage

Pa·m3/s(He)

Cv flow factor

Connection

Actuation

Operating pressure

MPa

Operating pressure connection port

Weight kg

Specifications

Saving space while maintaining basic operations

Descriptions

*1: Value for AGD01V-4RM (1/4-inch JXR male joint).

Inert gas/process gas

1.3 10-6 to 0.5

-10 to 80

-10 to 80

1.3 10-9 or less

2.8 10-12 or less

0.1

1/4" JXR male joint


M5

0.22 *1

NC (normally closed)

0.4 to 0.6

NO (normally open)

0.4 to 0.5 (fluid temperature 60 )

0.4 to 0.45 (60 fluid temperature)

1 2 3

IN OUT

Air operated valve for process gas

AGD0 V Series Metal diaphragm Compact type

Precautions

Always read page 9 in the introduction

and pages 2 to 3 to ensure correct and

safe use of this product.

12

Model No. Actuation Cv flow factor

AGD01V NC Cv=0.1Model No. Actuation Cv flow factor

AGD02V NO Cv=0.1

7

AGD01V-4RM

AGD02V-4RM

Symbol Actuation

NC

NO

A

52

52

B

ø30

ø30

D

63

63

E

11

11

F

14

14

G

14

14

H

2-M4 depth 5

2-M4 depth 5

I

M5

M5

AGD01V-4R

AGD02V-4R

J

66

66

K

11

11

Dimensions

How to order

AGD0 4R1 V

A Actuation

B Connection

1

2


NO (normally open)

ActuationA

Symbol Descriptions

ConnectionB

1/4" JXR male joint


4RM

4R

Model No.

Symbol Actuation

NC

NO

Model No.

C

22.5

22.5

L

22.5

22.5

AGD0*V-4RM JXR male joint

AGD0*V-4R JXR female joint

IN OUT

A

I

E

C

B

D

G

F

H

IN OUT

L

J

K

AGD0 V SeriesAir operated valve for process gas

12

8

Working fluid


Pa(abs)-MPa

Fluid temperature

Ambient temperature

Valve seat leakage

Pa·m3/s(He)

External leakage

Pa·m3/s(He)

Cv flow factor

Connection

Actuation

Operating pressure

MPa


Weight kg


1.3 10-6 to 1.0

-10 to 80

-10 to 80

1.3 10-9 or less

2.8 10-12 or less

Rc1/8

Specifications

1/4" JXR male joint




NO (normally open)

NC : 0.4 to 0.6

NO : 0.4 to 0.5

0.35 *1

High corrosion resistance and long life Ni-Co alloy diaphragm(4 million cycles achieved *2 )


Standard (male and female) and double barbed joints

*1: The JXR joint can be connected to the VCR joint.*2: Life when working fluid is inert gas within specified range, which

does not contain solids such as reaction products.

3/8" JXR male joint




NO (normally open)

NC : 0.4 to 0.6

NO : 0.4 to 0.5

0.88 *1




1

2

3

Descriptions

*1: Value for AGD11V-4RM (1/4-inch JXR male joint) and AGD21V-6RM (3/8-inch JXR male joint).

Standard diaphragm valve V series created from a pursuit of contamination control



Valve dead space minimized

Electropolished finish specifications

AGD1*V AGD2*V

0.26 0.6

1 2 3


AGD11V NC Cv=0.26

AGD12V NO Cv=0.26

Precautions

Always read page 9 in the introduction and

pages 2 to 3 to ensure correct and safe

use of this product.


AGD1 V Series

AGD2 V Series Metal diaphragm Standard

1212


AGD21V NC Cv=0.6

AGD22V NO Cv=0.6

9

Dimensions

AGD1*V-4RAGD2*V-6R JXR female joint

AGD1*V-4SAGD2*V-6S Double barbed joint

NCNONCNO

NCNONCNO

AGD11V-4RMAGD12V-4RMAGD21V-6RMAGD22V-6RM

AGD11V-4RAGD12V-4RAGD21V-6RAGD22V-6R

AGD11V-4SAGD12V-4SAGD21V-6SAGD22V-6S

ActuationModel No. Symbol

ActuationModel No. Symbol

A B C D E F G H I

27

35

27

35

67

86

14.3

16

18

20.2

18

20.2

2-M5 depth 6

2-M5 depth 8

57

76

ø41

ø55

70.6

83

14.3

16

Rc 1/8

Rc 1/8

J K LNCNONCNO

27

35

62

80

14.3

16

M N O

27.8

44.3

PActuationModel No. Symbol

AGD1*V-4RMAGD2*V-6RM JXR male joint

How to order

AGD1 4RM1 V

A Actuation

Model No.

B Connection

1

2


NO (normally open)

ActuationA

Symbol Descriptions

ConnectionB

6R1 V

A Actuation

B Connection

AGD2

Model No.

4RM

4R

4S

1/4" JXR male joint



1

2


NO (normally open)

ActuationA

Symbol Descriptions

ConnectionB

6RM

6R

6S

3/8" JXR male joint



IN OUT

A

I

G

F

HE

C

B

D

IN OUT

O

P

M

N

IN OUT

L

J

K

AGD1 V/AGD2 V SeriesAir operated valve for process gas

12

12

10

Body options (pages 10 to 21)Flow path directionNC/NO combinationConnectionPort shape combinationFluid temperature

Model Variations

Actuator options (pages 22 to 23)Valve opening adjustment functionAir indicatorMicroswitchProximity switchCylinder switch

AGD0*VAGD1*VAGD2*V


Parts compatible with other variationsAGD**V Series

Custom order

C

D Connection

A Size

How to order

AGD 1 1 V 4 FRJ FFF

012

1/8"1/4"3/8"

AGD0

RJ R RM W S

12

NCNO

E Port shapecombination

F Fluid temperatureAGD1

AGD2

Model No.

SizeA

ActuationB

Symbol

Symbol

Descriptions

468

1/4"3/8"1/2"

RJR

RMWS

JXR female joint (with bearing)JXR female jointJXR male jointAutomatic welded jointDouble barbed joint

BlankMFFM

FFFFFMFMMMMMWWW

IN, OUT Same joint typeIN: Male OUT: FemaleIN: Female OUT: Male

abc female/female/femaleabc female/female/maleabc female/male/maleabc male/male/maleabc automatic welded jointabc *1

Port sizeC

ConnectionD

BlankF

80 standard180 valve seat PFA

Fluid temperatureF

Port shape combinationE

2 way valve

3-way separate flow valve

BlankMFFM

FFFFFMFMMMMMWWW

ConnectionD

2 way valve


*1 F: Female, M: Male, W: Automatic welded joint, all joints can be combined.

2-way valve, 3-way separate flow valve

Port size

B Actuation

11

B

C

E Connection

A Size

Flow path direction

NC/NOcombination

AGD V1 4 FY 111 RJ FFF

012

1/8"1/4"3/8"

AGD0

RJ R RM

YT

Selector typeDivider type

F Port shape combination

G Fluid temperature AGD1

AGD2

Model No.

SizeA

Flow path directionB

Symbol

Symbol

Descriptions

46

1/4"3/8"

11122122

V1 : NC V2 : NCV1 : NC V2 : NOV1 : NO V2 : NCV1 : NO V2 : NO

RJR

RM

JXR female joint (with bearing)JXR female jointJXR male joint

FFFMMM

abc female/female/femaleabc male/male/maleabc *2

NC/NO combinationC

Port sizeD

BlankF

80 standard180 valve seat PFA

Fluid temperatureG

ConnectionE

Port shape combinationF

FFFMMM

ConnectionE

*2: F: Female, M: Male, all joints can be combined.

How to order 2-station 3-way valve

D Port size

AGD0*V SeriesHow to order

12

Dimensions

AGD0*V 2 way valve Custom order

AGD0*V-4RJ (1/4" JXR female joint (with bearing) type)

AGD0*V-4S (1/4" double barbed joint type)

AGD0*V-4W (1/4" automatic welded joint type)

AGD0*V-4RJ- (1/4" JXR female (with bearing) - male combination type)

AGD0*V-4R- (1/4" JXR female - male combination type)

FMMF

FMMF

Operation port M5

Operation port M5

66

14

26

Figure shows AGD01V-4RJ-MF female joint (with bearing)

Female joint: 4R Male joint: 4RM

Figure shows AGD01V-4RJ female joint (with bearing)

Double barbed joint: 4S Welded joint: 4W

33 33 26

23.2 44

(57.4)2-M4 screw depth 5

ø30

22.5

63

14

11

AGD0*V Series

13

Dimensions

Custom order

AGD0*V-4RJ- (1/4" JXR female joint (with bearing) combination type)

AGD0*V-4R- (1/4" JXR female joint combination type)

AGD0*V-4RM-MMM (1/4" JXR male joint type)

AGD0*V-4W- (1/4" automatic welding joint combination type)

AGD0*V 3-way separate flow valve

66

14

66

33 33 48.7 22

52 44

<Main port>

<Branch port>

33

ø30

11

63

14

Operation port M5

2-M4 screw depth 5

a

a

c

c

b

b

a c

b


Figure shows AGD01V-4RJ-FFF female joint (with bearing)

Welded joint: 4W

Female joint: 4RJ- F (with bearing)

Male joint: - MFemale joint: 4R- F Welded joint: - W

22.5

AGD0*V SeriesAir operated valve for process gas

14

AGD01V- **-4RJ- (1/4" JXR female joint (with bearing) combination type)

AGD01V- **-4R- (1/4" JXR female joint combination type)

AGD01V- **-4RM-MMM (1/4" JXR male joint type)

Dimensions

AGD0*V 2-station 3-way valve Custom order

115

55

52.5 57.5

62.5

12

57.5

12115

55

18

18 25

57.5

57.5

12 12

V1 Operation port M5

<Y: Selector type>

<Other joint dimension>

<T: Divider type>

2-M5 screw depth 6

ø30ø30

a c a c

b bV2 Operation port M5

Figure shows AGD01V-Y11-4RJ-FFF female joint (with bearing)

Male joint: 4RM Female joint: 4R

Figure shows AGD01V-T11-4RJ-FFF female joint (with bearing)

18

18 25

2-M5 screw depth 6

V1 Operation port M5 V2 Operation port M5

V1

V2a c

b

V1 V2a c

b

AGD0*V Series

15



AGD1*V-4RJ- (1/4" JXR female (with bearing) male combination type)


Dimensions


FMMF

FMMF

Operation port Rc1/8


70.6

18

28.5 35.3 35.3 28.5

55

18

2-M5 screw depth 6

ø41

14.3

67


Welded joint: 4W



27


16




AGD1*V-4W- (1/4" automatic welding joint combination type)

Dimensions

AGD1*V 3-way separate flow valve Custom order

70.6

18

ø41

35.3

67

14.3

27

18


2-M5 screw depth 6

70.6

35.3 35.3 51 27.5

57 55

a c

a c

b

b

Figure shows AGD11V-4RJ-FFF female joint (with bearing)

Female joint: 4R

Female joint: 4RJ- F(with bearing)

Female joint: 4R- F Male joint: - M Welded joint: - W

Male joint: 4RM Welded joint: 4W

<Main port>

<Branch port>

a c

b

AGD1*V Series

17





Dimensions

AGD11V 2-station 3-way valve Custom order

V1 Operation port Rc1/8

65

18

18 30

2-M5 screw depth 6

67.5 62.5

67.5

14.3

62.5

14.3

125

65

14.3

62.5

14.3

62.5

125

V2 Operation port Rc1/8




V1 Operation port Rc1/8 V2 Operation port Rc1/8

<Y: Selector type>


<T: Divider type>

a c

b

a c

b

18

18 30

2-M5 screw depth 6

V1

V2a c

b

V1 V2a c

b

18



AGD2*V-8S (1/2" double barbed joint type)

AGD2*V-8RM (1/2" JXR male joint type)

AGD2*V-8R (1/2" JXR female joint type)



Dimensions



2-M5 screw depth 6

ø55

35

69

1686

83

20.2

20.2


Female joint: 8RJ (with bearing) Male joint: 8RMFemale joint: 8R

Double barbed joint: 8S Welded joint: 8W

Welded joint: 6W

83

37 68(84.5)

83 76

AGD2*V Series

19

AGD2*V-6RJ- (3/8" JXR female joint (with bearing) male combination type)


AGD2*V-8RJ- (1/2" JXR female joint (with bearing) male combination type)


Dimensions


FMMF

FMMF

FMMF

FMMF

38 41.5

38 41.5

41.5

41.5 38

38








20

Dimensions

AGD2*V 3-way separate flow valve Custom order




AGD2*V-6W- (3/8" automatic welded joint combination type)

· The 1/2-inch size is also available. The face-to-face distance is the same as the 3/8-inch size.

b


83

20.2

2-M5 screw depth 6

63

41.5 41.5 61.5 34.5

76 69

<Main port>

<Branch port>

20.2

35

41.5

16

86

ø55

a c

Figure shows AGD21V-6RJ-FFF female joint (with bearing.)

Female joint: 6RJ- F (with bearing)


Female joint: 6R Male joint: 6RM Welded joint: 6W

a c

b

a c

b

AGD2*V Series

21

Dimensions

AGD21V 2-station 3-way valve Custom order






V1 Operation port Rc1/8 V2 Operation port Rc1/8 V1 Operation port Rc1/8 V2 Operation port Rc1/8

150

80

8016

75

7516

84

20.2

150

84

1675

20.2

36

1675

<Y: Selector type> <T: Divider type>

a c

b

a c

b

2-M5 screw depth 8 20.2

20.2

36

2-M5 screw depth 8

V1

V2a c

b

V1 V2a c

b




22

AGD**V With valve opening adjusting mechanism

The flow rate when the valve is open is adjustable.

Dimensions

AGD**V Actuator option Custom order

AGD01V-

AGD02V-

AGD11V-

AGD12V-

AGD21V-

AGD22V-

C

ø30

ø30

ø41

ø41

ø55

ø55

B

11

11

14.3

14.3

16

16

AModel No.

85.5

85.5

100

100

119

119

Note: Keep the ambient temperature within -10 to 60 .Note: The push-in joint cannot be used with AGD01V or AGD02V.

The indicator projects when the valve is operating (during air pressurization), so valve operation can be confirmed visually.

AGD11V-

AGD12V-

AGD21V-

AGD22V-

C

ø41

ø41

ø55

ø55

B

14.3

14.3

16

16

AModel No.

100

100

119

119

Valve operation confirmation can be output from the microswitch when the valve is open.

MicroswitchD2JW-011-MD (OMRON)· DC 3-wire reed (NC, NO) lead length 0.3m· 30 VDC, 100mA rating resistance load

AGD11V-

AGD12V-

AGD21V-

AGD22V-

C

ø41

ø41

ø55

ø55

B

14.3

14.3

16

16

AModel No.

90

90

111

111

Operation portApplicable pipe diameter ø4C

C

AA

BB

C

AB

Operation port Rc1/8 Air indicator (Figure shows operating state)


Microswitch

AGD**V With air indicator

AGD**V With microswitch

Opening adjusting dial

AGD**V Series

23

AGD**V With proximity switch

AGD**V With cylinder switch

* Contact your CKD representative for details on the actuator option model No., etc.

Dimensions

AGD**V Actuator option Custom order

Valve operation confirmation can be output from the proximity switch when the valve isopen.

Proximity switchEM-030 (KEYENCE)· DC 3-wire proximity (NO) lead length 2m· Power voltage 10.8 to 30 VDC· Current consumption 12mA or less

AGD11V-

AGD21V-

C

ø41

ø55

B

14.3

16

AModel No.

67

86

Valve operation confirmation can be output from the cylinder switch when the valve is open.

Cylinder switchSW-T3V (CKD)· DC 3-wire proximity (NO) lead length 1m· Power voltage 10 to 28 VDC· Current consumption 10mA or less (at 24V DC)

AGD11V-

C

ø41

B

14.3

AModel No.

78

Note: Keep the ambient temperature within -10 to 60 .

C

A

B

C

A

B

Proximity switch Operation port Rc1/8


AGD**V SeriesAir operated valve for process gas

24


Stable inner seal performance achieved with nonrotating rod(Patent pending)


Valve dead space minimized


Handle position and top indicator indicate whether the valve is open or closed.

Panel installation possible

Inner seal performance stabilized with spring

High corrosion resistant Ni-Co alloy diaphragm



OGD10V OGD20VWorking fluid


Pa(abs)-MPa

Fluid temperature

Ambient temperature

Valve seat leakage

Pa·m3/s(He)

External leakage

Pa·m3/s(He)

Cv flow factor

Connection

Weight kg


1.3 10-6 to 1.0

-10 to 80

-10 to 80

1.3 10-9 or less

2.8 10-12 or less

Specifications

1/4" JXR male joint



3/8" JXR male joint



0.34 *1 0.69 *1

*1: The JXR joint can be connected to the VCR joint.




1

2

3

Descriptions

0.26 0.6

*1: Value for OGD10V-4RM (1/4-inch JXR male joint) and OGD20V-6RM (3/8-inch JXR male joint).

Close the valve by turning the handle

1 2 3

Precautions




Model No. Cv flow factor

OGD10V Cv=0.26Model No. Cv flow factor

OGD20V Cv=0.6

Manual valve for process gas

OGD 0V Series Metal diaphragm 90° rotation snap action type

12

25

Model No. A

57

76

B

37

47

C

82

104

D

27

35

E

36

48

F

24

27

G

14.3

16

H

18

20.2

J

2-M5 depth 6

2-M5 depth 8

I

18

20.2

K

ø20.5

ø26.5

OGD10V-4R-

OGD20V-6R-

L

70.6

83

M

14.3

16

N

27

35

OGD10V-4S-

OGD20V-6S-

O

62

80

P

14.3

16

Q

27

35

R

27.8

44.3

OGD10V-4RM-OGD20V-6RM- JXR male joint

Dimensions

Handle color

OGD10V-4R-OGD20V-6R- JXR female joint

OGD10V-4S-OGD20V-6S- Double barbed joint

How to order

A B

OGD10V 4RM

OGD20V 6RM

K

K

4RM

4R

4S

6RM

6R

6S

1/4" JXR male joint



3/8" JXR male joint



OGD10V OGD20V

•••

••••

••••

•••

K

R

B

Y

Black

Red

Blue

Yellow

Model No. Connection

C Handle color

ConnectionB

Handle colorC

Symbol Descriptions•Black (-K) •Red (-R)

•Blue (-B) •Yellow (-Y)

OGD10V-4RM-

OGD20V-6RM-

Symbol

Model No. Symbol Model No. Symbol

Model No.A

H

G

D

I

A

J

FB

E

C

IN OUT

KPanel mount

diameter

Pan

el m

ou

nt

thic

knes

s5m

m o

r le

ss

IN OUT

N

L

M

IN OUT

QR

O

P

OGD 0V SeriesManual valve for process gas

12

26

•Continuous use possible up to 80

• Zero particle generation realized with optimum seal structure and improved surface roughness

•Valve dead space minimized

•Electropolished finish specifications

•Handle shape ensures optimum inner sealing

•Panel installation possible

•Stopper prevents diaphragm d a m a g e f r o m e x c e s s i v e tightening

•JXR joint connection *1


•High corrosion resistant Ni-Co alloy diaphragm


No. Parts name

Materials for wetted areasMaterialNi-Co alloyPCTFESUS316L


1

2

3

MGD10V MGD20V DescriptionsInert gas/process gas

1.3 10-6 to 1.0

-10 to 80

-10 to 80

1.3 10-9or less

2.8 10-12or less

Specifications

1/4" JXR male joint



3/8" JXR male joint



Manual valve incorporating basic air-operated valve performance

Working fluid


Pa(abs)-MPa

Fluid temperature

Ambient temperature

Valve seat leakage

Pa·m3/s(He)

External leakage

Pa·m3/s(He)

Cv flow factor

Connection

Weight kg

*1: Value for MGD10V-4RM (1/4-inch JXR male joint) and MGD20V-6RM (3/8-inch JXR male joint).

0.26 0.6

0.29 *1 0.62 *1

1 2 3


MGD 0V Series Metal diaphragm 270° rotation type

12

Model No. Cv flow factor

MGD10V Cv=0.26Model No. Cv flow factor

MGD20V Cv=0.6

Precautions




27

MGD10V-4R

MGD20V-6R

K

70.6

83

L

14.3

16

M

27

35

MGD10V-4S

MGD20V-6S

N

62

80

O

14.3

16

P

27

35

Q

27.8

44.3

MGD10V-4RM

MGD20V-6RM

A

57

76

B

ø38

ø38

C

74

86

D

27

35

E

36

48

F

14.3

16

G

18

20.2

H

18

20.2

J

ø20.5

ø20.5

I

2-M5 depth 6

2-M5 depth 8

MGD10V-4RMMGD20V-6RM•JXR male joint

Dimensions

MGD10V-4RMGD20V-6R•JXR female joint

MGD10V-4SMGD20V-6S•Double barbed joint

How to order

MGD10V 4RM

A Connection

Model No.

4RM

4R

4S

1/4" JXR male joint



ConnectionA

Symbol Descriptions

MGD20V 6RM

A Connection

Model No.

6RM

6R

6S

3/8" JXR male joint



ConnectionA

Symbol Descriptions

Note: The handle comes in standard silver and black, red, blue, and yellow Refer to Page 28 for the model no. (Dimensions are the same as following.).

Model No. Symbol

Model No. Symbol Model No. Symbol

B

JPanel mount

diameter

A

G

HI

D

F

E

C

Pan

el m

ou

nt

thic

knes

s5m

m o

r le

ss

IN OUT

M

K

L

IN OUT

QN

P

O

IN OUT

MGD 0V SeriesManual valve for process gas

12

28


Parts compatible with other variationsOGD*0V/MGD*0V Series

Custom order

Body options (pages 28 to 32)

•Connection

•Port shape combination

•Handle color

Model Variations

Safety specification options (page 33)

•Locking mechanism

•Double action mechanism

OGD10VOGD20VMGD10VMGD20V

How to order OGD-V, MGD-V Series options

SpecificationsRefer to specification pages for each series.

GD 1O K40V RJ MF

RJ R RM W SE Port shape

combination

F Handle color

Symbol

BlankMFFM

FFFFFMFMMMMMWWW

ConnectionD

2 way valve


D Connection

C Port size

B Size

A Model OM

Manual (snap action)Manual (round handle)

OGD1

12

1/4"3/8"

OGD2

MGD1

MGD2

Model No.

ModelA

SizeB

Symbol Descriptions

468

1/4"3/8"1/2"

RJR

RMWS

JXR female joint (with bearing)JXR female jointJXR male jointAutomatic welded jointDouble barbed joint

BlankMFFM

FFFFFMFMMMMMWWW

IN, OUT Same joint typeIN: Male, OUT: FemaleIN: Female, OUT: Male

abc female/female/femaleabc female/female/maleabc female/male/maleabc male/male/maleabc automatic welded jointabc / / *1

Port sizeC

ConnectionD

Port shape combinationE

2 way valve


KBYR

BlackBlueYellowRed

Handle colorF

*1 F: Female, M: Male, W: Automatic welded joint, all joints can be combined.

