ee143 f2010 lecture 19 cmos inverter layoutee143/fa10/lectures/lec_19.pdfp-tub n-tub twin tub. ......
TRANSCRIPT
![Page 1: EE143 F2010 Lecture 19 CMOS Inverter Layoutee143/fa10/lectures/Lec_19.pdfP-tub N-tub Twin Tub. ... EE143 F2010 Lecture 19 11 Twin Well CMOS Process Flow. Professor N Cheung, ... EE143](https://reader031.vdocument.in/reader031/viewer/2022021421/5aa89c247f8b9a9a188bcdc0/html5/thumbnails/1.jpg)
Professor N Cheung, U.C. Berkeley
Lecture 19EE143 F2010
VDD
GND
Select mask
(dark field &
clear field)
P-well mask
(dark field)
Note body contacts:
• p-well to GND
• n-substrate to VDD
CMOS Inverter Layout
PMOS
W/L=9l/2l
NMOS
W/L=3l/2l
Active
(clear field)
Gate
(clear field)
Contact
(dark field)
Metal
(clear field)
![Page 2: EE143 F2010 Lecture 19 CMOS Inverter Layoutee143/fa10/lectures/Lec_19.pdfP-tub N-tub Twin Tub. ... EE143 F2010 Lecture 19 11 Twin Well CMOS Process Flow. Professor N Cheung, ... EE143](https://reader031.vdocument.in/reader031/viewer/2022021421/5aa89c247f8b9a9a188bcdc0/html5/thumbnails/2.jpg)
Professor N Cheung, U.C. Berkeley
Lecture 19EE143 F2010
Visualizing Layouts and Cross-Sections with SIMPLer
SIMPL is a CAD tool created by Prof. Neureuther’s group
• allows IC designers to visualize device cross-sections
corresponding to a fabrication process and physical layout.
A Berkeley undergraduate student, Harlan Hile, created a
mini-version of SIMPL (called SIMPLer) for EE40.
• It’s a JAVA program -> can be run on any computer,
as well as on a web server.
• A 3D version SIMPL-GL can be accessed at
http://cuervo2.eecs.berkeley.edu/Volcano/simpl_gl/main.htm
![Page 3: EE143 F2010 Lecture 19 CMOS Inverter Layoutee143/fa10/lectures/Lec_19.pdfP-tub N-tub Twin Tub. ... EE143 F2010 Lecture 19 11 Twin Well CMOS Process Flow. Professor N Cheung, ... EE143](https://reader031.vdocument.in/reader031/viewer/2022021421/5aa89c247f8b9a9a188bcdc0/html5/thumbnails/3.jpg)
Professor N Cheung, U.C. Berkeley
Lecture 19EE143 F2010
![Page 4: EE143 F2010 Lecture 19 CMOS Inverter Layoutee143/fa10/lectures/Lec_19.pdfP-tub N-tub Twin Tub. ... EE143 F2010 Lecture 19 11 Twin Well CMOS Process Flow. Professor N Cheung, ... EE143](https://reader031.vdocument.in/reader031/viewer/2022021421/5aa89c247f8b9a9a188bcdc0/html5/thumbnails/4.jpg)
Professor N Cheung, U.C. Berkeley
Lecture 19EE143 F2010
![Page 5: EE143 F2010 Lecture 19 CMOS Inverter Layoutee143/fa10/lectures/Lec_19.pdfP-tub N-tub Twin Tub. ... EE143 F2010 Lecture 19 11 Twin Well CMOS Process Flow. Professor N Cheung, ... EE143](https://reader031.vdocument.in/reader031/viewer/2022021421/5aa89c247f8b9a9a188bcdc0/html5/thumbnails/5.jpg)
Professor N Cheung, U.C. Berkeley
Lecture 19EE143 F2010
![Page 6: EE143 F2010 Lecture 19 CMOS Inverter Layoutee143/fa10/lectures/Lec_19.pdfP-tub N-tub Twin Tub. ... EE143 F2010 Lecture 19 11 Twin Well CMOS Process Flow. Professor N Cheung, ... EE143](https://reader031.vdocument.in/reader031/viewer/2022021421/5aa89c247f8b9a9a188bcdc0/html5/thumbnails/6.jpg)
Professor N Cheung, U.C. Berkeley
Lecture 19EE143 F2010
![Page 7: EE143 F2010 Lecture 19 CMOS Inverter Layoutee143/fa10/lectures/Lec_19.pdfP-tub N-tub Twin Tub. ... EE143 F2010 Lecture 19 11 Twin Well CMOS Process Flow. Professor N Cheung, ... EE143](https://reader031.vdocument.in/reader031/viewer/2022021421/5aa89c247f8b9a9a188bcdc0/html5/thumbnails/7.jpg)
Professor N Cheung, U.C. Berkeley
Lecture 19EE143 F2010
