"green" rfid and wireless sensor nodes

59
Inkjet-Printed Paper/Polymer-Based “Green” RFID and Wireless Sensor Nodes: The Final Step to Bridge Cognitive Intelligence, Nanotechnology and RF? M.M. Tentzeris [[email protected]] R.Vyas, V.Lakafosis, A.Traille, A.Rida, S.Kim, T.Thai IEEE Fellow and DML School of ECE, Georgia Institute of Technology, Atlanta, GA, 30332-250, USA and Georgia Tech Ireland, Athlone This work has been supported by NSF-ECS, Microsoft, IFC/SRC

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Page 1: "Green" RFID and Wireless Sensor Nodes

Inkjet-Printed Paper/Polymer-Based “Green” RFID and Wireless Sensor Nodes: The Final Step to Bridge Cognitive Intelligence, Nanotechnology and RF?

M.M. Tentzeris[[email protected]]

R.Vyas, V.Lakafosis, A.Traille, A.Rida, S.Kim, T.Thai

IEEE Fellow and DML

School of ECE, Georgia Institute of Technology, Atlanta, GA, 30332-250, USA

andGeorgia Tech Ireland, Athlone

This work has been supported by NSF-ECS, Microsoft, IFC/SRC

Page 2: "Green" RFID and Wireless Sensor Nodes

3D Integrated Platforms

Sensor node Comm. nodePower management

Nanowire Sensor

Multi‐mode Nanowire Interface for Sensing/Energy Harvesting/storing

Nanowire Battery

Multi‐mode Wireless Interface for Comm. and Energy Harvesting

.... ....

Wireless Interface for Comm/Sensor/Power

Nanowire Energy Harvest

Electronic Interface for Nanowire

Organic Substrate

Si‐CMOS Substrate

Page 3: "Green" RFID and Wireless Sensor Nodes

Enabling Technologies in the future

BGA

BGA

Filter AntennaCavit

Micro-BGA

Structure MCM-L en LCP Puces digitales et MMIC

MEMS Switch, inductanceÉ

MCM-LLCP

Digital & Analog IC

RF MEMSSwitch & Inductor

Hermetic Packaging

FPGA#1

FPGA#2

Transceiver

MUX/DEMU

X

Page 4: "Green" RFID and Wireless Sensor Nodes

LCP 3D Integration

• Multiple layers of thin-film LCP can be arranged and laminated to form low-profile lightweight packaging structures for active devices

• Flip-chip and/or wire bonds may be used for the interconnections for active devices

• Low melting temperature LCP layers (285 C) are used to adhere generally thicker high melting temperature core layers (315 C) to create a homogeneous LCP package stack-up

• Laser or mechanical drilling can be used to selectively remove parts of certainlayers in arbitrarily desired shapes, which, when laminated with solid layers, becomecavities for embedded active or passive devices

• Cavities also provide an excellent opportunity for the easy integration of RF MEMS devices

• Passive components, off-chip matching networks, embedded filter, and antennas are implemented directly into the SOP boards by using multilayer technologies.

Page 5: "Green" RFID and Wireless Sensor Nodes

Inkjet-Printed RF Electronics and Modules on Paper

Page 6: "Green" RFID and Wireless Sensor Nodes

IFC/SRC 4.1.1 Broadband/Multiband Conformal and Wearable Antennas up to mmW/THz

• Innovative wearable inkjet-printed antennas and antenna arrays on paper and organic-based substrates

• Flex-independent high-gain, high-efficiency radiation performance up to mmW

• Nested-loop Scalable-band antennas • SOP-on-LCP/paper integration with printed passives• UWB enhanced range (up to 1km+) semi-passive• Multi-band/multi-mode performance for easy integrability

w/ transceiver (wireless sensor, power harvesting.

