introduction to new high -resolution 3d line confocal ... juha saily.pdf · 3d line confocal...
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Introduction to new high-resolution 3D Line Confocal Imaging technology
Content• Company• Line Confocal Imaging• Applications• Scan examples
FocalSpec Ltd• Founded in 2009• Spin-off from Technical Research
Center of Finland (VTT)• HQ in Oulu, Finland• FocalSpec, Inc., Atlanta, GA (2016)• Demo space, Santa Clara, CA (2016)• Core technology: Line Confocal Imaging
Line Confocal Imaging (LCI)• Non-contact optical measurement method• High-speed, high-resolution 3D imaging for
– Dimensions & shapes– Surface roughness– Thickness– Textures– Flatness– Air gaps, etc.
• Unique, globally patented
LCI Principle
LCI Principle
LCI Principle
LCI Principle
Line Confocal Sensors
Key Specifications• 3D points per line 2048• Z (height) resolution 100 – 980 nm (0.0039 – 0.0386 mil)
• Lateral resolution 2.2 – 36 µm (0.0866 – 1.4173 mil)
• Z range 1.0 – 5.5 mm (0.04 – 0.22”)
• Meas. line length 4.50 – 16.40 mm (0.18 – 0.65”)
• Scan speed 300 – 4000 lines/second• Data acquisition rate 0.6 – 8.2 million 3D points/sec.
LCI Strengths• High speed real-time in-production applications• Sub-micron resolution• Works well on all surface types and materials:
– Highly reflective, mirror-like– Transparent, translucent, opaque– Curved, convex, concave, sloping– High-contrast (matte-glossy, dark-light)– Soft, fragile– Porous– All colors
LCI Strengths• Enables measurement of
– Thickness of transparent layers and air gaps– Microtopography under transparent coatings and layers (tomography)
• Acquires 2048 points simultaneously reduced error caused by vibration
• Native 3-dimensional method• Produces high-quality raw data• No speckle noise• Safe
LCI Weaknesses• Sensors
– Sizable– Heavy– New technology small quantities costly to
produce• Shadowing high aspect ratio features parallel
to line may require additional 90-degree scan
Potential Applications
3D Conductor Trace Measurement• For printed and etched conductors
– Flex circuits, PCBs– Heaters, PV contact grids, etc.
• Trace width at top and foot• Trace height• 3D trace profile cross-sectional area
Line length 11.26 mm, 2048 pixels
2.8 mm(z-range)
10 µm ( 1 pixel )
3D Conductor Trace Measurement+++ Non-filtered, unprocessed raw data shown +++
Surface Roughness Measurement • For copper and substrate layers, etc.• Off-line or on-line• Ra range 0.5 -20 µm• 250 Ra readings/sec.
Surface Roughness Measurement
Surface Roughness Measurement
Ink Thickness Measurement • Off-line or on-line• Method: Step height• Height resolution: 100 nm• Speed: 300 measurements/sec.
Ink Thickness Measurement +++ Non-filtered, unprocessed raw data shown +++
Ink Thickness Measurement
Additional Scan Examples
Printed Bio Sensor+++ Non-filtered, unprocessed raw data shown +++
Screen Printed Patterns on PET Film+++ Non-filtered, unprocessed raw data shown +++
Height: 92 µm
Width: 450 µm Width:
250 µm
Height: 96 µm
Hot-embossed Microfluidic Device+++ Non-filtered, unprocessed raw data shown +++
Paper Surface Microtopography+++ Non-filtered, unprocessed raw data shown +++
Hot-embossed Microfluidic Channels on PMMA
+++ Non-filtered, unprocessed raw data shown +++
Surface of 0603 SMT Resistor+++ Non-filtered, unprocessed raw data shown +++
PCB Assembly+++ Non-filtered, unprocessed raw data shown +++
MATTE
GLOSSY
Detail of A Dime+++ Non-filtered, unprocessed raw data shown +++
Thank you!FocalSpec, Inc.1595 Peachtree ParkwaySuite 204-110Cumming, GA 30041USA
Juha SailySales Manager(770) [email protected]