hgs-company profile .justin yun

HAPPY GLOBAL SOLUTION CO., LTD.

Copyright 2011 By HAPPY GLOBAL SOLUTION Co., Ltd. All rights reserved.ⓒ 1

COMPANY PROFILE

2 0 1 5


Copyright 2011 By HAPPY GLOBAL SOLUTION Co., Ltd. All rights reserved.ⓒ

[email protected]

www.happysolution.co.kr



TEL, FAX

Tel:(031)373-4689, (031)374-4689

Fax:(031)375-4689

COMPANY HAPPY GLOBAL SOLUTION CO., LTD. (HGS)

PRESIDENT

Hea Keun Yun

FOUNDED

ADDRESS

E-mail, Website

[email protected]


HQ in Korea: #46-3, Woesammi-ro 5beon-gil, Osan-Si, Gyeonggi-do, Korea 447-230

Aug. 10, 2006 (Incorporated on May 15, 2009)

Company Overview



TEL, FAX, Mobile

(512)419-7808 : Office(512)419-7884 : Fax (512)468-6032 : MobileAustin, Texas

COMPANY HAPPY GLOBAL SOLUTION CO., LTD. (HGS US)

PRESIDENT

FOUNDED Dec. 5th, 2012

ADDRESS

Company overview of US branch

E-mail, Website

[email protected]


8900 Shoal Creek Blvd., Bldg. 100, Suite 113, Austin, TX 78757

Contact Person

Hunter Lee (Austin)Justin Yun (Washington D.C. )

Yong Hugh

ADDRESS

14631 Lee Highway Suite 212Centreville, VA. 20121

TEL, FAX, Mobile

(703)815-8188 : Office(703)815-9898 : Fax(301)910-2929 : MobileWashington, D.C.



R & D Institute

R & D

President

Management Headquarters

Nat’l policy/Industrial/Commercial Project

Internal ERP Sys control, CAD

Accounting

Accounting, General Affairs

Int’l / Local Sales

C/S

Int’l/Local Robot Installation, After Sales Service

Sales/CSRobot Business

Manufacturing, Repair Sales, C/S Materials, Accounting

FFU, Pivot, Blade, Robot Analysis Sys, etc.

Overhaul

Robot (VHP+, XP, HP+, Producer, Kawasaki, etc.), HD Motor, etc.

MaterialsSalesManufacturing

Office Admin.

Organization

Sales, Overhaul Sale(Robot Overhaul, Parts Sourcing/Resale)

HGS US Branch

Sales of Industrial Robot

신규 사업부New Business

Planning, Design

Executive Director

Facility Improvement



Disassembling Hub Repair Motor Repair Assembling Performance Test

(48hrs cycle test)

Motor torque, Vibration Test Moving Repeatability Test Repeatability Test Sensor - Sensitivity : 0.01mm - X, Y, Z-axis sensing

- Measurement : Vertical, Horizontality, Height - Spec : within ±0.1mm- 48hrs repeated test

-Torque, Vibration test after repair-Electrical Status(R, L, I) Test-Coil, Resolver check

VHP+ ROBOT

VHP+ Robot is Vacuum Robot used for 200mm, 300mm ETCH, CVD, METAL Process. It is wafer transfer Robot moving Arm by 2 units of 3ph AC Servo Motor.

Repair Technology

Lead time: within 4~5 days

In repair shop

Release out

54321



Particles from upper bearing

Particles dropping down to lower bearing

Moving conditions improvement and life time extension by Cover, which is self-designed by HGS, preventing particles.

Insert Cover to prevent particles

PRODUCER ARM

Producer Arm is mainly used to 300mm CVD Process and is equipped with Robot Hub and transfer wafer in motion of Forward/Backward/Left/Right.

Repair Technology

Lead time : within 2~3 days

Disassembling

4AssemblingRepair

Assembling Cover to prevent particles w/ producer arm

Pics. of Cover equipped with producer arm

321 In repair

shop Release

outAnalysis of failure cause



Leak Check▪ Leak, Scratch check area : Hub, Top flange▪ Spec of Leak detector- 1.0e-10 He (Max.)- 1.0e-8 Vacuum Pressure(Max.)