Task Goal : Developing Inkjet‐printed Wearable/Conformal “Multimode” Antenna and Antenna Arrays with Ultrabroadband Range (up to THz), High Gain (up to 30dBi), High Efficiency (90%+)

• Realized the first inkjet-printed MIMO Tri-B system• Developed flex-free 3D “Magic Cube” antennas• Developed Nested-Loop 2/3-Band Arrays• Extended CNT/inkjet-printed process up to 15 GHz• Developed 15dbi+ gain antenna array around 75GHz• Initial integration on paper/flex with range of 200m

Concept

Year 1 Progress

Technology Nugget

- Year 2 *Integrate with short-range wearable test-bed*Developing 50% BW Wearable antenna*Target Gain: 20dbi/Range: 1km (>20GHz)

- Year 3. Integrate with ALL Wireless Interface. Target Efficiency : 90%/Range: 5km. Target Gain: 30dbi/Bandwidth > 100 %

Year 2, 3 Plan

Page 7: "Green" RFID and Wireless Sensor Nodes

Conformal Flexible mmW Arrays for Radars/mmID’s(BW=5GHz around 76-81GHz) with Gain 25dbi+

• Best reported antenna in 76-81 GHz range• Directivity > 25dBi from 76-81 GHz• Aperture efficiency=73% (32x16 array)• <3 deg H-cut beamwidth• Most broadband reported ustrip-CPW

interconnect (bottom right)• 3D organic module integration• 4x-6x cheaper than WG (waveguide) • 6x-8x lighter than WG ones• Conformal shape /Fully-printed• Can cover short/med/long

range radar bands• Effective range > 300m-400m• Easy to extend to 120/240GHz imagingGain (E-cut, Phi=90) at 80GHz

Gain (H-cut, Phi=0) at 80GHzS-Parameters for Final Design

-45

-40

-35

-30

-25

-20

-15

-10

-5

0

50 60 70 80 90 100Frequency (GHz)

S-p

ara

met

ers

(dB

)

S11 design IIS21 design IIS11 design IS21 design I

Page 8: "Green" RFID and Wireless Sensor Nodes

8

S-parameters for 3D Transition CPW-CPW

* S21 for back‐to‐back transition at 77 GHz : ‐0.9 dB

Photo of GSG Probe tips at the structure

launch

Optimum via spacing (center to center): 500 μm

A. Rida, A. Margomenos, T. Wu, and M. M. Tentzeris, "Novel Wide‐band 3D Transitions on Liquid Crystal Polymer for Millimeter‐Wave Applications up to 100 GHz", pp. 953‐956, IEEE International Microwave Symposium Boston, MA, USA, June 2009.

Page 9: "Green" RFID and Wireless Sensor Nodes

9

Existing Dual Band Array

Pozar, 2001 X. Qu, W.Wang 2007 Pokuls, Pozar 1998

Pro •8:1 frequency ratio•Thin: λ/29•Dual Polarized

•3:1 Frequency Ratio•Thin: λ/11•Dual polarized

•Wide Beam Scan•Dual polarized

Con •Limited Beam Scan•PCB

•Limited Beam Scan•PCB

•1.8:1 Frequency ratio•Thick: λ/3.5

Page 10: "Green" RFID and Wireless Sensor Nodes

Ultrathin 1/2/16 GHz Triple Band Shared Aperture Array

10

• Multilayer (no hidden Via)• Frequency Ratio 16:2:1 (GHz)• Thickness < 1 cm • First ever reported 1/2/2^4 Tri-Band

Shared Aperture Area Antenna Array • Concurrent Communication and

Radar/Sensing Capabilities• Can be easily extended to subTHz

imaging + comm systems

• Testing collaboration with GTRI-SEAL

Page 11: "Green" RFID and Wireless Sensor Nodes

Tri-Band Antenna Array Performance

Page 12: "Green" RFID and Wireless Sensor Nodes

Comparison Table

Pozar, 2001

X. Qu, 2007

Shafai, 2000

Pokuls,1998

Triple

Thickness λ/29 λ/11 λ/27 λ/6.4 λ/32

Frequency Ratio

7.5:1 3:1 4:1 1.8:1 16:2:1

Polarization Dual Dual Dual Dual Linear

2012/3/28 12

Page 13: "Green" RFID and Wireless Sensor Nodes

RFID Ink-jet Printed on Paper Using Conductive Ink

PAPER ELECTRONICS:• Environmental Friendly and is the LOWEST COST MATERIAL MADE • Large Reel to Reel Processing• Compatible for printing circuitry by direct write methodologies• Can be made hydrophobic and can host nano-scale additives (e.g. fire retardant textiles)• Dielectric constant εr (~3) close to air’s• Potentially setting the foundation for truly

“green” RF electronics

Page 14: "Green" RFID and Wireless Sensor Nodes

RFID printed on paper: conductive inkPAPER:• Environmental Friendly and low cost (LOWEST COST MATERIAL MADE BY HUMANKIND)• Large Reel to Reel Processing• Compatible for printing circuitry by direct write methodologies• Can be made hydrophobic and can host nano-scale additives (e.g. fire retardant textiles)• Dielectric constant εr (~2) close to air’s

INK:• Consisting of nano-spheres melting and sintering at low temperatures (100 °C)• After melting a good percolation channel is created for electrons flow.• Provides better results than traditional polymer thick film material approach.

