downloads.semi.orgdownloads.semi.org/.../$file/5524a.docx · web viewsemi g92 — specification for...

Background Statement for SEMI Draft Document 5524ARevisions to SEMI E156-0710: Mechanical Specification for 450 mm AMHS Stocker to Transport Interface, with title change to Specification for Mechanical Interfaces between 450 mm AMHS Stocker and Transport Equipment

Notice: This background statement is not part of the balloted item. It is provided solely to assist the recipient in reaching an informed decision based on the rationale of the activity that preceded the creation of this Document.

Notice: Recipients of this Document are invited to submit, with their comments, notification of any relevant patented technology or copyrighted items of which they are aware and to provide supporting documentation. In this context, “patented technology” is defined as technology for which a patent has issued or has been applied for. In the latter case, only publicly available information on the contents of the patent application is to be provided.

Purpose

Add 450 FOSB and MAC to objects to be transported (currently 450 FOUP only). Modify expressions that may cause misunderstanding.

Background

SEMI E156 was first published in July, 2010 and has targeted only 450mm-FOUP as carriers to be transported. After the publication of SEMI E156, standards for 450mm-MAC and 450mm-FOSB were established. As those MAC and FOSB are subject to SEMI E156, revision of SEMI E156 is required to add MAC and FOSB as carriers to be transported. By taking this opportunity, unclear explanations are rewritten and variations in describing a same thing are revised.

Notice: This ballot is a major revision to SEMI E156-0710.

The revised E156 balloted last time failed at Cycle 7 because of the following reason:

1. Every table of dimensions below Figures 1 to 4 should have been eliminated, but the table below Figure 1 was left undeleted.

For re-ballot of the revision, the following is modified:

1. The table appeared at Figure 1 to be eliminated.

2. Introducing the definition of CBSP to be withdrawn and the original HP to be used. In accordance with the modification, the dimension of HP is modified from 179 mm to 200 mm.

The ballot results will be reviewed and adjudicated at the meetings indicated in the table below. Check www.semi.org/standards under Calendar of Events for the latest update.

Review and Adjudication InformationTask Force Review Committee Adjudications

Group 450mm AMHS Task Force Japan TC Chapter of Physical Interfaces & Carriers Global Technical Committee

Date Friday, July 3, 2015 Thursday, July 30, 2015Time & Time zone 10:30 - 12:00 [JST] 13:30 - 17:00 [JST]Location SEMI Japan office SEMI Japan officeCity, State/Country Tokyo, Japan Tokyo, JapanLeaders Kenji Yamagata (Daifuku)

Yoichi Motoori (Murata Machinery)Tsuyoshi Nagashima (Miraial)Tsutomu Okabe (TDK)Kenji Yamagata (Daifuku)

Standard staff Chie Yanagisawa (SEMI Japan)81.3.3222.5863 / cyanagisawa @semi.org

Chie Yanagisawa (SEMI Japan)81.3.3222.5863 / cyanagisawa @semi.org

This task force meeting’s detail is subject to change, and additional review sessions may be scheduled if necessary. Contact Standards staff for confirmation.

Telephone and web information will be distributed to interested parties as the meeting date approaches. If you will not be able to attend these meetings in person but would like to participate by telephone/web, please contact Standards staff.

If you need a copy of the documents in order to cast a vote, please contact the following person within SEMI. Chie YanagisawaSEMI Standards, SEMI JapanTel: 81.3.3222.5863Email: [email protected]

Info

rmat

iona

l (B

lue)

Bal

lot

DRAFTDocument Number: 5524A

Date: 5/15/23

SEMI Draft Document 5524A

Revisions to SEMI E156-0710: Mechanical Specification for 450 mm AMHS Stocker to Transport Interface, with title change to Specification for Mechanical Interfaces between 450 mm AMHS Stocker and Transport Equipment

SEMI E156-XXXXSPECIFICATION FOR MECHANICAL INTERFACES BETWEEN 450 mm AMHS STOCKER AND TRANSPORT EQUIPMENT

1 Purpose1.1 The purpose of this document is to define interfaces between AMHS stocker and different types of transport equipment and to clarify dimensions required for 450 Wafer Carrier transfer.

2 Scope2.1 The specification in this document covers representative handoff interfaces between 450 mm AMHS stocker and transport equipment for 450 Wafer Carrier.

NOTICE: SEMI Standards and Safety Guidelines do not purport to address all safety issues associated with their use. It is the responsibility of the users of the Documents to establish appropriate safety and health practices, and determine the applicability of regulatory or other limitations prior to use.

