ece137a, notes set 2: mosfets - ucsb · mosfets: three regions of gate voltage ( )2 is a e ed, is y...

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ECE137A class notes, UCSB, Mark Rodwell, copyright 2019 ECE137A, notes set 2: MOSFETs Mark Rodwell, Doluca Family Chair, ECE Department University of California, Santa Barbara [email protected]

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Page 1: ECE137A, notes set 2: MOSFETs - UCSB · MOSFETs: Three Regions of Gate Voltage ( )2 is a e ed, is y d D gs th gs I V V v n V gs is ssnld,or is ) ff : " o" ' V | v t L g / P ( / 2)

ECE137A class notes, UCSB, Mark Rodwell, copyright 2019

ECE137A, notes set 2:

MOSFETs

Mark Rodwell, Doluca Family Chair, ECE DepartmentUniversity of California, Santa [email protected]

Page 2: ECE137A, notes set 2: MOSFETs - UCSB · MOSFETs: Three Regions of Gate Voltage ( )2 is a e ed, is y d D gs th gs I V V v n V gs is ssnld,or is ) ff : " o" ' V | v t L g / P ( / 2)

ECE137A class notes, UCSB, Mark Rodwell, copyright 2019

Goals of this note set:

model limited- velocityfashioned-old-lessslightly

model. limited-mobility fashioned-old

MOSFETs of models almathematicRough

stics.characteri voltage-current FET

operation FET of sense physicalRough

*We won't cover the ballistic injection velocity model

Page 3: ECE137A, notes set 2: MOSFETs - UCSB · MOSFETs: Three Regions of Gate Voltage ( )2 is a e ed, is y d D gs th gs I V V v n V gs is ssnld,or is ) ff : " o" ' V | v t L g / P ( / 2)

ECE137A class notes, UCSB, Mark Rodwell, copyright 2019

N-Channel MOSFET

Page 4: ECE137A, notes set 2: MOSFETs - UCSB · MOSFETs: Three Regions of Gate Voltage ( )2 is a e ed, is y d D gs th gs I V V v n V gs is ssnld,or is ) ff : " o" ' V | v t L g / P ( / 2)

ECE137A class notes, UCSB, Mark Rodwell, copyright 2019

Field-Effect Transistor Operation

sourcedrain

gate

Positive Gate Voltage

→ reduced energy barrier

→ increased drain current

Page 5: ECE137A, notes set 2: MOSFETs - UCSB · MOSFETs: Three Regions of Gate Voltage ( )2 is a e ed, is y d D gs th gs I V V v n V gs is ssnld,or is ) ff : " o" ' V | v t L g / P ( / 2)

ECE137A class notes, UCSB, Mark Rodwell, copyright 2019

Field-Effect Transistor Operation

sourcedrain

gate

Positive Gate Voltage

→ reduced energy barrier

→ increased drain current

Page 6: ECE137A, notes set 2: MOSFETs - UCSB · MOSFETs: Three Regions of Gate Voltage ( )2 is a e ed, is y d D gs th gs I V V v n V gs is ssnld,or is ) ff : " o" ' V | v t L g / P ( / 2)

ECE137A class notes, UCSB, Mark Rodwell, copyright 2019

N-Channel MOSFET

Page 7: ECE137A, notes set 2: MOSFETs - UCSB · MOSFETs: Three Regions of Gate Voltage ( )2 is a e ed, is y d D gs th gs I V V v n V gs is ssnld,or is ) ff : " o" ' V | v t L g / P ( / 2)

ECE137A class notes, UCSB, Mark Rodwell, copyright 2019

Physical Sketch

Page 8: ECE137A, notes set 2: MOSFETs - UCSB · MOSFETs: Three Regions of Gate Voltage ( )2 is a e ed, is y d D gs th gs I V V v n V gs is ssnld,or is ) ff : " o" ' V | v t L g / P ( / 2)

ECE137A class notes, UCSB, Mark Rodwell, copyright 2019

MOSFET Physical Structure: ~130nm node

N+ source N+ drain

source contact (silicide) drain contact (silicide)

