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Materials forSmart Systems III

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Cambridge University Press978-1-107-41322-1 - Materials Research Society Symposium Proceedings: Volume 604:Materials for Smart Systems IIIEditors: Marilyn Wun-Fogle, Kenji Uchino, Yukio Ito and Rolf GotthardtFrontmatterMore information

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MATERIALS RESEARCH SOCIETYSYMPOSIUM PROCEEDINGS VOLUME 604

Materials forSmart Systems III

Symposium held November 30-December 2, 1999, Boston, Massachusetts, U.S.A.

EDITORS:

Marilyn Wun-FogleCarderock Division, Naval Surface Warfare Center

West Bethesda, Maryland, U.S.A.

Kenji UchinoPennsylvania State University

University Park, Pennsylvania, U.S.A.

Yukio ItoRutgers University

Piscataway, New Jersey, U.S.A.

Rolf GotthardtEcole Polytechnique Federate de Lausanne

Lausanne, Switzerland

Materials Research SocietyWarrendale, Pennsylvania




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CONTENTS

Preface xi

Acknowledgments xiii

Materials Research Society Symposium Proceedings xiv

PIEZOELECTRICS

Dielectric Properties of Highly Oriented Lead Zirconium TitanateThin Films Prepared by Reactive RF-Sputtering 3

S. Kalpat, X. Du, I.R. Abothu, A. Akiba, H. Goto, S. Trolier-McKinstry,and K. Uchino

Aluminum Nitride Thin Films for Microwave Filter and MicrosystemApplications 9

M-A. Dubois, P. Muralt, and L. Sagalowicz

* Characteristics of Piezoelectric Ceramics at High Vibration Levels 15S. Takahashi, Y. Sasaki, M. Umeda, K. Nakamura, and S. Ueha

Loss Mechanisms in Piezoelectrics—Extrinsic and Intrinsic Losses 25K. Uchino, J. Zheng, Y.H. Chen, X. Du, S. Hirose, and S. Takahashi

Microstructural Effects on Piezoelectric Cracking 33C.C. Fulton and H. Gao

Switching Current in Pb(Zni/3Nb2/3)O3-PbTiO3 Single Crystals 39Uma Belegundu, Xiaohong Du, and Kenji Uchino

Composite Piezoelectric Materials for Health Monitoring ofComposite Structures 45

P. Blanas and D.K. Das-Gupta

Indentation of Piezoelectric Ceramics: Theory, Experiments andApplications 51

Subra Suresh, Antonios E. Giannakopoulos, S. Sridhar,and U. Ramamurty

* Invited Paper




Effects of Electric Fields on the Bending Behavior of PiezoelectricComposite Laminates 59

J.Q. Cheng, T.Y. Zhang, M.H. Zhao, C.F. Qian, S.W.R. Lee,and P. Tong

High-Temperature Properties of Langasite 65H. Fritze, H.L. Tuller, G. Borchardt, and T. Fukuda

New Concept for Resonant Longitudinal-Shear Ultrasonic Motor 71P. Bouchilloux, B. Koc, and K. Uchino

Considerations in the Development of a Piezoelectric TransducerCochlear Implant 79

N. Mukherjee and R.D. Roseman

SHAPE MEMORY

*Shape Memory Alloys—Their Challenge to Contribute to SmartStructures 87

C. Boiler

Characterization of NiTi Materials Using a Novel Aces Methodology 99S.P. Mizar, M.I. Pech-Canul, and R.J. Pryputniewicz

Stress-Induced Martensite in NiTi Corrugated Films 105Manfred Wuttig, J.S. Slutsker, Kiyotaka Mori, andJiang Li

*Rapid-SoIidified Metallic Actuator Materials Developed byElectromagnetic Nozzleless Melt Spinning Method 109

Y. Furuya

Zero Hysteresis in Shape-Memory Ti-Ni-X Films (X = Cu, Pd)Under Constraint 117

B. Winzek and E. Quandt

Influence of Deformation Speed on Fatigue and TensileProperties of a Ti-Ni-Cu Shape Memory Alloy 123

