Item #

Description Qty

Picture

1 QDR bath WPMS01 200mm Sugai SES

1

2 FR Bath WPOD01 200mm Sugai SES

1

3 FR Bath

WPMS01 200mm Sugai SES

1

4 Wafer guide set

left&right WVES01 200mm Sugai SES

1

5 Bath cover one set WVES01 200mm Sugai SES 4 ea in box #49

14

6 Baffle plate WVES01 200mm Sugai SES

2

33 1

7 H2SO4 Bath &bath covers& plumbing hardware Kaijo WPCK02

2

8 HQDR bath Kaijo WPCK02

1

9 Wafer guides for H2O2 WVES01 200mm Sugai SES

3

10 PEEK RT Chucks Kaijo WOEK01

2

11 Wafer guides PEEK Kaijo WOEK01

4

12 Quart Chuck for SES wet bench WPMS01 200mm Sugai SES

6

12-b 6

13 Quartz deflector baffle plate WPMS01 200mm Sugai SES

1

14 Wafer guide Quartz WPMS01 200mm Sugai SES

1

15 Quartz bubbler One good one repairable WPMS01 200mm Sugai SES

6

15-b Quartz HS bubbler

15-c 3

16 HS bath WPMS01 200mm Sugai SES

1

17 HQDR bath WPMS01 200mm Sugai SES

1

18 NW valve &HTS

valve filter housing 200mm Sugai SES

1

19 SC1 bath KAIJO

WPOD01 200mm

1

20 QDR bath

WPMS01 200mm Sugai SES

1

21 QDR deflector punch plate WPMS01 200mm Sugai SES

1

22 HS1 right quartz cover WPMS01 200mm Sugai SES

1

23 Quartz wafer guide WPMS01 200mm Sugai SES

4

24 Quartz wafer chucks WPMS01 200mm Sugai SES

12

25 1. cover 2. HQDR shower bar 3. bath cover 4. arm cover WPMS01 200mm Sugai SES

26 H2SO4 Bath cover

2 ea set WPCK02

2

27 Quartz chuck mounting cracked Kaijo WPCK02 200mm

6

28 QDR BATH w/valve

WTWS02 200mm

1

29 QDR BATH w/valve WTWS02 200mm

1

30 HSI bath WPRS04 200mm

1

31 Quartz SC1 wafer guide WPRS04 200mm

4

31-b Quartz HS wafer guide

6

32 QDR bath WPDS09

1

33 PEEK wafer guide WPDS09

2

34 1)Quartz SC1 bath 2) bathe covers 2 3) TC tubes 4 WPDS09

1

35 Quartz chucks

WOEK01

4

36 Quartz wafer guide WOEK01

1

37 H2SO4 bath WPRS02

1

38 H2SO4 bath WPRS02

1

39 Quartz QDR bath WPDS01

1

40 Quartz SC1 bath WPRS02

1

41 Quartz SC1 bath Needs repair WPRS02

1

42 Quartz QDR bath WTWS02

1

43 Quartz FR QDR bath WPRS04

1

44 Quartz BUFFER 1 bath WPRS04

1

45 Quartz FR QDR bath WPDS09

