ÖNORM

EN ISO 14644-10

Edition: 2013-06-15

Cleanrooms and associated controlled environments

Part 10: Classification of surface cleanliness by chemical concentration

(ISO 14644-10:2013)

Reinräume und zugehörige Reinraumbereiche ―

Teil 10: Klassifizierung der chemischen Oberflächenreinheit

(ISO 14644-10:2013)

Salles propres et environnements maîtrisés apparentés ―

Partie 10: Classification de la propreté chimique des surfaces

(ISO 14644-10:2013)

ICS 13.040.35 Identical (IDT) with ISO 14644-10:2013-03 Identical (IDT) with EN ISO 14644-10:2013-03 responsible Committee 236 Indoor air

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EUROPEAN STANDARD

NORME EUROPÉENNE

EUROPÄISCHE NORM

EN ISO 14644-10

March 2013

ICS 13.040.35

English Version

Cleanrooms and associated controlled environments - Part 10: Classification of surface cleanliness by chemical concentration

(ISO 14644-10:2013)

Salles propres et environnements maîtrisés apparentés - Partie 10: Classification de la propreté chimique des

surfaces (ISO 14644-10:2013)

Reinräume und zugehörige Reinraumbereiche - Teil 10: Klassifizierung der chemischen Oberflächenreinheit (ISO

14644-10:2013)

This European Standard was approved by CEN on 2 February 2013. CEN members are bound to comply with the CEN/CENELEC Internal Regulations which stipulate the conditions for giving this European Standard the status of a national standard without any alteration. Up-to-date lists and bibliographical references concerning such national standards may be obtained on application to the CEN-CENELEC Management Centre or to any CEN member. This European Standard exists in three official versions (English, French, German). A version in any other language made by translation under the responsibility of a CEN member into its own language and notified to the CEN-CENELEC Management Centre has the same status as the official versions. CEN members are the national standards bodies of Austria, Belgium, Bulgaria, Croatia, Cyprus, Czech Republic, Denmark, Estonia, Finland, Former Yugoslav Republic of Macedonia, France, Germany, Greece, Hungary, Iceland, Ireland, Italy, Latvia, Lithuania, Luxembourg, Malta, Netherlands, Norway, Poland, Portugal, Romania, Slovakia, Slovenia, Spain, Sweden, Switzerland, Turkey and United Kingdom.

EUROPEAN COMMITTEE FOR STANDARDIZATION C O M I T É E U R O P É E N D E N O R M A LI S A T I O N EUR OP ÄIS C HES KOM ITEE FÜR NOR M UNG

Management Centre: Avenue Marnix 17, B-1000 Brussels

© 2013 CEN All rights of exploitation in any form and by any means reserved worldwide for CEN national Members.

Ref. No. EN ISO 14644-10:2013: E

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EN ISO 14644-10:2013 (E)

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Contents Page

Foreword ....................................................................................................................................................... 3

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EN ISO 14644-10:2013 (E)

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Foreword

This document (EN ISO 14644-10:2013) has been prepared by Technical Committee ISO/TC 209 "Cleanrooms and associated controlled environments" in collaboration with Technical Committee CEN/TC 243 “Cleanroom technology” the secretariat of which is held by BSI.

This European Standard shall be given the status of a national standard, either by publication of an identical text or by endorsement, at the latest by September 2013, and conflicting national standards shall be withdrawn at the latest by September 2013.

Attention is drawn to the possibility that some of the elements of this document may be the subject of patent rights. CEN [and/or CENELEC] shall not be held responsible for identifying any or all such patent rights.

According to the CEN-CENELEC Internal Regulations, the national standards organizations of the following countries are bound to implement this European Standard: Austria, Belgium, Bulgaria, Croatia, Cyprus, Czech Republic, Denmark, Estonia, Finland, Former Yugoslav Republic of Macedonia, France, Germany, Greece, Hungary, Iceland, Ireland, Italy, Latvia, Lithuania, Luxembourg, Malta, Netherlands, Norway, Poland, Portugal, Romania, Slovakia, Slovenia, Spain, Sweden, Switzerland, Turkey and the United Kingdom.

Endorsement notice

The text of ISO 14644-10:2013 has been approved by CEN as EN ISO 14644-10:2013 without any modification.