Y. Kishi, Z. Yajima, K. Shimizu, and M. Asai

High Hf Content NiTiHf Shape Memory Films 129Chen Zhang, Paul E. Thoma, and Ralph Zee

* Invited Paper




Superelastic Shape Memory Alloy For Seal Applications Producedby Low Pressure Thermal Spray Technology 135

Albert Sickinger and Joseph P. Teter

Adaptive Composites With Embedded Shape Memory Alloy Wires 141J.A. Balta, M. Parlinska, V. Michaud, R. Gotthardt, andJ-A.E. Manson

ACTUA TOR MA TERIALS

"Intelligent Gels 149Yoshihito Osada, Jian Ping Gong, and Tetsuharu Narita

Shape Memory Ceramics 161T. Matsumura, T. Nakamura, M. Tetsuka, K. Takashina,K. Tajima, and Y. Nishi

"Properties and Applications of Magnetorheological Fluids 167M.R. Jolly

i

"Monolithic Shape Memory Alloy Actuators": A New Concept forDeveloping Smart Micro-Devices 177

Y. Bellouard, T. Lehnert, T. Sidler, R. Gotthardt, andR. Clavel

POSTERS

Hypersonic and Dielectric Studies of Relaxor Ferroelectric SingleCrystal 185

Chi-Shun Tu, V.H. Schmidt, C-H. Yeh, L-F. Chen, and C-L. Tsai

Radial Bragg Grating Package for Temperature Compensation inInterferometric Hydrophone Arrays 191

L.G. Carreiro, G.H. Ames, T.S. Ramotowski, and P.D. Curry

Application of Piezoelectric Materials for Use as Actuators andSensors in Hard Disk Drive Suspension Assemblies 197

J.F. Heffelfinger and D.A. Boismier

•Invited Paper




Electrical Properties and Power Considerations of a PiezoelectricActuator 203

T. Jordan, Z. Ounaies, J. Tripp, and P. Tcheng

Temperature Dependence of High Field Characteristics in PMN-PT-BTCeramics Containing Chemical Additives 209

Yong S. Cho, Chang H. Yoon, Steven M. Pilgrim, andKeith Bridger

Doping Effects in Pb(Mgi/3Nb2/3)O3-PbTiO3 Ceramics for High PowerTransduction Applications 215

Yun-Han Chen, Senji Hirose, Dwight Viehland, and Kenji Uchino

The Effect of Hafnium and Thermal Cycling on the TransformationTemperatures of NiTi-Based Shape Memory Alloys 221

Paul E. Thoma and John J. Boehm

Comparative Study of Structural and Neel Transition Temperaturesin Fe-Mn-Si Shape-Memory Alloys 227

M.I.N. da Silva, G.J. de Arruda, P.E.F. Cortes, M.S. Andrade,R. Paniago, and N.L. Speziali

High-Temperature Thermoelectric Properties of Silicon BorideCeramics as a Smart Material 233

Noriyuki Takashima, Yasuo Azuma, and Jun-Ichi Matsushita

PbZro.52Tio.4sO3 Ferroelectric Thin Films on Silicon by KrFExcimer Laser Ablation 239

K. Ebihara, F. Mitsugi, M. Yamazato, T. Ikegami, andJ. Narayan

MAGNETOSTRICTIVE MATERIALS

*On Magnetostrictive Transducer Applications 247Alison B. Flatau, Marcelo J. Dapino, and Frederick T. Calkins

Force Capability of a Planar Peristaltic Terfenol-D Motor 261MJ. Gerver, J.H. Goldie, Won-Jong Kim, Jerome Kiley,and J.R. Swenbeck

Energy Absorption and Damping in Magnetostrictive Composites 267G.P. McKnight and G.P. Carman

* Invited Paper




Development of High Frequency Terfenol-D Transducer Material 273E.A. Lindgren, J.C. Poret, JJ. Whalen, M. Rosen, M. Wun-Fogle,J.B. Restorff, and A.E. Clark

Modeling and Experiments for Deformation Under Load in Ni-Mn-GaFerromagnetic Shape Memory Alloy 279