1

46 Quartz SC1-2 bath SC1-2 buffer plate WPRS02

1-1

47 Quartz SC1-2 wafer

guide Used with above tank WPRS02

1

48 Quartz HQDR bath & spray manifolds WPRS02

1

49 Covers for SC1 bath WPRS02

50 Quartz TC tube WPRS02

4

51 Quartz TC tube One for WPRS02 Two for WPRS04

3

52 Quartz Final rinse bath WTWS02

1

53 Quartz SC1 bath WTWS02

1

54 Quartz HS2 bath WPRS04

1

55 Quartz SC1 bath Needs repair WPRS04

1

56 Quartz HQDR rinse bath WPRS04

57 Quartz HQDR rinse bath WPRS04

1

Quartz TC tube

1

58 Quartz SC1 bath Needs repair side wall crack WTWS02

1

59 Quartz HQDR rinse bath WOEK01

1

60 NEW Quartz final rinse bath 70400169900 400-005-00 WOEK01

1

61 Quartz SC1 bath WOES02

1

62 PEEK wafer guide WOEK01

2

63 Quartz wafer guide WOEK01

1

64 Quartz HQDR rinse bath WPRS02

1

65 Quartz HQDR rinse bath WPRS02

1

66 Quartz QDR rinse bath WPDS09

1

67 Robot guide

7

68 Immersible quartz heater One needs repair

4

69 Ultrasonic Quartz chuck cleaning bath

2

70 Quartz bubbler 4

71 Robot guides 2

72 2” PFA pneumatic

quick dump valve & hardware

1

73 Quartz HQDR bath WPRS04

1

74 Quartz HQDR bath WOEK01

1

75 76 77

CAMFIL HEPA filters WPDK03

2 3 3

75 CAMFIL HEPA initial

filter WPDK03

4

78 Acid monitoring sensor case tubes WPDK03

2

78 Acid bath covers Set of 2 WPDK03

2

78 Bath front covers One set for full wet station WPDK03

SET

78 HS Acid monitoring sensor case tubes WPMS01

1

78 Shower manifolds For HQDR bath WPMS01

2

Item #

Description qty Pictures Pictures/name tags

79 IWAKI auto dampner Model: PDA-208 HF

3

80 KOMATSU

heater E-332B-6-UL with controller GR Pn.411-11-1N30

3

81 MITSUBISHI

inverter Model: FR-U120-NO.75K-UF

1

82 This part moved to # 69 HITACHI MICROSONIC Model: U0 1000MPA

83 HORIBA SC-1 monitor Model: CS-220

1

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uuuuuuuuuuuuuuuuu uuuuuuuuuuuu uuuuuuuuuuuu uuuuuuuuuuuu uuuuuuuuuuuu uuuuuuuuuuuu uuuuuuuuuuuu uuuuuuuuuuuu uuuuuuuuuuuu uuuuuuuuuuuu uuuuuuuuuuuu uuuuuuuuuuuu uuuuuuuuuuuu uuuuuuuuuuuu uuuuu 84