3 Limitations3.1 This standard does not intend to cover transfer of 450 TFC.

3.2 This standard only provides specification for single 450 Wafer Carrier handoff.

4 Referenced Standards and Documents4.1 SEMI Standards

SEMI E154 — Mechanical Interface Specification for 450 mm Load Port

SEMI E158 — Mechanical Specification for Fab Wafer Carrier Used to Transport and Store 450 mm Wafers (450 FOUP) and Kinematic Coupling

SEMI E159 — Mechanical Specification for Multi Application Carrier (MAC) Used to Transport and Ship 450 mm Wafers

SEMI G92 — Specification for Tape Frame Cassette for 450 mm Wafer

SEMI M80 — Mechanical Specification for Front-Opening Shipping Box Used to Transport and Ship 450 mm Wafers

NOTICE: Unless otherwise indicated, all documents cited shall be the latest published versions.

5 Terminology5.1 Abbreviations and Acronyms

5.1.1 AMHS — Automated Material Handling Systems

5.1.2 BP — Bilateral Plane

This is a Draft Document of the SEMI International Standards program. No material on this page is to be construed as an official or adopted Standard or Safety Guideline. Permission is granted to reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document development) activity. All other reproduction and/or distribution without the prior written consent of SEMI is prohibited.

Doc. jn l SEMI

Semiconductor Equipment and Materials International3081 Zanker RoadSan Jose, CA 95134-2127Phone: 408.943.6900, Fax: 408.943.7943

Info

rmat

iona

l (B

lue)

Bal

lot

DRAFTDocument Number: jn l

Date: 5/15/23

5.1.3 FP — Facial Plane

5.1.4 HP — Horizontal Plane

5.1.5 OHS — Overhead Shuttle

5.1.6 OHT — Overhead Hoist Transport

5.2 Definitions

5.2.1 450 Wafer Carrier — 450 FOUP (SEMI E158), 450 FOSB (SEMI M80) or 450 MAC (SEMI E159).

5.2.2 active transport equipment — transport equipment that transfers a carrier to and from a stocker transfer port using robots located on the transport equipment itself.

5.2.3 bilateral plane (BP) — a vertical plane, defining x=0 of a system with three orthogonal planes (HP, BP, FP), coincident with the nominal location of the rear primary KCP, and midway between the nominal locations of the front primary KCPs. [SEMI E154]　

5.2.4 stocker transfer port — a transfer port that is attached to or embedded in a stocker.

5.2.5 facial plane (FP) — a vertical plane, defining y=0 of a system with three orthogonal planes (HP, BP, FP), y33=194 ± 0 mm in front of the nominal location of the rear primary KCP. [SEMI E154]

5.2.6 horizontal plane (HP) — a horizontal plane, defining z=0 of a system with three orthogonal planes (HP, BP, FP), coincident with the nominal location of the uppermost points (tips) of the three KCPs. [SEMI E154]

5.2.7 load face plane — the furthest physical vertical boundary plane from the cassette centroid or carrier centroid on the side (or sides) of the equipment where loading of the equipment is intended.

5.2.8 overhead shuttle (OHS) — a vehicle that travels overhead on a rail (or rails) and does not have a hoist. [SEMI S17]

5.2.9 overhead hoist transport (OHT) — a vehicle that travels overhead on a rail (or rails) and does have a hoist. [SEMI S17]

1: OHS and OHT can be active transport equipment or passive transport equipment depending on configuration.

5.2.10 passive transport equipment — transport equipment that requires another piece of equipment (e.g., a robot at a stocker transfer port) to be loaded/unloaded with 450 Wafer Carrier.

5.2.11 stocker — an AMHS storage device. [SEMI E85]

5.2.12 stocker crane — stocker transfer agent specialized for the movement of carriers between shelves and input and output port locations. [SEMI E88]

5.2.13 stocker port robot — robot for transport of the carrier from stocker transfer port to vehicle or conveyor, and from vehicle or conveyor to stocker transfer port.

5.2.14 transport equipment — a piece of active or passive equipment which transports 450 Wafer Carrier. Vehicle (e.g., OHS, OHT) and conveyor are types of transport equipment.

6 Requirements6.1 The 450 Wafer Carrier shall be loaded and unloaded with its front surface of carrier parallel to the load face plane.

6.2 Representative interfaces between AMHS stocker and transport equipment are detailed in the following configuration options (¶¶ 6.2.1, 6.2.2, 6.2.3 or 6.2.4). The dimensional requirements for the configurations are in Table 1. Figures 1 to 4 illustrate the options and are not intended to contain requirements, be dimensionally accurate or be to scale.

