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Meso/Micro/NanoScale Technologies
Clayton Teague, Chief, APTD, MEL
John Evans, Chief, ISD, MEL
June 8, 1999
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Contents of Presentation• What we (MEL) have done in meso-scale area
• What is nanotechnology
• Nanotechnology is important
• Principal message
• Why is it important to industry and NIST?– Examples of industry/NIST work at all scales
• Challenges for NIST
• Long term needs at the nano-scale
• Short term needs at the meso/micro-scales
• Priorities
• Ideas
• Discussion topics
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Background
• During past 9 months, MEL has explored measurements andstandards needs of meso and micro-scale manufacturing
• Visited 20 companies
• Conducted and participated in three workshops jointly sponsoredwith DARPA and NSF
• Organized informal NIST-wide co-ordinating group formeso/micro/nano scale activities
• All feedback from these efforts points toward an explodinggrowth of nanotechnology
• We see a continuum of needs for NIST efforts from themacro-scale to the nano-scale
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What is Nanotechnology?
• Technology on the scale of atoms -100 pm- upto biomolecular systems as large as cells -10’s µm
• “Top-down” - achieving increasedminiaturization through extension of existingmicrofabrication schemes
• “Bottom-up” - capability to construct functionalcomponents, devices, and systems frombuilding blocks of atoms and molecules
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Nanotechnology Strategies
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Nanotechnology is important!
• “We’ve got to learn how to build machines, materials, and devices with theultimate finesse that life has always used: atom by atom, on the samenanometer scale as the machinery in living cells.” Richard Smalley, NobelLaureate, 1995
• “I believe nanoscience and nanotechnology will be central to the next epochof the information age …” John Armstrong, formerly Chief Scientist ofIBM, 1991
• “If I were asked for an area of science and engineering that will most likelyproduce the breakthroughs of tomorrow, I would point to nanoscale scienceand engineering.” Neal Lane, Director OSTP, 1998
• “Nanotechnology has given us the tools to make contact with the world ofthe molecule and the atom. … The possibilities to create new things appearlimitless.” Horst Stoermer, Nobel Laureate
• “… with nanodevices, … you could put all the information needed for somemajor fraction of your life (the equivalent of 1000 CDs) on your wristwatch.It’s one of those ideas that shifts the notion of how a life should be led.”George Whitesides, Prof. Of Chemistry at Harvard, 1998
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Why nano/micro/meso?
• Exciting diversity of new physical, chemical,mechanical, magnetic, and electronicphenomena
• Opportunities for dramatically new materials,products, and manufacturing processes
• Global competitive pressures and the ever-increasing demand for faster, smaller, lessexpensive products
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Principal Message
For efficient advancement of nanotechnologyneed to connect enabling technologies acrossall scales (nano, micro, meso, macro)
– knowledge of materials
– materials and device characterization methods
– fabrication technologies and processes
– measurement and test methods
– modeling & simulation tools
Materials Structures Devices Circuits Systems
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DARPADARPADefense Sciences Office
Meso-Machines - aka “The Right Size”-MachinesAir Purification/MesoSystems Inc.
25C 350C
Meso-ReactorAmbientAir
Filtered Air
Temperature
Combustion/Heat
30C
Air Cooling
4”
Nanosats/LANL
Situational Awareness LANL Vanderbilt
Cool Uniforms UIUC Battelle/PNNL
mesoscalechannel condensor
expansionvalve
flexible circuit board layer
evaporator
layered construction
< 3mm
sensor
sensor
compressorcontroller
control leads
board to board power leads
evaporator
~100 mm
~ 120 mm
All “terrain” machines GTRI Sandia
Control electronics
Fuel Valve
Restroke spring
Fuel tank
Main cylinder
Spark plug
Ignition coil
Piston foot
Water Purification MesoSystems LATA/MIOX Corp.