This image cannot currently be displayed.

SEM images of printed silver nano-particle ink, after 15 minutes of curing at 100 C and 150 C

The ONLY group able to inkjet-print carbon-nanotubes for ultrasensitive gas sensors (ppb) and structural integrity (e.g.aircraft crack detection) non-invasive

sensors

Page 15: "Green" RFID and Wireless Sensor Nodes

Characteristics:• Piezo-driven jetting device to preserve

polymeric properties of ink

• 10 pL drops give ~ 21 μm

• Drop placement accuracy ±10 μm gives a resolution of 5080 dpi

• Drop repeatability about 99.95%

• Printability on organic substrates (LCP, paper …)

Inkjet-printing Technology - Printer

High resolution inkjet printed copper (20 μm)

SEM Images of a Layer of Printed ink, Before and After a 15 Minute Cure at 150ºC

Page 16: "Green" RFID and Wireless Sensor Nodes

Wireless Sensor Module: 904.2 MHz• Single Layer Module Circuit printed on Paper using

inkjet technology

• Integrated microcontroller and wireless transmitter operating @ 904.2 MHz

• Module can be custom programmed to operate with any kind of commercial sensor, environment & Communication requirement

• Rechargeable Li-ion battery for remote operation

• Maximum Range: 1.86 miles

Wireless Temperature Sensor Signal sent out by module, measured by Spectrum Analyzer

Wireless Signal Strength sent out by module, measured by Spectrum Analyzer

Circuit +Sensor+ Antenna on Paper

Antenna on Paper

Antenna Radiation Pattern showing high gain

Page 17: "Green" RFID and Wireless Sensor Nodes

Wireless Sensor Module: 904.5 MHz• Double Layer Module Circuit printed on Paper using

inkjet technology

• Integrated microcontroller and wireless transmitter operating @ 904.5 MHz

• Module can be custom programmed to operate with any kind of commercial sensor, environment & Communication requirement

• Rechargeable Li-ion battery for remote operation

• Maximum Range: < 8 miles

Wireless ASK modulated Temperature Sensor Signal sent out by module, measured by Spectrum Analyzer

Wireless Signal Strength sent out by module, measured by Spectrum Analyzer

Circuit + Sensor+ Antenna on Paper

Antenna Radiation Patter showing high gain

Page 18: "Green" RFID and Wireless Sensor Nodes

Sensing site

RF Wireless Pressure Transducer

Processing Data

Antenna functions as

sensor

Receiver Site Fewer components Smaller system size Less power consumption

Page 19: "Green" RFID and Wireless Sensor Nodes

Carbon Nanotubes as Gas Sensor

CNTs structure can be conceptualized by wrapping a one-atom-thick layer of graphite into a seamless cylinder.

Single-walled CNTs and Multi-walled CNTs

A diameter of close to 1 nanometer, with a tube length that can be many thousands of times longer.

CNTs composites have electrical conductance highly sensitive to extremely small quantities of gases, such as ammonia (NH3) and nitrogen oxide (NOx).

The conductance change can be explained by the charge transfer of reactive gas molecules with semiconducting CNTs.

Fabrication of CNTs film:

-Vacuum Filtering, dip coating, spray coating, and contact printing, requiring at least two steps to achieve the patterns.

-Can it be inkjet-printed? Yes, if you can develop the recipe!

Page 20: "Green" RFID and Wireless Sensor Nodes

Inkjet-printed SWCNT Films

Overlapping Zone500um

10L

15L

20L

25L

SWCNT Film

Silver Electrode

Silver electrodes were patterned before depositing the SWCNT film, followed by a 140˚C sintering.

The electrode finger is 2mm by 10mm with a gap of 0.8mm. SWCNT film was 2mm by 3mm.