6.2.1 In Option A, active transport equipment (e.g., active OHS) loads/unloads a 450 Wafer Carrier to/from stocker transfer port utilizing the KC mating grooves on the 450 Wafer Carrier. The stocker transfer port shall therefore maintain the center exclusion volume below the HP, which is defined by dimensions H1, A1, A2, D, D1 and D3 as shown in Figure 1. This exclusion volume in the stocker transfer port facilitates 450 Wafer Carrier delivery from the


Doc. jn l SEMI


Info

rmat

iona

l (B

lue)

Bal

lot


Date: 5/15/23

transport equipment using the secondary set of kinematic pins. Although the stocker may use any of the other 450 Wafer Carrier handling features, the two primary kinematic coupling pins closest to the door are reserved for the stocker transfer port. An exclusion height above the 450 Wafer Carrier, defined by dimension C, allows for clearance during 450 Wafer Carrier transfer. The center exclusion volume below the HP has a height H1, width (A1 + A1) extending from the load face plane to a distance (D − D1), width (A2 + A2) from that point to a distance D3 away from the FP with total depth of (D + D3).

Figure 1Stocker Transfer Port Option A


Doc. jn l SEMI

NOTE 2 : Top view of center exclusion volume. The stocker uses the primary set of kinematic coupling pins.

D3

Active transport equipment

Load face plane-FP-

-BP-

A1

B-B’ View

D1A2

-FP-

DA2

A1

A’A

Option A


Stocker

NOTE 3 :Transport equipment uses secondary set of kinematic coupling pins.

A-A’ View

B’

-HP-

-BP-

A2

A1

A2A1

H1

CB


Info

rmat

iona

l (B

lue)

Bal

lot


Date: 5/15/23

6.2.2 In Option B, an OHT loads/unloads a 450 Wafer Carrier to/from stocker transfer port. The stocker transfer port is open from above to facilitate vertical delivery from an OHT.

A A’

B-B’ View

B B’

A-A’ View

Figure 2Stocker Transfer Port Option B


Doc. jn l SEMI

B-B’ View

NOTE 4: Stocker uses the set of kinematic coupling pins.

Load Face Plane


Option B

-FP-

D2

-BP-

-BP-

Stocker

D2


Info

rmat

iona

l (B

lue)

Bal

lot


Date: 5/15/23

6.2.3 In Option C, the 450 Wafer Carrier is oriented with the 450 Wafer Carrier door parallel to the load face plane on passive transport equipment (e.g., passive OHS or conveyor) for pickup by the stocker port robot. In option C, the transport equipment shall use the 450 Wafer Carrier handling features that are compatible with the exclusion volumes for the transport. This includes the use of the primary kinematic coupling pins (all 3 pins accessible). The stocker port robot shall use the secondary kinematic coupling pins (all 3 pins accessible) to transfer the 450 Wafer Carrier. The transport equipment shall maintain the center exclusion volume shown in Figure 3 to allow for the stocker port robot to use the secondary kinematic pins to transfer the 450 Wafer Carrier, but no open volume internal to the stocker is required as in Figure 1, Option A. The center exclusion volume of the transport equipment below the HP is defined by dimensions H1, A2 and D4.

Figure 3Stocker Transfer Port Option C


Doc. jn l SEMI

-HP-

Option C

Passive transport

equipment(e.g., conveyor)

Passive transport

equipment(e.g., OHS)

A2

-BP-

B B’

H1

A2

A - A’ View

-BP-

Stocker port robot

NOTE 7: Exclusion volume in passive transport equipment (e.g., vehicle or conveyor lift unit)

NOTE 6: Vehicle or conveyor uses the primary set of kinematic coupling pins.

NOTE 5: Stocker robot uses secondary set of kinematic coupling pins.

B -B’ View

A’A

Stocker port robot

Load Face Plane

C

D4

Stocker

D2

-FP-


Info

rmat

iona

l (B

lue)

Bal

lot


Date: 5/15/23

6.2.4 In Option D, passive transport equipment (e.g., conveyor) carries a 450 Wafer Carrier to/from an internal stocker transfer port. The front surface of carrier is parallel to the stocker.

　B

NOTE 9: The example of lifting mechanism is shown in Related Information R1.

Figure 4Stocker Transfer Port Option D (Kinematic Coupling Pin Pick-Up)


Doc. jn l SEMI

Passive transport equipment

(e.g., conveyor)

-HP-

Option D

D4

A2A2

-BP-

A’A

-FP-

D

B-B’ View

A2

-BP-

A3A3

H2H1

A-A’ View

A2

NOTE 8: Exclusion volume in passive transport equipment for stocker crane pickup.