Repair Technology

Lead Time: within 4~5days

XP ROBOT

Disassembling Hub Repair Motor RepairAssembling PerformanceTest

(48hrs cycle test)

Leak CheckOutsourcing

cleaning parts

7654321

XP Robot is Vacuum Robot used for 300mm METAL Process and it is wafer transfer Robot moving Arm by 4 units of 3ph AC Servo Motor.

Motor torque, Vibration Test

-Torque, Vibration test after repair-Electrical Status(R, L, I) Test-Coil, Resolver check

Moving Repeatability Test


In repair shop

Release out



Disassembly Motor Replacement HUB and Arm Repair

Assembly Performance Test(48hrs cycle test)

Encoder Check Repeatability Test

Comparison tests for -Commend pulse -Feed back pulse -

HP ROBOT

HP Robot is Vacuum Robot used for Tool for 200mm Endura process. It is wafer transfer Robot moving an Arm by 2-axis. The robot is consisted as 2 units of Stepping motors, which is capable for precision control, and a Harmonic Gear that makes conversion with low-speed and high-torque.

Repair Technology

Lead time : within 2~3 days

입고 출고1

Sensor output Test- Sensor board lamp lights

2 43 5




Repair Technology

Lead time: within 6wks

Disassembling Assembling Final InspectionRepair

KAWASAKI ROBOT

▪Wafer Transfer Robot

▪Equipment: AMAT

▪Process: CMP, CVD

▪Wafer Size: 300mm

▪Environment: ATM

▪Precision of repeatability:

within ± 0.1mm

▪CMP FI Robot 3NS411 ▪Producer FI Robot 3N 200mm Arm▪ CMP FI Controller 3NS411▪Producer FI Controller 3NS410

◆ Repair Ass’y

Outside, Functional Inspection

Disassembling-Robot,Controller

Cleaning, Replacing Parts Repair, Overhaul

Zeroing, Calibration

Cycle, Functional Test-Blade Flatness, I/O signal -Motion range, repeatability-Hand unit linear-Wafer transfer

Report-Work scope-Detailed Test Data-Replacement Parts List

4321 65

◆

Features

In repair shop

Release out

TestAnalysis of failure cause



Arm Level Path inspection Repeatability movement Vibration Measurement

- Vibration check jig- Vertical / Horizontality - Spec : ±0.1 mm- 200 times Cycle test

- Arm’s placement Repeatability check after repair

2 weeks

YASKAWA ROBOT

Disassembly Exchange part Assembly Cycle TESTRepeatability Check Cleaning

Incoming Release7654321

Parts Repair

Various kinds of Yaskawa robots could be repaired for semiconductor process.

Repair Technology


Copyright 2011 By HAPPY GLOBAL SOLUTION Co., Ltd. All rights reserved.ⓒ 11HAPPY GLOBAL SOLUTION CO., LTD. Copyrightⓒ2011 By HAPPY GLOBAL SOLUTION Co., Ltd. All rights reserved. 1

MAG7 ROBOT

MAGNATRAN 7.1 MAGNATRAN 7.1 Armset

Lead time: within 1wk

Disassembling

Disassemble components (T1/T2 Assembly,

Z axis assembly)

Assembling

Adjustment Gap Calibration Data Uploading

Final InspectionRepair

Cleaning,Part Replacement

Analysis of failure cause

Visual / Functional Inspection

Test Cycle, Functional Test High/Low speed, Slippage test

Vacuum leak test.

Robot configuration I/O map data Communication

In repair shop

Releaseout

2 31 4 5 6

• Brooks Automation Vacuum

Robot

• Wafer: 200mm / 300mm

• Transfer Arm: Dual / Single

Armset

• Exchange Program Available

OEM: Inova, Altus, Jusung, IPS, Lam Research(Lam

2300), Novellus, ULVAC, etc.