![Page 8: EE143 F2010 Lecture 19 CMOS Inverter Layoutee143/fa10/lectures/Lec_19.pdfP-tub N-tub Twin Tub. ... EE143 F2010 Lecture 19 11 Twin Well CMOS Process Flow. Professor N Cheung, ... EE143](https://reader031.vdocument.in/reader031/viewer/2022021421/5aa89c247f8b9a9a188bcdc0/html5/thumbnails/8.jpg)
Professor N Cheung, U.C. Berkeley
Lecture 19EE143 F2010
Define active areas; etch Si trenches
Fill trenches (deposit SiO2 then CMP)
Twin Well + STI CMOS Process
Form wells (implantation + thermal anneal)
Grow gate oxide
Deposit poly-Si and pattern gate electrodes
Implant source/drain and body-contact regions
Activate dopants (thermal anneal)
Deposit insulating layer (SiO2); planarize (CMP)
Open contact holes; deposit & pattern metal layer
![Page 9: EE143 F2010 Lecture 19 CMOS Inverter Layoutee143/fa10/lectures/Lec_19.pdfP-tub N-tub Twin Tub. ... EE143 F2010 Lecture 19 11 Twin Well CMOS Process Flow. Professor N Cheung, ... EE143](https://reader031.vdocument.in/reader031/viewer/2022021421/5aa89c247f8b9a9a188bcdc0/html5/thumbnails/9.jpg)
Professor N Cheung, U.C. Berkeley
Lecture 19EE143 F2010
9
3D view of a CMOS inverter after contact etch.
![Page 10: EE143 F2010 Lecture 19 CMOS Inverter Layoutee143/fa10/lectures/Lec_19.pdfP-tub N-tub Twin Tub. ... EE143 F2010 Lecture 19 11 Twin Well CMOS Process Flow. Professor N Cheung, ... EE143](https://reader031.vdocument.in/reader031/viewer/2022021421/5aa89c247f8b9a9a188bcdc0/html5/thumbnails/10.jpg)
Professor N Cheung, U.C. Berkeley
Lecture 19EE143 F2010
10
Well Engineering
P-tub
N-tub
Twin Tub
![Page 11: EE143 F2010 Lecture 19 CMOS Inverter Layoutee143/fa10/lectures/Lec_19.pdfP-tub N-tub Twin Tub. ... EE143 F2010 Lecture 19 11 Twin Well CMOS Process Flow. Professor N Cheung, ... EE143](https://reader031.vdocument.in/reader031/viewer/2022021421/5aa89c247f8b9a9a188bcdc0/html5/thumbnails/11.jpg)
Professor N Cheung, U.C. Berkeley
Lecture 19EE143 F2010
11
Twin Well CMOS Process Flow
![Page 12: EE143 F2010 Lecture 19 CMOS Inverter Layoutee143/fa10/lectures/Lec_19.pdfP-tub N-tub Twin Tub. ... EE143 F2010 Lecture 19 11 Twin Well CMOS Process Flow. Professor N Cheung, ... EE143](https://reader031.vdocument.in/reader031/viewer/2022021421/5aa89c247f8b9a9a188bcdc0/html5/thumbnails/12.jpg)
Professor N Cheung, U.C. Berkeley
Lecture 19EE143 F2010
12
C(x)
x
Conventional well (depth and profile
controlled by diffusion drive-in)
Retrograde well (depth and profile
controlled by implantation
energy and dose)
Retrograde Well
- formed by high energy (>200keV) implantation
![Page 13: EE143 F2010 Lecture 19 CMOS Inverter Layoutee143/fa10/lectures/Lec_19.pdfP-tub N-tub Twin Tub. ... EE143 F2010 Lecture 19 11 Twin Well CMOS Process Flow. Professor N Cheung, ... EE143](https://reader031.vdocument.in/reader031/viewer/2022021421/5aa89c247f8b9a9a188bcdc0/html5/thumbnails/13.jpg)
Professor N Cheung, U.C. Berkeley
Lecture 19EE143 F2010
13
1) Very low thermal budget for well formation
(no need for diffusion drive-in)
2) Retrograde Well is formed AFTER field oxidation
small lateral diffusion and localized high conc under FOX
Conventional vs Retrograde Well
![Page 14: EE143 F2010 Lecture 19 CMOS Inverter Layoutee143/fa10/lectures/Lec_19.pdfP-tub N-tub Twin Tub. ... EE143 F2010 Lecture 19 11 Twin Well CMOS Process Flow. Professor N Cheung, ... EE143](https://reader031.vdocument.in/reader031/viewer/2022021421/5aa89c247f8b9a9a188bcdc0/html5/thumbnails/14.jpg)
Professor N Cheung, U.C. Berkeley
Lecture 19EE143 F2010
14
Example: Formation of Channel Stop and Retrograde Well