Load Face Plane

D5D4

-FP-End effector of stocker crane

C

Stocker

D

B’


Info

rmat

iona

l (B

lue)

Bal

lot


Date: 5/15/23

Table 1 Dimensional Requirements for 450 mm Stocker Transfer PortsAll dimensions are in mm unless otherwise indicated.

Dim Definition Option A Option B Option C Option D

A1

Width of the center exclusion volume below the HP from the load face plane to a distance D1 from the FP of a 450 Wafer Carrier sitting at the transfer position on the stocker transfer port (symmetric about the BP).

183 (min.) N/A N/A N/A

A2Width of the center exclusion volume used for center pickup using the secondary kinematic coupling pins (symmetric about the BP).

156 (min.) N/A 156 (min.) 156 (min.)

A3

Width of exclusion volume for passive transport equipment installation measured from the BP to the nearest obstruction on the stocker (symmetric about the BP).

N/A N/A N/A 500 (min.)

C

Height of the nearest stocker obstacle above the 450 Wafer Carrier measured from the top of the 450 Wafer Carrier sitting on the stocker transfer port (Option A) or the passive transport equipment (Option C, D).

80 (min.) N/A 80 (min.) 80 (min.)

D

Distance from the load face plane to the FP of the 450 Wafer Carrier sitting on the stocker transfer port (Option A) or the passive transport equipment (Option D).

295 (max.) N/A N/A 295 (max.)

D1

Depth of the center exclusion volume used for center pickup using the secondary kinematic coupling pins measured from the FP of the 450 Wafer Carrier sitting at the transfer position on the stocker transfer port toward the load face plane.

245 (max.) N/A N/A N/A

D2Distance from the FP of the 450 Wafer Carrier sitting at the transfer position on the transport equipment to the load face plane.

N/A311.25(nominal)

+10/-5 adjustability

380 (max). N/A

D3

Depth of the center exclusion volume used for center pickup using the secondary kinematic coupling pins measured from FP of the 450 Wafer Carrier sitting on the transfer position on the stocker transfer port away from the load face plane.

245 (min.) N/A N/A N/A

D4

Depth of cavity or cutout in the passive transport equipment for center pickup using the secondary kinematic coupling pins, measured from FP of the 450 Wafer Carrier sitting at transfer position on the passive transport equipment.

N/A N/A 175 (min.) 175 (min.)

D5Depth of exclusion volume for passive transport equipment installation measured from the FP to the nearest obstruction on the stocker.

N/A N/A N/A 245 (max.)

H1Height of the exclusion volume below the HP sitting on the stocker transfer port (Option A) or the transport equipment (Options C, D).

200 (min.) N/A 200 (min.) 200 (min.)

H2Minimum height of exclusion volume for passive transport equipment installation measured from the HP to the nearest obstruction on the stocker.

N/A N/A N/A 300 (min.)


Doc. jn l SEMI


Info

rmat

iona

l (B

lue)

Bal

lot


Date: 5/15/23

RELATED INFORMATION 1 EXAMPLE OF LIFTING MECHANISM

R1-1 This specification is intended to enable interoperability between AMHS components supplied by multiple vendors. When both storage and transport components are supplied by the same vendor, the interfaces defined in this document may not apply.

R1-2 This illustration shows an example of a mechanism with primary kinematic pins at the conveyor’s stocker transfer port location to position the 450 Wafer Carrier for pickup by the secondary pins of the stocker crane to transfer the 450 Wafer Carrier to/from the stocker shelf. Illustrated for Option D, although the locator could be rotated about a vertical axis by 90 degrees for Option C.

Figure R1-1

NOTICE: SEMI makes no warranties or representations as to the suitability of the standard(s) set forth herein for any particular application. The determination of the suitability of the standard(s) is solely the responsibility of the user. Users are cautioned to refer to manufacturer’s instructions, product labels, product data sheets, and other relevant literature respecting any materials or equipment mentioned herein. These standards are subject to change without notice.

By publication of this standard, Semiconductor Equipment and Materials International (SEMI) takes no position respecting the validity of any patent rights or copyrights asserted in connection with any item mentioned in this standard. Users of this standard are expressly advised that determination of any such patent rights or copyrights, and the risk of infringement of such rights are entirely their own responsibility.


Doc. jn l SEMI

Stocker crane end effecter


Info

rmat

iona

l (B

lue)

Bal

lot


Date: 5/15/23


Doc. jn l SEMI