Repair Technology



SOP AssemblingSOP Disassembling Performance Test

Remote Plasma Source

MKS Remote Plasma source (ASTRON Series, Revolution Series)


In repair shop

Release out

41

ASTRON® Series ASTRON®i Siries

ASTRON®ex Series R*evolution Series

32

New Al Block & Consumable parts replacement

1

Features- Actual power monitoring through SPMS- New parts overhaul (Block, Nozzle, Board etc..)- Clean Efficiency increased through Al block internal structure alteration

New Anodizing Coating Full Auto System Test function- Repeatability test program- Key parameter testing- Auto ignition & burning test

- Coating method improvement - Protect of Worn out

Repair Technology



SOP Disassembling MOSFET Leds

Bending Jig

SOP Assembling Performance Test

RF Generator

AE, MKS RF Generator, Matching Network , Remote Plasma source DC Power Supply, Ozone Generator, Micro Wave generator.


In repair shop

Release out

4321

AE RFG,APEX Series MKS Spectrum Series

MKS OB-1,2 Series MKS Genesis Series

- Main parts replaced (Power Pack, Drive Excite, MOS FET, Capacitor, etc.)- Lifetime extension- Test and calibration based on OEM spec.

Our strength of RF Generator and RPS Repair

Short lead time for all worldwide customers (Maximum 2 weeks) Price Competitiveness Repaired with Technical Know-how of RF and Electrical and Electronics experts A lot of repair experience with domestic and international customers

Features

Repair Technology



REMOTE PLASMA SOURCE SERIES Type Model Capacity

ASTRON® AX7650 / AX7651 / AX7657 / FI20620 / FI20620-1

2ℓ

ASTRON®i AX7670-16 / AX7670-19 / AX7670-21 /

AX7670-303ℓ

ASTRON®e AX7680 / FI80130ASTRON®ex AX7685 / FI80131 / FI80132 /

FI801334ℓ,6ℓ

ASTRON®hf-s AX7645 RH,PS 15ℓ

ASTRONhf AX7635 (LCD) 22ℓ

R*evolution AX-7690LAM-23 / AX-7690PSK-01 /AX-7690NOV-01

4ℓ,7500 W

XStream 6K / 8K

LS3200

Repair Technology



HD Motor is used to work conveyer in LCD manufacturing line. It is Ultra-high torque output of 2400N/m in max. and available to high precision position control.

HD MOTOR

Maker : SHINKO Max. torque : 2400 N/m Mass : 340kg Max. speed : 30 RPM Power : 220 V, Ø3 Max. Current : 85 A Accuracy : 0.0004˚

Moving Test Zig Mobile cart w/ lift

Pics. of

disassemble

and spread

out

Operation waveforms after repair

<Resolver tuning 후 Feedback data>

(In spec: ±10%)

Repair Technology



ELA Driver

<ELA Driver>

Feature - 100~110V ±10% Input - Control NSK Motor type : SSB014 series - Position/Torque Control

Repair Sequence - Condition check & fail parts Search - Parts, Capacitor, Resister, IC supply - Fail parts replace - Var Resistor, Capacitor turning - Circuit test - Completion test with Robot

Condition Check Parts supply Parts Replace Circuit test Completion Test

Lead time: within 1month

In repair shop

Release out

54321

Repair Technology



For unexpected Robot failure …!!

Robot Analysis System

Robot Analysis System developed to provide information and alarm of the operating conditions and status and breakdown phenomenon of the Robot, used in semiconductor and LCD equipment, and determine its own problems before they occur, so that users know.

Wafer mfg. Schedule “Facility down, Manufacturing loss”

“Increased amount of damaged wafer “

Material Loss

Personnel Loss

Production Loss

Wafer Broken!!