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© ISO 2013

Cleanrooms and associated controlled environments —Part 10: Classification of surface cleanliness by chemical concentrationSalles propres et environnements maîtrisés apparentés —Partie 10: Classification de la propreté chimique des surfaces

INTERNATIONAL STANDARD

ISO14644-10

First edition2013-03-01

Reference numberISO 14644-10:2013(E)A

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ISO 14644-10:2013(E)

ii © ISO 2013 – All rights reserved

COPYRIGHT PROTECTED DOCUMENT

© ISO 2013All rights reserved. Unless otherwise specified, no part of this publication may be reproduced or utilized otherwise in any form or by any means, electronic or mechanical, including photocopying, or posting on the internet or an intranet, without prior written permission. Permission can be requested from either ISO at the address below or ISO’s member body in the country of the requester.

ISO copyright officeCase postale 56 • CH-1211 Geneva 20Tel. + 41 22 749 01 11Fax + 41 22 749 09 47E-mail copyright@iso.orgWeb www.iso.org

Published in Switzerland

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ISO 14644-10:2013(E)

© ISO 2013 – All rights reserved iii

Contents Page

Foreword ........................................................................................................................................................................................................................................iv1 Scope ................................................................................................................................................................................................................................. 12 Normative references ...................................................................................................................................................................................... 13 Terms and definitions ..................................................................................................................................................................................... 14 Classification ............................................................................................................................................................................................................ 2

4.1 Principles for establishing classification of clean surfaces in cleanrooms and controlled environments ................................................................................................................................................................ 2

4.2 Classification for surface cleanliness by chemical concentration ............................................................... 24.3 ISO-SCC designation ........................................................................................................................................................................... 44.4 Converter for substances into surface atomic concentration ......................................................................... 4

5 Measuring and monitoring the cleanliness of surfaces for chemical contamination and demonstration of compliance ................................................................................................................................................................. 55.1 Criteria for good cleanliness assessment ......................................................................................................................... 55.2 Documentation and reporting ................................................................................................................................................... 6

Annex A (informative) Conversion between different unit expressions of surface concentration for chemical substances ......................................................................................................................................................................................... 8

Annex B (informative) Parameters influencing testing and interpretation of results ..................................15Annex C (informative) Essential considerations for a good cleanliness assessment ......................................16Annex D (informative) Methods for testing surface cleanliness by chemical concentration .................17Annex E (informative) Test record documentation ............................................................................................................................28Bibliography .............................................................................................................................................................................................................................29

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ISO 14644-10:2013(E)

Foreword

ISO (the International Organization for Standardization) is a worldwide federation of national standards bodies (ISO member bodies). The work of preparing International Standards is normally carried out through ISO technical committees. Each member body interested in a subject for which a technical committee has been established has the right to be represented on that committee. International organizations, governmental and non-governmental, in liaison with ISO, also take part in the work. ISO collaborates closely with the International Electrotechnical Commission (IEC) on all matters of electrotechnical standardization.

International Standards are drafted in accordance with the rules given in the ISO/IEC Directives, Part 2.

The main task of technical committees is to prepare International Standards. Draft International Standards adopted by the technical committees are circulated to the member bodies for voting. Publication as an International Standard requires approval by at least 75 % of the member bodies casting a vote.

Attention is drawn to the possibility that some of the elements of this document may be the subject of patent rights. ISO shall not be held responsible for identifying any or all such patent rights.

ISO 14644-10 was prepared by Technical Committee ISO/TC 209, Cleanrooms and associated controlled environments.

ISO 14644 consists of the following parts, under the general title Cleanrooms and associated controlled environments:

— Part 1: Classification of air cleanliness by particle concentration

— Part 2: Specifications for testing and monitoring to prove continued compliance with ISO 14644-1

— Part 3: Test methods

— Part 4: Design, construction and start-up

— Part 5: Operations

— Part 6: Vocabulary

— Part 7: Separative devices (clean air hoods, glove boxes, isolators, mini-environments)

— Part 8: Classification of air cleanliness by chemical concentration (ACC)

— Part 9: Classification of surface cleanliness by particle concentration

— Part 10: Classification of surface cleanliness by chemical concentration

The following part is under preparation:

— Part 12: Classification of air cleanliness by nanoscale particle concentration

Cleaning of surfaces to achieve defined levels of cleanliness in terms of particle and chemical classifications will form the subject of a future Part 13.

iv © ISO 2013 – All rights reserved

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