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Micro mechatronics 1
part 1: introduction
Prof. Fritz J. NeffDirector of the Laboratory forMicro mechatronics and Hybrid integrated thick film circuitSat the University of AppliedSciences Karlsruhe (FH)Germany, 1.12.2008
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Prof.Fritz J. Neff, Steinbeis TZ Mechatronik Karlsruhe 2
contentMicro mechatronics = Micro systems technology = MEMS SubstratesPastesScreen printing technology for line widths >100µmSurface mount technologyBonding technologyQuality assurance / quality managementTechnology for micro conductors(line widths < 100 µm)
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Prof.Fritz J. Neff, Steinbeis TZ Mechatronik Karlsruhe 3
objectives
Nescessary knowledge formanufacturing of thick film hybrid integrated circuits and micro systems
Practical trainee in clean room for the use of all instruments and machines of the LMHSAbility to manufacture hybrid integrated micromechatronic systems
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Prof.Fritz J. Neff, Steinbeis TZ Mechatronik Karlsruhe 4
Your experiences and interests
experiences: none!?
interests:very interested!? ☺
therefore:some examples! !☺!
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Prof.Fritz J. Neff, Steinbeis TZ Mechatronik Karlsruhe 5
Application of micromechatronic systems
Chemical analysiscarsAirplanes and space shuttlesTool machinesHouse technics
MedicintechnicsMedio ambienteBio technicsCommunicationtechnics
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Prof.Fritz J. Neff, Steinbeis TZ Mechatronik Karlsruhe 6
Objective of micromechatronics technologies
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Prof.Fritz J. Neff, Steinbeis TZ Mechatronik Karlsruhe 7
Applicated micro mechatronics
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Prof.Fritz J. Neff, Steinbeis TZ Mechatronik Karlsruhe 8
Applicated micro mechatronics
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Prof.Fritz J. Neff, Steinbeis TZ Mechatronik Karlsruhe 9
Mechatronics for Aerospace Applications
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Prof.Fritz J. Neff, Steinbeis TZ Mechatronik Karlsruhe 10
What is SMART?
Simple to use
Maintenable
Accurate
Reliable
Trainable
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Prof.Fritz J. Neff, Steinbeis TZ Mechatronik Karlsruhe 11
Main requirements to micromechatronic systems
Unsensitive against:Changes of temperatureChanges of mechanical stresspollutionElectro magnetic fields
Further on:Smallest dimensionsPossibilities for communication
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Prof.Fritz J. Neff, Steinbeis TZ Mechatronik Karlsruhe 12
They contain:Sensoresprocessorsactuators
They are:Elements of macro mechatronic systemsintelligent(partly) autonomous
Characteristics of micromechatronic systems
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Prof.Fritz J. Neff, Steinbeis TZ Mechatronik Karlsruhe 13
µ-Elektronik is a homologic technologyµ-mechatronics contains a lot of technologies and materials, therefore it is a non homologic technologyA µ-mechatronic system is a technical product whichhas been manufactured by micro technologiesTolerances very often have the same dimensions likethe mechanical partVery dominant are the surfaces not the volumeforcesIf a monolithic construction is not possible than thehybride integration is requested.
Important characteristics of micro mechatronic systems
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Prof.Fritz J. Neff, Steinbeis TZ Mechatronik Karlsruhe 14
Homologicalµ-electronic systems
90% of all wafers are Silizium
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Prof.Fritz J. Neff, Steinbeis TZ Mechatronik Karlsruhe 15
None homologicµ-mechatronik
/NEXUS/
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Prof.Fritz J. Neff, Steinbeis TZ Mechatronik Karlsruhe 16
Layout of micromecha-tronic
systems
Actuatorarray
Sensor array
actuator
Sensor
amplifieramplifier
AD
AD
AD
AD
AD
AD
D/A converter
A/D converter
Multiplex
RAM ROM µP I/O
data -treatment
InternalBus
ExternalBusinterface
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Prof.Fritz J. Neff, Steinbeis TZ Mechatronik Karlsruhe 17
Manufacturing of micromechatronic systems
1. possibilitymonolithic integration (semi conductor)
2. possibilityHybride Integration (thick film)
3. possibilitysurface mount technology
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Prof.Fritz J. Neff, Steinbeis TZ Mechatronik Karlsruhe 18
Monolithic IntegrationMicro mechanicalpressure sensorwith signaltreatment on onesingle silicon die
Quelle: Bosch Reutlingen, 2000
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Prof.Fritz J. Neff, Steinbeis TZ Mechatronik Karlsruhe 19
Hybride IntegrationPartly autarc
micro mechatronicsystem to detectand treat datas of Air pressure,temperature and Light intensity
Quelle: Neff, LMHS – FH Karlsruhe, 1997
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Prof.Fritz J. Neff, Steinbeis TZ Mechatronik Karlsruhe 20