Home Calibration Position Error

Facility down for failure Robot

Robot Spare urgently needed

Key factor analysis for diagnosis of the robot

Analysis of key items &Optimization of the data

Display of resultafter data analysis

for Robot status

Central monitoring, On-line for each facility

“ What’s the happy solution?? ”

Wafer broken for Robot failure

R&D, Products



Fine Warning Danger

Complete timeComplete time

Position errorPosition error

BacklashBacklash

TorqueTorque

VibrationVibration

Custom Spec

TekTek M Pos: 0.000sM Pos: 0.000sStopStop

2211

a. Torque variation

A-axisA-axis

B-axisB-axis

Moving WaveMoving Wave

PositionPosition

R&D, Products



Configuration of Robot Analysis System

Ethernet

Driver

Capture Module1

Alarm

PC Software3

Main Module2

Central Monitoring 4

XP Robot

VHP/VHP+ Robot

Benefits for Robot Analysis System

① Detecting vibration and Torque problem of Robot

② Detecting sign of slip, particles and calibration

position error

③ Preventive maintenance by catching signs of trouble

④ Implementation of Remote integrated Control System (RCS)

R&D, Products



Portable Robot Analysis System

Robot Model Consist of Features

VHP ROBOT

PRAS-V100• Portable diagnostic case

(1SET)

• Cable (1SET)

• S/W (1SET)XP ROBOT PRAS-X100

Pictures SpecificationBenefits

• Easy to use and carry as a portable case.

• Large size of touched-screen.

• Available to save log record with Self-

recording function autonomously without

disconnected FDC.

• Saving data to the huge storage of HDD.

(up to 50 year’s history)

• Estimate XP ROBOT in real-time.

• Update the S/W system continuously

S/W Composition

• OS : Windows7• DB : MSSQL2008• Robot analysis S/W• FDC communication

S/WH/W composition(Analysis system)

• Quad Processor MCU

• (DSP32bit/ARM32bit)

• LAN 10/100M 1CH• USB2.0 1CH• EEPROM 1Mb

<Portable analysis system>

<Diagnosed S/W screen>

• The Capture module is installed only at ordinary

times. If necessary, the portable detector can

be connected to measure.

• PRAS is utilized for a careful inspection of non

regular robots’ condition through PM cycle or

pre-alarm.

• PRAS transmits the measured data to FDC in

real-time.

R&D, Products



Belt Analysis System

.

Driver

Capture Module

Alarm

Laptop for Analysis

Main(Calculation) Module

Comprehensive management by FDC

FDCFDC

BMSBMS

I. Main board V1.0

II. DSP Processor 150MHz

Single

III. EEPROM 1Mbit/ USB2.0

IV. LAN10/100M

V. EXT ALARM Port

VI. LED ALARM Display

Specification

제 원

• Belt Analysis System that is applied for driving parts of semiconductor and LCD facilities,

diagnoses any problem or breakdown.

• BAS detects problem autonomously before it occurs.

• Users recognize driving part’s information and BAS alerts the up-coming problem

previously to users.

Patent : Registration No. 10-2012-0106812 (September 25th 2012)Application No. 10-1223756 Analysis system of the belt and motor state with encoder (January 11th 2013)

R&D, Products



XP HUB ASSEMBLY

• Used Facility and Process : AMAT Endura, 300mm Metal

• Part No : HGS-XPHPL(XP Hub Primary : OEM NO – 0010-

19899)

HGS-XPHAL (XP Hub Auxiliary : OEM NO – 0010-

19900)

• Production Range: All the parts (Hub Main Body, Soup, Magnet

ring, Magnet.)

• Applied Bearing : Optimized Bearings (Fala, Kaydon, RBC

etc.)

• Minimizes the impact of the particles in the high-

integrity metal process.

• Lower price competitiveness compared to OEM’s

products.

• Guarantees excellent process characteristics.

Specification

Feature

R&D, Products



XP ELBOW

• Improved problems related with dislocated elbow

bearing.

(Drooping of elbow, particle occurrence, damage of elbow itself, and

damage of heater and blade in the process chamber, etc.)

• Semi-permanent performance guaranteed through

structural change and reinforcement of the

apparatus in the former elbow.

Prevents thermal expansion of elbow and elbow

drooping in case of vibrating in operation.

• Elbow - Part No : 0040-04682(Upper), 0040-

04680(Lower) - Material : Aluminum

• Bearing - Part No : KOYO SV5203-3ZZSTCS3 - Ball Type : Steel ball

New Type

Old Type

Specification

Feature

R&D, Products



E HUB

• Used Process: Apply to all processes

• Bearing Contact Point: 4 Points

• Fixing Bearing: Bearing’s inner and outer races are

fixed by upper, lower unit body.