S.J. Murray, S.M. Allen, and R.C. O'Handley

A Model for Asymmetric Hysteresis in Piezoceramic Materials 285R.C. Smith and Z. Ounaies

A Mechanism for Magnetically Driven Shape Memory Alloys 291P.J. Ferreira and J.B. Vander Sande

Formation and Characterization of Single Crystal Ni2MnGaThin Films 297

J.W. Dong, L.C. Chen, S. McKernan, J.Q. Xie, M.T. Figus,R.D. James, and C.J. Palmstrom

SENSOR AND OTHER MATERIALS

Sr(Ti,Fe)C>3: Materials for a Temperature Independent ResistiveOxygen Sensor 305

W. Menesklou, H-J. Schreiner, R. Moos, K.H. Hardtl, andE. Ivers-Tiffee

Molecular Recognition of Organic Compounds by Imprinted Silica 311Xiaoyi Gong, Jun Liu, and William D. Samuels

Electrical Conductivity of Piezoelectric Strontium BismuthTitanate Under Controlled Oxygen Partial Pressure 317

C. Voisard, P. Duran Martin, D. Damjanovic, and N. Setter

Triboluminescence of Rare-Earth-Doped Aluminosilicates and ItsApplication to Sensing of Structural Damage 323

Katsuhisa Tanaka, Tsuguo Ishihara, Koji Fujita, andKazuyuki Hirao

De-Icing Layers of Interdigitated Microelectrodes 329Zoe Courville and V.F. Petrenko

The Design of Organic Gelators Based on a Family of Bis-Ureas 335Rosa E. Melendez, Andrew J. Carr, Kazuki Sada, andAndrew D. Hamilton




Processing and Characterization of Cofired Capacitor andVaristor Ceramics 341

B. Malic, M. Kosec, J. Razinger, and Z. Zivic

Magnetoimpedance: A Choice Property for Smart Materials 347K.L. Garcia and R. Valenzuela

Structural Changes on Photochromism of Organic-InorganicHybrid Materials 351

Keiichi Kuboyama and Kazumi Matsushige

Author Index 355

Subject Index 357




PREFACE

This volume represents a record of the proceedings of Symposium LL, "Smart Materials," heldNovember 30-December 2 at the 1999 MRS Fall Meeting in Boston, Massachusetts, the thirdsymposium in the series on "Smart Materials." In addition to the conventional piezoelectric,magnetostrictive and shape memory materials, the symposium was expanded to include electro-/magnetorheological fluids and mechanochemical actuators. Seventy-one papers were presentedover the course of three days. Of the fifty-one papers in this volume, twenty-one (or roughly41%) came from outside the U.S.

Piezoelectric actuators seem to have reached a rather mature status. Various talks on theirreliability issues were presented. A review of the high vibration-level characteristics for PZTpiezoelectric ceramics, using both burst and continuous voltage drive methods in order to measurethe temperature rise effect separately, was presented. It was concluded that the mechanical lossincreases significantly with the vibration stress. A promising application for a disk-typepiezoelectric transformer, which utilized a circular piezoceramic with an asymmetrical electrodeconfiguration (Poster Award recipient) was reported. Compared with the conventional rectangularshape, this new design realized higher voltage step-up ratio and efficiency.

The session on Shape Memory Alloys (SMA) has shown that the SMA are still prominentrepresentatives of smart materials and contribute to smart structures. In order to use SMA in anoptimal way, new characterization and fabrication methods, as well as thermo-mechanicaltreatments, were presented and discussed. In particular an interesting technology, where specialshapes of materials are produced by low pressure thermal spraying, has been applied to SMA inorder to produce foils, tubes or seals. The trend to integrate SMA elements into compositescontinues. Thin film composites with interesting properties have been developed in view of anapplication as a microactuator, consisting of Ni-Ti based SMA magnetron sputtered on metallicsubstrates. New adaptive composites have been presented whose vibration frequency can bedisplaced when prestrained Ni-Ti wires are embedded in a Kevlar fiber reinforced epoxy matrixand activated by direct electrical current. A frequency displacement of up to 50% was reported.

