ee 143: microfabrication technology ctn 4/15/10 lecture...
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![Page 1: EE 143: Microfabrication Technology CTN 4/15/10 Lecture ...ee143/sp10/lectures/Lec23n.AdvIsolation.pdf · Title: Microsoft PowerPoint - Lec23n.AdvIsolation.ee143.ctn.ppt Author: ctnguyen](https://reader030.vdocument.in/reader030/viewer/2022040301/5e79ac2e55902d1c573fa317/html5/thumbnails/1.jpg)
EE 143: Microfabrication TechnologyLecture 23n: Advanced Isolation
CTN 4/15/10
Copyright @ 2010 Regents of the University of California at Berkeley 1
EE 143 93CTNIsolation Technologies
![Page 2: EE 143: Microfabrication Technology CTN 4/15/10 Lecture ...ee143/sp10/lectures/Lec23n.AdvIsolation.pdf · Title: Microsoft PowerPoint - Lec23n.AdvIsolation.ee143.ctn.ppt Author: ctnguyen](https://reader030.vdocument.in/reader030/viewer/2022040301/5e79ac2e55902d1c573fa317/html5/thumbnails/2.jpg)
EE 143: Microfabrication TechnologyLecture 23n: Advanced Isolation
CTN 4/15/10
Copyright @ 2010 Regents of the University of California at Berkeley 2
EE 143 94CTNIssues With LOCOS
![Page 3: EE 143: Microfabrication Technology CTN 4/15/10 Lecture ...ee143/sp10/lectures/Lec23n.AdvIsolation.pdf · Title: Microsoft PowerPoint - Lec23n.AdvIsolation.ee143.ctn.ppt Author: ctnguyen](https://reader030.vdocument.in/reader030/viewer/2022040301/5e79ac2e55902d1c573fa317/html5/thumbnails/3.jpg)
EE 143: Microfabrication TechnologyLecture 23n: Advanced Isolation
CTN 4/15/10
Copyright @ 2010 Regents of the University of California at Berkeley 3
EE 143 95CTNSemi-Recessed LOCOS
![Page 4: EE 143: Microfabrication Technology CTN 4/15/10 Lecture ...ee143/sp10/lectures/Lec23n.AdvIsolation.pdf · Title: Microsoft PowerPoint - Lec23n.AdvIsolation.ee143.ctn.ppt Author: ctnguyen](https://reader030.vdocument.in/reader030/viewer/2022040301/5e79ac2e55902d1c573fa317/html5/thumbnails/4.jpg)
EE 143: Microfabrication TechnologyLecture 23n: Advanced Isolation
CTN 4/15/10
Copyright @ 2010 Regents of the University of California at Berkeley 4
EE 143 96CTNSemi-Recessed LOCOS
![Page 5: EE 143: Microfabrication Technology CTN 4/15/10 Lecture ...ee143/sp10/lectures/Lec23n.AdvIsolation.pdf · Title: Microsoft PowerPoint - Lec23n.AdvIsolation.ee143.ctn.ppt Author: ctnguyen](https://reader030.vdocument.in/reader030/viewer/2022040301/5e79ac2e55902d1c573fa317/html5/thumbnails/5.jpg)
EE 143: Microfabrication TechnologyLecture 23n: Advanced Isolation
CTN 4/15/10
Copyright @ 2010 Regents of the University of California at Berkeley 5
EE 143 97CTNFully-Recessed LOCOS
![Page 6: EE 143: Microfabrication Technology CTN 4/15/10 Lecture ...ee143/sp10/lectures/Lec23n.AdvIsolation.pdf · Title: Microsoft PowerPoint - Lec23n.AdvIsolation.ee143.ctn.ppt Author: ctnguyen](https://reader030.vdocument.in/reader030/viewer/2022040301/5e79ac2e55902d1c573fa317/html5/thumbnails/6.jpg)
EE 143: Microfabrication TechnologyLecture 23n: Advanced Isolation
CTN 4/15/10
Copyright @ 2010 Regents of the University of California at Berkeley 6
EE 143 98CTNFully-Recessed LOCOS
![Page 7: EE 143: Microfabrication Technology CTN 4/15/10 Lecture ...ee143/sp10/lectures/Lec23n.AdvIsolation.pdf · Title: Microsoft PowerPoint - Lec23n.AdvIsolation.ee143.ctn.ppt Author: ctnguyen](https://reader030.vdocument.in/reader030/viewer/2022040301/5e79ac2e55902d1c573fa317/html5/thumbnails/7.jpg)
EE 143: Microfabrication TechnologyLecture 23n: Advanced Isolation
CTN 4/15/10
Copyright @ 2010 Regents of the University of California at Berkeley 7
EE 143 99CTNFully-Recessed LOCOS
![Page 8: EE 143: Microfabrication Technology CTN 4/15/10 Lecture ...ee143/sp10/lectures/Lec23n.AdvIsolation.pdf · Title: Microsoft PowerPoint - Lec23n.AdvIsolation.ee143.ctn.ppt Author: ctnguyen](https://reader030.vdocument.in/reader030/viewer/2022040301/5e79ac2e55902d1c573fa317/html5/thumbnails/8.jpg)
EE 143: Microfabrication TechnologyLecture 23n: Advanced Isolation
CTN 4/15/10
Copyright @ 2010 Regents of the University of California at Berkeley 8
