modeling and tests of the electron shading effect in plasma-induced oxide damage
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Modeling and tests of the electron shading effect in plasma-induced oxide damage. The electron shading effect. Hashimoto et al. JJAP 1994. Test structures to measure local potentials & currents. Contemplated. First try. - PowerPoint PPT PresentationTRANSCRIPT
Modeling and tests of the electron shadingeffect in plasma-induced oxide damage
Si substrate
source drain
gate oxide gate
VG
VSVD
channel
The electron shading effect
Hashimoto et al. JJAP 1994
Test structures to measure local potentials & currents
PARTICLE ANALYZER
LEADS
+
--
a
Cross section along dotted line
6” aluminium plate
Holes (vias)
a
a
a
‘a’ :checking uniformity
to scope metal
collectingsurface
Insulating material
Contemplated First try
An ICP is needed to keep KTe high while n is low(to makeD >> trench size)
35.7 cm
Two loopantenna
Pyrex Top1.3 cm thick
30 cm
B-Bot Probe
21 cm
Initial Results
Isat @ 5 mtorr for different bias voltages
0
0.005
0.01
0.015
0.02
0.025
0.03
0.035
40 50 60 70 80 90 100
rf power/ Watts
Isat /
mA
C1 (9.5V)
C2 (9.5V)
C1 (135V)
C2 (135V)
0
3
6
0 40 80 120 160 200
RF power/W
Ion cu
rrent
/micr
o-A
d(5)-5mT
d(5)-10mT
d(7.5)-5mT
d(7.5)-10mT
Plasma condition
s
Ne, Te, Vp
Sheath calculations
Ion & electron fluxes
Trajectory tracing
Ions
Current
Satisfies boundary condition
?
END
modified
Potential on
boundary
Electric fields
NO
YES
Boundary recognitio
n
Input guess to Potential
on boundary
Calculation flow chart
Potential lines
-1.300E+01 1.300E+01X
0.000E+00
2.200E+01
Y
File prefix: Help7.EOUPlot type: ContourQuantity: Potential (V)
Minimum value: -6.999E+00Maximum value: 2.000E+01
-4.749E+00 -2.500E+00 -2.500E-01 2.000E+00 4.249E+00 6.499E+00 8.748E+00 1.100E+01 1.325E+01 1.550E+01 1.775E+01 2.000E+01
Current viewwindow
Modeling: ion orbits in given E-field
0 1 10 4 2 10 4 3 10 4 4 10 4 5 10 40
0.001
0.002
0.003
0.004
0.005
0.006
0.007
0.008
0.009
0.01
0.011
0.012
0.013HS
0
ynb
W0 xnb
0th iteration: Ions collected in sidewall bins (42000 ions, 0->L)
0
5
10
15
20
25
30
4 6 8 10 12 14 16 18 20 22 24 26 28 (col)30
R egion #
Convergence after many iterations
-10
0
10
20
30
40
50
60
0 1 2 3 4 5 6 7 8 9 10
Iteration #
Ions
col
lect
ed