The session on Magnetostrictive Materials began with an overview of magnetostrictivetransducer technology illustrating both actuation and sensing applications. Composites utilizingmagnetostrictive materials in the form of powders and thin ribbons were developed for dampingand high frequency applications. The relatively new area of magnetically activated shapememory alloys in both bulk and thin film forms was introduced. Strains on the order of 6% werereported in the Ni-Mn-Ga ferromagnetic shape memory alloys.

The review on magnetorheological fluids gave us a better understanding of their practicalcommercial market. Damper applications of magnetorheo logical fluids have been expanded toinclude truck seats and bicycles. An intriguing chemomechanical actuator was introduced. Usingacrylic acid and n-stearyl acrylate based gel, which can spread fluid on water continuously, a tinywater vehicle made of soft gel was demonstrated.

All papers submitted for inclusion in the proceedings were peer-reviewed in accordance withMRS procedures. We gratefully acknowledge the contributions of the individual reviewers and thesession chairs in making this a successful symposium.

Marilyn Wun-FogleKenji UchinoYukio ItoRolf Gotthardt

March 2000




ACKNOWLEDGMENTS

Financial support for the symposium on "Smart Materials" was provided by:

Office of Naval Research




MATERIALS RESEARCH SOCIETY SYMPOSIUM PROCEEDINGS

Volume 557— Amorphous and Heterogeneous Silicon Thin Films: Fundamentals toDevices—1999, H.M. Branz, R.W. Collins, H. Okamoto, S. Quha, R. Schropp,1999, ISBN: 1-55899-464-5

Volume 558— Flat-Panel Displays and Sensors—Principles, Materials and Processes, F.R. Libsch,B. Chalamala, R. Friend, T. Jackson, H. Ohshima, 2000, ISBM: 1-55899-465-3

Volume 559— Liquid Crystal Materials and Devices, T.J. Bunning, S.H. Chen, L.C. Chien,T. Kajiyama, N. Koide, S-C.A. Lien, 1999, ISBN: 1-55899-466-1

Volume 560— Luminescent Materials, J. McKittrick, B. DiBartolo, K. Mishra, 1999,ISBN: 1-55899-467-X

Volume 561— Organic Nonlinear Optical Materials and Devices, B. Kippelen, H.S. Lackritz,R.O. Claus, 1999, ISBN: 1-55899-468-8

Volume 562— Polycrystalline Metal and Magnetic Thin Films, D.E. Laughlin, K.P. Rodbell,O. Thomas, B. Zhang, 1999, ISBN: 1-55899-469-6

Volume 563— Materials Reliability in Microelectronics IX, C.A. Volkert, A.H. Verbruggen,D.D. Brown, 1999, ISBN: 1-55899-470-X

Volume 564— Advanced Interconnects and Contacts, D.C. Edelstein, T. Kikkawa, M.C. Oztiirk,K-N. Tu, E.J. Weitzman, 1999, ISBN: 1-55899-471-8

Volume 565— Low-Dielectric Constant Materials V, J. Hummel, K. Endo, W.W. Lee, M. Mills,S-Q. Wang, 1999, ISBN: 1-55899-472-6

Volume 566— Chemical-Mechanical Polishing—Fundamentals and Challenges, S.V. Babu,S. Danyluk, M. Krishnan, M. Tsujimura, 2000, ISBN: 1-55899-473-4

Volume 567— Ultrathin SiO2 and High-K Materials for ULSI Gate Dielectrics, H.R. Huff,C.A. Richter, M.L. Green, G. Lucovsky, T. Hattori, 1999, ISBN: 1-55899-474-2

Volume 568— Si Front-End Processing—Physics and Technology of Dopant-Defect Interactions,H-J.L. Gossmann, T.E. Haynes, M.E. Law, A.N. Larsen, S. Odanaka, 1999,ISBN: 1-55899-475-0

Volume 569— In Situ Process Diagnostics and Modelling, O. Auciello, A.R. Krauss, E.A. Irene,J.A. Schultz, 1999, ISBN: 1-55899-476-9

Volume 570— Epitaxial Growth, A-L. Barabasi, M. Krishnamurthy, F. Liu, T.P. Pearsall, 1999,ISBN: 1-55899-477-7