N+ polygate

gate metal(silicide) dielectric

sidewall

gate oxide

P substrate

S D S D S D S

G

G

Wg

Cross-Section Layout

P substrate

gatedielectric

N+polysilicongate

inversionlayer

(6 FETs, each of gate width Wg , connected in parallel)

Page 9: ECE137A, notes set 2: MOSFETs - UCSB · MOSFETs: Three Regions of Gate Voltage ( )2 is a e ed, is y d D gs th gs I V V v n V gs is ssnld,or is ) ff : " o" ' V | v t L g / P ( / 2)

ECE137A class notes, UCSB, Mark Rodwell, copyright 2019

MOSFET I-V characteristics (approximate)

: voltageknee theabove agesdrain volt have weIf

Page 10: ECE137A, notes set 2: MOSFETs - UCSB · MOSFETs: Three Regions of Gate Voltage ( )2 is a e ed, is y d D gs th gs I V V v n V gs is ssnld,or is ) ff : " o" ' V | v t L g / P ( / 2)

ECE137A class notes, UCSB, Mark Rodwell, copyright 2019

MOSFET I-V characteristics (approximate)

: vs.plot can Then we GSD VI

)1()2/(~ :limited- velocity)3

)1()(~ :limited-mobility 2)

off quitenot but almost ldSubthresho 1)

:curve in the ***regions *3* The

1

2

DSthgsD

DSthgsD

GSD

VVVVI

VVVI

VI

Page 11: ECE137A, notes set 2: MOSFETs - UCSB · MOSFETs: Three Regions of Gate Voltage ( )2 is a e ed, is y d D gs th gs I V V v n V gs is ssnld,or is ) ff : " o" ' V | v t L g / P ( / 2)

ECE137A class notes, UCSB, Mark Rodwell, copyright 2019

MOSFETs: Three Regions of Gate Voltage

2)(

limitedmobility iscurrent , thresholdabove little a is When

thgsD

gs

VVI

V

ld"subthresho" :off (almost) isr transisto, threshold thanless is When gsV

/gsatLvV

)2/(

limited velocityiscurrent , thresholdabovefar is When

VVVI

V

thgsD

gs

Page 12: ECE137A, notes set 2: MOSFETs - UCSB · MOSFETs: Three Regions of Gate Voltage ( )2 is a e ed, is y d D gs th gs I V V v n V gs is ssnld,or is ) ff : " o" ' V | v t L g / P ( / 2)

ECE137A class notes, UCSB, Mark Rodwell, copyright 2019

MOSFET DC Characteristics: Mobility-Limited Case

:current limitedmobility

voltage,knee thenlarger tha voltagesdrainfor Applies

2( ) (1 ); this is only approximateD gs th DSI K V V V

mobility-limited

velocity-limited

/ where

for

satg

thgsth

vLV

VVVV

where ( / 2 )gs g gK c W L

Page 13: ECE137A, notes set 2: MOSFETs - UCSB · MOSFETs: Three Regions of Gate Voltage ( )2 is a e ed, is y d D gs th gs I V V v n V gs is ssnld,or is ) ff : " o" ' V | v t L g / P ( / 2)

ECE137A class notes, UCSB, Mark Rodwell, copyright 2019

MOSFET DC Characteristics: Velocity-Limited Case

ID

VDS

increasingVGS

voltage,knee thenlarger tha voltagesdrainfor Applies

current limitedvelocity

mobility-limited

velocity-limited

for

where /

gs th

g inj

V V V

V L v

(1 )( / 2) : this is only approximateD v DS gs thI K V V V V

Where v gs g injK c W v

Page 14: ECE137A, notes set 2: MOSFETs - UCSB · MOSFETs: Three Regions of Gate Voltage ( )2 is a e ed, is y d D gs th gs I V V v n V gs is ssnld,or is ) ff : " o" ' V | v t L g / P ( / 2)