Handle color Black (-K) Red (-R)

Blue (-B) Yellow (-Y)

29

MGD10V SeriesManual valve for process gas

OGD10V Series

Dimensions

2 way valve Custom order

•OGD10V-4RJ-K (B, Y, R) (1/4" JXR female joint (with bearing) type)

•OGD10V-4W-K (B, Y, R) (1/4" automatic welded joint type)

•MGD10V-4RJ-K (B, Y, R) (1/4" JXR female joint (with bearing) type)

•MGD10V-4R-K (B, Y, R) (1/4" JXR female joint type)

•MGD10V-4RM-K (B, Y, R) (1/4" JXR male joint type)

•MGD10V-4W-K (B, Y, R) (1/4" automatic welded joint type)

•MGD10V-4S-K (B, Y, R) (1/4" double barbed joint type)

OGD10VMGD10V

•OGD10V-4RJ- -K (B, Y, R) (1/4" JXR female (with bearing) - male combination type)

•OGD10V-4R- -K (B, Y, R) (1/4" JXR female - male combination type)

•MGD10V-4RJ- -K (B, Y, R) (1/4" JXR female (with bearing) - male combination type

•MGD10V-4R- -K (B, Y, R) (1/4" JXR female - male combination type)

FMMF

FMMF

FMMF

FMMF

Figure shows OGD10V-4RJ-KFemale joint (with bearing)

Welded joint: 4W

Female joint (with bearing) Female joint: 4R Male joint: 4RM

Figure shows MGD10V-4RJ-KFemale joint (with bearing)

35.328.5 35.3 28.5

18

2-M5 screw depth 618

55

36

14.3

ø37

74

70.6

Pan

el m

ou

nt

thic

knes

s5m

m o

r le

ss

Panel mount diameter

ø20.5

27

14.3

2437

82

70.6

36

Panel mount diameter

ø20.5

Pan

el m

ou

nt

thic

knes

s5m

m o

r le

ss

27

30

MGD10V Series

OGD10V Series

Dimensions

3-way separate flow valve Custom order

•OGD10V-4RJ- -K (B, Y, R) (1/4" JXR female joint (with bearing) combination type)

•OGD10V-4R- -K (B, Y, R) (1/4" JXR female joint combination type)

•OGD10V-4RM-MMM-K (B, Y, R) (1/4" JXR male joint type)

•OGD10V-4W- -K (B, Y, R) (1/4" automatic welded joint combination type)

•MGD10V-4RJ- -K (B, Y, R) (1/4" JXR female joint (with bearing) combination type)

•MGD10V-4R- -K (B, Y, R) (1/4" JXR female joint combination type)

•MGD10V-4RM-MMM-K (B, Y, R) (1/4" JXR male joint type)

•MGD10V-4W- -K (B, Y, R) (1/4" automatic welded joint combination type)

OGD10VMGD10V

Figure shows OGD10V-4RJ-FFF-KFemale joint (with bearing)

Female joint: 4R Welded joint: 4WMale joint: 4RM



Figure shows MGD10V-4RJ-FFF-KFemale joint (with bearing)

27.5

70.670.6

5135.3

5557

35.3

35.370.6

35.370.6

2-M5 screw depth 618

18

36

14.3

Pan

el m

ou

nt

thic

knes

s5m

m o

r le

ss

Panel mountdiameter

ø20.5

ø37

2414

.3P

anel

mo

un

t th

ickn

ess

5mm

or

less

74

82

37

Panel mountdiameter

ø20.5

36

<Branch port>

<Main port >

a c

b

a

a

c

c

b

b

27 27

a c

b

31

MGD20V SeriesManual valve for process gas

OGD20V Series

2 way valve Custom order

Dimensions

•OGD20V-6RJ-K (B, Y, R) (3/8" JXR female joint (with bearing) type)

•OGD20V-6W-K (B, Y, R) (3/8" automatic welded joint type)

•MGD20V-6RJ-K (B, Y, R) (3/8" JXR female joint (with bearing) type)

•MGD20V-6R-K (B, Y, R) (3/8" JXR female joint type)

•MGD20V-6RM-K (B, Y, R) (3/8" JXR male joint type)

•MGD20V-6W-K (B, Y, R) (3/8" automatic welded joint type)

•MGD20V-6S-K (B, Y, R) (3/8" double barbed joint type)

OGD20VMGD20V

•OGD20V-6RJ- -K (B, Y, R) (3/8" JXR female (with bearing) - male combination type)

•OGD20V-6R- -K (B, Y, R) (3/8" JXR female - male combination type)

•MGD20V-6RJ- -K (B, Y, R) (3/8" JXR female (with bearing) - male combination type)

•MGD20V-6R- -K (B, Y, R) (3/8" JXR female - male combination type)

FMMF

FMMF

FMMF

FMMF

Figure shows OGD20V-6RJ-KFemale joint (with bearing)

Welded joint: 6W Double barbed joint: 8S

Female joint: 6RJ (with bearing) Female joint: 6R Male joint: 6RM

Figure shows MGD20V-6RJ-Kfemale joint (with bearing)

·The 1/2-inch size is also available. The face-to-face distance is the same as the 3/8-inch size. (This does not apply to the double-barbed joint.)

·The 1/2-inch size is also available. The face-to-face distance is the same as the 3/8-inch size.

ø37

47

104

8583

Panel mountdiameter

ø20.5 Pan

el m

ou

nt

thic

knes

s5m

m o

r le

ss48

16

2748

16

Panel mountdiameter

ø26.5

35

Pan

el m

ou

nt

thic

knes

s5m

m o

r le

ss

(84.5)

83

372-M5 screw depth 820.2

20.2

69

41.5 3838 41.5

35

32

MGD20V Series

OGD20V Series

3-way separate flow valve Custom order

Dimensions

•OGD20V-6RJ- (3/8" JXR female joint (with bearing) combination type)

•OGD20V-6R- (3/8" JXR female joint combination type)

•OGD20V-6RM-MMM (3/8" JXR male joint type)

•OGD20V-6W- (3/8" automatic welded joint combination type)

•MGD20V-6RJ- (3/8" JXR female joint (with bearing) combination type)

•MGD20V-6R- (3/8" JXR female joint combination type)

•MGD20V-6RM-MMM (3/8" JXR male joint type)

•MGD20V-6W- (3/8" automatic welded joint combination type)

OGD20VMGD20V

Figure shows OGD20V-6RJ-FFFfemale joint (with bearing)

Female joint: 6R Welded joint: 6WMale joint: 6RM



Figure shows MGD20V-6RJ-FFFfemale joint (with bearing)

·The 1/2-inch size is also available. The face-to-face distance is the same as the 3/8-inch size.

<Branch port>

<Main port >

a cb a

a

c

c

b

b

Panel mountdiameter

ø20.5 Pan

el m

ou

nt

thic

knes

s5m

m o

r le

ss48

ø37

8541.5

16

83

27

Pan

el m

ou

nt

thic

knes

s5m

m o

r le

ss48

Panel mountdiameter

ø26.5

47

104

41.5

83

76 6983

20.2

61.5 34.541.5

35

16

2-M5 screw depth 820.2

41.5

35

a c

b

33

Safety specification options Custom order

MGD10V With double action mechanismMGD10V With locking mechanism

Outline drawing

OGD*0VMGD10V

Malfunctions are eliminated by pushing and turning the handle (double action).

Contact your CKD representative for details on the model No., etc.

* Contact your CKD representative for details on the model No., etc.

Dimensions

Handle can be padlocked not to move. (1) Locked when valve open(2) Locked when valve closed(3) Locked when valve open/closed The following three are available:

* Contact your CKD representative for details on the model No., etc.

OGD10V-

OGD20V-

C

37

47

B

14.3

16

AModel No.

94

118

OGD*0V- With locking mechanism

A

C

B

MGD*0V SeriesManual valve for process gas

OGD*0V Series

34

Vacuum generator for process gas exhaust

VG Series Nozzle diameter: ø0.5

VG DescriptionsInert gas/process gas

0 to 80

Nitrogen, dry air

0.4 to 0.6

15 or less *1

13.3 or less

6 *1 *2

2.8 10-12 or less

3

0 to 80

0.2

Specifications


MaterialSUS316LSUS316LSUS316LSUS316LSUS316LFKM or Perfluoroelastomer

BodyNozzleSpacerDiffuserDiffuser holderO ring

1

2

3

4

5

6

•New nozzle: 1. Greatly reduces fluid consumption 2. Resists primary pressure fluctuations (Patent pending)

Model No.

VG-05FVG-05P

O ring material

FKMPerfluoroelastomer

•JXR joint connection *1

IN: 1/4" JXR male joint VAC.: 1/4" JXR female joint VENT: 3/8" JXR male joint

•Compact

VENTIN

VA

C


*1: At 0.5MPa pressurization (during operation)*2: When working fluid is air

Working fluid

Fluid temperature

Supply fluid

Supply fluid pressure MPa MPa

Supply fluid consumption /min(ANR)

Ultimate vacuum kPa(abs)

Discharge rate /min(ANR)

External leakage Pa·m3/s(He)

Withstanding pressure MPa

Ambient temperature

Port size

Weight kg

IN : 1/4" JXR male joint (Connectable with VCR joint)

VAC : 1/4" JXR female joint (Connectable with VCR joint)

VENT: 3/8" JXR male joint (Connectable with VCR joint)

Energy saving evacuation1 2 3 4 5

6

Precautions




35

•Ultimate vacuum

•VG-05*

•Supply fluid consumption rate, discharge rate

Characteristics curve

How to order

Dimensions

Ult

imat

e va

cuu

m

Supply pressure

100

0 0.1 0.2 0.3 0.4 0.5 0.6 0.7 0.8

13.3kPa(abs)

10

1

(kPa(abs))

(MPa)

Co

nsu

mp

tio

n r

ate,

dis

char

ge

rate 20

10

15

5

0

Supply pressure

0 0.1

( /min(ANR))

0.2 0.3 0.4 0.5 0.6 0.7 0.8(MPa)

Consumption rate

Discharge rate

VG 05 F

A Nozzle diameter [mm]

Model No.

B O ring material

05 ø0.5

Nozzle diameter [mm]A

Symbol Descriptions

O ring materialB

F

P

FKM

Perfluoroelastomer

31.5

VAC.

VENTIN1/4" JXR male joint


3/8" JXR male joint

26.5

32.5

VG Series

　

36

•Diaphragm type extremely small flow rate adjustment valve

•Piston structure check valve

· Wetted areas are all metal: Body (SUS316L) Diaphragm (Ni-Co alloy)

· Two maximum Cv flow factors are possible: 0.03 and 0.2

· Flow reaches to the maximum Cv flow factor when the handle is turned 10 times.

· Connection The JXR male joint, JXR female joint, and Double-barbed joint are available.

· The valve seat is Kalrez.

· Other wetted areas using SUS316L

· Cracking pressure is 23 kPa.

· Connection The JXR male joint and Double-barbed joint are available.

Diaphragm type extremely small flow rate adjustment valvePiston structure check valve

Custom order

37

Regulator for process gasRegulator for process gas

Precautions 39PGM 42

CONTENTS

37

39

Regulator for process gas PGM series

Component for process gas


Completely loosen the pressure adjustment knobcounterclockwise (DEC) before supplying gas tothe regulator.Gradually open the supply valve inlet so the sup-ply valve can be shut immediately if any abnormalpressure rise or leak occurs.After supplying inlet pressure, check that no out-lets leak.Do not use this component as a shutoff valve.During use, a metallic noise may be heard, and out-let pressure may change violently (vibration). If thisoccurs, close the inlet supply valve immediately andstop use.

Set pressure will increase when the pressure ad-justment knob is turned clockwise (INC).If the knob is turned counterclockwise (DEC)while gas is flowing, set pressure drops.The regulator does not have a relief function, soa vent must be provided when gas is not flowing.

Gradually open the inlet gas supply valve andsupply inlet pressure.Close outlet and inlet valves and wait for at leastten minutes. Check whether outlet pressure rises.

Turn the pressure adjustment knob clockwiseand adjust outlet pressure to within the adjust-ment pressure range. Wait at least ten minutesafter outlet pressure stabilizes and checkwhether outlet pressure rises.If outlet pressure continues to rise in steps and , an outlet leak exists.

If an outlet leak is found, discontinue use immedi-ately. Bleed gas, purge the regulator, then removeand replace it.

Regulator inletConfirm that the regulator pressure adjustmentknob is turned completely counterclockwise,then supply clean inert gas (N2, Ar, etc.) to theregulator inlet.Close the inlet supply valve after inlet pressurestabilizes.If inlet pressure gradually drops from the abovestate over time, a leak may exist in the regulator.Note that this applies when no outlet leak exists.

Regulator outletConfirm that the regulator pressure adjustmentknob is turned completely counterclockwise,then supply clean inert gas (N2, Ar, etc.) to theregulator inlet.Close the regulator outlet valve and set the pres-sure with the pressure adjustment knob.Completely close the regulator inlet supply valveafter inlet and outlet pressure stabilize.If inlet and outlet pressure both fluctuate greatlyfrom the above state over time, a leak may existin the regulator outlet.Note that this applies when no outlet leak exists.

If a leak is found, discontinue use immediately,and bleed gas. Purge pipes if necessary, then re-move and replace the regulator.

Design & Selection

Install a safety device if output pressure exceed-ing the regulator set pressure may cause damageor faulty operation of peripherals.

Pipe so fluid flows in the direction of the arrow.

During use

CAUTION

WARNING

1. Precautions for use

Adjusting knob

To increase pressure:Turn in clockwise direction (INC)

To decrease pressure:Turn in counterclockwisedirection (DEC)

2. Operation methods

CAUTION

3. Checking for outlet leaks

CAUTION

4. Checking air-tightness

CAUTION

3

4 23

1

2

1

2

3

1

2

3

4

40

Slim body· Easy to install, improved knob operability.· Sufficient space for harnesses, etc., when IGS is installed· Compatible with 1.125-inch size when IGS is installed

Sealing performance· Improved valve seat sealing reduces the occurrence of outlet leaks.

Clean level compatible with ultra-high-purity gas· Poppet sliding sections are reduced to minimize particle generation.· Metal seal specifications apply to all screws in wetted areas.· Long-life, highly corrosion- resistant Hastelloy C-22 used for diaphragm.· Electropolished finish specifications· Gas purging considered with reduced internal capacity and optimum flow path design.· High anticorrosion grades also available! (Option)

Vibration measures· New vibration prevention guards against vibration. (Patent pending)

Flow characteristics· Small pressure drop· Large flow realized with compact size!· Negative pressure control first realized with free poppet. (Patent pending)· Low sliding section members ensure smooth operation and reduce hysteresis!

Control of extremely small flow· Problems due to changes in the MFC output signal for extremely small flows less than several + sccm have been resolved.R

PGM-30V,30,50 PGM-H-60

PGM-100 PGM-H-100

0.00

0.05

0.10

0.15

0.20

0.25

0.30

0.35

0.40

0 10 20 30 40 50 60

P1=0.7MPaP1=0.5MPaP1=0.3MPa

0.00

0.05

0.10

0.15

0.20

0.25

0.30

0.35

0.40

0 20 40 60 80 100


Flow characteristics

0.00

0.60

0.50

0.40

0.30

0.20

0.10

0 20 40 60 80 100


0.00

0.60

0.50

0.40

0.30

0.20

0.10

0 10 20 30 40 50 60


IN OUT

Flow( /min(ANR))(N2) Flow( /min(ANR))(N2)

Flow( /min(ANR))(N2) Flow( /min(ANR))(N2)

Sec

on

dar

y p

ress

ure

(M

Pa)

Sec

on

dar

y p

ress

ure

(M

Pa)

Sec

on

dar

y p

ress

ure

(M

Pa)

Sec

on

dar

y p

ress

ure

(M

Pa)

High-performance regulatorincorporating CKD's abundant experience

PGM series

PGM Series

41

Flo

w s

erie

sF

low

ser

ies

20 /min

50 /min

-0.1 0 0.1 0.2 0.3 0.4 0.5 0.6 0.7 0.8

Secondary set pressure(MPa)

PGM-30V

PGM-30

PGM-50

PGM-100

PGM-H-60

PGM-H-100

PGM Series

Variety

Diverse connection variations


1/4" JXR male joint

1/4" JXR male female joint

1/4" JXR female male joint

1.5" C seal

1.5" CS seal

1.5" W seal

1.125" C seal

1.125" W seal

Abundant pressure range variations

(JXR joint type)

( Circled section shows each

integrated valve interface)

42

Regulator for process gas

PGM Series Metal diaphragm

Specifications

-0.07 to 0.21 0 to 0.21 0 to 0.35


1.0

-5 to 40

1 10-9 or less

2.8 10-12 or less

1.5

-5 to 40

Electropolished finish

Various integrated valve (IGS) interface (PGM-*-1, 2, 3, 4, 5)

1/4" JXR joint (Connectable with VCR) (PGM-*4R, 4RM, 4MF, 4FM)

0.39(PGM-*-4)

0 to 0.42 0 to 0.7

Working fluid

Primary maximum working pressure MPa

Secondary set pressure MPa

Working fluid temperature

Valve seat leakage Pa·m3/s(He)



Ambient temperature

Wetted area surface treatment

Connection

Weight kg

JIS Symbol

PGM- 30V 30 50 100PGM-H- 60 100

Descriptions

PrecautionsAlways read page 9 in the introduction and page 39 to ensure correct and safe use of this product.

Flow characteristics Refer to Page 40.

Model No. Flow series Secondary set pressure

PGM-30V 20 /min -0.07 to 0.21MPaPGM-30 20 /min 0 to 0.21MPaPGM-50 20 /min 0 to 0.35MPaPGM-100 20 /min 0 to 0.7 MPa

Model No. Flow series Secondary set pressure

PGM-H-60 50 /min 0 to 0.42MPaPGM-H-100 50 /min 0 to 0.7 MPa

43

PGM Series


MaterialSUS316L

Hastelloy C-22

PCTFE

SUS316L or Hastelloy C-22 (option)

SUS316 or Ni-Co alloy (option)

Body

Diaphragm

Sheet

Poppet

Spring

1

2

3

4

5

4R S

How to order

Internal structure and parts list

PGM H

A Flow series

B Secondary set pressure

C Connection

D Option

30

Blank

H

20 /min

50 /min

Flow seriesA

Symbol Descriptions

Symbol Descriptions PGM PGM-H

Secondary set pressureB

Model No.

30V

30

50

60

100

-0.07 to 0.21MPa {-10 to 30psi}

0 to 0.21MPa {0 to 30psi}




ConnectionC

4R

4RM

4MF

4FM

1

2

3

4

5

1/4"JXR female joint

1/4"JXR male joint

1/4"JXR male female joint

1/4"JXR female male joint

1.125" C seal

1.5" C seal

1.5" CS seal

1.5" W seal

1.125" W seal

OptionD

SPoppet: Hastelloy C-22

Spring: Ni-Co alloy

IN OUT

*1: Listed flows are nominal. Confirm pressure conditions with the flow characteristics graph.*2: There is no gauge port.

1

2

3

4

5

44

PGM Series

ø28.6

85(M

AX

95)

11.2

18 30

70.6

IN OUT

4-M5 depth 718

29

ø28.6

85(M

AX

95)

11.2

18 30

70.6

IN OUT

4-M5 depth 718

29

ø28.6

99(M

AX

109)

6.5

21.7

4

28.5

IN OUT

4-ø4.721.74

28.5

7.75

ø28.6

104(

MA

X11

4)8

30.1

8

38

IN OUT

ø28.6

104(

MA

X11

4)8

IN OUT

ø28.6

104(

MA

X11

4)8

IN OUT

ø28.6

99(M

AX

109)

6.5

IN OUT

4-ø5.530.1838

30 39

4-ø5.52639

30 39

4-ø5.62639

21.8

28.5

4-ø4.420

28.5

7.75

PGM-*-4R(1/4"JXR female joint)

PGM-*-4RM(1/4"JXR male joint)

PGM-*-1(1.125"C seal)

Note: The flow path direction is indicated on the body by arrows.

PGM-*-2(1.5"C seal)

PGM-*-3(1.5"CS seal)

PGM-*-4(1.5"W seal)

PGM-*-5(1.125"W seal)

Dimensions

45

Integrated gas supply systemIntegrated gas supply system

Product guide 46IAGD3 (CS seal) 50IAGD4 (W seal) 60SEMI F86 and F87 (1.125 inch size, C seal) compatible valve 67

CONTENTS

45

46

Process gas regulator PGM Series Highly accurate pressure control

Compatible with both CS and W seals

Space saved usingblocks with filters

Gas line expansion is flexibly handled using rails

Integrated gas supply systemIAGD3/IAGD4 Series

Greatly improvingspace saving and maintenance.

This system was developed for use in the gas supply line ofsemiconductor manufacturing equipment. The SEMI standard surface-mounted air-operated valve and mass flow controller, etc., areintegrated compactly.

IntegratedGasSystem Series

Overview

Custom order

* This is a rail product.

PAT.

47

Main features

Integrated Gas System Series

Reduced footprint

· Footprint 50% of conventional

· Volume 36% of conventional

Increased corrosion resistance(zero contamination)

· Welded areas are reduced by 80%.Conventional causes of contamination are greatly reduced by reducing welded areas.

Improved purging

· The flow path is configured with little internal volume and dead volume.

· Purging is improved.

Standardization

· Standardized components are promoted.

Improved workability

· Components can be installed and removed from the top.

· With the rail model, gas line expansion is handled flexibly.

· Heating is simplified.

Improved reliability

· CS and W seals are used.

Existing gas jungle


48

History of integrated gas system


1992 1994 1996 1998 2000 2002 2004

IAGDCS seal

IAGD2CS seal

IAGD3CS seal

IAGD4W seal

49

Flow of integrated gas supply system


Layout

· The layout is based on the user's specifications and flowcharts.

· Device manufacturers and models are selected and prepared based on

the user's specifications.

· Components are positioned with jigs, and the base block is installed.

· Integrated devices are installed.

Layout drawing

Completion

MFCMFC

MFC

MFCMFCMFC

MFC

MFC

PTPTPTPTPT

C

C C CC CC CCCC C C CC CC CCCC Flowchart

Partspreparation

Assembly 1

Assembly 2

Inspection

50

Integrated gas supply system componentsAir operated valve for IAGD3


IAGD3

MAGD3-0 MAGD3-1DescriptionsWorking fluid

Working pressure range Pa(abs)-MPa

Fluid temperature

Ambient temperature



Cv flow factor

Connection

Operating pressure MPaNC

NO


Body

Diaphragm

Sheet


1.3 10-6 to 0.7

-10 to 80

-10 to 80

1.3 10-9

5.0 10-10

CS seal (nominal 6.35)

0.4 to 0.6

0.4 to 0.5

M5

SUS316L

Ni-Co alloy

PCTFE

Specifications

0.1 0.26M

ater

ial

F Check valve

G Pressurizingdirection

C

D Actuation (V2)

E Actuation (V3)

A

B

How to order

MAGD3 1 A1 2 C04A

MAGD3 Air operated valve for IAGD3Series

Valve shape

SeriesA

Symbol Descriptions

<Example of model number>MAGD3-03A-12C-A

Series: Air-operated valve for IAGD3Valve shape: 1/8 inch size 3-station block

A type valve (3-port)Actuation (V1): NCActuation (V2): NOActuation (V3): Without V3With check valvePressurizing direction:

(a)port pressurizing (for MFC primary side)

A

B

C

D

E

F

G

02A

03A

04A

11C

11D

11F

2-station block A type valve (3-port)



1-station block C type valve (2-port)

1-station block D type valve (2-port)

1-station block F type valve (3-port)

Valve shape

0.1

0.26

Cv flow factorB

1

2

3

4

NC

NO

NC (with proximity sensor (energized when valve closed))

NO (with proximity sensor (energized when valve opened))

Actuation (V1)C

1

2

3

4

NC

NO



Actuation (V2)D

1

2

Blank

NC

NO

No V3

Actuation (V3)E

A

B

port pressurizing (for MFC primary side)

port pressurizing (for MFC secondary side)

Pressurizing directionG

C Check valve

Check valveF

Actuation (V1)

a

a

b

Note 1: Select the pressurizing direction only when using (B)valve O3A or O4A.