EE 143 100CTNFully-Recessed LOCOS
![Page 9: EE 143: Microfabrication Technology CTN 4/15/10 Lecture ...ee143/sp10/lectures/Lec23n.AdvIsolation.pdf · Title: Microsoft PowerPoint - Lec23n.AdvIsolation.ee143.ctn.ppt Author: ctnguyen](https://reader030.vdocument.in/reader030/viewer/2022040301/5e79ac2e55902d1c573fa317/html5/thumbnails/9.jpg)
EE 143: Microfabrication TechnologyLecture 23n: Advanced Isolation
CTN 4/15/10
Copyright @ 2010 Regents of the University of California at Berkeley 9
EE 143 101CTNFully-Recessed LOCOS
![Page 10: EE 143: Microfabrication Technology CTN 4/15/10 Lecture ...ee143/sp10/lectures/Lec23n.AdvIsolation.pdf · Title: Microsoft PowerPoint - Lec23n.AdvIsolation.ee143.ctn.ppt Author: ctnguyen](https://reader030.vdocument.in/reader030/viewer/2022040301/5e79ac2e55902d1c573fa317/html5/thumbnails/10.jpg)
EE 143: Microfabrication TechnologyLecture 23n: Advanced Isolation
CTN 4/15/10
Copyright @ 2010 Regents of the University of California at Berkeley 10
EE 143 102CTNTrench Isolation
![Page 11: EE 143: Microfabrication Technology CTN 4/15/10 Lecture ...ee143/sp10/lectures/Lec23n.AdvIsolation.pdf · Title: Microsoft PowerPoint - Lec23n.AdvIsolation.ee143.ctn.ppt Author: ctnguyen](https://reader030.vdocument.in/reader030/viewer/2022040301/5e79ac2e55902d1c573fa317/html5/thumbnails/11.jpg)
EE 143: Microfabrication TechnologyLecture 23n: Advanced Isolation
CTN 4/15/10
Copyright @ 2010 Regents of the University of California at Berkeley 11
EE 143 103CTNTrench Isolation
![Page 12: EE 143: Microfabrication Technology CTN 4/15/10 Lecture ...ee143/sp10/lectures/Lec23n.AdvIsolation.pdf · Title: Microsoft PowerPoint - Lec23n.AdvIsolation.ee143.ctn.ppt Author: ctnguyen](https://reader030.vdocument.in/reader030/viewer/2022040301/5e79ac2e55902d1c573fa317/html5/thumbnails/12.jpg)
EE 143: Microfabrication TechnologyLecture 23n: Advanced Isolation
CTN 4/15/10
Copyright @ 2010 Regents of the University of California at Berkeley 12
EE 143 104CTNTrench Isolation
![Page 13: EE 143: Microfabrication Technology CTN 4/15/10 Lecture ...ee143/sp10/lectures/Lec23n.AdvIsolation.pdf · Title: Microsoft PowerPoint - Lec23n.AdvIsolation.ee143.ctn.ppt Author: ctnguyen](https://reader030.vdocument.in/reader030/viewer/2022040301/5e79ac2e55902d1c573fa317/html5/thumbnails/13.jpg)
EE 143: Microfabrication TechnologyLecture 23n: Advanced Isolation
CTN 4/15/10
Copyright @ 2010 Regents of the University of California at Berkeley 13
EE 143 105CTNTrench Isolation
![Page 14: EE 143: Microfabrication Technology CTN 4/15/10 Lecture ...ee143/sp10/lectures/Lec23n.AdvIsolation.pdf · Title: Microsoft PowerPoint - Lec23n.AdvIsolation.ee143.ctn.ppt Author: ctnguyen](https://reader030.vdocument.in/reader030/viewer/2022040301/5e79ac2e55902d1c573fa317/html5/thumbnails/14.jpg)
EE 143: Microfabrication TechnologyLecture 23n: Advanced Isolation
CTN 4/15/10
Copyright @ 2010 Regents of the University of California at Berkeley 14
EE 143 106CTNTrench Isolation
![Page 15: EE 143: Microfabrication Technology CTN 4/15/10 Lecture ...ee143/sp10/lectures/Lec23n.AdvIsolation.pdf · Title: Microsoft PowerPoint - Lec23n.AdvIsolation.ee143.ctn.ppt Author: ctnguyen](https://reader030.vdocument.in/reader030/viewer/2022040301/5e79ac2e55902d1c573fa317/html5/thumbnails/15.jpg)
EE 143: Microfabrication TechnologyLecture 23n: Advanced Isolation
CTN 4/15/10
Copyright @ 2010 Regents of the University of California at Berkeley 15
EE 143 107CTNSEG Isolation
![Page 16: EE 143: Microfabrication Technology CTN 4/15/10 Lecture ...ee143/sp10/lectures/Lec23n.AdvIsolation.pdf · Title: Microsoft PowerPoint - Lec23n.AdvIsolation.ee143.ctn.ppt Author: ctnguyen](https://reader030.vdocument.in/reader030/viewer/2022040301/5e79ac2e55902d1c573fa317/html5/thumbnails/16.jpg)
EE 143: Microfabrication TechnologyLecture 23n: Advanced Isolation
CTN 4/15/10
Copyright @ 2010 Regents of the University of California at Berkeley 16
EE 143 108CTNSilicon-On-Insulator (SOI)