ECE137A class notes, UCSB, Mark Rodwell, copyright 2019

DC Characteristics: *Somewhat* Better Approximation

1

n ExpressiodGeneralize

1,

2

2,

D

D

D

D

I

I

I

I

Id

VgsVth

mobility-limited

velocity-limited

ID

VDS

increasingVGS

s.expression limitedmobility

or limited- velocityeither the **eappropriat *as* use Instead

:class in this use tousfor complex toois expression This

2

,1 ( ) (1 )D gs th DSI K V V V

,2 (1 )( )D v DS gs thI K V V V

Page 15: ECE137A, notes set 2: MOSFETs - UCSB · MOSFETs: Three Regions of Gate Voltage ( )2 is a e ed, is y d D gs th gs I V V v n V gs is ssnld,or is ) ff : " o" ' V | v t L g / P ( / 2)

ECE137A class notes, UCSB, Mark Rodwell, copyright 2019

How well does our approximation work ?

Black: actual curveOur fit: mobility region and velocity region

0 0.5 1 1.5 2 2.5 3 3.5 4

our fit: mobility region

actual I-V curve

asymptotic fit

our fit: velocity region

Dra

in c

urr

en

t, Id

/Wg

, a

mps/m

icro

me

ter

(Vgs-Vth)/V

Observe: for very large ( ), a better fit would be ( ).

This is the dotted line.

No simple expression can fit perfectly at all !

Our simple (red/blue) model will suffice for this

gs th D v gs th

gs

V V I K V V V

V

class.

Page 16: ECE137A, notes set 2: MOSFETs - UCSB · MOSFETs: Three Regions of Gate Voltage ( )2 is a e ed, is y d D gs th gs I V V v n V gs is ssnld,or is ) ff : " o" ' V | v t L g / P ( / 2)

ECE137A class notes, UCSB, Mark Rodwell, copyright 2019

Paramers and Typical #s (1)

7

2

injection velocity from the source into the channel

~ 1.0 10 cm/s for N-MOSFETs

carrier mobility at surface ~ 150 200 cm /(V-s) for N-MOSFET

In older technologies (~>35nm):

P-channe

injv

l FETs have both and about half that of N-FETs

In newer technologies (~<35nm):

and are comparable for the PFET and NFET.

threshold voltage ---usually 0.2-0.4 V for modern N-

inj

inj

th

v

v

V

FETs

gives slope of output characteristics: 1/ typically 3-20 V

Page 17: ECE137A, notes set 2: MOSFETs - UCSB · MOSFETs: Three Regions of Gate Voltage ( )2 is a e ed, is y d D gs th gs I V V v n V gs is ssnld,or is ) ff : " o" ' V | v t L g / P ( / 2)

ECE137A class notes, UCSB, Mark Rodwell, copyright 2019

Paramers and Typical #s (2)

1

0 2

gate-channel capacitance per unit area

1/ 1/ two capacitances in series

/ ( 3.8 for SiO ) This is the oxide capacitance

equivalent oxide thickness - about

gs

ox semi

ox r ox r

ox

c

c c

c T

T

-9

2

1 nm 10 m

0.1 F/m

This is the semiconductor surface capacitance, and arises because

the semiconductor surface does not approximate that of a perfect conductor

semic

( arises from two effects:

the finite # of available quantum states within the semiconductor,

and the nonzero depth of the wavefunction within the semiconductor )

semic

Stern and Howard: Properties of Semiconductor Surface Inversion Layers in the Electric Quantum Limit, Phys. Rev. 163, 816 – 15 Nov. 1967, https://journals.aps.org/pr/abstract/10.1103/PhysRev.163.816 , doi = 10.1103/PhysRev.163.816

Page 18: ECE137A, notes set 2: MOSFETs - UCSB · MOSFETs: Three Regions of Gate Voltage ( )2 is a e ed, is y d D gs th gs I V V v n V gs is ssnld,or is ) ff : " o" ' V | v t L g / P ( / 2)