Note 2: Installation bolts, gasket, actuator, and drive air joint are not included, and must be purchased separately.

Note 3: Consult with the CKD Sales Office if a valve with air joint for actuator drive is required.

G

B

51

a b

cd

a c b

d

da bc

V1 V3 V2

V1 V3 V2

V1 V3 V2

MAGD3-04A-111C-A

MAGD3-04A-112C-B

656.5 65.5

30 3973

.8 90.8

16

159.5

1-station block 2-station block 3-station block 4-station block

63.5 1692.5

30 39

6.5

90.8

a c b

V1 V2

V1 V2

a b

c

30 39

92 166.5121

73.8 90

.8

a c b

V2V1

V1 V2

a c b

V1 V2

MAGD3-03A-11C-A

MAGD3-03A-11C-B

a b

c

MAGD3 SeriesDimensions

Dimensions

MAGD3-11C

MAGD3-11D

MAGD3-11F

MAGD3-02A-1*

MAGD3-02A-3*

MAGD3-03A-11C

MAGD3-03A-3* C-A

MAGD3-04A-11* C

MAGD3-04A-31* C-A

MAGD3-04A-132C-A

30 3949.5

897

12.7

6.5

2639

30 398

8930 39

296.5 1658

2898

a c b

a b

c

30 39

6.5 63.5 1692.5

114

a c b

V1 V2

V1 V2

a b

c

92 166.5121

30 3973

.8 90.8 11

4

a c b

V2

V1

V1 V2

a

b

c

c

a

d

b

da bc

V1 V3

V2

V1 V3 V2

159.5

73.8

656.5 65.5 16

30 3911

4

90.8

a

d

b

c

ad

bc

V3 V2

V1

V1 V3 V2

159.565.5656.5

3930

16

90.8

73.8

114

The check valve direction is reversed

for MAGD3-O3A-3* C-B.

52

Components for integrated gas supply systemManual valve for IAGD3


IAGD3

MOGD3-11 DescriptionsWorking fluid


Fluid temperature

Ambient temperature



Cv flow factor

Connection

Body

Diaphragm

Sheet


1.3 10-6 to 0.7

-10 to 80

-10 to 80

1.3 10-9

5.0 10-10

0.26


SUS316L

Ni-Co alloy

PCTFE

Specifications

Mat

eria

l

C

D Pressurizing direction

E Others

A

B

How to order

MOGD3 K S1A11C

MOGD3 Manual valve for IAGD3series

valve shape

seriesA

Symbol Descriptions

<Example of model number>MOGD3-11C-KA-S1

Series: Manual valve for IAGD3Valve shape: 1-station block C type valve (2-port)Handle color: BlackPressurizing direction: port pressurizingOthers: With handle lock (only when valve is closed)

Note 1: Installation bolts and gasket are not included, and must be purchased separately.

A

B

C

D

E

11C

11D

1-station block C type valve (2-port)


valve shapeB

K

R

B

Y

G

Handle color Black

Handle color Red

Handle color Blue

Handle color Yellow

Handle color Green

Handle colorC

A

B

port pressurizing

port pressurizing

Pressurizing directionD

S1

Blank

With handle lock (only when valve is closed)

No key

OthersE

Handle color

a

b

a

53

MOGD3 SeriesDimensions

Dimensions

MOGD3-11C-* A

MOGD3-11C-KA-S1

MOGD3-11C-* B

MOGD3-11F-* A

MOGD3-11D-* A

MOGD3-11F-* B

12.7

18

810

4

49.5

6.5

3930

a b

20

b a

12.78

104

49.5

6.5

39 30

18

20

a b

39

26

30

39

968

30

12.7

811

6.6

49.5

6.5

39

18

a b

20

a

a

b

b

c

c

105

28

5829 16 6.5

3930

ab c

b a

c

105

2858

16 29 6.530 39

54

Components for integrated gas supply systemFlow adjusting valve for IAGD3


IAGD3

MFGD3-11D-1 MFGD3-11D-4 DescriptionsWorking fluid


Fluid temperature

Ambient temperature



Cv flow factor (max.)

Connection

Body

Diaphragm


1.3 10-6 to 0.7

-10 to 80

-10 to 80

1/100 or less of maximum Cv flow factor

5.0 10-10


SUS316L

Ni-Co alloy

Specifications

0.03 0.2M

ater

ial

* The product has a cover.

C

A

B

How to order Dimensions

MFGD3 111D

series

valve shape

<Example of model number>

MFGD3-11D

MFGD3-11D-1Series: Flow adjusting valve for IAGD3Valve shape: 1-station block D type valve (2-port)Cv flow factor (max.): 0.03


A

B

C

Cv flow factor(max.)

MFGD3 Flow adjusting valve for IAGD3

seriesA

Symbol Descriptions

11D 1-station block D type valve (2-port)

valve shapeB

1

4

Cv flow factor (max.) 0.03


Cv flow factor (max.)C12

7

8

39

26

30 39

55

Components for integrated gas supply systemCheck valve for IAGD3


IAGD3

MCGP3-01D Descriptions

Working fluid


Fluid temperature

Ambient temperature




Connection

Body

Sheet

Spring

Gasket


1.3 10-6 to 0.7

-10 to 80

-10 to 80

4.7 10-8

5.0 10-10

0.25


SUS316L

Kalrez

SUS316-WPA

PTFE

Specifications

Mat

eria

l

C

A

B


MCGP3 01D 023 KA

Series

Shape


MCGP3-01D-023-KA

MCGP3-01D-023-KASeries: Check valve for IAGD3Shape: 1-station block D type valve (2-port)Cranking pressure: 2.3kPa Sheet material: Kalrez


A

B

C

D

Cranking pressure (2.3kPa)

D Sheet material (Kalrez)

( )1-station block D type valve (2-port)

39

26

30 3960

.3

8

56

Components for integrated gas supply systemOther components for IAGD3


IAGD3

Model No.Gasket set (Bolt length 16 mm)

Gasket set (Bolt length 20 mm)Gasket set (Bolt length 30 mm)Gasket set (Bolt length 35 mm)

Gasket set (Bolt length 40 mm)

Gasket set (Bolt length 45 mm)

IAGD3-SEAL

IAGD3-SEAL-L20IAGD3-SEAL-L30IAGD3-SEAL-L35

IAGD3-SEAL-L40

IAGD3-SEAL-L45

Applicable partsMAGD3-11CMAGD3-11DMOGD3-11CMOGD3-11DMFGD3-11DMCGP3

MAGD3-11FMAGD3-02AMOGD3-03AMOGD3-04ABypass block (for 26 mm pitch between surfaces)Bypass piping block (for 79.8 mm pitch between MFC surfaces)Sealing flangeSEC-7330* -* -792B(STEC MFC)SEC-7340* -* -792B(STEC MFC)SEC-F730* -* -792B(STEC MFC)SEC-F740* -* -792B(STEC MFC)SEC-4400-792B(STEC MFC)FC-785X* B(AEJ MFC)FC-795* T-B(AEJ MFC)FC-D985* T-B1(AEJ MFC)FC-D985* Y-B1(AEJ MFC)FC-985* T-B1(AEJ MFC)FC-985* Y-B1(AEJ MFC)IFLOW FC* SS CS SEALDB9-T(Mykrolis MFC)FC-2979(Mykrolis MFC)SEC-7350* -* -792B(STEC MFC)SEC-7355* -* -792B(STEC MFC)SEC-F750* -* -792B(STEC MFC)FC-785* T-B(AEJ MFC)FC-785* Y-B(AEJ MFC)FC-786* T-B(AEJ MFC)FC-786* Y-B(AEJ MFC)FC-796* T-B1(AEJ MFC)FC-D986* Y-B1(AEJ MFC)FC-986* T-B1(AEJ MFC)FC-986* Y-B1(AEJ MFC)

Gasket set (2 hexagon socket head cap bolts, 1 C-ring, 1 gasket retainer)

Name

Model No. NameMaintenance tool set IAGD3-MAINTENANCE

Maintenance tool ( )1 each: Installer set, torque wrench, hexagon wrench bit with magnet, hexagon wrench ball bit, extension bar

Note 1: The required number of gasket sets is determined by the number of CS seals.Note 2: Contact CKD for details on applicable parts.

See the Instruction Manual for details on use.

Material C ring: SUS316L, SUS304-WPB (Non-wetted area)Gasket retainer: SUS304Hexagon socket head cap bolt: SCM435 (Special treatment)

57

IAGD3 SeriesOther components

Top mount block Bypass block

(for 26 mm pitch between surfaces)

Mount base B-1

Bypass piping block(for 79.8 mm pitch between MFC surfaces)

Mount base E-5

Sealing flange

Mount base F-1

Base block

39

3028

39

26

92.8

79.8

30 38

28

1328

38

30

28

16

15

24 30 3815

16 6

45

14

20 15 6.5

24 18

1530 38

16

2436 443015

28

15

58

Components for integrated gas supply systemAir operated valve for IAGD4


IAGD4

MAGD4-0 MAGD4-1 DescriptionsWorking fluid


Fluid temperature

Ambient temperature



Cv flow factor

Connection

Operating pressure MPa NC

NO


Body

Diaphragm

Sheet


1.3 10-6 to 0.7

-10 to 80

-10 to 80

1.3 10-9

5.0 10-10

W seal (nominal 6.35)

0.4 to 0.6

0.4 to 0.5

M5

SUS316L

Ni-Co alloy

PCTFE

Specifications

0.1 0.26M

ater

ial

C

D Actuation (V1)

E Actuation (V2)

A

B

How to order

MAGD4 W 1 202A

MAGD4

MAGD4A

Air operated valve for IAGD4

Air operated valve for IAGD4

(Upgraded version type, MAGD4A-11D only)

Series

Valve shape

SeriesA

Symbol Descriptions

<Example of model number>MAGD4-02A-W-12

Series: Air operated valve for IAGD4Valve shape: 2-station block D type valve (3-port)Seal shape: W seal (nominal 6.35)Actuation (V1): NCActuation (V2): NO

Note 1: Installation bolts, gasket, actuator, and drive air joint are not included, and must be purchased separately.

Note 2: Consult with the CKD Sales Office if a type with installation bolts is required.

A

B

C

D

E

01D

01X

01Y

02A

11D


1-station block X type valve (3-port)

1-station block Y type valve (3-port)



Valve shape

0.1

0.26

Cv flow factorB

W W seal (nominal 6.35)

Seal shapeC

1

2

3

4

5

6

NC

NO



NC (with proximity sensor (energized when valve opened))

NO (with proximity sensor (energized when valve closed))

Actuation (V1)D

1

2

3

4

5

6

NC

NO



NC (with proximity sensor (energized when valve opened))

NO (with proximity sensor (energized when valve closed))

Actuation (V2)E

Seal shape

59

a c

b

ca

b

30 39

3913 13

65.8

8

a c

b

a

b

c

30 3989

8

(124

.2)

3913 13

a c

b

ca

b

30 39

7360

54.5

6.5

79.5

31

a c

b

a c

b

30 39

7360

54.5

6.5

102.

7(1

37.9

)

31

MAGD4 SeriesDimensions

Dimensions

1-station block MAGD4-01D

MAGD4-01Y

MAGD4-02A

(With proximity sensor)


MAGD4-01X

MAGD4A-11D




2-station block

30 39

2613

63.5

8

30 39

2613

86.7

8

(121

.9)

a c

b

a c

b

V1 V2

30 39

6.591.5

69.5

3179

.5

78.5

a c

b

a c

b

V1

V2

6.5 78.591.5

30 39

69.5

3179

.510

2.7

(137

.9)

30

2639

398

97.7

811

2.5

30 39

2639

(147

.7)

60

Components for integrated gas supply systemManual valve for IAGD4


IAGD4

MOGD4-01 MOGD4-11 DescriptionsWorking fluid


Fluid temperature

Ambient temperature


External leakage Pam3/s(He)

Cv flow factor

Connection

Body

Diaphragm

Sheet


1.3 10-6 to 0.7

-10 to 80

-10 to 80

1.3 10-9

5.0 10-10


SUS316L

Ni-Co alloy

PCTFE

Specifications

0.1 0.26M

ater

ial

C

D Handle color

E Others

A

B

How to order

MOGD4 W S111D KA

MOGD4 Manual valve for IAGD4Series

Valve shape

SeriesA

Symbol Descriptions

<Example of model number>MOGD4-11D-W-KA-S1

Series: Manual valve for IAGD4Valve shape: 1-station block D type valve (2-port)Seal shape: W seal (nominal 6.35)Handle color: BlackOthers: With handle lock (only when valve is closed)



A

B

C

D

E

11D

01X

01Y


1-station block X type valve (3-port)

1-station block Y type valve (3-port)

Valve shape0.26

0.1

Cv flow factorB

K

R

B

Y

G

Handle color Black

Handle color Red

Handle color Blue

Handle color Yellow

Handle color Green

Handle colorD

S1

Blank

With handle lock (only when valve is closed)

No key

OthersE


Seal shapeCSeal shape

61

MOGD4 SeriesDimensions

Dimensions

MOGD4-01D

MOGD4-11D-W-* A

MOGD4-01X

MOGD4-11D-W-* A-S1

30 39

2639

810

0

39 30

3926

(125

)

116.

68

26

30 3985

8

1373

30 39

a c

b54.5

606.5

101

3131

a

b

c

62

Components for integrated gas supply systemFlow adjusting valve for IAGD4


IAGD4

MFGD4-11D-W-1 MFGD4-11D-W-4 DescriptionsWorking fluid


Fluid temperature

Ambient temperature




Connection

Body

Diaphragm


1.3 10-6 to 0.7

-10 to 80

-10 to 80

1/100 or less of maximum Cv flow factor

5.0 10-10


SUS316L

Ni-Co alloy

Specifications

0.03 0.2

* The product has a cover.

Mat

eria

l

D

A

B


MFGD4 W 111D

Series

Valve shape

C Seal shape


MFGD4

MFGD4-11D-W-1Series: Flow adjusting valve for IAGD4Valve shape: 1-station block D type valve (2-port)Seal shape: W seal (nominal 6.35)Other: Cv flow factor (max.) 0.03



A

B

C

D

Cv value (max.)

MFGD4 Flow adjusting valve for IAGD4

SeriesA

Symbol Descriptions

11D 1-station block D type valve (2-port)

Valve shapeB

1

4



Cv flow factor (max.)D


Seal shapeC8

131.

4

30 39

26

39

63

Components for integrated gas supply systemCheck valve for IAGD4


IAGD4

MCGP4-01D MCGP4-F DescriptionsWorking fluid


Fluid temperature

Ambient temperature




Connection

Body

Sheet

Spring

Gasket


1.3 10-6 to 0.7

-10 to 80

-10 to 80

4.7 10-8

5.0 10-10

0.25


SUS316L

Kalrez

SUS316-WPA

PTFE

Specifications

Mat

eria

l

C

A

B


MCGP4 01D 023 KA

Series

Shape


MCGP4-F* MCGP4-01D

MCGP4-01D-W-023-KASeries: Check valve for IAGD4Shape: 1-station block D type valve (2-port)Seal shape: W seal (nominal 6.35)Cracking pressure: 2.3 kPaSheet material: Kalrez



A

B

C

D

E

Seal shape

MCGP4 Check valve for IAGD4

SeriesA

Symbol Descriptions

01D

F1

F2


Flow direction JXR joint side to W seal side

Flow direction W seal side to JXR joint side

ShapeB

023 Cracking pressure 2.3 kPa

Cracking pressureDD Cracking

pressure

E Sheetmaterial

KA Sheet material Kalrez

Sheet materialE

W

L


1/4 inch JXR male joint

Seal shapeC

W

30 39

18

8

47

30 39

26

39

8

67

1/4 inch JXR male

64



IAGD4

DescriptionsWorking fluid

Filtration m

Particle trapping rate

Maximum working pressure MPa

Fluid temperature


Connection

Materials for wetted areas


0.003

Particles 0.003 m or larger: 99.9999999% and over (at 30 /min)

0.97

-10 to 80

3.0 10-10


SUS316L

Specifications

Dimensions

0.1

0.09

0.08

0.07

0.06

0.05

0.04

0.03

0.02

0.01

0

Pre

ssu

re lo

ss (

MP

a)

Flow characteristics Primary pressure P1 = 0.2 MPa (references data)

0 10 20 30 40 50

Flow rate ( /min) 2016 30 39

39

13

146

Features

Performance equivalent to top mounted filter. Outstanding gas replacement and dry down characteristics.

Space saving (Entire length of the integrated unit can be shortened.)

* Contact the CKD Sales Office for details on the model, etc.

65



IAGD4

Model No. NameW seal gasket (nominal 6.35) IAGD4-UGF-6.35GR

Gasket

Model No. NameMaintenance tool set IAGD4-MAINTENANCE

Maintenance tool

Model No. NameHexagon socket head cap bolt

for W seal (M5 X 12, 4 pieces)

Hexagon socket head cap bolt






IAGD4-BOLT-M5 12-4

IAGD4-BOLT-M5 35-4

IAGD4-BOLT-M5 40-4

IAGD4-BOLT-M5 43-4

Applicable partsMAGD4-01D

MAGD4A-11D

MOGD4-11D

MFGD4-11D

MCGP4-01D

MCGP4-F*

Bypass block (for 26 mm pitch between surfaces)

Bypass piping block (for 79.8 mm pitch between MFC surfaces)

Sealing flange

SEC-G111* -W-1.5 (STEC MFC)

MAGD4-01X

MAGD4-02A

MOGD4-01X

FC-785(AEJ MFC)

FC-786(AEJ MFC)

FC-985(AEJ MFC)

SEC-7330* -800A(STEC MFC)


SEC-F730* -800A(STEC MFC)




FC-986(AEJ MFC)

W seal mounting bolt

(1 each: torque driver, torque driver bit, tweezers (gasket mounting tool))

Contact CKD for details on applicable parts.

See the Instruction Manual for details on use.

66

30 39

25

39

26

(55.

4)30 39

79.8

92.4

13

30

39

8

IAGD4 SeriesOther components

Top mount block By-pass block (For 26 mm pitch between surfaces)

Base block 1 (20.6 mm between surfaces)

By-pass piping block(For 79.8 mm pitch between MFC surfaces)

Base block 5 (14.0 mm between surfaces)

Sealing flange

1/4 inch JXR male flange

Base block

20

20.6

32.6

16 30 39

2030 39

1426

16

2016 30 39

6

17

49.224.8

1/4 inchJXR male

12

67

Components for integrated gas supply systemSEMI F86, F87 (1.125-inch size, C seal) compatibleair-operated valve, manual valve


DescriptionsWorking fluid


Fluid temperature

Working ambient temperature



Wetted area surface treatment

Connection


1.3 10-6 to 0.86

-40 to 80

-40 to 80

1 10-10 or less

2.8 10-12 or less


SEMI F86, F87 compatible

MAGD · MMGD

Specifications

Features

Cv= 0.3 realized with 1.125 inch compact body. Outstanding valve sealing Push-in joint for 1/8-inch tubing integrated in actuator operation port. (Air-operated valve) LOTO mechanism integrated to prevent incorrect operation (manual valve)

69

Other gas componentsOther gas components

Precautions 70Inline clean filter FCS 72Clean regulator RC2000 82

CONTENTS

69

70

Use within the product's specific specificationrange.

Do not use this product in an atmosphere con-taining organic solvents or chemicals, etc., orwhere these may come in contact with the prod-uct.Failure to observe this may damage the polyamide housing.Use stainless steel in these environments.

This product is for industrial use and not for usein devices or circuits for medical equipment ordevices that involve human life.

Confirm the working circuit and working fluid.Install a dryer, air filter, or oil mist filter on the primary side toremove any moisture and oil and to prevent filter performancefrom being compromised.

Do not exceed the maximum working pressureor maximum pressure difference.Failure to observe this may damage the product or elementmembrane.

Do not let fluids exceed the maximum flow.Failure to observe this may cause filtration to drop or damagethe element membrane.

This device cannot be used as an absolute filter.Filtration is 99.99% within specified conditions.

Design & Selection

Open the product in a clean room.The product is packaged in a clean room, and should beopened just before piping it in the clean room.

Avoid installing this product where it may be sub-jected to direct sunlight.

Flush and clean pipes before use.Any dirt or foreign matter in piping decreases product perfor-mance.

Check that foreign matter does not enter whenscrewing in pipes or joints.Check that pipe thread swarf or sealing agent does not enterwhen screwing in pipes or joints. Product performance maydecrease if there is dirt or foreign matter in piping.

Confirm the flow direction indicated by the arrowand connect the product correctly.Product life is shortened if installed reversed.

Pipe so that excessive force is not applied to theproduct.Check that force such as pulling, compression, bending, orexternal force from the tube is not applied to the product whenpiping or installing.

Use appropriate piping tubing.Use CKD soft nylon or urethane tubing.Consult with CKD regarding the use of fluorine resin tubing,etc.

Insert piping tubing securely into the push-in jointbefore use.

Avoid installing where vibration or impact ispresent.

Use the connection's width across flats when pip-ing.When connecting R thread or Rc thread piping, place a wrenchacross the connection's width across flats, then pipe. Avoidfixing the connection in other places.Tighten pipes with theappropriate torque.

Tighten pipes with the appropriate torque.

Do not supply sudden high pressure when sup-plying compressed air the first time after connect-ing pipes.The connected pipe may be dislocated and piped tubing maycome off.

Performance may decrease if the filter element isclogged. Regularly inspect and replace the ele-ment.

Inspect regularly for cracks, scratches, and otherdeterioration in the clear resin.Cracks, scratches, and other deterioration may result in dam-age. Replace with a new part or SUS.

Do not disassemble or modify the product.

Stop the fluid supply and confirm that there is noresidual pressure before maintenance.

Read instructions and precautions included withthe product before use or maintenance.

Check that vibration, impact, and external forcecaused by vibrating tubing is not applied to theproduct during use.




Safety PrecautionsAlways read before starting use

Inline clean filter FCS Series

CAUTION

CAUTION

CAUTION

M5Rc1/8, R1/8Rc1/4, R1/4Rc3/8, R3/8

1 to 1.5

3 to 5

6 to 8

13 to 15

Tightening torque N·mSet screw

WARNING

71

Clean regulator RC2000 Series



Use within the product's specific specificationrange.

Install a safety device where an output pressureexceeding the regulator's set pressure valuecould result in damage or faulty operation of sec-ondary side devices.

