Intel Confidential1

VOLTAGE SAGS-SOLUTIONS IN SEMICONDUCTOR INDUSTRY

Armand Usher Electrical Engineer

Intel Electronics Kiriat Gat Israel

SAGS

In the semiconductor industry facilities (FABs) the “voltage sags” or “voltage

dips” (in British English) are the most common power problem and cause

downtime, scrap and M$ losses.

SAG – voltage drop below 90% of the Un ,but not interruption

Causes - Weather conditions ,equipment failure, operation errors

https://www.youtube.com/watch?v=SeGqCl3YAaQ

Voltage sags in semiconductor industry

Phase Start Time Duration (s) Value (V) Deviation Voltage Sag

2 15/09/2014 5:17:32.441AM 0.079 59600 35.83% 64.12%

Interpretation 161 KV 1Ph sag 35% → 22 KV 2 Ph sag 20% → 0.4 KV 3Ph sag 12%

ΔU=35.8%Un

Voltage sags in semiconductor industry

L1

L2

L3 3 Ph Sc

Voltage sags in semiconductor industry

0.000 0.050 0.100 0.150 0.200 0.250 0.300 0.350 0.400 0.450 0.5000.00%

10.00%

20.00%

30.00%

40.00%

50.00%

60.00%

70.00%

80.00%

90.00%

100.00%

Series1

Source Intel Fab 28A XFMR 522 45MVA 161/22KV Dec 2012 –Dec 2013

Voltage sags in semiconductor industry

Voltage sags in semiconductor industry

Affected systems:

•Instrument and controller power supplies

•VFD –variable frequency drives

•Voltage monitoring relays

•Circuit breakers open due to increased current on phases without sags

•Sensor faults or errors

•Robot failure

•Internal communication errors

•Computer re-boots

Voltage sags in semiconductor industry

Voltage sags in semiconductor industry

SOLUTIONS 1 IEC performance improvement

2 Increase the voltage sags immunity for equipment's and tools

3 Install DVR (Dynamic Voltage Restorer)

4 SEMI F47 standard

Voltage sags in semiconductor industry

SOLUTIONS

1 IEC performance improvement

In 1999 were registered about 200 events from IEC supply grid

In 2013 were registered about 100 events

Voltage sags in semiconductor industry

2 Increase the voltage sags immunity for equipment's and tools

- Switch power supply settings

- Increase the rating of power supply unit (PSU)

- Reduce the load in the power supply unit(PSU)

- Use 2 Phase PSU instead of one phase

- Use 3 phase PSU

- Change the voltage relays settings (threshold and trip delay)

- Use contactors instead of relays were possible

- VFD calibration instead of scalar to set DFC (direct fly start) were flying start is

automatic

Voltage sags in semiconductor industry

3 Install DVR (Dynamic Voltage Restorer)

The DVR purpose to compensate loss of power during voltage sags

The energy is provided by a capacitors bank Intel DVR statistic• Two DVRs –rated power of one DVR 15/22MVA• Concept : DVR at Off line mode Vs UPS at On line mode• 15 years in service • DVR availability 99.9%• Average voltage compensation /year 120 • DVR external/internal compensation rate 99.5%• Compensation for 1Ph sags– 50% , for 500msec• Compensation for 3Ph sags– 35% , for 500msec

Voltage sags in semiconductor industry

Voltage sags in semiconductor industry

Booster Transformer

Converter

EnergyStorage

Distrib.Bus Load

DVR

Voltage sags in semiconductor industry

161/93KV ΔUn=35%

22/12.7KV ΔUn=2.9%

Voltage sags upstream DVR on 161KV

After DVR compensation on 22KV

Voltage sags upstream DVR on 161KV

After DVR compensation

Voltage sags in semiconductor industry

4 SEMI F47- Specification for Semiconductor Process Equipment Voltage Sag ImmunitySCOPESEMI F47-0706 defines the required voltage sag tolerance for a semiconductor tool that must operate without interruptionFor sags Phase to N and two Phases (not 3 Ph) SEMI= Semiconductor Equipment and Materials InternationalThe standard has been implemented by semiconductor tool vendors

Voltage sags in semiconductor industry

The primary focus for tools: Lito, Dif, Etch etc

The secondary focus for utilities subsystems and components

–Power supplies units–Ultrasonic generators–Computers and communication systems –Robots and factory interfaces–AC Contactor coils and AC relay coils–Chillers pumps and blowers–Variable frequency drives (VFD)

Voltage sags in semiconductor industry

SEMI F47 requires that tools tolerate the following voltage sags: •50% remaining voltage, 50% missing voltage, for 200 milliseconds•70% remaining voltage, 30% missing voltage, for 500 milliseconds•80% remaining voltage, 20% missing voltage for 1 second.In addition, SEMI F47 recommends, but does not require, that tools tolerate: •0% remaining voltage, 100% missing voltage, for 1 cycle•80% remaining voltage, 20% missing voltage, for 10 seconds

Voltage sags in semiconductor industry

SEMI F47-0706

Equipment will continue to operate

Equipment not required to operate

Voltage sags in semiconductor industry

0.000 0.050 0.100 0.150 0.200 0.250 0.300 0.350 0.400 0.450 0.5000.00%

10.00%

20.00%

30.00%

40.00%

50.00%

60.00%

70.00%

80.00%

90.00%

100.00%

Series1

F28A 2012-2013 VOLTAGE SAGS vs SEMI -F47 STANDARD

Voltage sags in semiconductor industry

Bibliography:-Intel F28 DVR ABB Switzerland-Maintenance manual-Intel F28 Elspec- Investigator manual-SEMI F47-0706 and IEC Voltage Sag Standards -Differences, overlaps, and similarities - Alex Mc Eachern Power Standards Lab (PSL)-Sag immunity - Inexpensive, simple ways to increase sag immunity -Power Standards Lab (PSL)-Voltage sag immunity standards –Pacific Gas and Electric Company –Power quality bulletin 3-www.semi.org

Voltage sags in semiconductor industry