SHREEJEE INSTITUTE OF TECHNOLOGY AND MANAGEMENT

Micro electro mechnical system

• Guided By:- Mr. Prakash Singh Panwar

• By:- Krishna Rathor

• EC BRANCH 1ST YEAR

MEMS is a technology of very small devices. It is a combination of mechanical functions and electrical functions on the same chip

using micro fabrication technology.

MEMS are made up of components between 1 to 100 micrometers in size

MEMS devices generally range in size from 20 micrometers to a millimeter

• Actuator

• Ambient intelligence

• Energy scavengers

• Getters

• Sensor (M,T,C,R,E)

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Fabrication of MEMS

Deposition Patterning Etching

Physical Chemical Lithography Dry Wet

Photolithography

Electron beam lithography

Ion beam lithography

Ion track technology

X-ray lithography.

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Deposition –Physical deposition : Physical deposition consists of a process in which a material is

removed from a target, and deposited on a surfaceChemical deposition :

Chemical deposition techniques include chemical vapor deposition, in which a stream of source gas reacts on the substrate to grow the material desired.

Patterning –• Patterning of MEMS is the transfer of a pattern into a material. • Lithography is a widely used process in patterning of mems .• Examples of lithography are– Photolithography, Electron beam

lithography, Ion beam lithography, Ion track technology, X-ray lithography.

Etching• a

• Wet Etching :

• Wet chemical etching consists in selective removal of material by dipping a substrate into a solution that dissolves it.

• The chemical nature of this etching process provides a good selectivity

• Dry Etching :

• Dry etching can be done in three ways and they are –

a) Reactive ion etching (RIE)

b) Sputter etching

c) Vapor phase etching.

Designing an MST/MEMS device is basically an iterative process; the design is put into a simulation loop, improved and resubmitted for simulation until the design fits the demands.

It is seldom possible to use design methodologies and tools from traditional industries working with larger dimensions due to the fundamental differences related to the order of magnitude of the typical dimensions

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Metal can package

Plastic package

Ceramic package

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Applications of MEMS

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• A MEMS is a device that can beimplanted in the human body.

• MEMS surgical tools provide theflexibility and accuracy to performsurgery.

• In medicine

• BIO MEMS

• Bio-mems are used to refer to the science and technology of operating at the micro scale for biological and biomedical applications.

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• In automotives :

• As gyroscope:

Heavy use of mems is found in air bag systems, vehicle security system, inertial brake lights, rollover detection, automatic door locks etc.

Inexpensive vibrating structure gyroscopes manufactured with MEMS technology have become widely available. These are packaged similarly to other integrated circuits and may provide either analog or digital outputs.

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• In microphones:

Micro-electro mechanical system (MEMS) technology help projectiles to reach their

targets accurately.

• In military :

The mems microphone also called as microphone Chip is widely used in the present day communication world.

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• In accelerometers:

• MEMS accelerometers are widely used in cars for airbag deployment and in consumer electronics applications such as smart phones, gaming devices for sensing motion

• In sensors:

• A sensor is a device which receives and responds to a signal when touched. A micro sensor reaches a significantly higher speed and sensitivity compared with microscopic approaches.

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• Apart from these applications mems are also used in many fields in the present world

• They are used to detect earth quakes, in gas shut off, in shock and tilt sensing

• Inkjet printers and micro scanners also involve the use of mems.• Mems is used in Optical switching technology in which, switching

technology and alignment for data communications is done.

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Advantages and disadvantages

Minimize energy and materials.

Improved reproducibility.

Improved accuracy and reliability.

Increased selectivity and sensitivity.

Farm establishment requires huge investments.

Micro-components are costly compared to macro components.

Design includes very much complex procedures

Conclusion

• This enabling technology promises to create entirely new categories of products.

• MEMS will be the indispensible factor in advancing technology

• As with all emerging technologies had been predicted to revolutionize technology and our lives