Check the working circuit and working fluid.Malfunctions may result if fluids containing solids or not speci-fied fluids flow. Connect a filter to the primary side of the prod-uct to prevent the entry of solid matter.

WARNINGThe line may vibrate depending on work and pip-ing conditions.Lower primary pressure if the line vibrates.

Secondary pressure flows to the primary sidewhen primary pressure is released.Other devices may malfunction if secondary fluids flow to theprimary side. Provide a circuit that maintains the pressure.

Set secondary side pressure of the regulator to85% or less of the primary side, or else the pres-sure drop could increase.

CAUTION

Design & Selection

Installation

Open the product in a clean room.This product is packed in a double layer in a clean room. Openthe first layer, and take the product into the clean room. Openthe second layer just before piping.

Flush and clean pipes before use.Any dirt or foreign matter in piping decreases product perfor-mance.

Check that foreign matter does not enter whenscrewing in pipes or joints.Check that pipe thread swarf or sealing agent does not enterwhen screwing in pipes or joints. Product performance maydecrease if there is dirt or foreign matter in piping.

Confirm the flow direction indicated by the arrowand connect the product correctly.The RC2000 does not function correctly if installed reversed.

Tighten pipes witht h e a p p ro p r i a t etorque.

(Right table is rec-ommended torque)

Sufficient maintenance spaceEnsure sufficient space for maintenance and inspection.

Plug the pressure gauge connection port usingthe pressure gauge and pipe plug.

Avoid installing where vibration or impact ispresent.

If nuts for panel installation are loosened, nutsfunction as a jack making it easier to remove theknob. When installing the knob, install nuts first.

CAUTIONSet screw Tightening torque N·m

M5

Rc1/8

Rc1/4

Rc3/8

Rc1/2

1.0 to 1.5

3 to 5

6 to 8

13 to 15

16 to 18


Release the lock before adjusting pressure.Operating the pressure adjustment knob while locked mayresult in damage.

Adjust pressure in the direction of pressure rise.Pressure cannot be set correctly if adjusted downward.

Non-relief pressure cannot be reduced unless sec-ondary pressure is consuming pressure.

Read instructions and precautions included withthe product before use or maintenance.

CAUTION

72

Specifications

Working fluid

IN side diameter (*1)

OUT side diameter (*2)


Withstanding differential pressure MPa

Working pressure range MPa

Working temperature range

Filtration rating

Treating flow rate /min (ANR) Note 1

Product mass g

Body

Material Case

Element

Assembly/inspection/packing

Cleaning

JIS symbol

Compressed air, nitrogen

Selection from ø4, ø6, ø8, R1/8, R1/4

1.5

0.5 (0.2 for 45 to 50 )

-0.095 to 0.99 Note 2

5 to 50

0.01 (removal efficiency 99.99%)

50 (80 for H88A, 8AH8 type)

45

Polyamide, aluminum (alumite treatment)

Transparent polyamide

Polypropylene + urethane

Integrated manufacture in clean room

Degreasing and cleaning

2.25 (compressed air), 1.5 (nitrogen)

0.5

-0.095 to 1.5 (compressed air), -0.095 to 0.99 (nitrogen)

5 to 45

Stainless steel

Stainless steel

Rc1/4

Rc1/4

80

100

Rc1/8

Rc1/8

50

100

Selection from ø4, ø6, ø8

1.5

0.5 (0.2 for 45 to 50 )

-0.095 to 0.99 Note 2

5 to 50

50 (80 for H8H8 type)

45

Polyamide


DescriptionsStandard element resin type Male thread pipe type P9 element stainless steel type

FCS500-(*1)(*2) FCS500-(*1)(*2)FCS500-88-P90FCS500-88-P94

FCS500-66-P90FCS500-66-P94

Relationship of working temperature and maximum working pressure for the resin

element and male thread piping filter

0.6

0.7

0.8

0.9

1

1.1

5 10 15 20 25 30 35 40 45 50

Temperature ( )

Max

. wor

king

pre

ssur

e (M

Pa)

Usable range

Not available

0

0.01

0.02

0.03

0.04

0.05

0.06

0.07

0.08

0.09

0.1

0 0.01 0.02 0.03 0.04 0.05 0.06 0.07 0.08 0.09 0.1 0.11 0.12

Air flow rate (m3/min [ANR])

Pre

ssu

re lo

ss (

MP

a)

Pre

ssu

re lo

ss (

MP

a)

0

0.01

0.02

0.03

0.04

0.05

0.06

0.07

0.08

0.09

0.1

0 0.01 0.02 0.03 0.04 0.05 0.06 0.07 0.08 0.09 0.1 0.11 0.12

Air flow rate (m3/min [ANR])

0.1MPa0.1MPa

0.7MPa0.7MPa

0.5MPa0.5MPa0.3MPa0.3MPa 0.1MPa0.1MPa 0.5MPa0.5MPa0.3MPa0.3MPa

0.7MPa0.7MPa

0.1MPa

0.7MPa

0.5MPa0.3MPa 0.1MPa 0.5MPa0.3MPa

0.7MPa

•FCS500-H8H8 •FCS500-H88A •FCS500-8AH8

•FCS500-88-P90·P94•FCS500-H4H4 •FCS500-H6H6 •FCS500-H46A

•FCS500-66-P90·P94 (products including ø4, ø6 joint, R1/8, Rc1/8 connection.)

Note 1: Initial flow at 0.7 MPA primary pressure and 0.03 MPa pressure decrease.Note 2: Maximum working pressure differs with based on the working temperature. Check the maximum with the graph showing the relationship of the working temperature and maximum working pressure.


Inline clean filter

FCS500 SeriesPort size: Rc1/8, Rc1/4, R1/8, R1/4

Push-in joint ø4, ø6, ø8

73

How to order

B OUT side port size

A IN side port size

Note 1: Two set screws (M2.5x25) and two flat washers are included with the product. These are not included when 6A or 8A is selected for the IN or OUT connection bore size.Note 2: When using male thread piping for both IN and OUT sides, check that piping does not apply lateral load or bending torque when installing.

FCS500

FCS500-B(One bracket, 2 set screw (M4 X 6))

H4 H4•Resin type

•Bracket discrete model No.

IN side port sizeA

ø4

ø6

ø8

R1/8

R1/4

H4

H6

H8

6A

8A

B Attached

A

C

Port size

Clean room specifications

Model No.(Clean room specifications)(Oil-prohibited specifications)

FCS500 88 B P90•Stainless steel type


Structure/treatment Material restriction

Copper-based, silicon-based, halogen-based

(Fluorine, chlorine, oxalic) unacceptable.

Use of stainless steel,

oil treatment prohibited


oil treatment prohibitedP90

P94

Port sizeA

IN side/OUT side port size Rc1/8

IN side/OUT side port size Rc1/4

66

88

Note: "P94" is custom order.

OUT side port sizeB

ø4

ø6

ø8

R1/8

R1/4

H4

H6

H8

6A

8A

AttachedB

None

Bracket, set screw

Blank

B

Clean room specificationsC

FCS500 Series

How to order

74

OUTIN

OUTIN

1 26

6

3

4

5

1 2

4

5


•Parts list

•Resin type

•Stainless steel type

Body

Pin

Pin

O ring

Cartridge joint

1

2

3

4

5

6

Element

Housing

Filter

Potting material

Brass (nickeling)

Nitrile rubber

Polyamide


Polypropylene

Urethane

Stainless steel

Stainless steel

Polypropylene

Urethane

Fluoro rubber (for clean room specifications P90)

Nitrile rubber (for specifications P94)

No. Parts name Standard element resin type

P9*elementstainless steel type

Polyamide

Aluminum (alumite treatment)


Polypropylene

Urethane

Stainless steel

Stainless steel

Male thread pipe type

Fluoro rubber

FCS500 Series

75

41.6

15.82-2.8

IN side Port size ø4 ø6 ø8

OUT side port size ø4 ø6 ø8

A 21

20

ø18

OUTIN

Port size ø4 ø6 ø8

Port sizeR1/8R1/4

ø1

8

A

A

IN(OUT)

IN

OUT(IN)

OUT

25

23

40

ø4.5

OUT sidePort sizeRc1/8Rc1/4IN side

Port sizeRc1/8Rc1/4

18

60

OUTIN

1

ø21

20

IN side port sizeR1/8R1/4

OUT side port sizeR1/8R1/4 25

23

ø18

Dimensions

•Resin type Port size IN side (cartridge joint) - OUT side (cartridge joint)

•Male thread pipe type Port size Cartridge joint - male thread

Port size Male thread - male thread


Port size

model No.

A dimension

H8H8

87

8AH8

H88A

76

8A8A

65

H68A

8AH6

75

H66A

6AH6

72

H6H8

H8H6

86

FCS500 (standard element, resin type/male thread pipe type)H6H6

85

6A6A

58.5

6A8A

8A6A

62

H48A

H86A

6AH8

8AH4

73

H46A

6AH4

69.5

H4H8

H8H4

84

H4H6

H6H4

83

Model No.H4H4

80.5

FCS500 Series

Dimensions

76

Inline clean filter

FCS1000 Series Port size: Rc1/4, Rc3/8, R1/4, R3/8 Push-in joint ø8, ø10, ø12

Specifications

Working fluid

IN side diameter (*1)

OUT side diameter (*2)


Withstanding differential pressure MPa

Working pressure range MPa


Filtration rating

Treating flow rate /min (ANR)

Body

Material Case

Element


Cleaning

JIS symbol

Select from Rc1/4, Rc3/8

2.25 (compressed air), 1.5 (nitrogen)

-0.095 to 1.5 (compressed air), -0.095 to 0.99 (nitrogen)

Stainless steel

Stainless steel

Select from push-in joint ø8, ø10, ø12,

R1/4, R3/8, Rc1/4, Rc3/8

1.5

-0.095 to 0.99

Polyamide


DescriptionsResin type Stainless steel type (custom order)

FCS1000-(*1)(*2)FCS1000-(*1)(*2)-P90FCS1000-(*1)(*2)-P94


0.5

5 to 45

0.01 (removal efficiency 99.99%)

300 to 400 Note 1

Polypropylene + urethane


Degreasing and cleaning

0

0.02

0.04

0.06

0.08

0.1

0

0.02

0.04

0.06

0.08

0.1

0

0.02

0.04

0.06

0.08

0.1

0 0.2 0.4 0.6 0.8 1 0 0.2 0.4 0.6 0.8 1 0 0.2 0.4 0.6 0.8 1

•FCS1000-H8H8

•FCS1000-8A8A•FCS1000-H10H10

•FCS1000-10A10A

•FCS1000-88

•FCS1000-88-P90/P94

•FCS1000-H12H12

•FCS1000-1010

•FCS1000-1010-P90/P94

P1=0.3 P1=0.5 P1=0.1 P1=0.3 P1=0.5 P1=0.7 P1=0.1 P1=0.3 P1=0.5 P1=0.7

P1=0.7P1=0.1

Air flow rate (m3/min [ANR]) Air flow rate (m3/min [ANR]) Air flow rate (m3/min [ANR])

Pre

ssu

re lo

ss (

MP

a)

Pre

ssu

re lo

ss (

MP

a)

Pre

ssu

re lo

ss (

MP

a)

Note 1: Initial flow at 0.7 MPa primary pressure and 0.03 MPa pressure decrease. (This varies based on connection bore size.)


77

How to order


A IN side port size

Note 1: Two set screws (M3x40), two flat washers, and two spring washers are included with the product.

FCS1000 H8 H8•Resin type

•Element for replacement model No. (One element, two O-lings)

·For resin type : FCS1000-E ·Stainless steel type

For P90 : FCS1000-E-P90 (custom order)

For P94 : FCS1000-E-P94 (custom order)

IN side port sizeA

ø8

ø10

ø12

R1/4

R3/8

Rc1/4

Rc3/8

H8

H10

H12

8A

10A

8

10


A

C

IN side port size

Clean room specifications


FCS1000 P90•Stainless steel type (custom order)



Copper-based, silicon-based, halogen-based

(fluorine, chlorine, oxalic) unacceptable.


oil treatment prohibited


oil treatment prohibitedP90

P94

IN side port sizeA

Rc1/4

Rc3/8

8

10

OUT side port sizeB

ø8

ø10

ø12

R1/4

R3/8

Rc1/4

Rc3/8

H8

H10

H12

8A

10A

8

10

OUT side port sizeB

Rc1/4

Rc3/8

8

10

Clean room specificationsC

8 8

FCS1000 Series

How to order

78

3 1

2

4

3

55

1

2

4

55


•Parts list

•Resin type •Stainless steel type

1

2

3

4

5

No. Parts name Resin type Stainless steel type

Element

Housing

Filter

Potting material

Body

Plug

O ring

Cartridge joint

(Port size ø8, ø10, ø12)

Adaptor

(Port size Rc1/4, Rc3/8, R1/4, R3/8)


Polyamide

Polyamide

Nitrile rubber

Brass (nickeling)

Nitrile rubber

Aluminum

(Alumite treatment)

Stainless steel

Stainless steel

Fluoro rubber (for clean room specifications P90)

Nitrile rubber (for clean room specifications P94)

Stainless steel

Polypropylene

Urethane

FCS1000 Series

79

86

OUTIN

34

33

4-4.4

4-3.

46.

6Set screw (M3 40)

40

39

A

B

Port size ø8 ø10 ø12

A Port sizeRc1/4Rc3/8

23

23

Port sizeR1/4R3/8

A

23

23

IN OUT

95

73

IN side port sizeRc1/4Rc3/8

ø4023

23

OUT side port sizeRc1/4Rc3/8

Dimensions

•Resin type

· Push-in joint (ø8, ø10, ø12)

· R screw (R1/4, R3/8)

· Rc screw (Rc1/4, Rc3/8)


H8

H10

H12

8A

10A

8

10

Port size A Bø17.5

ø17.5

ø19.5

12

14.5

16

24

24

11

11

Connection model No.ø8 push-in joint

ø10 push-in joint

ø12 push-in joint

R1/4

R3/8

Rc1/4

Rc3/8

FCS1000 Series

Dimensions

80

Particle occurrence data

Particle occurrence is detected from the regulator and 2-port solenoid valve, etc.

Particles generated at the regulator and 2-port solenoid valve, etc., are removed by FCS.

0500

100015002000250030003500

0 20000 40000 60000 80000 100000Valve operational cycle [time]

0500

100015002000250030003500

0 20000 40000 60000 80000 100000Valve operational cycle [time]

[Piece/min]

[Piece/min]

Regulator

Regulator

2 port solenoidvalve

2 port solenoidvalve

Pneumaticssources

Particle counter

Particlecounter

Vacuum pump

Pre-filter(5 m) Oil mist

filter

Measuringchamber

Measuringchamber

Vacuum pump

Particle number"0"

FCS

Example of applications and working circuits

•Application 1. Use as a precision filtration filter to filter air and N2 gas and provide clean air.

•Application 2. Use a vacuum break filter to flush the vacuum break circuit and provide clean air.

* See the catalogs below for products listed on working circuit. [Pneumatic, Vacuum and Auxiliary Components] (Catalog No.CB-024S) [High Purity Chemical Liquid System Component] (Catalog No.CB-031)

Vacuum

3 port valve

Inline clean filterFCS

For air

Air dryerSD

Air filterF3000

Oil mist filter

M3000

CleanregulatorRC2000

Airoperated

valveAMD

Inline clean filterFCS

For nitrogen

Par

ticl

e n

um

ber

(Total

numb

er mo

re tha

n 0.1

m)

Par

ticl

e n

um

ber

(Total

numb

er mo

re tha

n 0.1

m)

FCS Series

81

Flow rate: 500 /min (ANR) *1Port size : Rc1/4, Rc3/8

Elbow type push-in joint reduces space when piping.Flow rate: 50 to 80 /min (ANR) *1Port size : ø4, ø6, ø8 L type push-in joint

FCS500 FCS500 L type joint type

FCS1000 stainless steel large flow rate type

*1 Initial flow at 0.7 MPa primary pressure and 0.03 MPa pressure decrease.Contact the CKD Sales Office for other connections and bore sizes.

Custom orderThese products are custom-made. Contact the CKD Sales Office for details.

FCS500 FCS500 Integrated connection type

FCS500 large flow rate type

This integrated connection has no sealed members and is perfect for leakage testers.Flow rate: 10 /min (ANR) *1Port size : R1/8

FCS500 Series increased flow specificationsFlow rate: 100 to 120 /min (ANR) *1Port size : ø6, ø8 push-in joint, R1/8, R1/4

82

A B

How to order

C D

Port sizeA

Rc1/4

Rc3/8

Rc1/2

(Custom order)

81015

RC2000 8 LN P90GY49B3E1

Model No.(Clean room

specifications)(Oil-prohibitedspecifications)

Clean room specificationsD

Treatment

Use of stainless steel, oil treatment prohibitedP90

Option Note 1B

0.05 to 0.7MPa

0.02 to 0.2MPa

Relief type

Non-relief type

Blank

L

Blank

N

Pressure range Note 2Reliefmechanism

Attachment (attached) Note 1, 3C

No attachments

Pressure gauge (G49D-6- -P94)

Pressure gauge (G49D-6- -P90)

L type bracket

Joint (for exhaust treatment)

BlankGY49GZ49

B3E1

Note 1: When selecting multiple options or adjustments, indicate the model symbol in order from the top. If there is no symbol for the option or attachment, delete the hyphen "-". Example: RC2000-8-P90Note 2: If "No symbol" is selected for the pressure range, the 1.0 MPa pressure gauge (pressure gauge model: G49D-6-P10-P9*) is used. If "L" is selected for the pressure range, the 0.2 MPA pressure gauge (pressure gauge model: G49D-6-P02-P9*) is used.Note 3: Two pipe plugs (R1/8) are included with the product. If a pressure gauge is selected as an attachment, one plug is included.

Note 1: When using the standard with a set pressure of 0.4 MPa or less, check that the primary pressure difference for the set pressure is within 0.5 MPa. When using the low pressure type, check that the primary pressure difference for the set pressure is within 0.3 MPa.

Working fluid

Max. working pressure MPa



Set pressure range MPa

Port size (IN/OUT)

Pressure gauge port size

Product mass kg

Metal

Wetted areas materials Resin

Rubber


Cleaning (wetted areas)

JIS symbol

SpecificationsModel No. RC2000-8-P90 RC2000-10-P90 RC2000-15-P90


1.0 (0.5 for low pressure)

1.5

5 to 60

Standard: 0.05 to 0.7Note 1

Low pressure: 0.02 to 0.2

Rc3/8

Rc1/8

0.45

SUS316

PTFE

FKM


Precision cleaning

Rc1/4 Rc1/2

0.47 0.59

Overview FeaturesThe stainless steel RC2000 Series has specificationsprohibiting oil, making this suitable for controlling the pressure of clean air and N2 used in semiconductor manufacturing and liquid crystal equipment. This regulator is also suitable for air (N2) exhaust because it is compact and accommodates a large flow.

•Specifications prohibiting oilAll parts are precisely cleaned (wetted) and are integrallyproduced from assembly to packaging in a clean room. Nogrease is used in wetted areas.

•Compact with large flowA large flow of 0.8 m3/min is realized with a compactness of 50 mm face to face.(Flow at 0.7 MPa primary pressure, 0.5 MPa set pressure, 0.1 MPa pressure decrease)

•Reversible when back pressure is not appliedSecondary pressure is reversed to the primary side when primarypressure is purged.This safety-oriented product leaves no pressure on thesecondary side.

Clean regulator

RC2000 Series Port size: Rc1/4, R3/8, R1/2

83

* A mesh filter is installed on the IN side of RC2000-8-P90 and RC2000-10-P90.



•RC2000-8-P90

•RC2000-15-P90

•RC2000-10-P90Primary pressure 0.7MPa

0

0.1

0.2

0.3

0.4

0.5

0.6

0.7

0 0.5 1 1.5 2Air flow rate m3/min (ANR)

Primary pressure 0.7MPa

0

0.1

0.2

0.3

0.4

0.5

0.6

0.7



0

0.1

0.2

0.3

0.4

0.5

0.6

0.7


Pressure characteristicsFlow characteristics (low pressure)

•RC2000-*-L-P90

Air flow rate m3/min (ANR)

Secondary side flow rate 25L/minSet pressure 0.2MPa

0

0.1

0.2

0.3

0 0.2 0.4 0.6 0.8 10

0.1

0.2

0.3

0 0.2 0.4 0.6 0.8 1Primary pressure MPa

Setpoint


Sec

on

dar

y p

ress

ure

(M

Pa)

Sec

on

dar

y p

ress

ure

(M

Pa)

Sec

on

dar

y p

ress

ure

(M

Pa)

Sec

on

dar

y p

ress

ure

(M

Pa)

Sec

on

dar

y p

ress

ure

(M

Pa)

IN OUT

No.1

2

3

4

5

6

7

8

9

10

11

12

13

14

Parts nameCover

Pressure adjusting screw assembly

Spring

Diaphragm

Valve

O ring

Plate

Screw

Knob

Mounting nut

Body

Bottom cap

Bottom rubber

Spring

Material (treatment)PA66

Steel, SUS, FKM, POM

Steel

SUS316, FKM, SUS303

SUS316, FKM

FKM

SUS304

Steel (nickel plating)

POM

Zinc die casting (nickel plating)

SUS316, FKM, PTFE

SUS316

FKM

SUS316

3

4

5

6

7

1

2

8

11

10

12

9

14

13

RC2000 SeriesFlow characteristics

84

RC2000 Series

Dimensions

Model No.RC2000-8

RC2000-10

RC2000-15

ARc1/4

Rc3/8

Rc1/2

B

50

58

C

25.5

27.5

D

27

29

E

95

99

F

21

23

Attachment

•L type bracket (-B3) Part model No. : RC2000-B3

•Joint (-E1) Part model No. : RC2000-E1 Model No.

Working fluid

Fluid temperature

Ambient temperature

Applicable tube

RC2000-E1Compressed air, nitrogen

5 to 60

5 to 60

Urethane tube

ItemMetal part

Rubber part

Material (treatment)Brass (nickeling)

NBR

32

Attachment(Joint: for exhaust treatment)

38

OUT

Dim

ensi

on

wh

en

op

erat

ing

kn

ob

E3

CD

F

12

Pressure gauge port size2-Rc1/8

IN

B3659

Exhaust treatment port sizeM5

Attachment(L type bracket)

Port size2-A

Attachment(Pressure gauge)

ø31

Panel cut dimensionPanel plate thickness: Max. 4mm

28

54

68

6.5

1624.5

2

M5 0.8

7 (opposite side of hexagon) Tube O.D. ø6

ø9

15.3

2.5

85

RC2000 SeriesPressure gauge

Pressure gauge

Specifications How to order

Dimensions

Working fluid

Fluid temperature

Ambient temperature

Accuracy Note 1

Shape

Display section diameter

Material

Pressure range MPa

Port size R

Weight g

Model No. G49D-P9*Compressed air, nitrogen

5 to 60

5 to 60

JIS class 3 equivalent ( 3%FS)

DT type (back side screw, stock section 4 squares)

ø43

SUS316

SCS14 (SUS316 equivalent)

Steel (chrome plated)

Glass

0 to 0.2

0 to 1.0

1/8

90

Model No.A

Pressure gaugeG49DPort sizeB

R1/86Pressure display (MPa)C

0 to 0.2

0 to 1.0

P02P10

G49D 6 P02 P90

Bourdon tube

Stock

Housing

Lens

Note 1: The indication accuracy guaranteed temperature is 20 15 .