• Material : Aluminum

• Compared to normal Hub, E hub makes less particle, and same life time with upper and lower bearings.

Guaranteed longer life time and optimized operation

• By increasing the contact point of the bearing, hub’s rotating gets more stable.

(normal hub: 2 Points E-hub: 4 Points)

Lower price competitiveness compared to other companies’ products

Normal HUB E HUB

• Due to relatively short life

time of upper bearing

compared to lower bearing,

the hub’s life time gets

shorter.

• Same life time of the upper and

lower bearing.

• E hub’s life is longer than normal

hub.

FeatureSpecification

R&D, Products



VHP Top-Flange Cooling Line

VHP Top Flange Cooling Line makes the motor bearing and hub bearing’s lifetime longer by

blocking the heat from VHP Top-Flange to the Motor.

• Material : Top-Flange(Aluminum), • Pipe : Cu Type, SUS Type • Pipe Size: 8/3• Velocity : 5m/s• Lifetime : Semi-permanent

• Optimized cooling effect which improves the process capability

• Improving Robot’s lifetime led by bearing’s longer

lifetime

• Practical and user friendly design

• Short lead time through our own design and

manufacturing, and good price competitiveness

• Impedance trend stabilized

• Motor’s lifetime improved

• CVD (Ultima, Producer SE)• ETCH• IMP• DIFF

Specification

Feature

R&D, Products



Pivot(for VHP, HP) & any ARMS

Pivot combines the VHP ROBOT ARM and an area assembled with BLADE. HGS provides improved Belt type Pivot from the existing Gear type Pivot.

R&D, Products

Existing Gear type Pivot

Improved Belt type Pivot

Worn Gear causes Particles, Clearance

Advantages of Belt type pivot : Preventing Particles, life extension

HGS-VP2400L-TM

HGS-VP2400S-BF

Self-improved Pivot & Arms

Unit PriceUsed from

Apr. 2010

Reason for improvement

Preventing Particles, Moving Development, Service life extension

BEARING

Koyo, Kaydon

Material

Case: AluminumHandle: SUS304 Belt: Spring steel

plate

PlatingCase: Electroless NI, Handle: EP, Belt : -

Unit price

?

Used to ~ Jul. 2010

- -

BEARING

-

Material

Case: Aluminum Handle: SUS304

Belt: Spring steel plate

PlatingCase:

Handle: Belt :

Producer armUltima ARMVHP HUB ASS`YXP ARM, PivotXP HUB



HP Motor

HP motor is composed with the upper and lower motors, and is used in the Endura for

200mm process.

HP motor is installed Stepping motor(precise controlling) and Harmonic gear (low speed high

torque), and an encoder (resolution of 250).

• Phase control : 5-phase Stepping

• Max current consumption : 1.4A

• Resolution of Encoder : 250 CPR

• Resolution of Motor : 50000 PPR

• Harmonic Gear Reduction Ratio : 100:1

• Turn angle of the motor (including reducer) :

0.0072°

• High precision and high torque controlling

available

* Compatible in the Endura 200mm facility

- The same form factor with the formal motor

- The same control method and spec with the formal

motor

• Available to be more stable operation with 1/100

reducer in the low speed.

• As a new substitute about discontinued models,

the motor is possible to be maintenance and

replacement.

Specification

Feature

R&D, Products



FFU (Fan Filter Unit)FFU mounted on the upper part of semiconductor facilities (primarily EFEM) required

high cleanliness level(Class-1) is an equipment, continuously injecting clean air. 1FAN and 2FAN type is produced in two models.

R&D, Products

Specification

• Input Power: 100~240V, 50/60Hz• Power consumption: Max 100W(1FAN), 200W(2FAN)• Max. Air flow rate: 700CFM(1Blower)• Material: Aluminum - 2T(Body), 3T(Top plate)• Noise: approx. 60dB

• Solid basic Features - 0.1um~0.2um particle Filtering - Ultralight and Firmness by Aluminum body • Periodical Filter replacement - Replacement filters can be separated from the body.• Customized-design for each facility - Implementation of adaptive design and fabrication for EFEM structure.•Cost Effectiveness - Much cost effective with the same specs. than competitor's product.