1.1mm overlapping zone to ensure the good contact between the SWCNT film and the electrodes.

Page 21: "Green" RFID and Wireless Sensor Nodes

Gas Detection

dGGPP rttr 1010 log404log4022

SWCNT Film @868MHz Z=51.6-j6.1 Ohm in air

Z=97.1-j18.8 Ohm in NH3

Tag Antenna @ 686MHz

Zant=42.6+j11.4 Ohm

2*

ANTload

ANTIoad

ZZZZ

+

+

Power reflection coefficient changes from -18.4dB to -7.6dB. At reader’s side, this means 10.8dBi increase of the received power level.

By detecting this backscattered power differnce, the sensing function is fulfilled.

Page 22: "Green" RFID and Wireless Sensor Nodes

Inkjet‐Printed Graphene Oxide samples

NozzleGO Ink Drop

Page 23: "Green" RFID and Wireless Sensor Nodes

RGO sample performance under test

gas

Page 24: "Green" RFID and Wireless Sensor Nodes

UWB Inkjet-Printed Antennas on Paper: Is it possible?

Page 25: "Green" RFID and Wireless Sensor Nodes

Inkjet Printing on LCP: Up to mm-Wave Frequencies

25 3/28/2012

Page 26: "Green" RFID and Wireless Sensor Nodes

Extension of Inkjet Printing up to 60 GHz

First demonstration of inkjet printing technologies up to 80 GHz (5x better than

state of the art)

Page 27: "Green" RFID and Wireless Sensor Nodes

High Gain Performance and Consistent Pulse Fidelity

(Ultrawideband) with Folding

3 4 5 6 7 8 9 10-10

-5

0

5

Frequency (GHz)

Gai

n (d

Bi)

R=infR=25 mm

3 4 5 6 7 8 9 10-10

-8

-6

-4

-2

0

2

4

6

Frequency (GHz)

Gai

n (d

Bi)

R=infR=25 mm

3 4 5 6 7 8 9 101

2

3

4

5

6

7

Frequency (GHz)

Gai

n (d

Bi)

R=infR=25 mm

(a) (b) (c)

-1 -0.5 0 0.5 1

-0.2

0

0.2

0.4

0.6

0.8

1

Time (nanoseconds)

SentR=infR=25 mmR=15 mm

R=25 mmR=15 mm

Fabricated prototypes mountedon Styrofoam cylinders

0 1 2 3 4 5 6 7-1

-0.5

0

0.5

1

Time (nanoseconds)

R=infR=25 mmR=15 mm

Raised Cosine Pulse Impulse Response

Page 28: "Green" RFID and Wireless Sensor Nodes

3D-”Magic Cube” Antennas• Typical RFID/Wireless Sensor antennas

tend to be limited in miniaturization by their length

• What if used a cube instead of a planar structure to decrease length dimension?

• Interior of cubic antenna used for sensing equipment as part of a wireless sensor network

• Can lead to the implementation of UWB sensors and the maximization of power scavenging efficiency, potentially enabling trully autonomous distributed sensing networks

Feed loop

30 mm

30 mm

30 mm

The first trully 3D maximum power-scavenging antenna on

paper

Page 29: "Green" RFID and Wireless Sensor Nodes

ORIENTATION #1 ORIENTATION #2 ORIENTATION #3

OrientationsTX RX

Transmit Module

Receive Module

Experimental Set-Up

June 2010 - 29

Tx and Rx co-polarized Tx and Rx orthogonal Tx and Rx random

Page 30: "Green" RFID and Wireless Sensor Nodes

Min/Max Distance Ratio for All Orientations

RXTX

Outdoor Range Measurement

June 2010 - 30

GTRI Cobb County

• Maximum Whip-Whip Distance is 0.12 miles

• Maximum Cube-Cube Distance is 0.116 miles

0102030405060708090

100

C0 C3 C7

Sensor Cube Stacked WhipChannels

Min

/Max

Rat

io

Channel 0 = 903.37 MHz

Channel 3 = 909.37 MHz

Channel 7= 921.37 MHz

More variability with orientationfor the whip antenna (65% vs. 95%for the cube antenna)

Page 31: "Green" RFID and Wireless Sensor Nodes

Antenna on Top of Engineered Surface

• A 4x4 split ring resonator array with a dipole placed on the surface (feeding now shown) and the resulting simulated antenna reflection coefficient.