43.527.5

46.5

ø43

ø2 hole

R1/8

P90 is clean assembly/clean packing.P94 is clean packing.

D Clean room specifications

P90P94


Copper-based, silicon-based, halogen-based (fluorine, chlorine, oxalic) unacceptable.

Use of stainless steel, oil treatment prohibitedUse of stainless steel, oil treatment prohibited

87

High vacuum componentsHigh vacuum components

Precautions 88Air operated valve for high vacuumAVB*1V 92AVB**3 96AVB**2 100AVB* Custom order 106AVP**2 112Manual valve for high vacuumMVB*0 118MVP*0 120Leak valve (Vacuum break valve)FGL11/21 122High vacuum solenoid valveHVB112 126HVB41 128HVB51/61/71/81 130Vacuum delay solenoid valveHVL12/42 134

CONTENTS

87

88

Incorrect installation and piping will cause productproblems, may cause problems in the user's sys-tem, and may cause death or serious injury. The useris responsible for ensuring that the operator hasread the instruction manual and fully understandsthe system.After installation, conduct an appropriate functiontest to confirm that the product is correctly installed.

The vacuum valve is basically designed so all ports can be usedas connection ports to the vacuum pump. However, with somemodels (below), the port for connection to the vacuum pump islimited to one direction.



The high-vacuum component is designed for the control of gas (inert gas, air, vacuum). If used with other media (active gas, fluids,solids, etc.), the product may not function correctly or the performance may drop significantly.

Design & Selection

1. Working media

Electric shock: Solenoid valve electric wiring con-nection (bare live section)

There is a risk of electric shock of the solenoid valve (HVB/HVL) electric wiring connections (bare live section) aretouched.Always disconnect the power supply before starting disas-sembly inspection.Do not touch the live sections with wet hands.

Continuous energized use of solenoid valveWhen the solenoid valve HVB51/61/71/81 are continuouslyenergized and used, and then the power is turned off, thevalve may not open even when reenergized.Check the conditions in Table 2 before using the valve in acontinuous energized state.

1. Solenoid valve

2. Direction when connecting pipes (some models)

High-temperature warning during energizing ofsolenoid valve's coil (some models)

The solenoid valve (HVB/HVL) coil heats when energized. Mod-els using the H Class specification coil (some HVB models) getespecially hot when energized.A risk of burns exists if touched directly.

Precautions for wiring solenoid valveAs a guide, use a wire having a nominal cross-section of0.5 mm2 or larger. Check that excessive force is not ap-plied to leads.Use the product within the allowable voltage range. Useexceeding the tolerable voltage range may cause malfunc-tions or damage coils.Provide an appropriate circuit breaker, such as a fuse, onthe control circuit side to protect electrical equipment.Using a switch circuit that does not generate contact chat-tering improves solenoid valve durability.If the electric circuit is not susceptible to the solenoid surge,provide measures by inserting a surge absorber parallel tothe solenoid.

3. Solenoid valve

<<Table 2>> Conditions for continuous energizing

HVB51-12F-3

HVB51-12F-5

HVB61-12F-3

HVB71-15F-3

HVB71-15F-5

HVB81-15F-3

HVB81-15F-5

ModelDifferential pressure

(MPa)

*1

Allowable continuousenergizing time

*2

De-energized timeto restarting

*3

Differential pressurefor restarting

Continuous energizing working conditions

-0.1 and over to 0.1

0.1 to 0.2


0.0 to 0.1


0.2 to 0.3




0.2 to 0.3


0.0 to 0.1

*1: Continuous energizing time which allows restarting immediately after continuous energizing*2: De-energizing time required after energizing for time shown in *1*3: Differential pressure allowing restarting immediately after energizing for time longer than *1

1. Installation


WARNING

If the vacuum pump is connected to a not designated portwhen using models in Table 1, problems such as sealing faultsor malfunction may occur.

CAUTION

During use

CAUTION

CAUTION

CAUTION

Continuous energizing possible

25min and over


25min and over


30min and over




120min and over


90min and over

1

2

3

4

5

10min

10min

10min

60min

40min

-0.1 to 0.1MPa

-0.02 to 0.0MPa

-0.1 to 0.2MPa

-0.1 to 0.2MPa

-0.1 to 0.0MPa

<<Table 1>> Models with limited vacuum pump connection port

ModelAVP712-50KAVB812-80KAVP812-80K

FGL (all models)HVB51-12F-5HVB71-15F-5

Vacuum pump connection portBottom port (Refer to Fig. 1)Bottom port (Refer to Fig. 1)Bottom port (Refer to Fig. 1)

OUT portA portA port

Side port

Bottom port

<<Fig. 1>>

89

Correctly connect leads accordingto the color coding. Always turn offthe power for the electrical circuit onthe connection side before startingthis wire.

Fig. 1 Example of T2 basic circuit

Fig. 2 Example (1) of T3 basic circuit(When switch power supply andload power supply are the same)

Fig. 3 Example (2) of T3 basic circuit(when switch power supply andload power supply are different)

Provide a contact protection circuitto prevent switch damage and short-ened life.

When connecting to an inductionload (relay, solenoid valve), a surgevoltage will occur when the switchis turned off. Provide the protectivecircuit shown in Fig. 4.When connecting to a capaciousload (capacitor), a rush current willoccur when the switch is turned on.Provide the protective circuit shownin Fig. 5.If the lead is longer than 10 m, pro-vide the protective circuit shownin Fig. 6 and 7 (for T2) or Fig. 8 (forT3).

Fig. 4 Example of using surge absorbingelement for induction loadUse Hitachi VO6C diode or equivalent.

2 Output circuit protection

1 Connecting leads 3 Connecting to a programmablecontroller (sequencer)

Fig. 5 Example of current limiting resis-tance R inserted in capacious load.In this case, the resistance R ( )must satisfy the following expres-sion:

Fig. 6 Choke coilL=several hundred H to several mHSurpassing high-frequency charac-teristics

Wire near switch (within 2m)

Fig. 7 Rush current limiting resistanceR = Largest resistance acceptablefor load circuit wiringWire near switch (within 2m)

Fig. 8 Electric power noise absorp-tion circuitC1=20 to 50 F Electrolytic ca-pacitor (withstand voltage 50Vand over)C2=0.01 to 0.1 F Ceramic ca-pacitorRush current limiting resistanceR1 = 20 to 30R2 = Largest resistance accept-able for load circuit wiringWire near switch (within 2m)

Connection differs according to the pro-grammable controller model. Connectas shown in Fig. 9 to 13.

Fig. 9 Example of T2 connection tosource load input (with externalpower supply)

Fig. 10 Example of T2 connection tosource load input (with inte-grated power supply)

Fig. 11 Example of T2 connection tosink input

Fig. 12 Example of T3 connection tosource load input (with exter-nal power supply)

Fig. 13 Example of T3 connection tosource load input (with inte-grated power supply)

The T3 switch cannot be connected to asink input programmable controller.

Precautions

Brown

Black

Blue

Load

Switch

ICR

Brown

Black

BlueSwitch

0.05= R( )

V

L

Brown

Blue

Switch

LoadBelow 2m

R

Brown

Blue

Switch

LoadBelow 2m

C1 R1

R2

C2Brown

Blue

BlackSwitch

Below 2m

24VDC COM

COMBlue

Brown

Input

term

inalSwitch

Programmablecontroller

BlackExternalpower

24V DC

COMBlue

Brown

Inpu

t ter

min

al

Switch


Black

Externalpower

Switch

Switch

Blue Brown

Blue Brown


Input

termi

nal

Switch

Switch

Blue Brown


Input

termi

nal

COM

BlueBrown


Input

termi

nal

COM

Switch

Switch

10 to 30V DC

LoadBrown

Blue

Switch

DC power supply for switch and load10 to 28V DC

Brown

Blue

BlackSwitch

Load

DC power supplyfor load30VDC or less

Brown

Blue

BlackSwitch

Load

Proximity switch T2H, T2V, T3H, T3V, NAB-C2, C3

90

If the surrounding area contains astrong magnetic field or large current(large magnet, spot welder, etc.), use astrong magnetic field proof switch.When installing a cylinder with a switchnearby in parallel, or if a magnetic bodymoves very close to the cylinder, mu-tual interference may occur and may ad-versely affect detection accuracy.(Contact CKD for details on the strongmagnetic field proof switch.)

The lead's minimum bending radius is9 mm and over. Pay special attention towiring so that repeated bending strainand tensile strength are not applied tothe lead. Connect an elastic lead speci-fications cylinder switch with higherelasticity at movable sections.(Contact CKD for details on the elastic-ity lead specifications cylinder switch.)

When several 2-wire switches areconnected in parallel, leakage currentincreases in proportion to the num-ber of connected units. Check theload specifications and determine thenumber of switches to be connected.Note that switch light may dim or maynot light.With the 2-wire proximity switch,when one switch is changing from onto off, voltage at both ends of theswitch connected in parallel drops tothe internal voltage drop value whenthe switch is turned on and will beless than the load voltage range.Other switches will not turn on. Checkthe input specifications of the pro-grammable controller, which is theconnection load, before starting use.The 3-wire proximity switch has anextremely small leakage current value(10 A or less), so no problem occursunder normal conditions.

When connecting several 2-wireswitches serially, the switch voltagedrop will be the total voltage drop ofall connected switches.The voltage applied to the load sideis the voltage obtained by subtract-ing the voltage drop at switches frompower voltage. Check the input speci-fications of the programmable con-troller, which are load specifications,and determine the number ofswitches to be connected.When connecting several 3-wire prox-imity switches serially, switch voltagedrop will be the total voltage drop ofall connected switches, as with the2-wire.Current that flows to the switch willbe the total of connected switch cur-rent consumption and load current,as shown below. Thus, Check the loadspecifications and determine thenumber of switches to be connectedso that the switch's maximum loadcurrent is not exceeded.Switches light only when all-switchesare on.

Fig.14

N0.n

Brown

Brown

Brown

Black

Blue

Black

Black

Blue

Blue

Sw

itch

N0.2

Sw

itch

N0.1

Sw

itch

Lo

ad

Currentconsumption

Currentconsumption

Load current

Load current + current consumption

Load current + current consumption 2

Load current + current consumption (n-1)

Currentconsumption

DC power supply for switch and load

4 Magnetic environment

5 Protecting the lead

Parallel connection6

PrecautionsProximity switch T2H, T2V, T3H, T3V, NAB-C2, C3

　

Serial connections7

91

Fig. 3

Fig. 4

Use the following or equivalent relays. OMRON: MY Fuji Electric: HH5 Tokyo electricity: MPM Matsushita Electric Works: HC

When connecting several TO switchesserially, switch voltage drop will be thetotal voltage drop of all connectedswitches. If one TO is used to check theoperation and another T5 switch is used,the voltage drop will be equivalent to oneTO switch (approx. 2.4 V). The Lampslight only when all of the switches areon.

There is no limit when connecting mul-tiple switches in parallel. However, whenTO switches are connected, the switchmay dim or may not light.

Provide the contact protection circuitshown in Figs. 1 and 2. When connect-ing an inductive load, such as a relay,surge voltage will be generated whenthe switch turns off.Provide a protection circuit when con-necting a capacitive load (capacitor),because rush current will be gener-ated when the switch turns on.When the wiring length increases, wir-ing capacity is reached and rush cur-rent generated. This may damage theswitch or reduce life, so provide thecontact protection circuit shown inFigs. 3 and 4 if wiring length exceedsthe values given in Table 1.Table 1

Fig. 1 When using capacitor, resistor

Fig. 2 When using diode

Avoid using this switch in areas with astrong magnetic field or large current(large magnet, spot welder, etc.). Wheninstalling a cylinder with a switch nearbyin parallel, or if a magnetic body movesvery close to the cylinder, mutual inter-ference may occur and may adverselyaffect detection accuracy.(Contact CKD for details on the strongmagnetic field proof switch.)

The lead's minimum bending radius is9 mm and over. Pay special attention towiring so that repeated bending strainand tensile strength are not applied tothe lead.Connect an elastic lead specificationscylinder switch with higher elasticity atmovable sections. (Contact CKD for de-tails on the elasticity lead specificationscylinder switch.)

Connect the switch lead in parallel to theload instead of connecting it directly tothe power. When using TO, observepoints and below.

When using for DC purposes, connectso that the brown wire comes to the

side and the blue wire comes to the side.The switch will function when con-nected in reverse, but the switch willnot light.When connected to the AC relay or pro-grammable controller input, if semi-waverectification is conducted with that circuit,the switch may not light. The switch willlight when the lead's polarity is reversed.

Do not use a load that exceeds maxi-mum switch contact capacity. Note thatwith the TO switch, the switch may notlight if the load is less than the ratedcurrent value.

1 Magnetic environment 5 Contact protection

6 Relay

7 Serial connection

8 Parallel connection

2 Protecting the lead

Connecting the lead3

4 Contact capacity

V

C R

Brown line Blue lineSwitch

AppliedvoltageACDC

Load

Capacitor resistance

User wiring

Protective circuit (spark quenching circuit)Recommended value C capacitor 0.033 to 0.1 F

R resistor 1 to 3OKAYA Electric Industries XEBIKI or equivalent product

Brown line Blue line

AppliedvoltageDC

User wiring

Protective circuitGeneral rectifying diodeHITACHI V06C or equivalent product

V

Switch

Load

LV


Below 2mSwitch

AppliedvoltageACDC

Load

Choke coilL = several hundred H to several mHSurpassing high-frequency characteristicsWire near switch (within 2m)

RV


Below 2mSwitch

AppliedvoltageACDC

Load

Rush current limiting resistanceR = Largest resistance acceptable for load circuit wiringWire near switch (within 2m)

1 2

1

2

PrecautionsReed switch TOH, TOV, T5H, T5V

＋

－

VoltageDCAC

Wire length50m10m

92


AVB 1V Series Formed bellows type Aluminum body type

4567

Model No. Actuation Orifice

AVB41V NC ø16

AVB51V NC ø24

AVB61V NC ø40

AVB71V NC ø50

Precautions

Always read page 9 in the introduction and the precautions on page 88 to 91 to ensure

correct, safe use of this product.

Working media

Installation

Direction when connecting piping

Proximity switch, reed switch

Much smaller and lighter with aluminum body

Wetted areas (flow path) have no sliding sections that may generate particles.

The aluminum body and dedicated actuator reduce the weight by approx. 1/3 of the conventional product (SUS body).

The compact body uses less space than the conventional model (AVB**3).

There is no dead space where gas may get trapped.(Body has no welded parts.)

Low dust generation

Light weight (Average 60% lighter than conventional product)

30% lower total height

No gas trapsMaterial: SUS316LDurability: 1 million times (*1)

*1 Life when working media is inert gas within specified range, which does not contain solids such as reaction products.

The vacuum pump can be connected to either port.

A reed switch (proximity, reed) can be connected to confirm the operation.(The switch rail kit is required for retrofitting.)

The bellows can be attached and removed easily using a hexagon wrench. This greatly reduces "washing" and

"replacement" processes.

Miniature switch mountable

Long-life formed bellows

Usable with back pressure

Quick attachment and removal

93

Descriptions

Working fluidWorking pressure range Pa(abs)Maximum working differential pressure MPaValve seat leakage Pa·m3/s(He)External leakage Pa·m3/s(He)Withstanding pressure MPaFluid temperatureAmbient temperatureOrifice mmConductance Note 1 /sConnectionControl pressure MPaWeight kgJIS symbol

Specifications

AVB41V AVB51V AVB61V AVB71V

Note 1: The conductance is the theoretical calculation value at the molecular flow range, and is not the actual measurement value.

Descriptions

Applications

Power voltage

Load voltage/current

Power consumptionInternal voltage dropLightLeakage current

Lead wire length Note 2

Maximum impactInsulation resistanceWithstand voltageAmbient temperature rangeProtective structure

20M or more when measured with 500V DC meggerNo failure when 1000V AC is applied for 1 minute

-10 to +60IEC Standard IP67, JIS CO920 (water-tight type), oil-resistant

Switch specifications

T2H/T2VProgrammable

controller–

10 to 30V DC,5 to 20mA Note 3

–4V or less

1mA or lessStandard 1m (oil-resistant

vinyl cabtire cord2-conductor 0.2mm2)

T3H/T3VRelay, programmable

controller10 to 28V DC

30V DC or less,100mA or less

10mA or less at 24VDC (ON)0.5V or less

Illuminating diode (lights when ON)10 A or less

Standard 1m (oil-resistantvinyl cabtire cord

3-conductor 0.2mm2)

TOH/TOVRelay, programmable

controller–

12/24V DC 5 to 50mA100V AC 7 to 20mA

–2.4V or less

0

T5H/T5VProgrammable controller, relay,

IC Circuit (without light), serial connection–

12/24V DC 50mA or less100V AC 20mA or less

–0V–0

Proximity switch Reed switch

Note 2: 3 m and 5 m leads are available as options.Note 3: The maximum load current 20 mA above is at 25 . If the switch's working ambient temperature is higher than 25 , load current will be lower than 20 mA (5 to 10 mA at 60 ).Note 4: The switch rail kit is required for retrofitting (See page 94).Note 5: See page 89 to 91 for other precautions for using the switches.

Vacuum and inert gas

1.3 10-6 to 1 105

0.1

1.3 10-10 or less

1.3 10-11 or less

0.3

5 to 60

0 to 60

0.4 to 0.6

ø16

5

NW16

0.45

ø24

13

NW25

0.50

ø40

47

NW40

1.15

ø50

80

NW50

1.20

980m/s2 294m/s2


2-conductor 0.2mm2)

AVB 1V Series


4567

94

How to order


4567

Orifice ø16

Orifice ø24

Orifice ø40

Orifice ø50

Reed

Proximity

2 wire

Symbol Descriptions

Model No.

AVB T5H

AVB61V-40K-T5H3-HModel: AVB61V air operated valve for high vacuum (NC type)

25K5 1V 3 H

A

:

:

:

:

:

Orifice ø40

NW40

T5H (axial lead wire)

3m

Detect when valve is open

Series

Connection

Switch model No.

Switch lead wire length

Switch quantity


AVB71V-R-T3V-RModel: Switch rail kit for AVB71V

:

:

:

:

AVB71V

T3V (radial lead wire)

1m

Detect when valve is closed

Series

ActuationNC

<How to order switch rail kit>

AVB TOH4 1V R 3 D

Switch rail kit

Series

16K25K40K50K

NW16

NW25

NW40

NW50

Only AVB41V is available




B Connection

BlankHRD

Without switch



Detect when valve is open/closed

E Switch quantity

Blank35

1m(standard)

3m

5m

D Switch lead wire length

BlankT0HT5HT0VT5VT2HT3HT2VT3V

Without switch

Axial lead wire

Radial lead wire

Axial lead wire

Radial lead wire

C Switch model No.

3 wire

2 wire

3 wire

4567

AVB41V

AVB51V

AVB61V

AVB71V

Reed

Proximity

2 wire

Symbol DescriptionsA Series

HRD




D Switch quantity

Blank35

1m (standard)

3m

5m

C Switch lead wire length

T0HT5HT0VT5VT2HT3HT2VT3V

Axial lead wire

Radial lead wire

Axial lead wire

Radial lead wire

B Switch model No.

3 wire

2 wire

3 wire

A

ConnectionB

Switch model No.C

Switch lead wire lengthD

Switch quantityE

A

B

C

D

E

SeriesA

Switch model No.B

Switch lead wire lengthC

Switch quantityD

Series

Switch model No.

Lead wire length

Switch quantity

A

B

C

D

AVB 1V Series4567

95


No. MaterialParts name1

2

3

4

5

6

7

8

9

10

11

12

13

Cylinder (magnet integrated)

Ring

Hexagon socket head screw

O ring

Body

Bellows

O ring

Valve disk B

O ring

Plain washer

Spring washer

Hexagon socket head bolt

Rod

A5056

SUSXM7

FKM

A6063-0

SUS316L

FKM

SUS316L

FKM

SUS304

SUS304

SUSXM7

SUS316L

AVB41V

AVB51V

AVB61V

AVB71V

ø30(NW16)

ø40(NW25)

ø55(NW40)

ø75(NW50)

Model No. A40

50

65

70

B106

116

157.5

163

C7

7

17

17

D25

25

35.5

35.5

EM5

M5

Rc1/8

Rc1/8

Gø38.6

ø38.6

ø58.8

ø58.8

Fø60

ø60

ø88

ø88

H

Switch rail

Switch

Dimensions Appearance when switch is mounted

The entire switch rail is removed in maintenance, so the switch position need not be adjusted after assembly.<PAT.P >

AIR

OP

ER

AT

ED

VA

LVE

MA

INO

PE

RA

TE

MA

DE

IN

JA

PA

N

OR

IFIC

ES

ER

IAL

for

VA

CU

UM

MO

DE

L

CK

D C

orpo

ratio

n

1

2

3

4

5

6

7

8

9

10

11

12

13

E

DA

CB

BA

G

HF

AVB 1V Series


4567

96


AVB *3 Series Formed bellows type Stainless steel body compact type

5678


AVB513 NC ø24

AVB613 NC ø40

AVB713 NC ø50

AVB813 NC ø80


AVB523 NO ø24

AVB623 NO ø40

AVB723 NO ø50

AVB823 NO ø80

Miniature switch mountableA reed switch (proximity, reed) can be connected to confirm the operation.(Retrofitting possible)

No gas trapsThe integrated blister creates a streamlined, smooth flow path.There is no dead space where gas may get trapped.

Low dust generationWetted areas (flow path) have no sliding sections that may generate particles.

25% lower total heightThe compact body uses less space than the conventional model (AVB**2).

Long-life formed bellowsSpecial stainless steel material (ASL350)Durability: 1 million times (*1)


Usable with back pressureThe vacuum pump can be connected to either port.

Short installation/removal time one-fifth the conventionalThe bellows can be attached and removed easily using a hexagon wrench. This greatly reduces "washing" and "replacement" processes.

Compact with improved maintenance

Contact CKD for the following custom orders:

1. Different flange surface length

2. Different flange types

3. Valve heating

4. Different O-ring materials at wetted areas

5. Slow exhaust

6. Straight piping

Precautions


the precautions on page 88 to 91 to ensure


Working media

Installation




AVB533 Double acting ø24




97

Working fluidWorking pressure range

Pa(abs)Maximum working differential pressure MPaValve seat leakage

Pa·m3/s(He)External leakage

Pa·m3/s(He)Withstanding pressure MPaFluid temperatureAmbient temperatureOrifice mmStroke mmConductance Note 1 /sConnectionControl pressure MPa

Weight kg

JIS symbol


1.3 10-6 to 1 105

0.1

1.3 10-9 or less

1.3 10-9 or less

0.35 to 600 to 60

0.4 to 0.6

Specifications

AVB5 3 AVB6 3 AVB7 3 AVB8 3123

123

123

123

ø24

10

13

NW25

1.1

1.1

1.0

ø40

20

52

NW40

1.9

1.9

1.6

ø50

22

80

NW50

3.6

3.5

3.2

ø80

32

242

NW80

7.9

7.8

7.3

NCNO

Double acting

NC

Note 1: The conductance is the theoretical calculation value at the molecular flow range, and is not the actual measurement value.