Features

• Pressure Sensor - Range: -100~3500Pa - Resolution: 0.05 Pa - Precision: 0.1%fs, 1%mv - Built-in temp. compensating circuit - Certificated: SCES047 in SWISS

•Preliminary, ULPA Filter - Glass-Fiber - Gasket: E.P.D.M - Efficiency: 99.9999816% - Certificated: ISO9001, UL

• Low Noise Brushless Motor - Long life time, Low noise - Max. RPM : 2600 - Certified: UL, CE

• Auto Fan Controller - Running mode: Auto/Manual - LCD Panel displaying running status and Error



LOCK CHAIN CLAMP

R&D, Products

The existing lock chain clamp problem: It has a no lock for preventing loose bolted joints.

Features

* The same size with the existing goods* It can be fastened with a wrench(spanner)

•Lock off -> It can be fastened to the same way as the existing Lock Clamp•Lock on -> It can be maintained the locked state while it never reverses

No bolts loosening



Consisted of

Existing materials

Complemented materialsAdvantages after

development

BODYAL Black

AnodizingAL BLACK Anodizing + Teflon

CoatingStrengthening corrosion

protection

SCREW SUS PEEKStrengthening corrosion

protectionMinimizing particle issue

SENSOR FT-KV1 (SUNX) FT-KV1 (SUNX) Localization of Sensor Align skill AMP FX-301 FX-301

End-Effector BLADE

End-Effector is a module mounted at the end of Robot Arm and sensing wafer when Foub is docking over Road-port Arm. It is developed to minimize particle issue and to strengthen corrosion protection by using complemented materials than existing ones.

R&D, Products

Senser Align Jig

Peek Screw



REPEATABILITY JIG

LEVEL & VIBRATION MEASUREMENT JIG

Measurement Jig

R&D, Products



∆ Thermal Spray, Plasma Spay

Coating Technology in

Atmospheric Pressure

∆ Spray Coating Powder

Items Purity Particle Size

Al2O3 99.9% 100nm, 1~2um, 15~45um

Y2O3 99.9% 100nm, 1~2um, 15~45um

Al2O3-3%TiO2 99.9% 15~45 um

Al2O3-13%TiO2 99.9% 15~45 um

Al2O3-40%TiO2 99.9% 15~45 um

Al2O3-50%TiO2 99.9% 15~45 um

TiO2 99.9% 30~35 um, 50~80 um

Cr2O3 99.9% 30~35 um, 50~80 um

ZrO2-5.25%Y2O3(YSZ) 99.9% 100nm, 1~2um, 15~45um

ZrO2-8%Y2O3(YSZ) 99.9% 100nm, 1~2um, 15~45um

ZrO2-13%Y2O3(YSZ) 99.9% 100nm, 1~2um, 15~45um

WC-6%Co 99.9% 15~45 um

WC-12%Co 99.9% 15~45 um

WC-17%Co 99.9% 15~45 um

WC-10%Cr-4%Co 99.9% 15~45 um

Mo 99.9% 30~35 um, 50~80 um

Mo-30%NiCrBSi 99.9% 30~35 um, 50~80 um

Ni 99.9% 100nm, 1~2um, 15~45um

Ni-20%Cr 99.9% 15~45um

Cr3C2-NiCr 99.9% 30~35 um, 50~80 um

Al2O3-ZrO2 99.9% 30~35 um, 50~80 um

Al2O3-Y2O3 99.9% 100nm, 1~2um, 15~45um

Spray Coating & Sintering Powder

R&D, Products



∆ Deposition Service

∆ Physical Vapor Deposition(PVD)

∆ Product ImageEvaporation Source

Sputtering Target

Al 99.999%

Cu Cr Ti3O5Pt

Au wireZnSeITOAu wireZnS

Ti Cu

Al ITO AZO

ZnSe IGZOTiNZnONb

∆ Bonding Service

Various electronic device is fabricated by PVD process !!!

Sputtering target & Evaporation Source

R&D, Products

hgs-company profile .justin yun

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