Volume 571— Semiconductor Quantum Dots, S.C. Moss, D. Ila, H.W.H. Lee, D.J. Norris, 2000,ISBN: 1-55899-478-5

Volume 572— Wide-Bandgap Semiconductors for High-Power, High-Frequency andHigh-Temperature Applications—1999, S.C. Binari, A.A. Burk, M.R. Melloch,C. Nguyen, 1999, ISBN: 1-55899-479-3

Volume 573— Compound Semiconductor Surface Passivation and Novel Device Processing,H. Hasegawa, M. Hong, Z.H. Lu, S.J. Pearton, 1999, ISBN: 1-55899-480-7

Volume 574— Multicomponent Oxide Films for Electronics, M.E. Hawley, D.H.A. Blank, C-B. Eom,D.G. Schlom, S.K. Streiffer, 1999, ISBN: 1-55899-481-5

Volume 575— New Materials for Batteries and Fuel Cells, D.H. Doughty, L.F. Nazar, M. Arakawa,H-P. Brack, K. Naoi, 2000, ISBN: 1-55899-482-3

Volume 576— Organic/Inorganic Hybrid Materials II, L.C. Klein, L.F. Francis, M.R. DeGuire,J.E. Mark, 1999, ISBN: 1-55899-483-1

Volume 577— Advanced Hard and Soft Magnetic Materials, M. Coey, L.H. Lewis, B-M. Ma,T. Schrefl, L. Schultz, J. Fidler, V.G. Harris, R. Hasegawa, A. Inoue, M.E. McHenry,1999, ISBN: 1-55899-485-8

Volume 578— Multiscale Phenomena in Materials—Experiments and Modeling, D.H. Lassila,I.M. Robertson, R. Phillips, B. Devincre, 2000, ISBN: 1-55899-486-6

Volume 579— The Optical Properties of Materials, J.R. Chelikowsky, S.G. Louie, G. Martinez,E.L. Shirley, 2000, ISBN: 1-55899-487-4

Volume 580— Nucleation and Growth Processes in Materials, A. Gonis, P.E.A. Turchi, A.J. Ardell,2000, ISBN: 1-55899-488-2

Volume 581— Nanophase and Nanocomposite Materials III, S. Komarneni, J.C. Parker, H. Hahn,2000, ISBN: 1-55899-489-0

Volume 582— Molecular Electronics, S.T. Pantelides, M.A. Reed, J. Murday, A. Aviram, 2000,ISBN: 1-55899-490-4




MATERIALS RESEARCH SOCIETY SYMPOSIUM PROCEEDINGS

Volume 583— Self-Organized Processes in Semiconductor Alloys, A. Mascarenhas, B. Joyce,T. Suzuki, D. Follstaedt, 2000, ISBN: 1-55899-491-2

Volume 584— Materials Issues and Modeling for Device Nanofabrication, L. Merhari, L.T. Wille,K. Qonsalves, M.F. Qyure, S. Matsui, L.J. Whitman, 2000, ISBM: 1-55899-492-0

Volume 585— Fundamental Mechanisms of Low-Energy-Beam-Modified Surface Growth andProcessing, S. Moss, E.H. Chason, B.H. Cooper, T. Diaz de la Rubia, J.M.E. Harper,R. Murti, 2000, ISBM: 1-55899-493-9

Volume 586— Interfacial Engineering for Optimized Properties II, C.B. Carter, E.L. Hall,C.L. Briant, S. Nutt, 2000, ISBM: 1-55899-494-7

Volume 587— Substrate Engineering—Paving the Way to Epitaxy, D.P. Morton, D.Q. Schlom,M. Newman, D.H. Matthiesen, 2000, ISBM: 1-55899-495-5

Volume 588— Optical Microstructural Characterization of Semiconductors, J. Piqueras,T. Sekiguchi, M.S. Unlu, M.M. Kalkhoran, 2000, ISBM: 1-55899-496-3

Volume 589— Advances in Materials Problem Solving with the Electron Microscope, J. Bentley,U. Dahmen, C. Allen, I. Petrov, 2000, ISBN: 1-55899-497-1