Faxboro conductivity and resistivity Model: 875CR-C1F-A

1

85 exhaust digital Monitors Krone KS-2500

4

86 RP-200A

LINTEC meter 1

87 423C-19-9-DN

1

88 NAIS HOUR

METER TH-141U

1

89

Ehaust digital Monitors Krone KS-2500

6

90 KAIJO

APC-1 4

91 Yamatake – Honeywell IP300

9

92 Proface29 GP2300-TC41-24V Model: 80070-02

1

93 Temp

controller Tokyo Keiso IR-6000-11-C

2

94 PS211 OC224 ID218 OD213 ID219 OD412 ID212 OMRON SYSMAC PLC

1 1 1 2 3 1 1

95

PC211 CV2000-V1 SLK21 LK201 ID219 OD213 OD412 ID212 IC201 OMRON SYSMAC PLC

1 1 1 1 4 2 1 1 1

96 PA208 ID219 OD213 II201 CV500-B1042 DRIVE OMRON SYSMAC PLC

1 2 2 1

97 PA208 ID219 OD213 II201 CV500-B1062 DRIVE OMRON SYSMAC PLC

1 3 2 1

98 PA208 ID291 OD213 II201 CV500-B1042 DRIVE OMRON SYSMAC PLC

1 3 3 1

99 PA208 ID219 OD213 ID212 OD415 II201 CV500-B1062 DRIVE OMRON SYSMAC PLC

1 2 2 1 1 1

100 Kaijo stocker flat aligner lift

4

101 Kaijo stocker

cassette rotater

6

102 Kaijo stocker

cassette changer

6

103 Kaijo HS in-line heater Junction box

4 2

104 Kaijo

start/stop console

4

105 Kaijo 4 solenoids 5 solenoids 6 solenoids 7 solenoids 12 solenoids 16 solenoids FM SOLID MANIFOLD X80M-ED-DN

1 2 1 2 2 3

106 AC servo driver Kokusai driver Power supply Omron Toki nose filter Kaijo Carrier stocker

3 3 10 5

107 MSP301N Speed controller Oriental motor Kaijo stocker $180

2

108 G2R-2-SND 24V DC MY4N-D2 24V DC OMRON Relay block

52 5

109 E3S-AT11-L E3S-AT11-D OMRON sensor Kaijo stocker

6 6

110 E3S-CL1

Sensor Kaijo stocker $150

8

111 E3S-BD61 Photoelectric sensor OMRON Kaijo stocker $30

12

112 UM-R5T

SEEKA Kaijo stocker

4

113 UM-Z3SV SEEKA Kaijo stocker $35

8

114 MBS-1205-22

Noise filter Nemic-Lambda Kaijo stocker

3

115 UM-TR50TV UM-TL50T SEEKA Kaijo stocker

14 12

116 3GN30K 3GN10XK 3RK15GN-AUL Oriental reversible motor 100~115V $300

2

117 MSMA041A1F

AC servo motor Panasonic $1,000

2

118 VRAF-LBL25C

MSMA021A1A AC servo motor w/ gear housing Panasonic $300

2

119 4047N123E12 U/D AC servo motor w/ gear Tamagawa $300

2

120 3275N500E12

U/D AC servo motor w/ gear Tamagawa $350

2

121 MBM315-411

Magnetic brake AC motor $400 Oriental motor One has no motor

3

122 2-HIG-

LLRA720 Quick connects TUTHILL $2 ea

48

123 CMK2-CC-32-75 CKD cylinder $50

4

124 Stocker

elevator motor & housing

3

125 Communicatio

n adapter

126 AQ-10 AR1-211 Resistivity meter and probe

2 2

127

E2K-X4ME1 Cpacitive proximity switch OMRON

4

128 TBL DRIVER AC servo motor controller Tamagawa

3

129 Proface Loader unit side and Unloader unit side GP270-LG11-24V $230

1 1

130 NT31-ST123-

EV3 Loader unit Unloader unit Drive/RT C/C bath Omron $275

1 1 1 1

131 EST0220C05WNX00 H02 S01 Smart terminal Yamatake-Honeywell

1

132 VF3450-5EZ

DC21-26V 4 Solenoids 2 Solenoids SMC

3 2

133 BCR2612-RDB

D model BCR2600 barcode reader BCV5052 Power supply Model BCV5050

1 1

134 SCD30

C305GD004100 Temperature controller Yamatake-Honeywell

4

135 MS61L Differential pressure switch Yamamto electric $20

5

136 PPD-P10PKN-6P CKD pressure switch $110

137 EQ-23

Sensor SUNX $30

4

138 D4D-2121N 6

139 LSP-2-0 LEAK SENSOR

5

140

PS-X28 PS-201T sensor Keyence $80 set

8 12

141 H3Y-2

Timer Omron $15

3

142 1A FEC FUSE

8

143 ST-18CM4 Buzzer speaker Arrow

1

144 BM-202 24V AC/DC Signal phone PATLITE

1

145 EE-SX670 4

146 EE-SPX303 Omron

9

147 RS-1 Magnetic switch

10

149 US315-01T Speed control unit Oriental motor

1

150 PS-25 amplifier PS-205 Sensor Keyence

2 2

151 MLPS-10A60

w/one valve MLPS-10A60 w/two valves MLPS-10A60 w/4 valves MLPS-10A60 w/5 valves

1 2 1 1

152 FUSE 1A 100V

56

153 Switch panel front Kaijo

9

154 S82S-0312 1

155 CHP-NF-10s-DC24 CHIP-F timer

9

156 MY2N 24VAC

MY4N 200VAC OMRON Relay

9 1

157 MY2N-D2 MY4N-D2 24V DC 4V DC OMRON Relay

39 3

158 CP30-BA, 1A CP30-BA, 2A CP30-BA, 3A CP30-BA, 5A CP30-BA, 10A CP30-BA, 20A AC/DC 2ph CP30-BA, 3A CP30-BA, 5A CP30-BA, 7A CP30-BA, 10A AC 3phase 5A