ECE137A class notes, UCSB, Mark Rodwell, copyright 2019

Knee Voltage: Mobility-Limited Case

VGD

=Vth

regionscurrent -constant and Ohmic the

betweenboundary thedefines voltageknee TheID

VDS

increasingVGS

Oh

mic

constant-current

thgsdsdg VVVV

whenoccurs curve in knee the

regime, limited-mobility theIn

IDR

D

VGD

=Vth

IDR

S

s.resistance drain & source parasitic theacross drops

by voltage increasedfurther is Voltage KneeThe

Page 19: ECE137A, notes set 2: MOSFETs - UCSB · MOSFETs: Three Regions of Gate Voltage ( )2 is a e ed, is y d D gs th gs I V V v n V gs is ssnld,or is ) ff : " o" ' V | v t L g / P ( / 2)

ECE137A class notes, UCSB, Mark Rodwell, copyright 2019

Knee Voltage: Velocity-Limited Case

In the velocity-limited regime, the knee in curve

occurs when /ds inj gV v L

s.resistance drain & source

parasitic theacross drops by voltage

increasedfurther is Voltage Knee theAgain,

VDS

=vsat

Lg/

IDR

D

VDS

=vsat

Lg/

IDR

S

/ds inj gV v L

/ds inj gV v L

Page 20: ECE137A, notes set 2: MOSFETs - UCSB · MOSFETs: Three Regions of Gate Voltage ( )2 is a e ed, is y d D gs th gs I V V v n V gs is ssnld,or is ) ff : " o" ' V | v t L g / P ( / 2)

ECE137A class notes, UCSB, Mark Rodwell, copyright 2019

Which Model to use When ?

If where / , use the mobility-limited model

If , use the velocity limited model

gs th inj g

gs th

V V V V v L

V V V

mobility-limited

velocity-limited

Page 21: ECE137A, notes set 2: MOSFETs - UCSB · MOSFETs: Three Regions of Gate Voltage ( )2 is a e ed, is y d D gs th gs I V V v n V gs is ssnld,or is ) ff : " o" ' V | v t L g / P ( / 2)

ECE137A class notes, UCSB, Mark Rodwell, copyright 2019

Linear vs. Square-Law Characteristics: 90 nm

Page 22: ECE137A, notes set 2: MOSFETs - UCSB · MOSFETs: Three Regions of Gate Voltage ( )2 is a e ed, is y d D gs th gs I V V v n V gs is ssnld,or is ) ff : " o" ' V | v t L g / P ( / 2)

ECE137A class notes, UCSB, Mark Rodwell, copyright 2019

90 nm MOSFET DC Characteristics

N-channel

/ 1.4 mS / μm 1.4 S / mm

1/ ~3V

P-channel

/ 0.7 mS / μm 0.7 S / mm

1/ ~3V

m g gs inj

m g gs inj

g W c v

g W c v

Page 23: ECE137A, notes set 2: MOSFETs - UCSB · MOSFETs: Three Regions of Gate Voltage ( )2 is a e ed, is y d D gs th gs I V V v n V gs is ssnld,or is ) ff : " o" ' V | v t L g / P ( / 2)

ECE137A class notes, UCSB, Mark Rodwell, copyright 2019

DC charactistics in the resistive region

22 ( ) / 2 (1 )

1) this is only approximate

2) this is only for *mobility-limited* operation

Unfortunately, I don't have a derivation in the velocity limit

D gs th DS DS DSI K V V V V V

Page 24: ECE137A, notes set 2: MOSFETs - UCSB · MOSFETs: Three Regions of Gate Voltage ( )2 is a e ed, is y d D gs th gs I V V v n V gs is ssnld,or is ) ff : " o" ' V | v t L g / P ( / 2)

ECE137A class notes, UCSB, Mark Rodwell, copyright 2019

P-Channel MOSFET

Page 25: ECE137A, notes set 2: MOSFETs - UCSB · MOSFETs: Three Regions of Gate Voltage ( )2 is a e ed, is y d D gs th gs I V V v n V gs is ssnld,or is ) ff : " o" ' V | v t L g / P ( / 2)