Volume 590— Applications of Synchrotron Radiation Techniques to Materials Science V,S.R. Stock, D.L. Perry, S.M. Mini, 2000, ISBN: 1-55899-498-X

Volume 591— Mondestructive Methods for Materials Characterization, T. Matikas, N. Meyendorf,Q. Baaklini, R. Gilmore, 2000, ISBN: 1-55899-499-8

Volume 592— Structure and Electronic Properties of Ultrathin Dielectric Films on Silicon andRelated Structures, H.J. von Bardeleben, D.A. Buchanan, A.H. Edwards, T. Hattori,2000, ISBM: 1-55899-500-5

Volume 593— Amorphous and Nanostructured Carbon, J. Robertson, J.P. Sullivan, O. Zhou,T.B. Allen, B.F. Coll, 2000, ISBN: 1-55899-501-3

Volume 594— Thin Films—Stresses and Mechanical Properties VIII, R. Vinci, O. Kraft, N. Moody,P. Besser, E. Shaffer II, 2000, ISBN: 1-55899-502-1

Volume 595— GaN and Related Alloys—1999, R. Feenstra, T. Myers, M.S. Shur, H. Amano, 2000,ISBN: 1-55899-503-X

Volume 596— Ferroelectric Thin Films VIII, R.W. Schwartz, S.R. Summerfelt, P.C. Mclntyre,Y. Miyasaka, D. Wouters, 2000, ISBN: 1-55899-504-8

Volume 597— Thin Films for Optical Waveguide Devices and Materials for Optical Limiting,K. Nashimoto, B.W. Wessels, J. Shmulovich, A.K-Y. Jen, K. Lewis, R. Pachter,R. Sutherland, J. Perry, 2000, ISBN: 1-55899-505-6

Volume 598— Electrical, Optical, and Magnetic Properties of Organic Solid-StateMaterials V, S.P. Ermer, J.R. Reynolds, J.W. Perry, A.K-Y. Jen, Z. Bao, 2000,ISBN: 1-55899-506-4

Volume 599— Mineralization in Natural and Synthetic Biomaterials, P. Li, P. Calvert, R.J. Levy,T. Kokubo, C.R. Scheid, 2000, ISBN: 1-55899-507-2

Volume 600— Electroactive Polymers, Q.M. Zhang, T. Furukawa, Y. Bar-Cohen, J. Scheinbeim,2000, ISBN: 1-55899-508-0

Volume 601— Superplasticity—Current Status and Future Potential, P.B. Berbon, M.Z. Berbon,T. Sakuma, T.G. Langdon, 2000, ISBN: 1-55899-509-9

Volume 602— Magnetoresistive Oxides and Related Materials, M. Rzchowski, M. Kawasaki,A.J. Millis, M. Rajeswari, S. von Molnar, 2000, ISBM: 1-55899-510-2

Volume 603— Materials Issues for Tunable RF and Microwave Devices, Q. Jia, F.A. Miranda,D.E. Oates, X. Xi, 2000, ISBN: 1-55899-511-0

Volume 604— Materials for Smart Systems III, M. Wun-Fogle, K. Uchino, Y. Ito, R. Gotthardt,2000, ISBN: 1-55899-512-9

Volume 605— Materials Science of Microelectromechanical Systems (MEMS) Devices II,M.P. deBoer, A.H. Heuer, S.J. Jacobs, E. Peeters, 2000, ISBN: 1-55899-513-7

Volume 606— Chemical Processing of Dielectrics, Insulators and Electronic Ceramics, A.C. Jones,J. Veteran, S. Kaushal, D. Mullin, R. Cooper, 2000, ISBN: 1-55899-514-5

Volume 607— Infrared Applications of Semiconductors III, B.J.H. Stadler, M.O. Manasreh,I. Ferguson, Y-H. Zhang, 2000, ISBM: 1-55899-515-3

Volume 608— Scientific Basis for Nuclear Waste Management XXIII, R.W. Smith, D.W. Shoesmith,2000, ISBN: 1-55899-516-1

Prior Materials Research Society Symposium Proceedings available by contacting Materials Research Society




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