Page 32: "Green" RFID and Wireless Sensor Nodes

Simulated Antenna Gain in two vertical cuts (Φ=0, 90o)

Page 33: "Green" RFID and Wireless Sensor Nodes

Fabrication• 16 split ring resonators printed

on paper substrate, and assembled using small amount of tape

• 2 pieces of foam, 81cm x 81cm, glued to copper sheet and EBG

Measurements conducted at Satimo

Page 34: "Green" RFID and Wireless Sensor Nodes

Dipole without EBG: E Total. dB Phi=0 deg

Page 35: "Green" RFID and Wireless Sensor Nodes

Dipole with EBG: E Total. dB Phi=0 deg

Page 36: "Green" RFID and Wireless Sensor Nodes

Printed Antenna in the Water

The coated antenna can survive in the water

< Antennas in the water after 1 Hr>< Antenna W/ coating> < Antenna W/O coating>

Page 37: "Green" RFID and Wireless Sensor Nodes

Laser Resolution Test

< Diameter: 56 um > < Diameter: 150 um > < Diameter: 254 um >

• A via hole which’s diameter is 50um is successfully punctured • The next step is metallization of the via holes

Page 38: "Green" RFID and Wireless Sensor Nodes

1.5 2 2.5 3 3.5-18

-16

-14

-12

-10

-8

-6

-4

-2

0

Frequency [GHz]

Ret

urn

loss

(S11

)

Simulation: Monopole w/ EBG above copper sheetSimulation: Monopole w/o EBG above copper sheetMeasurement: Monopole w/ EBG above copper sheetMeasurement: Monopole w/o EBG above copper sheet

(a) Printed EBG (b) antenna prototype

< Measured Return Loss (S11) >

(a)E‐plane (b) H‐plane< Radiation Patten>

< Communication Range Comparison>

Page 39: "Green" RFID and Wireless Sensor Nodes

• Antenna + EBGs + Ground plane• EBGs suppress surface wave and increase axial ratio[1]• EBGs increased gain of antenna at low frequency

Gap: 6mm

Ground

EBGs

Antenna Gap due to SMA connector(3.5mm)

Page 40: "Green" RFID and Wireless Sensor Nodes

Antenna Backed by Inkjet Printed EBG

Freq. W/O EBG Ground

W/ EBG Ground

1.0 GHz

-10.98 dBi 1.366 dBi

1.8 GHz

6.035 dBi 8.317 dBi

2.4 GHz

8.563 dBi 10.19 dBi

5.4 GHz

8.438 dBi 9.242 dBi

< Gain Improvement >

1 1.5 2 2.5 3 3.5 4 4.5 5 5.5-15

-10

-5

0

5

10

15

Frequency [GHz]

Rea

lized

Gai

n [d

Bi]

W/O EBGW/ EBG

12 dBi increment

Page 41: "Green" RFID and Wireless Sensor Nodes

ATHENA

Power ScavevengingTechnologies: Mechanical Motion Power Density: 4μw/cm2

Resonance: Hz Thermal Seebeck or peltier effect Power Density: 60 μw/cm2

Wireless Power Density ≤ 1μw/cm2

Solar Power Density: 100 mw/cm2

Does Not require differential936 MHz: -41dBm (0.08μw)

Power Scavenging

Page 42: "Green" RFID and Wireless Sensor Nodes

Wearable Energy Scavenger

This image cannot currently be displayed.

This image cannot currently be displayed.

Page 43: "Green" RFID and Wireless Sensor Nodes

Ambient Wireless Power: Terrestrial TV Bands

Digital TVAnalog TVCell Phone,MCA

Japan:

Analog TV: 460-500 MHz

Digital TV: 500-600 MHz

US:

Digital TV: 500-700 MHz

Equally spaced channels

ATHENA

Page 44: "Green" RFID and Wireless Sensor Nodes

Wireless Scavenger for TV & Cellular Signals

• Turn on Power: – 30uW → Charges Super cap

to 1.8V in 2 mins– 80uW → Charges Super cap

to 3V in 3 min• Used to turn on

Microcontroller+ Low Power radio

ATHENA

Page 45: "Green" RFID and Wireless Sensor Nodes

Wireless Scavenger for TV & Cellular Signals

• Captured power maximized through optimum design and matching of antenna and RF-DC charger