in a single step
Channel stopRetrograde well
![Page 15: EE143 F2010 Lecture 19 CMOS Inverter Layoutee143/fa10/lectures/Lec_19.pdfP-tub N-tub Twin Tub. ... EE143 F2010 Lecture 19 11 Twin Well CMOS Process Flow. Professor N Cheung, ... EE143](https://reader031.vdocument.in/reader031/viewer/2022021421/5aa89c247f8b9a9a188bcdc0/html5/thumbnails/15.jpg)
Professor N Cheung, U.C. Berkeley
Lecture 19EE143 F2010
15
Multiple Implants for Well Engineering
![Page 16: EE143 F2010 Lecture 19 CMOS Inverter Layoutee143/fa10/lectures/Lec_19.pdfP-tub N-tub Twin Tub. ... EE143 F2010 Lecture 19 11 Twin Well CMOS Process Flow. Professor N Cheung, ... EE143](https://reader031.vdocument.in/reader031/viewer/2022021421/5aa89c247f8b9a9a188bcdc0/html5/thumbnails/16.jpg)
Professor N Cheung, U.C. Berkeley
Lecture 19EE143 F2010
N Cheung EE243 Sp2010 Lec 116
Channel Engineering
Shallow
Oxide
Trench
Isolation
![Page 17: EE143 F2010 Lecture 19 CMOS Inverter Layoutee143/fa10/lectures/Lec_19.pdfP-tub N-tub Twin Tub. ... EE143 F2010 Lecture 19 11 Twin Well CMOS Process Flow. Professor N Cheung, ... EE143](https://reader031.vdocument.in/reader031/viewer/2022021421/5aa89c247f8b9a9a188bcdc0/html5/thumbnails/17.jpg)
Professor N Cheung, U.C. Berkeley
Lecture 19EE143 F2010
17
Generic Silicon-on-Insulator (SOI) CMOS Process Flow
![Page 18: EE143 F2010 Lecture 19 CMOS Inverter Layoutee143/fa10/lectures/Lec_19.pdfP-tub N-tub Twin Tub. ... EE143 F2010 Lecture 19 11 Twin Well CMOS Process Flow. Professor N Cheung, ... EE143](https://reader031.vdocument.in/reader031/viewer/2022021421/5aa89c247f8b9a9a188bcdc0/html5/thumbnails/18.jpg)
Professor N Cheung, U.C. Berkeley
Lecture 19EE143 F2010
18
SOI Process Flow (continued)
![Page 19: EE143 F2010 Lecture 19 CMOS Inverter Layoutee143/fa10/lectures/Lec_19.pdfP-tub N-tub Twin Tub. ... EE143 F2010 Lecture 19 11 Twin Well CMOS Process Flow. Professor N Cheung, ... EE143](https://reader031.vdocument.in/reader031/viewer/2022021421/5aa89c247f8b9a9a188bcdc0/html5/thumbnails/19.jpg)
Professor N Cheung, U.C. Berkeley
Lecture 19EE143 F2010
19
Smallest feature
printable by
lithography
SiO2
CVD oxide CVD oxide
n+ n+ n+ n+
poly-Si gate
Thermal
gate oxide
Oxide spacer
Angled
Implant
n+ pocket
Normal
S/D implant
TiSi2
Self-Aligned Channel V-gate by Optical Lithography
(SALVO) Process
* Sub-50nm channels
![Page 20: EE143 F2010 Lecture 19 CMOS Inverter Layoutee143/fa10/lectures/Lec_19.pdfP-tub N-tub Twin Tub. ... EE143 F2010 Lecture 19 11 Twin Well CMOS Process Flow. Professor N Cheung, ... EE143](https://reader031.vdocument.in/reader031/viewer/2022021421/5aa89c247f8b9a9a188bcdc0/html5/thumbnails/20.jpg)
Professor N Cheung, U.C. Berkeley
Lecture 19EE143 F2010
20
or
SALVO Process Flow
Chang et al, IEDM 2000
See Homework Problem
![Page 21: EE143 F2010 Lecture 19 CMOS Inverter Layoutee143/fa10/lectures/Lec_19.pdfP-tub N-tub Twin Tub. ... EE143 F2010 Lecture 19 11 Twin Well CMOS Process Flow. Professor N Cheung, ... EE143](https://reader031.vdocument.in/reader031/viewer/2022021421/5aa89c247f8b9a9a188bcdc0/html5/thumbnails/21.jpg)
Professor N Cheung, U.C. Berkeley
Lecture 19EE143 F2010
21
SUMMARY OF IC PROCESS INTEGRATION MODULE
•Self aligned techniques: channel stop, Source/Drain,
LDD, SALICIDE
•How to read process flow descriptions and cross-sections
•Generic NMOS Process with LOCOS
•Generic CMOS Process with LOCOS and single well
•Modified Processes:
•Shallow Trench Isolation (STI), Twin Wells, Retrograde
Well, SOI CMOS