ECE137A class notes, UCSB, Mark Rodwell, copyright 2019

P-Channel MOSFET

2

, ( ) (1 )D gs th DSI K V V V

, (1 )( / 2)D v v DS gs thI K V V V V /gsatLvV

Page 26: ECE137A, notes set 2: MOSFETs - UCSB · MOSFETs: Three Regions of Gate Voltage ( )2 is a e ed, is y d D gs th gs I V V v n V gs is ssnld,or is ) ff : " o" ' V | v t L g / P ( / 2)

ECE137A class notes, UCSB, Mark Rodwell, copyright 2019

P-Channel MOSFET

Page 27: ECE137A, notes set 2: MOSFETs - UCSB · MOSFETs: Three Regions of Gate Voltage ( )2 is a e ed, is y d D gs th gs I V V v n V gs is ssnld,or is ) ff : " o" ' V | v t L g / P ( / 2)

ECE137A class notes, UCSB, Mark Rodwell, copyright 2019

FET Small-Signal Model: Mobility-Limited

2

Drain Current

( ) (1 )

Transconductance

2 ( )(1 ) 2 ( )

Output Conductance

1

1

to within the accuracy of the models we are usin

D gs th DS

Dm gs th DS gs th

GS

D Dds

ds DS DS

D

I K V V V

Ig K V V V K V V

V

I IG

R V V

I

g

Note that varies roughly as 1 .ds DR / I

RDS

gmV

GS

VGS

D

S

G

Page 28: ECE137A, notes set 2: MOSFETs - UCSB · MOSFETs: Three Regions of Gate Voltage ( )2 is a e ed, is y d D gs th gs I V V v n V gs is ssnld,or is ) ff : " o" ' V | v t L g / P ( / 2)

ECE137A class notes, UCSB, Mark Rodwell, copyright 2019

FET transconductance: Mobility-Limited

2

2

Drain Current

( ) (1 )

Transconductance

2 ( )(1 )

2 ( )(1 ) 2

( ) (1 ) ( )

D gs th DS

Dm gs th DS

GS

gs th DSm

D gs th DS gs th

I K V V V

Ig K V V V

V

K V V Vg

I K V V V V V

RDS

gmV

GS

VGS

D

S

G

2 / ( ) , but only in mobility-limited case

** and only if ( ) 2 2 / **

m D gs th

gs th T

g I V V

V V V kT q

If ( ) 2 2 / , then the fet is in subthreshold mode and

/ , where 1 is some parameter characteristic of the device

gs th T

m D T

V V V kT q

g I nV n

Page 29: ECE137A, notes set 2: MOSFETs - UCSB · MOSFETs: Three Regions of Gate Voltage ( )2 is a e ed, is y d D gs th gs I V V v n V gs is ssnld,or is ) ff : " o" ' V | v t L g / P ( / 2)

ECE137A class notes, UCSB, Mark Rodwell, copyright 2019

FET Small-Signal Model: Velocity-Limited

Drain Current

(1 )( / 2)

Transconductance

(1 )

Output Conductance

1

1

D v DS gs th

Dm v DS v

GS

D Dds

ds DS DS

D

I K V V V V

Ig K V K

V

I IG

R V V

I

RDS

gmV

GS

VGS

D

S

G

Page 30: ECE137A, notes set 2: MOSFETs - UCSB · MOSFETs: Three Regions of Gate Voltage ( )2 is a e ed, is y d D gs th gs I V V v n V gs is ssnld,or is ) ff : " o" ' V | v t L g / P ( / 2)

ECE137A class notes, UCSB, Mark Rodwell, copyright 2019

Transconductance vs Vgs

2

,

mobility limited

( ) (1 )

2 ( )(1 )

D gs th DS

Dm gs th DS

GS

I K V V V

Ig K V V V

V

velocity limited

( / 2)(1 )

(1 )

D v gs th DS

Dm v DS

GS

I K V V V V

Ig K V

V

Id

VgsVth

V

gm

VgsVth

V

mobility-limitedvelocity-limited

Page 31: ECE137A, notes set 2: MOSFETs - UCSB · MOSFETs: Three Regions of Gate Voltage ( )2 is a e ed, is y d D gs th gs I V V v n V gs is ssnld,or is ) ff : " o" ' V | v t L g / P ( / 2)