• Ensures high efficiency and optimum load match for different ambient power levels

ZIN

VOUT

=1.8V

=2.2V

=3.0V Zin: Very low series losses. Capacitive for most part

ATHENA

Page 46: "Green" RFID and Wireless Sensor Nodes

NEC

300 micron thin No heavy metalsEnvironment friendlyPolymer electrolyte

Carrier film -Plastics

Infinite Power Solutions

LITE*STAR

50 Micron batteryLiPON electrolyte, Lithium anode, LiCoO cathode Voltage of up to 4.0 V

ORNL

Thin film Li batteryFlexibleSmallerLighterRechargeableManufacturable

Philips Lithylene™ battery

Free form factorPorous lithiumPolymer electrolyte

Licensed to Stone Battery, Taiwan

Ultrathin Integrable Batteries

Page 47: "Green" RFID and Wireless Sensor Nodes

Solar Powered Battery-Less Tag

ATHENA

MCU: 8 bit RISC based Microcontroller Unit –Assembly Programming

PMU: Super capacitors + low power analog eelectronics.

Communication: Asynchronous Communication Communication Frequency: 904.4 MHz (Unlicensed ISM Band) Modulation Type: FSK

Solar Cell Array (5 x 4)

Wireless Tag

MCU PAPLL

XmitPout 4mW

Pin 49mW

PAnt

PMU

Antenna

Page 48: "Green" RFID and Wireless Sensor Nodes

Solar Powered Tag

Solar Cell Array

AntennaPMU Tag: Wireless IC +

Microcontroller

Page 49: "Green" RFID and Wireless Sensor Nodes

Solar Powered Communication

ATHENA

Page 50: "Green" RFID and Wireless Sensor Nodes

Power Amp. (PA) Modeling + Antenna Design

Gain ≈ 0dB

Antenna |S11| = -30dB

@ 904.4 MHz

PA

Antenna

ZPA* Zant

Pmax Pant

ZPA* =36.95-j71.77ΩZant = 37.3-j65.96ΩPant/Pmax = (1-|S11|2) Pant/Pmax = 99.9%

Page 51: "Green" RFID and Wireless Sensor Nodes

Power Management Unit

• PMU Design 1– Solar Energy harnessed: 4.3mJ– Transmit Time achieved: 23.29ms

• PMU Design 2– Solar Energy harnessed: 4.3mJ– Transmit Time achieved: 43.75ms

Increase in Efficiency by 88%

Page 52: "Green" RFID and Wireless Sensor Nodes

Omnidirectional Broadband CP Antenna

The first CP Antenna with 30%+ AR Bandwidth (10x better

than state of the art)Also: omni, flex independent

Page 53: "Green" RFID and Wireless Sensor Nodes

Integration of antennas with solar cells (SOLANT)

Page 54: "Green" RFID and Wireless Sensor Nodes

Low-Profile Vehicle-Mounted Dual-Band Ultra-Broadband (Banwidth > 40% per band)

• First reported vehicle-mounted antenna covering (790-1215MHz/1710-3000MHz)

antenna covers mobileTV, 2,5G, 3G 4G cell phone band, WiFi, WiMax, RFID

• Easy-to-integrate with vehicular body• First antenna with bandwidths >40% in two

bands• Easy-to-expand to GPS and non-GPS

positioning and locating applications• Enabling vehicle-to-vehicle and vehicle-to-

stationary (Infostation) comunication• Extremely low profile / printed / non-

intrusive / concealable configuration

Omnidirectional radiation (900/1900 MHz)

Page 55: "Green" RFID and Wireless Sensor Nodes

sub-THz Antenna Design on LCP

50Ω CPW feeding

2.4 mm

3 mm

0.7 mm

Page 56: "Green" RFID and Wireless Sensor Nodes

Simulation Result – S11

• Frequency is very similar to original design

20 40 60 80 100 120 140 160 180 200-40

-35

-30

-25

-20

-15

-10

-5

0

Freq [GHz]

S11

[dB

]

Page 57: "Green" RFID and Wireless Sensor Nodes

Patterns @ 60GHz

Page 58: "Green" RFID and Wireless Sensor Nodes

Patterns @ 100GHz

Page 59: "Green" RFID and Wireless Sensor Nodes

Patterns @ 150GHz