9 32 7 9 16 2 3 5 2 1

159 DCN1-3

T-PORT TAP OMRON

1

160 SS40-TL1O Set is 2 WIDE SENSOR TAKEX

2

161 CIMR-

G5V25P5 VARISPEED 616G5

1

162 X88M-DN-ED-149W X80M-ED-DN 8x2=16 valves

1 4

163

CR6L-50 FUJI super rapid fuse

6

164 SC-N1 3ph contactor FUJI

2

165

SRD parts 1

166 SRD parts 1

167 SRD parts 1

168 SRD parts 1

169 HA-4A Simco

1

170 Valve x4 1

171 SRD balancers 2

172 E5C2 Temp controller omron

2

173 Terminal blocks

4

174 Pressure gauge

1

175 AV-7679-631U3 Air valve

6

176 G6B478ND Omron

1

177 SZR-LY2-N1 Relay Honeywell

2

178

HHF measurement tank Kaijo

1

179 NH4OH measurement tank Kaijo

1

180 EX-C60FF-100S Meetering pump IWAKI

5

181 FAB-CONTROLLER OKK

1

182 6Z02 Solenoid valve Koganei1

183 DC20-24F0-S000 Solid state power control Wattlow

2

DC20-24FO-S

184 PS211

OC224 ID218 OD213 ID219 OD412 ID212 II201 CV500-B1112 DRIVE OMRON SYSMAC PLC

1 1 1 2 3 1 1 1

185 PS211 CV2000-V1 SLK21 LK210 ID219 OD213 OD412 ID212 IC201 OMRON SYSMAC PLC

1 1 1 1 4 2 1 1 1

186 PS211 OC224 ID218 OD213 ID219 OD412 ID212 II201 CV500-B1112 DRIVE OMRON SYSMAC PLC

1 1 1 2 3 1 1 1

187 PS211 CV2000-V1 SLK21 LK210 ID219 OD213 OD412 ID212 IC201 OMRON SYSMAC PLC

1 1 1 1 4 2 1 1 1

189 PA208 ID219 OD213 IC201 OMRON SYSMAC PLC

1 4 2 1

190 PA208 ID219 OD213 IC201 OMRON SYSMAC PLC

1 2 2 1

191 PA208 ID219 OD213 ID212 OD415 IC201 OMRON SYSMAC PLC

1 2 2 1 1 1

192 PA208 ID219 OD213 II201 OMRON SYSMAC PLC

1 3 1 1

193 PA208 ID219 OD213 ID212 OD415 II201 OMRON SYSMAC PLC

1 2 2 1 1 1

194 PA208 ID219 OD213 IC201 OMRON SYSMAC PLC

1 2 2 1

195 PA208 CT021 ID219 OD213 II201 OMRON SYSMAC PLC

1 1 3 2 1

196 PA208 ID219 OD213 II201 OMRON SYSMAC PLC

1 2 2 1

197

NT-AI001 Link adapter OMRON

1

198 DRT2-AD004 Analog terminal Omron

1

199 413C-19-9-DN Meter Tsuruga electric

1

200 WME-FB SIGNAL TOWER PATLITE

1

201 NRF210 5A 250VAC 32VDC Fuse IDEC

4

202 PDK-004A-0WG SCREEN IEE

2

203 MU1238A-12B AC100V Cooler fan ORIX

3

204 S82F-1524 Switching power supply Omron

1

205 PGU310 Yamatake-honeywell

1

206 S82F-3024

Switching power supply Omron

6

207 Resistance bulb Hayashi denko

5

208 RS100-02-B-

1W Stainless regulator Koganei SUS-316 pressure gauge Daiichi keiki

7 13

209 AIR 3K 25 l/m

Flow meter 3

210

AW2000-02-C CDA line regulator with dryer

4

211 4KB120-D2 Solenoid valve CKD

2

212 4GA129-E2H Solenoid valve CKD

1

213 LS-30 10 channel PLC Technical&Try

1

214 RS-1000C 2

215 MR-J20A1 100V 200W AC Servo controller Mitsubishi

1

216 KML50-2C-A-4-0 Valve/switch CKD

1

217 PI200209-B-001 In-line heater 208V, 6kW P I Tech industrial

1

218

Model: 20620 FV-7279-631U3-01 ¾” Pneumatic valve Advance

11

219 ¾” Clean flow meter

7

220 PTFE 15 m/m PTFE 20 m/m

1 10

221 AMD412-20BUS-16-1-4 Pneumatic valve CKD

1

222 AW-3000-03B ½” Regulator with dryer SMC

1

223 NV30-CS Earth leakage circuit breaker Mitsubishi

4

224 NF-SF 2P 15A NF-SF 3P 25A NF-SF 2P 30A NF-SF 2P 45A NF-SF 2P 60A NF-SF 2P 125A No fuse breaker Mitsubishi

1 1 2 1 6 1

225 ABS 53b

Circuit breaker MEC

2

226 S-K125UL

S-K80UL Contactor Mitsubishi

1 1

284 Hand valve PTFE 20mm ¾” KUBOTA George Fischer

5

285 Hand valve PTFE 15mm ½” KUBOTA George Fischer

5

286 AMD312-15BUS-10-03PZ Pneumatic valve CKD

3

287 AMD412-20BUS-16-03Z Pneumatic valve CKD

13

288 AMD312-15BUS-10-03Z Pneumatic valve CKD

5

289 AMB512-

X0234 NC Pneumatic valve CKD

2

290 5K-P-R-H 1

291 DI flow meter ¾” Tokyo Keiso

2

292 PFA 3

300 PWH96N 24 l/m quartz DI water heater Komatsu

7

301 HI MEGASONIC 600 generator control module set

1

302 HI

MEGASONIC 600 generator control module set

1

303 Yieldup DHF last and Marangoni dryer 200mm cassette-less type

1

304 Yieldup

Marangoni dryer 200mm cassette-less type

3