Frommonolithiclayout to the printedcircuitboard
Silicon wafer
Chip
housedIC
HISSSMD-
PCB
Housed circuit
Quelle: Neff, Lernprogramm hybridintegrierteSchichtschaltungen, 1999
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Prof.Fritz J. Neff, Steinbeis TZ Mechatronik Karlsruhe 21
Mechatronik as interface forinterdisciplinary cooperation
AktuatorsSensors
MechatronicSystems
Mechanics Electronics
Information technics
Simulation &modelling
Process-algorithms
„Mechatronik is the best possible integration of Mechanics, Electronics and Informatics on one substrate. This includes as well the functional integrationand also the methods in developing and manufacturing.“ (Werner Vogt, BSH)
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Prof.Fritz J. Neff, Steinbeis TZ Mechatronik Karlsruhe 22
Macro- and Micro-Mechatronics
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Prof.Fritz J. Neff, Steinbeis TZ Mechatronik Karlsruhe 23
• Dish washer• Compact dish
washer• Washing centers
• Micro wave equipment
• Vacuum cleaner
• Damp exhaust • Climatiation equipment• Warm water equipment• Gas heating• Oil radiators
• Electric cooker• Electric backing oven• Glas ceramic-cooking
fields• Elektrokochmulden• Gas cooker• Gas backing oven• Gas cooking fields
• Kühlschränke• Kühl-Gefrier-
Kombinationen• Gefrierschränke• Gefriertruhen• Gewerbliche Kühl-
und Gefriergeräte
• Front loadingWash machins
• Top loader-Wash maschins
• Wash dryer
• Small• Domestic equipment
BSH – Product portfolio
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Prof.Fritz J. Neff, Steinbeis TZ Mechatronik Karlsruhe 24
Technologies Technologies fromfrom ExpertsExpertsSTEIN Automation - Partner for modular mounting
concepts
special station
Portal Robot Power screwdriving station
Labeling
test system cell Transportation systemConstrucion ofcontrols
• small risc by Technology leadership• Transparent calculation• short time to market• reliability
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Prof.Fritz J. Neff, Steinbeis TZ Mechatronik Karlsruhe 25
ANKA
Mask Making Hot EmbossingResist Lab ElectroplatingLithography
500/5 µm
LIGA Process SequenceForschungszentrum Karlsruhe GmbH Universität Karlsruhe (TH)
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Prof.Fritz J. Neff, Steinbeis TZ Mechatronik Karlsruhe 26
Faculté de Construction Mécanique et de Mécatronique
courses•Maschinenbau und Mechatronik M
•Mecatronic and Micro-Mechatronic Systems M•Maschinenbau B
• Fahrzeugtechnologie B
•Mechatronik B
Faculty Mechanical Engineering and Mechatronics
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Prof.Fritz J. Neff, Steinbeis TZ Mechatronik Karlsruhe 27
Participation in Formula StudentCompetition Germany and Italy
2007 2008
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Prof.Fritz J. Neff, Steinbeis TZ Mechatronik Karlsruhe 28
Reinraum des LMHSProf. Dipl.-Wirtsch. Ing. Fritz J. Neff
Schneiderand
Schneide
rand
Schneiderand
A0-Rahmen
LMHS: Laboratory for Micro-mechatronic Systemsand Hybridintegrated Thick film Circuits
Sch
neid
era
nd
Different Areas/Qualities in the Clean room:
Grey area: change clothes, reparation of SMT with solder paste dispensing, Pick and Place Unit and Vapor phase soldering
Rotation lock: surface cleaning for personal and material
White area: Class 7 acc to DIN EN ISO 14644-1 bzw. Klasse 10.000 nach FedStd.209D.
for screen masking, Lithography, screen printing, thermal processes: Drying (ca. 80°C), glue hardening(120°C – 180°C), fireing after screen print (max 850°C), Clean room test:Number of articles, over pressure (min 11 Pa – max 35 Pa), Temperature (ca. 20°C), rel. humidity (ca. 45% - 50%) Air flow intensity and direction, Recovery test, noise pressure level (max 70dB(A)),Light intensity (500 - 1100 lux)Clean room monitoring:Monitoring each 10 minutes: number of particles,
over pressure, rel. humidity, temperature
Class 6 acc to DIN EN ISO 14644-1bzw. Klasse 1000 nach FedStd.209D.
für wire bonding (100µm – 200µm Drahtdurchmesser), Flip-Chip-Bonding, Micro assembly
Class 5 acc to DIN EN ISO 14644-1bzw. Klasse 100 nach FedStd.209D
für wire bonding (25µm Drahtdurchmesser),Die-Bonding, Wedge-Wedge-Bonding, Ball-Wedge-Bonding, Pull & Shear Test
Erstellt am 5.11.2008-fjn
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Zeit t [min]
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Ergebnis eines Recoverytests 2007
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Prof.Fritz J. Neff, Steinbeis TZ Mechatronik Karlsruhe 29
International Conference of Mechatronic and Micro-Mechatronic
Systems
founded 2000 at HS Karlsruhe each year in september for students and industry
Together with City of Karlsruhe and KIT (Karlsruhe Institute of Technology) in Congress Center Karlsruhe15./16. September 2008Mechatronik-Tage – Workshop at Congress Center KA, HS Karlsruhe and Research Center KS28. April 2009Mechatronik-Tage International Conference and fairat Congress Center Karlsruhe9./10. February 2010