Descriptions

Descriptions

Applications

Power voltageLoad voltage/current

Power consumption

Internal voltage dropLightLeakage currentLead wire length Note 2

Maximum impactInsulation resistanceWithstand voltageAmbient temperature rangeProtective structure

20M and over when measured with 500VDC megger

No failure when 1000VAC is applied for 1 minute

-10 to + 60

IEC Standard IP67, JIS CO920 (water-tight type), oil-resistant


T2H/T2VProgrammable

controller–

10 to 30V DC,5 to 20mA Note 3

–

4V or less

1mA or lessStandard 1m (oil-resistant

vinyl cabtire cord 2-conductor 0.2mm2)

T3H/T3VRelay, programmable

controller10 to 28V DC

30V DC or less,100mA or less

10 mA or less at24 VDC (on)0.5V or less

Illuminating diode (lights when ON)10 A or less


3-conductor 0.2mm2)

TOH/TOVRelay, programmable

controller–

12/24V DC 50mA or less1OOV AC 7 to 20mA or less

–

2.4V or less

0

T5H/T5VProgrammable controller, relay,

IC Circuit (without light), serial connection–

12/24V DC 50mA or less1OOV AC 20mA or less

–

0V–0

Note 2: 3 m and 5 m leads are available as options.Note 3: The maximum load current 20 mA above is at 25 . If the switch's working ambient temperature is higher than 25 , load current will be lower than 20 mA (5 to 10 mA at 60 ).Note 4: See page 89 to 91 for other precautions for using the switches.

980m/s2 294m/s2

NO Double acting


2-conductor 0.2mm2)

Proximity switch Reed switch

AVB *3 Series


5678

98

Model No.

••••••

<Example of model number >

AVB613-40K-T5H3-HModel: AVB613 high vacuum air operated valveA SeriesB ActuationC ConnectionD Switch model No.

E Lead wire lengthF Switch quantity

AVB 6 1 3 - 40K - T5H 3 - H

How to order

T*H type(Axial lead wire)

T*V type(Radial lead wire)

Appearance when switch is mounted

5678

Orifice ø24

Orifice ø40

Orifice ø50

Orifice ø80

Reed

Proximity

2 wire


25K40K50K80K

NW25

NW40

NW50

NW80

Only AVB5*3 is available




C Connection

BlankHRD

Without switch




F Switch quantity

Blank35

1m(standard)

3m

5m

E Switch lead wire length

123


NO (normally open)

Double acting

B Actuation

BlankT0HT5HT0VT5VT2HT3HT2VT3V

Without switch

Axial lead wire

Radial lead wire

Axial lead wire

Radial lead wire

D Switch model No.

3 wire

2 wire

3 wire

SeriesA

ActuationB

ConnectionC

Switch model No.D

Switch lead wire lengthE

Switch quantity(Detecting position)

F

: Orifice ø40: NC (normally closed): NW40:T5H(Axial lead wire)

: 3m: Detect when valve is open

AVB *3 Series5678

99


Dimensions

NC type/Double acting

Switch model No.

AVB**3-*K- * * *

1

2

3

4

5

6

7

8

9

10

11

12

13

14

15

No. Parts name MaterialCompact cylinderCylinder adapterBellows assemblyO ringBody assemblyParallel pinO ringValve disk BO ringPlain washerSpring washerHexagon socket head boltSpring holder BSpringSpring holder A

A5056ASL350/SUS316LFKMSUS316LSUS301FKMSUS316LFKMSUS304SUS304SUS304C3604SWOSC-V (Electrodeposition coating)C3604

AVB5*3AVB6*3AVB7*3AVB8*3

Aø40(NW25)ø55(NW40)ø75(NW50)ø114(NW80)

B50557090

C505570105

D151.5(162.5)170.5(181.5)

208258

E37

44.552

64.5

F8

10.51113

G10151515

HRc1/8Rc1/4Rc1/4Rc3/8

I7786

112137

Dimensions in parentheses under symbol D are for NO.

(NC cross-section)

NO

Model No. Symbol

C L O S E

O P E NC L O S E

O P E N

A

C

A

B

D

G2-H

EF

I

I

13

14

15

1

2

3

4

5

6

7

8

9

10

11

12

AVB *3 Series


5678

100


AVB512 NC ø24

AVB612 NC ø40

AVB712 NC ø50

AVB812 NC ø80

AVB21 NC ø 5


AVB522 NO ø24

AVB622 NO ø40

AVB722 NO ø50

AVB822 NO ø80







AVB *2 Series Formed bellows type

5678

Pilot-operated solenoid valve installable





(Excluding AVB812)

Miniature switch mountableA reed switch (proximity) can be connected to confirm the operation.(Retrofitting possible)

AVB21 is:Ideal for leak valves

Ultra-compact with 5mm orifice

Long-life, low dust generation

Precautions


the precautions on page 88 to 91 to en-

sure correct, safe use of this product.

Working media

Installation



101

AVB21-8T AVB5 2 AVB6 2 AVB7 2 AVB8 2




Pa·m3/s(He)Withstanding pressure MPaFluid temperatureAmbient temperatureOrifice mmStroke mmConductance Note 1 /sConnectionControl pressure MPaWeight kgJIS symbol


1.3 10-6 to 1 105

0.1

1.3 10-9 or less

1.3 10-9 or less

0.35 to 600 to 60

0.3 to 0.5

Specifications123

123

123

123

1.3 10-6 to 2.5 105

0.250.1

(Back pressure notavailable for NC type)

241513

NW25

1.4

53-

1/4" tube

0.25

402052

NW40

2.5

502280

NW50

3.3

8032

242NW80

9.9

Descriptions

Applications

Power voltageLoad voltage/CurrentPower consumptionInternal voltage dropLightLeakage currentLead wire length Note 2Maximum impactInsulation resistanceWithstand voltageAmbient temperature rangeProtective structure

294m/s2

100M and over when measured with 500VDC meggerNo failure when 1000VAC is applied for 1 minute



NAB-C2Programmable

controller-

10 to 30V DC, 5 to 30mA-

4V or less

1mA or less1m (oil resistant vinyl round code 2-conductor 0.2mm2)

NAB-C3Programmable controller, relay,IC circuit, small solenoid valve

10 to 28V DC30V DC, 150mA or less

15mA or less at 24V DC (when ON)0.5V or less

10 A or less1m (oil resistant vinyl round code 3-conductor 0.15mm2)

Proximity switch

(Custom order)

Note 1: The conductance is the theoretical calculation value at the molecular flow range, and is not the

actual measurement value.

Electrical specificationsRated voltageApparentpowerPowerconsumptionHeat resistance class

100V AC(50/60Hz), 110V AC(60Hz), 200V AC(50/60Hz), 220V AC(60Hz), 24V DC3.9VA(50Hz), 3.1VA(60Hz)9.2VA(50Hz), 7.9VA(60Hz)2.0W(50Hz), 1.7W(60Hz)

4.0WB

Note 2: 3 m and 5 m leads are available as options.

Descriptions

NC NO Double acting

YXX Y

X

(Excluding AVB812)

(AVB812)

When holdingWhen starting

ACDC

Illuminating diode (lights when ON)

Bottom port

Side port

Side port

Bottom port

AVB**2-*K

AVB21-8T

AVB *2 Series


5678

102

Model No.

Method forAVB21 omitted


AVB512-25K-2C-HC23-DC24VModel: AVB512 high vacuum air operated valve

SeriesNote 1Note 2

AVB 5 1 25K 2C C2 3H DC24V

How to order

25678

1/4"

25A

40A

50A

80A (Custom order)


8T25K40K50K80K

1/4" tube

NW25

NW40

NW50

NW80

Only AVB21 is available





C Connection

BlankHRD

Without switch




E Switch quantity (Detecting position)

BlankAC100VAC200VDC24V

Without solenoid valve

AC100V(50/60Hz), AC110V(60Hz)

AC200V(50/60Hz), AC220V(60Hz)

DC24V

H Rated voltage

Blank35

1m (standard)

3m

5m

G Switch lead wire length

BlankC2C3

Without switch

Proximity 2 wire

Proximity 3 wire

F Switch type

Blank2C2G


Grommet coil

DIN terminal box

D Coil

123


NO (normally open)

Double acting

B Actuation

Note on model No. selection

Note 1: AVB2 is available only for the AVB21-8T.(There is no option setting.)

Note 2: The cylinder switch and solenoid valve are not used for the AVB2 type. Only NC is used for activation.

Note 3: If 2 (NO) is selected for B Actuation, it is basically not possible to retrofit the solenoid valve. Designate the solenoid valve at purchase.

Note 4: The D Coil setting is used only when 1 (NC) or 2 (NO) is selected for B Actuation.(The solenoid valve option is not used for the double-acting valve.)

2 - - - -

A

ActuationNote 3

B

ConnectionC

CoilNote 4

D


E

Switch typeF

Lead wire lengthG

Rated voltageH

A

B

C

D

E

F

G

H

SeriesActuationConnectionCoilSwitch quantitySwitch typeLead wire lengthRated voltage

: 25A: NC (normally closed): NW25: Grommet coil: Detect when valve is open: Proximity 2 wire: 3m: 24V DC

AVB *2 Series5678

103

ø6.35 (1/4")

ø6.

35 (

1/4"

)

20

36

ø33

ø30

ø45

1520

449

104

AVB21-8T


Dimensions

NC

AVB21-8TNC

No. Parts name MaterialCylinderRingBellows ringBellowsValve disk BBodyPipeO ringValve disk A

C3604SUS304SUS316LSUS304SUS304SUS304FKMFKM/SUS304

1

2

3

4

5

6

7

8

9

1

2

3

4

5

6

7

8

9

AVB *2 Series


5678

104


Dimensions

AVB**2-*KNC/NO/Double acting

AVB**2-*KNC/NO/Double acting(The drawing below shows the NC cross-section.)

*1. The external seal differs slightly for AVB7 and AVB8. (The 3 O-ring seal is shown at left.)

No. Parts name MaterialCylinder (magnet integrated)Bellows adaptorO ring (*1)BodyFormed bellowsRodRod pieceValve disk AO ringValve disk B

SUS316FKMSUS316ASL350SUS316SUS304SUS316FKMSUS316

1

2

3

4

5

6

7

8

9

10

AVB5*2-25KAVB6*2-40KAVB7*2-50KAVB8*2-80K

A193233271359

B188228266354

øC40(NW25)55(NW40)75(NW50)114(NW80)

D50557095

E50557098

F637878115

G15

15.515.515.5

øH48.660.576.3118

The options (pilot-operated solenoid valve, cylinder switch) and dimensions are available upon request.The solenoid valve option is not used for double-acting valve.

Model No. Symbol

F

øC

E

BA

øC

D øH

G

X port (NC)Y port (NO, double acting)

Y port (NC)X port (NO, double acting)

1

3

4

2

5

6

7

8

9

10

AVB *2 Series5678

105

MEMOMEMOMEMO

106

Specifications

Dimensions

ø24

ø1 to 3

10

2

13

NW25

Working fluid

Working pressure range Pa(abs)

Maximum working differential pressure MPa




Fluid temperature

Ambient temperature

Large flow orifice mm

Small flow orifice Note 3 mm

Main valve stroke mm

Small flow valve stroke mm

Conductance (main valve) Note 1 /s

Connection

Control pressure MPa

JIS symbol

Descriptions AVB513-X*Vacuum and inert gas

1.3 10-6 to 1.0 105

0.1

1.3 10-9 or less

1.3 10-9 or less

0.3

5 to 60

0 to 60

ø40

ø1 to 3

20

2

52

NW40

0.4 to 0.6

AVB613-X*

ø50

ø1 to 4

22

2

80

NW50

AVB713-X*

Note 1: The conductance is the theoretical calculation value at the molecular flow range, and is not the actual measurement value.Note 2: Contact CKD for details on specifications with the switch.Note 3: Contact CKD for details on small flow orifice diameters.Note 4: The bellows cannot be replaced for this customized order.

ø40(NW25)

ø55(NW40)

ø75(NW50)

50

55

70

50

55

70

180.5

177.5

216.5

AVB513-X*

AVB613-X*

AVB713-X*

Model No. A B C DBy-passing port(By-passing open/close valve)

MO

DE

L

OR

IFIC

E

SE

RIA

LO

PE

RA

TE

MA

IN

VA

LV

EO

PE

RA

TE

DA

IRV

AC

UU

Mfo

r

Co

rpo

rati

on

CK

DJA

PA

NIN

MA

DE

C

A

A

B

DSlow exhaust (internal bypass valve) compatible

Control exhaust rates in two steps1-actuator slow exhaust valve25A/40A/50A

NC NC


AVB Series Custom orderContact the CKD Sales Office for details.

Custom order

107

Specifications

Dimensions

ø24

10

13

NW25

ø40

20

52

NW40

ø50

22

80

NW50

ø80

32

242

NW80

Working fluid






Fluid temperature

Ambient temperature

Orifice (main flow path) mm

Stroke (Main valve) mm

Conductance (main valve) Note 1 /s

Connection


JIS symbol

Descriptions AVB513-X* AVB613-X* AVB713-X* AVB813-X*Vacuum and inert gas

1.3 10-6 to 1.0 105

0.1

1.3 10-9 or less

1.3 10-9 or less

0.3

5 to 60

0 to 60

0.4 to 0.6

ø40(NW25)

ø55(NW40)

ø75(NW50)

ø114(NW80)

50

55

70

90

50

55

70

105

151.5

170.5

208

258

AVB513-X*

AVB613-X*

AVB713-X*

AVB813-X*

Model No. A B C D131.5

127

165.5

191.5

E117.5

130.5

175.5

202

F

AGD11V-

AGD21V-

By-pass valve

1/4"

3/8"

By-pass pipe

Note 1: The conductance is the theoretical calculation value at the molecular flow range, and is not the actual measurement value.Note 2: Contact CKD for details on specifications with the main valve switch.Note 3: A bypass valve with flow control is available.

OPEN

CLOSE

D

F

F

EE

AC

AC

B

A

D

B

A

Slow exhaust (external bypass valve) compatible

Control exhaust rates in two steps2-actuator (bypass) slow exhaust valve25A/40A/50A

AVB513-X* AVB 13-X*678

NC NC

AVB**3 Series


108

Specifications

Dimensions

ø24

10

13

NW25

NC NO Double acting

ø40

20

52

NW40

ø50

22

80

NW50

ø80

32

242

NW80

Working fluid






Fluid temperature

Ambient temperature

Orifice mm

Stroke mm

Conductance Note1 /s

Connection


JIS symbol

Descriptions AVB5 3-X* AVB6 3-X* AVB7 3-X* AVB8 3-X*Vacuum and inert gas

1.3 10-6 to 1.0 105

0.1

1.3 10-9 or less

1.3 10-9 or less

0.3

5 to 60

0 to 60

0.4 to 0.6

ø40(NW25)

ø55(NW40)

ø75(NW50)

ø114(NW80)

130

140

210

250

130(138)

155(163)

191

241

AVB5 3-X*

AVB6 3-X*

AVB7 3-X*

AVB8 3-X*

Model No. A B C

Note 1: The conductance is the theoretical calculation value at the molecular flow range, and is not the actual measurement value.Note 2: Contact CKD for details on specifications with the switch.

Note 1: Dimensions in parentheses under symbol C are for NO.Note 2: Values for symbol C are maximum and differ based on the operation port direction.

123

123

123

123

123123123123

Straight flange compatible

Ideal for installation on straight piping sectionsStraight flange valve25A/40A/50A/80A

B

A

A

C

45°

Control port side

AVB**3 Series

109

Valve heater compatible

Prevent reaction byproducts from adhering to the valveJacket heater valve40A/50A/80A

Thermostat HeaterThermocoupleinstallation possible

(With heat insulating material)

AVB**3 Series


110







Large bore size type

AVB932-X0070


Pa(abs)Maximum workingdifferential pressure MPaValve seat leakage




1.3 10-6 to 1 105

0.1

1.3 10-9 or less

1.3 10-9 or less

0.35 to 600 to 60

10050

372NW100

0.3 to 0.518

Specifications

Note 1: The conductance is the theoretical calculation value at the molecular flow range, and is not the actual measurement value.Note 2: Contact CKD for details on specifications with the switch.

Descriptions

AVB**2 Series

Large bore size type

Precautions


and the precautions on page 88 to ensure

correct and safe use of this product.

•Working media

•Installation

•Direction when connecting piping

Custom order

111

E

A

BD

C

A

G

F

2-H

Dimensions

AVB932-X0070

Model No.

AVB932-X-*

A

ø134(NW100)

B

115

C

135

D

424

E

ø185

F

13

G

107.5

H

Rc3/8

Symbol

AVB932-X* SeriesAir operated valve

112


AVP *2 Series

•Double O-ring shaft seal

5678

•Pilot-operated solenoid valve installable

•Long-life, high sealingOutstanding life and external sealing are attained with the double O-ring seal and grease container.Durability: 500,000 times (*1)


•Miniature switch mountableA reed switch (proximity) canbe connected to confirm the operation. (Retrofitting possible)

•Usable with back pressureThe vacuum pump can be connected to either port.

(Excluding AVP712/812)

AVP21 only

•Ideal for leak valves

•Ultra-compact with 5mm orifice

Double O-ring shaft seal with outstanding reliability and maintenance

Precautions


AVP512 NC ø24

AVP612 NC ø40

AVP712 NC ø50

AVP812 NC ø80

AVP21 NC ø 5


AVP522 NO ø24

AVP622 NO ø40

AVP722 NO ø50

AVP822 NO ø80


AVP532 Double acting ø24




(Custom order)


and the precautions on page 88 to 91 to

ensure correct, safe use of this product.

•Working media

•Installation


•Proximity switch, reed switch

113


1.3 10-6 to 2.0 105

1.3 10-9 or less

1.3 10-8 or less

0.35 to 600 to 60

0.3 to 0.5

Specifications

AVP21-8T AVP5 2 AVP6 2 AVP7 2 AVP8 2123

123

123

123

1.3 10-6 to 2.5 105

0.25

1.3 10-6 to 1.5 105 1.3 10-6 to 1.0 105

1.3 10-6 to 1.0 105

1.3 10-6 to 1.0 105

53

1/4" tube

0.25

402052

NW40

2.6

241513

NW25

1.6

502280

NW50

3.8

8032

242NW80

10.4

Descriptions

Applications

Power voltageLoad voltage/currentPower consumptionInternal voltage dropLightLeakage currentLead wire length Note 4Maximum impactInsulation resistanceWithstand voltageAmbient temperature rangeProtective structure


NAB-C2Programmable

controller

10 to 30V DC, 5 to 30mA

4V or less

1mA or less1m (oil resistant vinyl round code 2-conductor 0.2mm2)

Proximity switch

(Custom order)

Electrical specificationsRated voltageApparentpowerPowerconsumptionHeat resistance class

100V AC(50/60Hz), 110V AC(60Hz), 200V AC(50/60Hz), 220V AC(60Hz), 24V DC3.9VA(50Hz), 3.1VA(60Hz)9.2VA(50Hz), 7.9VA(60Hz)2.0W (50Hz), 1.7W (60Hz)

4.0WB

Note 4: 3 m and 5 m leads are available as options.

Note 1: For AVP822: 1.3 10-6 Pa to 1.5 105 Pa For AVP832: 1.3 10-6 Pa to 2 105 Pa. Note that when using the AVP822 with a barotropic setting, the range is 1.3 10-6 Pa to 1.0 105 Pa.Note 2: The back pressure type is not used for AVP712 and AVP812.Note 3: The conductance is the theoretical calculation value at the molecular flow range, and is not the actual measurement value.

NC

NO

Double acting

Working fluid

Working pressure range Note 1 Pa(abs)

Maximum working differential pressure Note 2

MPaValve seat leakage



Descriptions

Baratropic: 1.3 10-6 to 1.0 105

Back pressure: 1.3 10-6 to 1.0 105

NC: 0.15

NO: 0.15Double acting: 0.2

NC: 0.1

NO: 0.1Double acting: 0.2

NC: 0.1(Back pressure not available)NO: 0.1Double acting: 0.2

NC: 0.1(Back pressure not available)NO: 0.15Double acting: 0.2

When holdingWhen starting

ACDC

Illuminating diode (lights when ON)

NAB-C3Programmable controller, relay,IC circuit, small solenoid valve

10 to 28V DC30V DC, 150mA or less

15mA or less at 24V DC (when ON)0.5V or less

10 A or less1m (oil resistant vinyl round code 3-conductor 0.15mm2)

294m/s2

100M and over when measured with 500VDC meggerNo failure when 1000VAC is applied for 1 minute


NC NO Double acting(Excluding AVP712, AVP812)

X

(AVP712, AVP812)Bottom port

Side port

X

Y X Y

Side port

Bottom port

AVP21-8T

AVP**2-*K

AVP *2 Series


5678

114

Model No.

Method for AVP21 omitted

SeriesNote 1Note 2


AVP612-40K-2C-HC23-DC24VModel: AVP612 high vacuum air operated valve

AVP 6 1 2 - 40K - 2C - H C2 3 - DC24V

How to order

25678

1/4"

25A

40A

50A

80A (custom order)


8T25K40K50K80K

1/4" tube

NW25

NW40

NW50

NW80

Only AVP21 is available

Only AVP5*2 is available




C Connection

BlankHRD

Without switch




E Switch quantity (detecting position)

BlankAC100VAC200VDC24V


AC100V(50/60Hz), AC110V(60Hz)

AC200V(50/60Hz), AC220V(60Hz)

DC24V

H Rated voltage

Blank35

1m (standard)

3m

5m

G Switch lead wire length

BlankC2C3

Without switch

Proximity 2 wire

Proximity 3 wire

F Switch type

Blank2C2G


Grommet coil

DIN terminal box

D Coil

123


NO (normally open)

Double acting

B Actuation


A

ActuationNote 3

B

ConnectionC

CoilNote 4

D


E

Switch typeF

Lead wire lengthG

Rated voltageH

Note 1: AVP2 is available only for the AVP21-8T. (There is no option setting.)

Note 2: The cylinder switch and solenoid valve are not used for the AVP21 type. Only NC is used for activation.

Note 3: If 2 (NO) is selected for B Actuation, it is basically not possible to retrofit the solenoid valve. Designate the solenoid valve at purchase.

Note 4: The D Coil setting is used only when 1 (NC) or 2 (NO) is selected for B Actuation. (The solenoid valve option is not used for the double-acting valve.)

: 40A: NC (normally closed): NW40: Grommet coil: Detect when valve is open: Proximity 2 wire: 3m: 24V DC

A

B

C

D

E

F

G

H

SeriesActuationConnectionCoilSwitch quantitySwitch typeLead wire lengthRated voltage

AVP *2 Series5678

115

1

ø33

ø30

ø4536

20

Side port

ø6.35(1/4") ø6.

