ion-assisted deposition with a new plasma source

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Page 1: Ion-assisted deposition with a new plasma source
Page 2: Ion-assisted deposition with a new plasma source
Page 3: Ion-assisted deposition with a new plasma source
Page 4: Ion-assisted deposition with a new plasma source
Page 5: Ion-assisted deposition with a new plasma source
Page 6: Ion-assisted deposition with a new plasma source
Page 7: Ion-assisted deposition with a new plasma source
Page 8: Ion-assisted deposition with a new plasma source