ECE137A class notes, UCSB, Mark Rodwell, copyright 2019

Example #1: NMOS @ 15nm gate length

plot for 1 micron gate width

ignores VDS term

2 2 2 2

,

2

2

Assume the following

15nm

2.4 10 F/m ( 1nm, 3.8, =8.6 10 F/m )

200 cm /V-s

0.3 V

Then:

/ 2 16mA/V ( /1 m)

2.40mA/V ( /1 m)

/ 75mV: Note how s

g

gs ox r ox semi

th

gs g g g

v gs inj g g

inj g

L

c T c

V

K c W L W

K c v W W

V v L

mall is the mobility-limited region

Page 32: ECE137A, notes set 2: MOSFETs - UCSB · MOSFETs: Three Regions of Gate Voltage ( )2 is a e ed, is y d D gs th gs I V V v n V gs is ssnld,or is ) ff : " o" ' V | v t L g / P ( / 2)

ECE137A class notes, UCSB, Mark Rodwell, copyright 2019

Example #2: 250 nm NMOS:

plot for 1 micron gate width

ignores VDS term

3 2 2 2

,

2

2

Assume the following

250nm

6.9 10 F/m ( 4.9nm, 3.8, =8.6 10 F/m )

400 cm /V-s

0.3V

Then:

/ 2 0.55mA/V ( /1 m)

0.69mA/V ( /1 m)

/ 0.625V Note

g

gs ox r ox semi

th

gs g g g

v gs inj g g

inj g

L

c T c

V

K c W L W

K c v W W

V v L

how *large* is the mobility-limited region

Page 33: ECE137A, notes set 2: MOSFETs - UCSB · MOSFETs: Three Regions of Gate Voltage ( )2 is a e ed, is y d D gs th gs I V V v n V gs is ssnld,or is ) ff : " o" ' V | v t L g / P ( / 2)

ECE137A class notes, UCSB, Mark Rodwell, copyright 2019

Example #3: for easy hand calculations

plot for 1 micron gate width

ignores VDS term

2

For easy hand calculations

with examples in the notes,

we will often use:

10mA/V ( /1 m)

2mA/V ( /1 m)

0.1V

0.3V

g

v g

th

K W

K W

V

V

I suppose this might be roughly the characteristics of a MOSFET

with ~30nm physical gate length.

Page 34: ECE137A, notes set 2: MOSFETs - UCSB · MOSFETs: Three Regions of Gate Voltage ( )2 is a e ed, is y d D gs th gs I V V v n V gs is ssnld,or is ) ff : " o" ' V | v t L g / P ( / 2)

ECE137A class notes, UCSB, Mark Rodwell, copyright 2019

Caution regarding examples 1,2 and 3

To keep analysis simple, we have ignored the effect of and .

We therefore considerably over-estimated the MOSFET drain current

at a given .

In the interest of simplicity, we will accept this lim

S D

gs

R R

V

itation in this class.

A proper analysis would need to include the effect of and ,

by treating and as separate external resistances,

or by adjusting the FET model parmeters to fit the overall

S D

S D

R R

R R

DC charateristics.

Page 35: ECE137A, notes set 2: MOSFETs - UCSB · MOSFETs: Three Regions of Gate Voltage ( )2 is a e ed, is y d D gs th gs I V V v n V gs is ssnld,or is ) ff : " o" ' V | v t L g / P ( / 2)

ECE137A class notes, UCSB, Mark Rodwell, copyright 2019

MOSFET model: comments

1) MOS models in most undergraduate texts ignore injection velocity limits,

yet this is a huge effect in modern MOSFETs.

2) Given (1), there is no consensus on how to teach velocity limited operatoin

in undergraduate classes.

3) The 137ab method, here, is my attempt at a reasonably accurate yet simple model.

4) The more accurate expression given here is derived by assuming

an exit velocity at thinjv e drain end of the channel.

5) Even the more accurate expression is only very approximate for highly scaled

MOSFETs: for detailed design, we use foundry CAD models.

6) See publications by M. Lundstrom and D. Antoniadis for good derivations

of modern FET I-V characteristics.