BWD Detection PumpsHoneywell SARCOS
William Warren/DARPA DARPADARPA
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Mesoscale and MicroscaleDevices: Not so obvious• Ball point pens, watches
• Hearing aids, pacemakers
• Fuel injectors
• RF Tags
• Surface mount electronics
• CD read heads
• Computer disk read/write heads
• Fiber optic connectors and switches
• Smart toys
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A nanomachine in a capillaryScientific American - 1988
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A micro-submarine in a vein • Made by Rapid Micro Product Development - 1999• microTEC - Germany
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10 nm Golddots on agoldsubstrate
Jonathan Mamin,IBM AlmadenResearch Center
1 µm
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Richard D. Piner, Jin Zhu, Feng Xu, Seunghun Hong, Chad A. Mirkin; Science 283, 661(1999)
Dip-Pen Nanolithography deposition ofocta-decane-thiol molecules
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Nano/micro/meso-technologychallenges for NIST
• Demanding process and measurement needs– Large number of processes
– At nano-scale, atomic level manipulation andcharacterization; scientific and engineering challenges
– Measurements need to be at least as good as what is beingmeasured; composition, dimensions, forces, energies
• Diverse nature of materials– Inorganic, Organic, Biologic, Composites
– Highly interdisciplinary
• Science, measurements, and technology rushing inparallel; all needed concurrently;
– strong participation by industry
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MACRO MESO MICRO NANO
1 m 1 mm 1 µm
INDUSTRY: Large Small Large Nascent
PRODUCTION: Serial Serial Parallel N.A.
ASSEMBLY: Serial Serial Integrated N.A.
METROLOGY: Established Holes Optical, SEM STM, AFM
RESEARCH Product and Manufacturing Applied + BasicARENAS: Engineering; Applied and Basic Research Research
Basic Research
Manufacturing Size Scales
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Meso/Micro/Nanotechnologyat NIST• Microchannel chemistry
• Microwave sensors
• Optoelectronics
• Microelectronics
• Magnetics
• Quantum devices and nanostructures
• Spintronics
• Nanobiology
• Metrology at micro and nanoscales
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Needs
• Long term: basic science for nanotechnologyand nanomaterials, measurements, standards,enabling technology.
• Short term: critical needs at mesoscale andmicroscale in metrology, in assembly andpackaging, in process science and particularlymaterials testing and materials data.
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Priority Needs for NIST
• Long Term:– Nanocharacterization: measurement methods,
metrology, data
– Nanomanipulation: manipulation and assembly
– Nanodevices: enabling technologies
– Magnetics industry support
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Measurement Needs:Molecular Spectroscopy & Imaging
•Scanning Probe Microscopies•Nearfield Scanning Optical Microscopy
•Raman, IR, visible spectroscopy atnanoscale resolution
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Multidimensional ASTEM AnalysisX-ray Spectra
0
400
800
1200
0 500 1000 1500 2000
Images
Quantitative Chemical Analysis
Multivariate Analysis
PolyPlot
Particle Morphology
EELS Spectra
Measurement Needs: Material Characterization
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Measurement Needs: Magnetics
Comparing SEMPA and MFMmeasurements on the same material
Measuringmagneticexchangecoupling effectsdue to singleatom layerthicknesschanges in films
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Measurement Needs:Dimensional Metrology
• Create a “nanoruler”directly traceable to thewavelength of light.• Nanoscale accuracy andprecision over millimeterdistances.
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MeasurementNeeds: DimensionalMetrology
• Step Height
• Pitch
• Roughness
• Linewidth
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Priority Needs for NIST
• Short Term:– Meso/micro metrology
– Assembly and packaging
– Science base for products and processes,particularly materials testing and materials data
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Diameter: 125 +1.5
-1.0µm( )
Position Tol: + 1.5 µm
Fine CMM Probe
Meso/Micro Metrology
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Meso/Micro Metrology
• NIST can provide:– Suite of optical, mechanical, electrical, and
magnetic measurement techniques for dimension,materials properties, and mechanical properties
– Calibration services for force to micro andnanoNewton levels and torque to pico N-m
• This is a “hole” in our support for industry thatis critical in the near term.
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Bookham Technology Transceiver, example of integrated optics.Photonics Spectra Feb. 1997
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Photonics Industry Problem
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Cost of Assembly
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MesoMicro Assemblyand Packaging
• NIST can provide– Information exchange
– Sensors (measurement technology) formicrorobotics and microstages
– Chemical and materials data
– Performance measures and testing methods
– Proactive role in creating interim de factostandards to help US industry and eventuallysupporting normative standards process
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Ideas from InformalCoordination Group
• Shared facilities for all Labs
• NIST serve as coordinator for distributedregional technology and fabrication center
• Leverage resources by– collaboration with NSF, DARPA, NASA, DOE
– joint research with universities
– cost share with industry
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Discussion Topics
• Needs
• Priorities
• Ideas
• Information, contacts, directions, needs,opportunities...