35(1

/4")

1520

449

104

Bottom port

2

3

4

5

6

7

8

9

10

11

No. Parts name MaterialCylinderRodRingO ring holderGrease containerValve disk BBodyPipeO ringO ringValve disk A

SUS304C3604SUS304SUS304SUS304SUS304SUS304FKMFKMFKM/SUS304

1

2

3

4

5

6

7

8

9

10

11

AVP21-8T


Dimensions

NC

AVP21-8TNC

*The cylinder switch and solenoid valve are not available for the AVP21 type. Only NC is available for actuation.

AVP *2 Series


5678

116

1

3

4

2

5

6

7

8

9

10

11

12

F

G

øH

øC

E

BA

øC

D

Y port (NC)X port (NO, double acting)

X port (NC)Y port (NO, double acting)

Side port

Bottom port

No. Parts name MaterialCylinder (magnet integrated)O ring holderO ring (*1)BodyO ring holderO ringGrease containerValve rodRod pieceValve disk AO ringValve disk B

SUS316FKMSUS316A5056FKMSUS304SUS316SUS304SUS316FKMSUS316

1

2

3

4

5

6

7

8

9

10

11

12

AVP5*2-25KAVP6*2-40KAVP7*2-50KAVP8*2-80K

A193233271359

B188228266354

øC40(NW25)55(NW40)75(NW50)114(NW80)

D50557095

E50557098

F637878115

G15

15.515.515.5

øH48.660.576.3118


Dimensions

AVP**2-*KNC/NO/Double acting

AVP**2-*KNC/NO/Double acting

*1. The external seal differs slightly for AVP7 and AVP8. (The 3 O-ring seal is shown at left.)

The options (pilot-operated solenoid valve, cylinder switch) and dimensions are available upon request.The solenoid valve option is not used for double-acting valve.

Model No. Symbol

AVP *2 Series5678

117

M E M OM E M O

118

Manual valve for high vacuum

MVB 0 Series

•Formed bellows •Handle

567

Custom order


MVB70 Manual ø50


MVB50 Manual ø24

MVB60 Manual ø40

•Long-life formed bellowsSpecial, stainless steel material (ASL-350) provided. Corrosion resistance is outstanding.

•Low dust generationWetted areas (flow path) have no sliding sections that may generate particles.

•Handle

•Usable with back pressureThe vacuum pump can be connected to either port.

MVB60 MVB70MVB50

Working fluid






Fluid temperature

Ambient temperature

Orifice mm

Stroke mm

Valve structure

Connection

Weight kg

JIS symbol


1.3 10-6 to 1 105

0.1

1.3 10-9 or less

1.3 10-9 or less

0.3

5 to 60

0 to 60

ø40

20

Formed bellows

NW40

2.4

Specifications

ø24

15

NW25

1.4

ø50

22

NW50

3.2

Descriptions

Air-operated valve (AVB**2) performance is incorporated in the manual valve.

Precautions




•Working media

•Installation


119

C

C

B

B

A

E

D

1

2

3

4

5

6

7

11

12

15

13

14

18

10

9

8

16

17

No. Parts name Material No. Parts name MaterialHexagon socket set screwHandleManual rodAdaptorBellows assemblyO ringBody assemblyE snap ringSpring washer

SUS304

SUS303A2011ASL350,SUS316FKMSUS304SUS304SUS304

123456789

RodSpring washerC snap ringValve disk AO ringRod pieceValve disk BFlat headed cross cut screwCross headed bolt

SUS316SUS304SUS304SUS316FKMSUS304SUS316SUS304SUS304

101112131415161718

How to order

SymbolModel No.MVB50MVB60MVB70

Fully open175205252

Fully closed160185230

C

ø40(NW25)ø55(NW40)ø75(NW50)

B

505570

D

636378

E

ø48.6ø60.5ø79

Series

Manual

MVB

MVB*0

Dimensions


567

Orifice ø24

Orifice ø40

Orifice ø50


25K40K50K

25A (Only MVB50 is available)



B Connection

5 0 25K

A

A

ConnectionB

MVB 0 Series


567

120


MVP 0 Series

•Double O-ring seal •Handle

567

Custom order


MVP50 Manual ø24

MVP60 Manual ø40


MVP70 Manual ø50

Long-life, high sealingOutstanding life and external sealing are attained with the double O-ring seal and grease

container.


Handle

Air-operated valve (AVP**2) performance is incorporated in the manual valve.

MVP50 MVP60 MVP70

Working fluid






Fluid temperature

Ambient temperature

Orifice mm

Stroke mm

Valve structure

Connection

Total height: values in parentheses apply for closed valves mm

Face-to-face dimensions mm

Weight kg

JIS symbol


1.3 10-6 to 2 105

0.2

1.3 10-9 or less

1.3 10-8 or less

0.3

5 to 60

0 to 60

ø40

20

O ring shaft seal

NW40

185(205)

55

2.5

Specifications

ø24

15

NW25

160(175)

50

1.4

ø50

22

NW50

230(252)

70

3.7

Descriptions

PrecautionsAlways read page 9 in the introduction



•Working media

•Installation


121

E

D

C

B

C

B

A

1

2

3

4

5

6

7

8

9

10

11

12

13

14

15

21

16

17

18

19

20

Performance class

No. Parts name MaterialHexagon socket set screwHandleManual rodAdaptorO ring holderO ringBody assemblyE snap ringSpring washerValve rodSpring washer

SUS304

SUS303A2011SUS316FKM

SUS304SUS304SUS316SUS304

1

2

3

4

5

6

7

8

9

10

11

No. Parts name MaterialC snap ringRod pieceValve disk AO ringO ring holderO ringGrease shieldValve disk BFlat headed cross cut screwCross headed bolt

SUS304SUS304SUS316FKMA5056FKMSUS304SUS316SUS304SUS304

12

13

14

15

16

17

18

19

20

21

SymbolModel No.MVP50MVP60MVP70

Fully open175205252

Fully closed160185230

C

ø40(NW25)ø55(NW40)ø75(NW50)

B

505570

D

636378

E

ø48.6ø60.5ø79

How to order

Manual

MVP 40K0


567

Orifice ø24

Orifice ø40

Orifice ø50

Symbol DescriptionsA Performance class

25K40K50K

25A Only MVB50 is available

40A Only MVB60 is available

50A Only MVP70 is available

B Connection

MVP*0

Dimensions

6

A

A

ConnectionB

MVP 0 Series


567

122

Precautions

Leak valve (Vacuum break valve)

FGL 1 Series

•Non-sliding •Control range: 0 to 60 seconds

12

Control the vacuum break time.Chamber vacuum break time is controlled by controlling the time to attain maximum flow.

Residue-free structureThe flow path from in to out is straight and smooth.

Highly corrosion resistantStainless steel (SUS316L, high corrosion resistance) is used for the flow path, including the body.

Control flow rates with optimum modeFine flow rate and time adjustment are not required.

Non-sliding valveWear particles do not form because no sliding sections are used.

Selective connectionThe double-barbed joint and JXR male joint are available.

Model No. Actuation Maximum flow rate Voltage

FGL11 NC 32 /min 12,24V DCModel No. Actuation Maximum flow rate Voltage

FGL21 NC 50 /min 12,24V DC

Solve all particle suspension problems with this valve.

What are leak valves?

Conventional Using leak valve

Most semiconductor manufacturing equipment wafer treatment processes are conducted in a vacuum chamber. When the wafer is loaded and unloaded, the chamber must be momentarily changed from the vacuum to atmospheric pressure. The gas introduced into the chamber could make accumulated particles suspended, which can get on the wafer and decrease yield.This vacuum break valve controls vacuum break time by changing the flow proportionately with time. This prevents particles from being suspended and improves throughput.

Principle of operation

Internal structure

When the current passed to the coil is increased, attraction force F applied to the plunger increases, displacing the coil to where it is balanced with leaf spring load f supporting the plunger, causing the valve opening to fluctuate.The flow curve (Fig.1) is attained by continuously changing the current with the internal controller.




•Working media

•Installation


123

FGL 1 SeriesLeak valve (Vacuum break valve)

12

Nitrogen

0.15

1.3 10-6 to 1 105

0.5

1.3 10-9

0.99

10 to 30

10 to 30

Free

12V, 24V DC

12V, 24V DC

FGL11-4S FGL11-4RM FGL21-4S FGL21-4RMDescriptionsWorking fluid

Primary pressure

MPa

Secondary pressure

range Pa(abs)

Max. flow rate /min

Valve seat leakage cm3/min or less

External leakage

Pa·m3/s(He)


Fluid temperature

Ambient temperature

Connection

Installation position

Power consumption W

Power voltage

Operation signal, pressure signal

1/4"

Double barbed joint

1/4"

JXR male joint Note 1

1/4"

Double barbed joint

1/4"

JXR male joint Note 1

Note 1: The JXR joint can be connected to the VCR joint.

Specifications

32 50

8 10

How to order

FGL 4RM DC12V1 321 015

Series

Model No. NC Adjusted pressure 0.15 MPa

1

2

SeriesA

Symbol Descriptions

4RM

4S

1/4" JXR male joint

1/4" Double barbed joint

ConnectionB

32

50

Flow rateC

DC12V

DC24V

DC12V

DC24V

VoltageD

A

ConnectionB

Flow rateC

VoltageD

32 /min Only FGL11 is available

50 /min Only FGL21 is available

Small (flow of 32 /min)

Large (flow of 50 /min)

124


Dimensions

FGL 1-4RM12 FGL 1-4S1

2

FGL 1-4RM12

FGL 1-4S12

No. Parts name MaterialO ringCoil assemblyPlunger assembly

FKM1

2

3

OrificeO ringO ring

SUS316LFKMFKM

4

5

6

FGL11-4S-32-015FGL21-4S-50-015

A117129

B1925

øD3850

C105113

E(46.5)(46.5)

FGL11-4S-32-015FGL21-4S-32-015

A117129

B1925

D7078

F(46.5)(46.5)

C105113

øE3850

No. Parts name Material

Model No. Symbol

Model No. Symbol

FLOW

øD

E

B

IN OUT

C

A

1/4 " JXR male joint

øE

B

IN OUT

C

D

A

1/4 " Double barbed joint

F

61

5

2 3 4

61

5

2 3 4

FGL 1 Series12

FGL11-4RM

FGL21-4S

125

FGL 1 SeriesLeak valve (Vacuum break valve)

12

Piping

The leak valve has a maximum 0.5 cm3/min valve seat leak, so use a separate gas valve on the IN side.

Cable connection

Contact input DC voltage input

Connect the included cable to the leak valve as shown below.The contact input or DC voltage input is selected based on the connection.

Control signal and flow characteristics

The leak valve operates with the operation signal (SIGNAL) and pressure signal (PRESSURE).When SIGNAL turns ON, the maximum flow is reached with preset time T and the valve closes when SIGNAL turns OFF.Assist mode is used if needed.Assist mode keeps chamber pressure negative to prevent ambient atmosphere from entering when the gate is opened.Assist mode is entered by turning PRESSURE ON while SIGNAL is ON and adjusting the flow from maximum flow to assist flow.

126

Vacuum/inert gas (Note 1)1.3 10-6 to 3 105

0.31.0 10-9 or less1.0 10-9 or less

0.50.2

5 to 550 to 55

1.60.0960

Vertical installation with coil facing upward

100/200V AC (50/60Hz), 24V DCRated voltage 10%

4.0B70

HVB112-6N-* HVB112-8R-* (Custom order)DescriptionsWorking fluidWorking pressure range Pa(abs)Maximum working differential pressure MPaValve seat leakage Pa·m3/s(He)External leakage Pa·m3/s(He)Withstanding pressure MPaBack pressure (Note 2) MPaFluid temperature Ambient temperatureOrifice mmCv flow factorFrequency times/min or lessPort sizeInstallation positionWeight kg

JIS symbol

Electrical specificationsRated voltageAllowable voltage fluctuationPower consumption WHeat resistance classTemperature rise K

Specifications

Note 1: Robustness may drop markedly depending on dryness.Note 2: Pressurizing from the A port with the B port released to atmosphere is possible.


HVB112 NC 1.6 HVB112 N.C. 1.6

NPT1/8 1/4 inch VCR female

0.15 0.24

Easy maintenanceThis simple structure has few

points.

Special packing incorporatedFKM packing has outstanding

seal life.

Highly corrosion resistantStainless steel (SUS303) is used for the body. (The VCR joint is SUS316.)

High-vacuum holdingVacuum holding is stable with little leakage.

No beatingThe DC coil eliminates beating.

Back pressure usable (reverse vacuum)

Space-saving miniature solenoid valve.

A

B

High vacuum solenoid valve

HVB112 Series

PrecautionsAlways read page 9 in the introduction



Working media

Installation


Solenoid valve

127


Dimensions

HVB112

With VCR joint (customized order)

How to order

HVB 6N AC100V112 5

Note: The old HVB11-6N-5 is equivalent to HVB112-6N-5.

Note: The line diode is not included with the DC specifications.

Port sizeA VoltageB

Orifice ø1.6

Model No.

No. Parts name Material

Core assembly

Plunger assembly

Coil assemblyCore BO ringSpringBody

SUS316SUS405

SUS405FKM

SUM22FKMSUS304SUS303

1

2

3

4

5

6

7

6N

8R

NPT1/8

1/4" VCR female joint (custom order)

Port sizeA

Symbol Descriptions

AC100V

AC200V

DC24V

AC100V(50/60Hz)

AC200V(50/60Hz)

DC24V

VoltageB

54ø

25 15

7

54

ø25

68

300

2-NPT 1/8

Line diode(DC does not have a line diode.)

Line diode(DC does not have a line diode.)

2-M4 0.7 depth 6

2-1/4" VCR female joint

A port B port

B port

7

2-M4 0.7 depth 6

15

A port

B portA port

1

2

3

4

5

6

7

HVB112 SeriesInternal structure and parts list

128

Vacuum, inert gas (Note 1)1.3 10-6 to 3 105

0.31.0 10-9 or less1.0 10-9 or less

0.50.2

5 to 550 to 55

5

30



14B80

HVB41-8N-* HVB41-8R-* (custom order)DescriptionsWorking fluidWorking pressure range Pa(abs)Maximum working differential pressure MPaValve seat leakage Pa·m3/s(He)External leakage Pa·m3/s(He)Withstanding pressure MPaBack pressure (Note 2) MPaFluid temperatureAmbient temperatureOrifice mmCv flow factorFrequency times/min or lessPort sizeInstallation positionWeight kg

JIS symbol


Specifications

Note 1: Robustness may drop markedly depending on dryness.Note 2: Pressurizing from the A port with the B port released to atmosphere is possible.


HVB41 NC 5

NPT1/4 (with O-ring seat) 1/4 inch VCR female

0.79 0.86

0.470.67

A

B

High-function solenoid valve based on comprehensive results and experience. Easy maintenance

This simple structure has few points.

Special packing incorporatedFKM packing seal has outstanding seal life.

Highly corrosion resistantStainless steel (SUS303) is used for the body. (The VCR joint is SUS316.)



Back pressure usable (reverse vacuum)


HVB41 Series

PrecautionsAlways read page 9 in the introduction and

the precautions on page 88 to ensure


Working media

Installation


Solenoid valve

129


Dimensions

HVB41

How to order

HVB 8N AC100V41 5 3H

Orifice ø5

Model No.

8N

8R

NPT1/4 (with O-ring seat)

1/4inch VCR female joint (custom order)

ConnectionA

Symbol Descriptions

AC100V

AC200V

DC24V

AC100V(50/60Hz)

AC200V(50/60Hz)

DC24V

VoltageC

Blank

3H

3K

B

None

Square terminal box with light G1/2

Square terminal box G1/2

Installation plate

OptionB

No. Parts name MaterialCoil assemblyCore assembly

Plunger assembly

SpringO ringBodyCushion plate

SUS405SUS403SUS316LSUS405FKMPET

SUS304FKMSUS303PET

1

2

3

4

5

6

7

ConnectionA OptionB VoltageC

Terminal box

Installation plate

With VCR joint (customized order)

ø25

2-NPT1/4

42

0.540

0.5

14

55

8484

28 (300)

ø45

46110

70

30 18

4 ø5.5

2 ø6

8t2

584618

91

61

45

G1 2-B

A

18

2-M5 depth 8

N

50

2-1/4" VCR female joint

B port A port

14

3482

18

2-M5 depth 8

B port A port

B port A port

1 7

2

3

4

5

6

HVB41 SeriesInternal structure and parts list

130


HVB 1 Series5678

Easy maintenanceThis simple structure has few component parts.

Special packing incorporatedFKM packing has outstanding seal life.

Highly corrosion resistantStainless steel (SCS13) is used for the body.



Back pressure use permissible (reverse vacuum)

Note that reverse vacuum

is not used with

HVB51-12F-5 or

HVB71-15F-5.


HVB51 NC 8,12HVB61 NC 8


HVB71 NC 12,15HVB81 NC 12,15

Large flow solenoid valve with different series and options

PrecautionsAlways read page 9 in the introduction and

the precautions on page 88 to ensure


Working media

Installation


Solenoid valve

131

HVB 1 SeriesHigh vacuum solenoid valve

5678

Specifications

14.3B80

19B80

28H

130

AC:32.5 DC:40H

130

Note 1: Product life may drop markedly depending on dryness.Note 2: Pressurizing from port A with port B released to atmosphere is possible. (Note that reverse vacuum is not used with HVB51-12F-5 or HVB71-15F-5.)

HVB51- HVB51- HVB61- HVB71- HVB71- HVB81- HVB81-12F-3 12F-5 12F-3 15F-3 15F-5 15F-3 15F-5

1.3 10-6

to 1 105

0.1

0.02

154.34.7

1.3 10-6

to 3 105

0.3

0.1

81.82.1

1.3 10-6

to 1 105

0.1

0.02

122.73.2

Vacuum and inert gas (Note 1)

1.0 10-9 or less

0.5

5 to 550 to 55

10



1.3 10-6

to 2 105

0.2

0.1

81.82.1

1.3 10-6

to 1.5 105

0.15

1.0 10-9 or less

0.1

123.23.6

1.3 10-6

to 3 105

0.3

0.1

123.23.6

1.3 10-6

to 1 105

0.1

0.1

154.34.7

Descriptions




Pa·m3/s(He)Withstanding pressure MPaBack pressure (Note 2) MPaFluid temperatureAmbient temperatureOrifice mm

Cv flow factor

Frequency times/min or lessPort sizeInstallation positionWeight kg

JIS symbol


ø48 flange

1.15

ø52 flange

1.9

StraightRadial

A

B

1HVB AC100V12F 3H5 3

Note 1: Symbol C 5 is not used for the HVB61.Note 2: Symbol D 3H, 3K, 3HF, and 3KF are not used for HVB61

or 81 AC voltage specifications.Note 3: The old HV-12-2F is equivalent to HVB51-12F-5.Note 4: The old HV-15-2F is equivalent to HVB71-15F-5.

How to order

SeriesA

ConnectionB

OrificeC

OptionD

VoltageE

Model No. 5678

Small

Large

SeriesA

Symbol Descriptions

12F15F

Flange ø48 Only HVB51, 61 is availableFlange ø52 Only HVB71, 81 is available

ConnectionB

Blank3H3KF

3HF3KF

NoneSquare terminal box with light G1/2 Note 2Square terminal box G1/2 Note 2With companion flangeSquare terminal box with light G1/2 + companion flange Note 2Square terminal box G1/2 + companion flange Note 2

OptionD

3

5

ø8 for HVB51, 61ø12 for HVB71, 81ø12 for HVB51ø15 for HVB71, 81 Note 1

OrificeC

AC100VAC200VDC24V

AC100V(50/60Hz)AC200V(50/60Hz)DC24V

VoltageE


132

HVB 1 Series5678

HVB* 1


Dimensions

ActuationNCNCNCNCNCNCNC

HVB51-12F-3HVB51-12F-5HVB61-12F-3HVB71-15F-3HVB71-15F-5HVB81-15F-3HVB81-15F-5

A B C D E F G H I d J60606070707070

118118118139139139139

52525255555555

49494954545454

40404042.442.442.442.4

4-M44-M44-M44-M54-M54-M54-M5

105105105110110110110

84848489898989

48484852525252

812 812151215

32

33

K

77

100

Note: The line diode is included only with HVB61 and HVB81 AC specifications. A terminal box cannot be assembled for this series.Note: Part of the internal structure differs for the HVB* 1-* * F-3.

Terminal box

Note: This is used as the bolt through holes.

1

2

3

4

5

6

7

8

9

No. Parts name MaterialCore ACoilPlunger assemblySpringCore BO ringBodyO ringBase cover

SUS405

SUS405,FKMSUS304SUS403FKMSCS13FKMSUS304

Model No. Symbol

Line diode

2 ø5.8(HVB71/81)2 ø4.5(HVB51/61) I

E

F

D

B

J

dC

A

K

61

45

G

H

I

B port A port

B port A port

1

2

3

4

5

6

7

8

9

ø34

ø24

3

ø34

ø24

3

133

HVB 1 SeriesDimensions

5678

Dimensions

ActuationNCNCNCNCNCNCNC

HVB51-12F-3HVB51-12F-5HVB61-12F-3HVB71-15F-3HVB71-15F-5HVB81-15F-3HVB81-15F-5

a b c d Mounting bolt O ring

48

52

40 ±0.2

42.4±0.2

4.8

5.8

M4-14

M5-14

Companion flange dimensions Straight piping Radial pipe

+0.5 0

+0.5 0

17.3

21.7

JIS B2401V-24

JIS B2401V-24

Installation bolts and applicable O-rings are included when the companion flange is ordered.

Companion flange dimensions

Model No. Symbol

(JIS G3459)Stainless steel pipe for piping

4-d

C0.58

a b c WeldedB port A port B port

A port

134

Vacuum delay solenoid valve

HVL 2 Series Solenoid valve with OFF delay

14

Delay leakUsing the CR circuit, the vacuum is broken in a several second (0 to 10 seconds) interval when power stops. (0 to 8 seconds only for HVL12 AC)

Easy time settingTime is easily set with a screwdriver.

SeparableThe circuit and valve can be separated and installed.

High vacuumThis valve has high-vacuum holding, with a valve seat and external leakage of 1.3x10-9 Pa·m3/s(He) or less.

Free pressure directionConnection to the vacuum is

made from either port.

Highly corrosion resistantThe body is of SUS303 and the valve seat of FKM.

Selective connectionThe Rc1/8 or 1/4-inch double-barbed joint and NW10.16 vacuum clamp joint are used.

Model No. Port size Orifice Voltage

HVL12 Rc1/8,1/4 Double barbed joint/NW10/NW16 1.2 24V DC/100V AC/200V ACHVL42 Rc1/8,1/4 Double barbed joint/NW10/NW16 3.0 24V DC/100V AC/200V

Prevent oil from rising when service is momentarily interrupted.

Main applications

Use as a delay vacuum solenoid valve (HVL Series)

Prevent oil from rising during momentary service interruption

Usually, after the machine stops, piping between the chamber and pump is released into the atmosphere at valve (1) to prevent oil from entering pipes. To protect the chamber (maintain vacuum, prevent contamination), piping must be released into the atmosphere after valve (2) is completely closed.

Chamber

If the pipe is not released into the atmosphere when the pump stops...

If valve (1) opens before valve (2) completely closes... Rising of oil is prevented and the chamber protected by using the HVL Series!!

Valve (1)

[Vacuum break valve] (HVL)

Pump

Valve (2)

[Isolation valve]Chamber

Valve (1)

Pump

Valve (2)

Oil rises

Chamber

Valve (1)

Pump

Valve (2)

* Chamber is contaminated* Vacuum drops

Power ON

OFFAt service interruption

Valve (2) Open

Close

Time T until valve (2) completely closes

Valve (1) Open

Close

<Fig. 3> <Fig. 4>

<Fig. 1> <Fig. 2>

Power ON

OFFAt service interruption

Valve (2) Open

Close

Time T until valve (2) completely closes

Set HVL Series delay time (see page 135) longer than time T

HVL series Open(Valve (1))

Close

<Fig. 5>

135

HVL 2 SeriesHow to order

14

Precautions

HVL12 HVL42Descriptions

Working fluid


Pa(abs)

Valve seat leakage

Pa·m3/s(He)

External leakage

Pa·m3/s(He)


Fluid temperature

Ambient temperature

Orifice mm

Installation position

Frequency

Port size

Cv flow factor

Delay time

Rated voltage

Allowable voltage fluctuation

Power consumption W

JIS symbol

Air, nitrogen (Note 1)

1.3 10-6 to 2.0 105

1.3 10-9 or less

1.3 10-9 or less

0.5

5 to 50

0 to 50

Free

0.5 times/minute or less

Rc1/8 and 1/4" double barbed joint, NW10.16 vacuum clamp joint

24V DC, 100V AC and 200V AC (HVL42: 100/200 VAC power common, used accordingly by connecting)

Rated voltage 10%

Specifications

1.2

0.05

AC:0 to 8sec,DC:0 to 10sec

4

3.0

0.3

AC/DC:0 to 10sec

11

Note 1: Robustness may drop markedly depending on dryness.

A

B

2HVL AC100V4S1 56

How to order

SeriesA

A port connectionNote 1

B

B port connectionNote 1

C

VoltageD

Model No. 14

Orifice 1.2Orifice 3.0

SeriesA

Symbol Descriptions

64S

10K16K

Rc1/81/4" double barbed jointNW10 vacuum clamp jointNW16 vacuum clamp joint

A port connection Note 1B

DC 24VAC100VAC200VAC100V/AC200V

DC 24VAC100VAC200VAC100/200VFor both powers Note 2

VoltageD

64S

10K16K

Rc1/81/4" double barbed jointNW10 vacuum clamp jointNW16 vacuum clamp joint

B port connection Note 1C


Only HVL42 is available



Note 1: When the type designated A port and B port are the same, designate only one.Example: When A port and B port are

both Rc1/8:HVL12-6-5-voltage (correct)HVL12-66-5-voltage (incorrect)

Note 2: Power is used accordingly by connecting.


the precautions on page 88 to ensure cor-

rect and safe use of this product.

Working media

Installation


Solenoid valve

136

HVL 2 Series14

No. Parts name MaterialSocketO ringWasherCore assemblyCoil assemblyPlunger assembly

O ringSpringBody

SUS303FKMSUS304SUS316L,SUS405PBT

SUS405,FKM,PTFE

FKMSUS304SUS303

1

2

3

4

5

6

7

8

9

No. Parts name MaterialSocketO ringWasherCore assembly

Coil assemblyPlunger assembly

O ringSpringBody

SUS303FKMSUS301-CSP

SUS403,SUS316L,SUS405

Class B nylon mold

SUS405,FKM,PTFE

FKMSUS304SUS303

1

2

3

4

5

6

7

8

9

HVL42-6-5

HVL12-6-5


9

8 7 6 5 4 3 2 1

1

2

3

4

5

6

7

98

A port

B port

A port

B port

137

A7890

B11.511.5

D7676

C2859

E5162

F14.514.5

A132152

B116136

D3030

C9

20

E88

103

F123138

G102105

H3537

HVL42-6-5

HVL12-6-5

Dimensions

DC

Model No. Symbol

Model No. SymbolHVL42-DC24VHVL42-AC100,200V

HVL12-DC24VHVL12-AC100,200V

+DELAY ADJ.

A

B

A

B

G

21122

H

7 37

F

E

D

C

CD

E

F

43

2-Rc 1/8A port

B port

R3.5

4

2-M4

8 61 4-M4 AC

B port

A port

HVL 2 SeriesDimensions

14

138

M E M OM E M O

139

Related productsRelated products

Operation solenoid valveMN3E0/MN4E0 140MN4GA/MN4GB 140Clean exhaust filterFAC 141Fiber tube (joint/tube)Fiber tube 142

CONTENTS

139

140

MN3EO/MN4EO/MN4GA/MN4GB Series

MN3EO/MN4EO Series(3, 4 port valve and two 3 port valves integrated type)

(Catalog No. CC-691)

Extra compact (height 39.5 mm) high-performance block manifoldCompact and space savingA 40 mm or less valve height is realized with a 10 mm coil width. (CKD conventionalpart: 46 mm)A footprint of equipment is reduced. The product can be installed anywhere.Environment protectionEnvironment-friendly halogen-free leads are used for internal wiring. (T30 type D sub-connector)High performance·12 ms response has balanced A port and B port (CKD data value using type with two built-in 3-port valves)·No more bothersome connection Use of connectors enables wiring to be completed during assembly.

Specifications

Working fluid

Actuation

Valve structure

Working pressure MPa

Rated voltage V

Power consumption W

C[dm3/(s·bar)]

b

Descriptions

Electrical specifications

Compressed air

Pilot operated

Soft spool

0.2 to 0.7

0.5 to 0.54

0.08 to 0.16

DC12, 24

0.6

MN3E0 MN4E0

Note 1: Conversion for effective sectional area S and acoustic velocity conductance C is S 5.0xC.

Flowcharacter-istics

MN4GA/MN4GB Series(3, 5 port valve block manifold)

(Catalog No. CB-23S)

User and eco-friendly next-generation block manifoldEcologyPaint-less: Particles are not generated by peeling paint.Indication of material names: Material names are stamped on key components tofacilitate recycling, etc.SafetyMisoperation prevention incorporated in connection keyEase-of-useReduced wiring compliance: Serial (compact slave station OPP4)Piping connection: Direct piping type, base piping typeTAG nameplates availableFlexibilityMixed blocks compatible with MN4G1 and 2 mountingReliabilityResponsiveness 12 ms 2 ms. (CKD data value for 4G1 series)Life 60,000,000 times and over (with clean air at 0.5 MPa pressure)

Specifications

Working fluid

Actuation

Valve structure

Working pressure MPa

Rated voltage DC

V AC

Power consumption W DC12, 24

Apparent power VA AC100V

Descriptions

Electrical specifications

Compressed air

Pilot operated

Soft spool

0.2 to 0.7

0.66 to 2.3

0.10 to 0.30

12, 24

100

0.55(0.6)

1.0(1.2)

MN3G MN4G

C[dm3/(s·bar)]

b

Note 1: Conversion for effective sectional area S and acoustic velocity conductance C is S 5.0xC.Note 2: Values in parentheses apply when a light is installed.

Flowcharacter-istics

Operationsolenoid valve

141

FAC Series


Revolutionary exhaust for clean rooms.

FAC Series

Clean exhaust filter

Working fluid


Min. working pressure MPa



Port size

Product mass g

Filtration rating m

Secondary cleanness

Maximum processing rate /min(ANR)

Specifications (FAC10/FAC100/FAC200)

Model No. FAC10 FAC100 FAC200Compressed air

0.1

0

0.3

R1/8, R1/4

65

0.01 (removal efficiency 99.99% and over)

100% of 0.1 m and larger particles removed Note 1

100

5 to 45

2

R3/8, R1/2

85

200

5 to 40

Working fluid


Min. working pressure MPa



Port size

Product mass g

Filtration rating m

Secondary cleanness

Maximum processing rate /min(ANR)

Specifications (FAC300)

Model No. FAC3000Compressed air

0.1

0

0.3

5 to 45

Rc3/8, Rc1/2

290

0.01 (removal efficiency 99.99% and over)

100% of 0.1 m and larger particles removed Note 1

600

Note 1: Flow rate conditions at 28.3 /min (ANR) when measuring.

Note 1: Flow rate conditions at 28.3 /min (ANR) when measuring. For FAC10, 10 /min (ANR) applies.

ø4 ø6 ø8 ø10 ø12

4 10 20 35 50

Precise filtration

0.01 m filtration, 99.99% removal

High secondary cleanness

100% of 0.1 m and larger particles are removed

*Measurement conditions: 28.3 /min (ANR) flow

Cost reducing and space saving

Work, cost, and space required for conventional external exhaust piping are eliminated.

Simplified piping

All external exhaust piping is eliminated by installing the plug on the cylinder and the

silencer on the switching valve, simplifying piping.

Silencer

Exhaust noise is suppressed to 60 dB (A) or less.

Ample variations

Three types: plug, silencer, and modular. Four flow rate series: 10, 100, 200, and 600 /

min (ANR) are available.

142

Specifications

•Fiber tube

Working fluid

Working pressure range (20 ) (Note 2)


Outer diameter inner diameter mm

Inner diameter accuracy mm

Outer diameter accuracy mm

Durometer hardness

Min. bending radius (JIS B 8381) mm

Min. installation radius mm

Burst pressure (20 ) MPa

Volume resistivity /cm

Material

Color

•Push-in joint (standard)

Model No. Antistatic type UP-9402-F1 Clean type EH-5802

Compressed air (Note 1)

-10 to 60 (to be unfrozen)

ø1.8 ø1.2

0.1

0.1

-100kPa to 1.0MPa

HDD 58

5

7

3.8

-

Special polyolefin

Black/Transparent

-100kPa to 0.8MPa

HDA 94

4

4

2.5

1010 to 1012

Antistatic urethane

Note 1: Contact CKD for other working fluids.Note 2: Refer to "Relation of usable temperature and pressure (normal breaking)"

for the usable pressure range.Note 3: Yellow and red are available as customized orders.

Working fluid



Applicable tube

•Push-in joint (clean type)

Model No. PG Series

Compressed air (Note 1)

-100kPa to 1.0MPa


Fiber tube (UP-9402-F1, EH-5802) Note 2

Note 1: Contact CKD for other working fluids.Note 2: Fiber tube for barbed joints (UP-9102-F1) cannot be used.Note 3: This joint is sold in sets of 10.

Working fluid



Lubricant

Applicable tube

Model No. CG Series

Clean air (Note 1)

-100kPa to 1.0MPa


Oil-prohibition

Fiber tube (UP-9402-F1, EH-5802) Note 2

Note 1: This joint uses rubber EPDM, and cannot be used with fluids containing mineral oils.Contact CKD for other working fluids.

Note 2: Fiber tube for barbed joints (UP-9102-F1) cannot be used.Note 3: This joint is sold in single sets.

Black/white/transparent/transparent blue/transparent green/yellow (Note 3)/red (Note 3)

This new ultra-thin tube greatlyimproves usability with enlargedbore size and push-in joint.

New outer grasping diameter incorporatedBore size enlarged from ø1.0 to ø1.2, increasing flow by 3-foldSmall tube volume saving energy and spaceSeries for clean models uses highly corrosion-resistant materialPush-in joint, standard PG series, and clean CG series available

Joint/Tube


Fiber tube R

Fiber tube® for push-in joint

143

Fiber tube R

Descriptions UP-9102-20-*-F1Working fluid

Working pressure range (20 ) (Note 1)


Outer diameter inner diameter

Inner diameter accuracy

Outer diameter accuracy

Min. bending radius (JIS B 8381)

Min. installation radius

Burst pressure (20 )

Volume resistivity

Material

Color

Compressed air

-100kPa to 0.7MPa


1.8 1.0

0.1

0.1

2

4

2.1 (reference value)

1 10 8 or less (black) 1 10 12 or less (colors other than black)

Conductive urethane

Black/White/Transparent/Transparent blue/Transparent green/Yellow (Note 2)/Red (Note 2)

Specifications

•Tube

mm

mm

mm

MPa

·cm

Descriptions PTN*Port size

Working fluid



Applicable tube

Effective sectional area

Flow rate (Note 3)

M3, M5, R1/8, ø3.2 (Note 4), ø4 (Note 4), ø6 (Note 4)

Compressed air

-100kPa to 0.7MPa


UP-9102-20-*-F1

Straight, barbed nipple: 0.3 Elbow: 0.2

Straight, barbed nipple: 20 Elbow: 13

•Dedicated joint

mm2

/min(ANR)

Note 1: Refer to "Relation of usable temperature and pressure (normal breaking)" for the usable pressure range.

Note 2: Customized order.Note 3: Flow rate is atmospheric pressure conversion at 0.5 MPa.Note 4: Applicable tube: Soft nylon tube (FH-3224, F-1504, F1506) Urethane tube (U-9504, U-9506)

Ultra-thin tube for free piping.This ultra-thin tube is as thin and flexible as leads.

Outer diameter of 1.8, minimum bending radius of 4 mm

Electric resistance is 1 177 ·cm, and prevents electrostatic discharge.

Ideal for fine-speed cylinder piping

Wide variety of tube colors and joints

Joint/Tube

(Catalog No. CB-024S)

Fiber tube®

144

M E M OM E M O

145

System lineupSystem lineup

High Purity Chemical Liquid System 146Pneumatic components for clean room specification 146

CONTENTS

145

146

System lineup

Pneumatic components for clean room specification

Catalog No.CB-033A

Regulator

Flow rate sensor

Solenoid valve for air blow

Needle valve Final filter

Main line filter

Filter

Differential pressure gauge

Pressure gauge

Oil removing filter

Exhausttreatment

Model circuit for clean blow system

Accurately producing ultra clean air

Inside clean room

Clean air blow is ensured by installing a final

filter at the end.

Use in different applications and clean room levels

Responding to advanced needs for semiconductor manufacturing process control

High-purity chemical liquid system componentCatalog No.CB-031A

•Industry's top results and reliability

•Realizing high quality with integrated production from

design to assembly and packaging in advanced

specification super clean rooms

•Diverse joint variations

Responding to advanced needs for semiconductor manufacturing process control

High Purity Chemical Liquid System Component General Catalog

WET FINE SYSTEM

Pneumatic cylinderElectric driven sliderDirectional switching

valveF.R.unit

Auxiliary componentsElectronics components

Valve for air blow

1

Pneumatic components for clean room specification

147

System lineup

Circuit configuration for air-operated device

Zero particle generation with vacuum and exhaust treatment

Switching valve

Switchingvalve

Inside clean room

Cylinder

Switchingvalve

Cylinder

Cylinder

Exhaust treatment

Screw air compressor

Main line filter

Refrigeratingdryer

Filter



Pressuregauge

Exhaust treatment

Vacuum treatment

Vacuum treatment

Flow control valve

Flow control valve

Flow control valve

Flow control valve

Oil removing filter

Oil removing filter

Filter

Switchingvalve

Cylinder

Standard cylinder

Guided cylinder

Regulator

Exhaust treatment

Vacuum treatment

Low-dust generating exhaust treatment

Low-dust vacuum treatment

P71 Series P51 Series

P7 Series P5 Series



Guided cylinder

Standard cylinder

A double rod packing is incorporated. Dust is exhausted outside the clean room from the pipe connected to the relief port at the middle section.

As with standard cylinders, double rod packing is used. Dust is exhausted outside the clean room from the pipe connected to the relief port at the middle section.Low dust generating grease is used at the sliding section (piston rod, guide rod).

As with the standard type cylinder, a relief port is provided at the sliding section of the piston rod on outer rod packing. Dust is vacuumed from this port and forcibly sucked out and exhausted.Low dust generating grease is used at the sliding section (piston rod, guide rod)

A relief port is provided at the sliding section of the piston rod on outer rod packing. Dust is vacuumed from this port and forcibly sucked out and exhausted.

148

The electronic catalog, which aims to make CAD designing more efficient, is provided on a CD-ROM as a pneumatic and control component related CAD database which focuses on the designers needs.Please contact your CKD Sales person or your nearest sales office to order this CD.

1. Searching from the catalogIf there is a CAD mark ( ) in the catalog, the CAD data is registered. Search for the registered file using the applicable product model, listed on the following page, as a key. Input "CAD data file name" from the CAD software to call out the drawing.

2. Searching from the CD-ROMOpen kensaku.exe, List.txt (for DXF) on the CD-ROM, and search for the registered file name using the applicable product Model No. as a key. The drawings can then be called out by inputting the "CAD data file name" from the CAD software.

1 DXF

•DXF data can be downloaded from the CKD internet website. http:/ /www.ckd.co.jp/

Guide to CKD Electronic Catalog(CAD DATA)

Using and ordering the electronic catalog

Searching the electronic catalog file name

Compatible CAD types

149

CAD Electronic CatalogFile list

Product Model No.File name

DXFFolder name

Process Gas Components

agd0_v_4rm.dxfagd0_v_4r.dxfagd1_v_4rm.dxfagd1_v_4r.dxfagd1_v_4s.dxfagd2_v_6rm.dxfagd2_v_6r.dxfagd2_v_6s.dxf

AGDAGD0*V-4RMAGD0*V-4RAGD1*V-4RMAGD1*V-4RAGD1*V-4SAGD2*V-6RMAGD2*V-6RAGD2*V-6S

•Air operated valve AGD


DXFFolder name

ogd10v_4rm.dxfogd10v_4r.dxfogd10v_4s.dxfogd20v_6rm.dxfogd20v_6r.dxfogd20v_6s.dxf

OGDOGD10V-4RMOGD10V-4ROGD10V-4SOGD20V-6RMOGD20V-6ROGD20V-6S

•Manual valve OGD


DXFFolder name

mgd10v_4rm.dxfmgd10v_4r.dxfmgd10v_4s.dxfmgd20v_6rm.dxfmgd20v_6r.dxfmgd20v_6s.dxf

MGDMGD10V-4RMMGD10V-4RMGD10V-4SMGD20V-6RMMGD20V-6RMGD20V-6S

•Manual valve MGD


DXFFolder name

rc2000_8.dxfrc2000_10.dxfrc2000_15.dxfrc2000_f .dxf

RC2000RC2000-8RC2000-10RC2000-15RC2000 accessory (joint, bracket, G49D)

•Clean regulator RC2000


DXFFolder name

fcs500_h4.dxffcs500_h6.dxffcs500_h8.dxffcs500_6a.dxffcs500_8a.dxffcs500_h_6a.dxffcs500_h_8a.dxffcs500_p9.dxf

FCS00FCS500-H4FCS500-H6FCS500-H8FCS500-6AFCS500-8AFCS500-H*6AFCS500-H*8AFCS500-P9, bracket

•Inline clean filter FCS

The "Electronic catalog file list" is for"CAD DATA Electric catalog (English) 2004".

150

CAD Electronic Catalog



DXFFolder name

fgl11_4rm.dxffgl11_4s.dxffgl21_4rm.dxffgl21_4s.dxf

FGLFGL11-4RMFGL11-4SFGL21-4RMFGL21-4S

•Leak valve FGL


DXFFolder name

avp_b_21.dxfavp_b_51.dxfavp_b_52_3_.dxfavp_b_61.dxfavp_b_62_3_.dxfavp_b_71.dxfavp_b_72_3_.dxfavp_b_81.dxfavp_b_82_3_.dxfavb51_3_3.dxfavb523.dxfavb61_3_3.dxfavb623.dxfavb7_3.dxfavb8_3.dxf

AVP_AVBAVP(B)21AVP(B)51AVP(B)52(3)AVP(B)61AVP(B)62(3)AVP(B)71AVP(B)72(3)AVP(B)81AVP(B)82(3)AVB51(3)3AVB523AVB61(3)3AVB623AVB7*3AVB8*3

•Air operated valve AVP/AVBThe "Electronic catalog file list" is for"CAD DATA Electric catalog (English) 2004".

151

M E M OM E M O

152

M E M OM E M O

Subject to the conditions below, CKD Corporation ("CKD") warrants the first end user (the"Buyer") that CKD's products are free from defects in material and workmanship.

CKD will, at CKD's option, either repair or replace a defective product, including lowesttransportation costs but not including installation or any other similar charges, provided that (1)the buyer notifies CKD in writing of the claimed defect within 18 months from the date Buyerreceived the product, (2) provides a complete explanation of the defect, the application of theproduct, and such other information concerning use of the product as CKD may request, and(3) returns the product to CKD in accordance with CKD's specific written instructions andauthorization obtained from CKD prior to return of the product, and CKD's inspection confirmsthat the product was defective.

This warranty applies only if the product was used and applied correctly under normaloperating conditions and good engineering practice; was installed, operated and maintained inaccordance with all instructions issued or published by CKD; was used within stated pressure,media and operating limitations published by CKD and in effect on the date of shipment; andwas not subject to abuse, misuse or unauthorized modification.

THIS WARRANTY IS THE ONLY AUTHORIZED CKD WARRANTY AND IN LIEU OF ALLOTHER WARRANTIES, EXPRESSED OR IMPLIED, INCLUDING ANY IMPILIEDWARRANTY OF MERCHANTABILITY OR FITNESS FOR A PARTICULAR PURPOSE,notwithstanding any disclosure to CKD of the use to which the product is to be put. TheBuyer's SOLE AND EXCLUSIVE REMEDY on any claim of any kind for any loss or damagearising out of the manufacture, sale, delivery or use of CKD's products shall be for the repair orreplacement of any defective products as provided herein.

IN NO EVENT SHALL CKD BE LIABLE FOR BUSINESS INTERRUPTIONS, LOSS OFPROFITS, PERSONAL INJURY, COSTS OF DELAY OR FOR ANY OTHER SPECIAL,INDIRECT, INCIDENTAL OR CONSEQUENTIAL LOSSES, COSTS OR DAMAGES. Thereare no warranties, expressed or implied, made by CKD other than the warranty against defectsin material and workmanship set forth above, and CKD neither assumes nor authorizes anyother person or firm to assume for it any other obligations or liability.

CKD shall not be liable for any trouble, malfunction and damages of CKD products caused,directly or indirectly, by disaster or any other causes not attributable to CKD's responsibility.CKD also shall not be responsible for any trouble, malfunction and damages of CKD Productscaused by the lack or malfunction of safety circuit or structure or function that should becommonly equipped in the Buyer's equipment in which the CKD products were used.

CKD MAINTAINS A POLICY OF ONGOING PRODUCT DEVELOPMENT ANDINPROVEMENT. WE THEREFORE RESERVE THE RIGHT TO CHANGE DIMENSIONS,SPECIFICATIONS AND DESIGN WITHOUT NOTICE.

CKD WARRANTY

●Specifications are subject to change without notice.

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● 広州事務所（GUANGZHOU OFFICE） PHONE +86-（0）20-83313461 FAX +86-（0）20-83313462 ● 大連事務所 / DALIAN OFFICE PHONE +86-（0）411-83779312 FAX +86-（0）411-83779313 ● 長春事務所 / CHANG CHUN OFFICE PHONE +86-（0）431-2909875 FAX +86-（0）431-2909875 ● 杭州事務所（HANGZHOU OFFICE） PHONE +86-（0）571-85800055 FAX +86-（0）571-85800054

CKD SINGAPORE PTE. LTD. PHONE +65-6744-2623 FAX +65-6744-2486

：Distributors

2006.3.CCC

process gas and vacuum components high purity gas control systems

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