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RESEARCH Revista Mexicana de F´ ısica 60 (2014) 257–268 MAY-JUNE 2014 Modeling surface processes and kinetics of compound layer formation during plasma nitriding of pure iron F. Le´ on C´ azares a , A. Jim´ enez Ceniceros a , J. Oseguera Pe ˜ na a,b , and F. Castillo Aranguren a,b,* a Instituto Tecnol´ ogico y de Estudios Superiores de Monterrey, Campus Estado de M´ exico, Carretera al Lago de Guadalupe Km 3.5, Atizap´ an de Zaragoza, Estado de M´ exico, 52926, M´ exico. b Trames S.A. de C.V., Calle Bohemia 11 5, Cuautitl´ an Izcalli, Estado de M´ exico, 54766, M´ exico. * e-mail: [email protected] Received 5 November 2013; accepted 25 March 2014 Different approaches have been developed concerning growth description of the compact nitride layers, especially those produced by ammo- nia. Nitriding by plasma uses a glow discharge technology to introduce nitrogen to the surface which in turn diffuses itself into the material. During this process, the ion bombardment causes sputtering of the specimen surface. This paper presents a mathematical model of compound layer formation during plasma nitriding of pure iron. The model takes into account the erosion effect at the plasma-solid interface due to sputtering. This erosion effect is computer simulated and adjusted in order to consider its contribution to the study of layer growth kinetics. The model is presented as a moving boundary diffusion problem, which considers the observed qualitative behavior of the process. Keywords: Diffusion; plasma nitriding; layer growth kinetics; sputtering. PACS: 81.65-b; 68.35.Fx; 66.30.je 1. Introduction Thermochemical nitriding treatments in several varieties of steel are widely used in industry because of their broad ap- plication range [1,2]. Nitriding can be performed with gases containing ammonia [3-5] or with cyanide salts [6], as well as by weakly ionized plasmas [1,2,7]. The nitrogen flow from the surface to the bulk material leads to allotropic transfor- mations that notably enhance the mechanical and chemical properties of the workpiece. The combination of a compact layer of nitrides, followed by a nitrogen diffusion zone in fer- rite, results in an improved wear resistance, a significant in- crease in hardness from the surface towards the interior of the part, and in many cases in an improvement of fatigue re- sistance. In general, interaction with other surfaces lead to a decrease in friction coefficients, as well as to an improved corrosion resistance [1,2]. Plasma assisted thermochemical treatments allow diffusion to occur at low temperatures com- pared to other processes, so that very low distortions are de- veloped in the pieces. Additionally, these treatments produce no pollutants [1,2,7]. Several authors have modeled the concomitant growth of compact layers of nitrides in the Fe-N thermodynamic system [8-23]. Concerning gas nitriding, taking into con- sideration the important role of the nitrogen potential, and thus its surface concentration, descriptions of the concomi- tant growth of the layers have been carried out as a quasi- steady state regime. In different models the displacement of the interfaces is assumed to be parabolic for the whole pro- cess. However, based on the moving boundary mathemat- ical approximation it is not necessary to assume a priori a parabolic regime [24-27]. At the surface of the workpiece, grain boundaries, dislo- cations, and the orientation between the grains strongly affect the nitrogen transport in the solid at the beginning of the pro- cess. The formation of compact nitride layers highly depends on the defective configuration at the vicinity of the surface. Besides, a relevant aspect in the case of plasma nitriding is the surface sputtering. Some authors have considered the ef- fects of this phenomenon in the analysis of the compact layers growth [28,29]. Considering a mass balance in each interface, taking into account a complete model of the sputtering process from the very beginning of the thermochemical treatment, whose rele- vance is particularly important in ferrite, based both on soft- ware simulations and experimental data, and without assum- ing neither a parabolic growth nor another specific behavior a priori, we have modeled the concomitant growth of compact nitride layers, as well as the nitrogen concentration profile at each phase, during ion nitriding in pure iron. The above men- tioned elements provide a novel approach to the study of the compound layer formation. 2. Statement of the problem 2.1. Surface erosion In order to accurately develop the present model it is neces- sary to previously determine the sputtering rate. However, it cannot be assumed to be constant during the whole pro- cess due to the surface evolution. Many parameters should be taken into account to describe exactly this phenomenon such as plasma characteristics, surface roughness evolution and phase transitions in which iron nitrides are formed [28],

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RESEARCH Revista Mexicana de Fısica60 (2014) 257–268 MAY-JUNE 2014

Modeling surface processes and kinetics of compound layerformation during plasma nitriding of pure iron

F. Leon Cazaresa, A. Jimenez Cenicerosa, J. Oseguera Penaa,b, and F. Castillo Arangurena,b,∗aInstituto Tecnologico y de Estudios Superiores de Monterrey, Campus Estado de Mexico,

Carretera al Lago de Guadalupe Km 3.5, Atizapan de Zaragoza, Estado de Mexico, 52926, Mexico.bTrames S.A. de C.V., Calle Bohemia 11 5, Cuautitlan Izcalli,

Estado de Mexico, 54766, Mexico.∗e-mail: [email protected]

Received 5 November 2013; accepted 25 March 2014

Different approaches have been developed concerning growth description of the compact nitride layers, especially those produced by ammo-nia. Nitriding by plasma uses a glow discharge technology to introduce nitrogen to the surface which in turn diffuses itself into the material.During this process, the ion bombardment causes sputtering of the specimen surface.This paper presents a mathematical model of compound layer formation during plasma nitriding of pure iron. The model takes into accountthe erosion effect at the plasma-solid interface due to sputtering. This erosion effect is computer simulated and adjusted in order to considerits contribution to the study of layer growth kinetics. The model is presented as a moving boundary diffusion problem, which considers theobserved qualitative behavior of the process.

Keywords: Diffusion; plasma nitriding; layer growth kinetics; sputtering.

PACS: 81.65-b; 68.35.Fx; 66.30.je

1. Introduction

Thermochemical nitriding treatments in several varieties ofsteel are widely used in industry because of their broad ap-plication range [1,2]. Nitriding can be performed with gasescontaining ammonia [3-5] or with cyanide salts [6], as well asby weakly ionized plasmas [1,2,7]. The nitrogen flow fromthe surface to the bulk material leads to allotropic transfor-mations that notably enhance the mechanical and chemicalproperties of the workpiece. The combination of a compactlayer of nitrides, followed by a nitrogen diffusion zone in fer-rite, results in an improved wear resistance, a significant in-crease in hardness from the surface towards the interior ofthe part, and in many cases in an improvement of fatigue re-sistance. In general, interaction with other surfaces lead toa decrease in friction coefficients, as well as to an improvedcorrosion resistance [1,2]. Plasma assisted thermochemicaltreatments allow diffusion to occur at low temperatures com-pared to other processes, so that very low distortions are de-veloped in the pieces. Additionally, these treatments produceno pollutants [1,2,7].

Several authors have modeled the concomitant growthof compact layers of nitrides in the Fe-N thermodynamicsystem [8-23]. Concerning gas nitriding, taking into con-sideration the important role of the nitrogen potential, andthus its surface concentration, descriptions of the concomi-tant growth of the layers have been carried out as a quasi-steady state regime. In different models the displacement ofthe interfaces is assumed to be parabolic for the whole pro-cess. However, based on the moving boundary mathemat-ical approximation it is not necessary to assumea priori aparabolic regime [24-27].

At the surface of the workpiece, grain boundaries, dislo-cations, and the orientation between the grains strongly affectthe nitrogen transport in the solid at the beginning of the pro-cess. The formation of compact nitride layers highly dependson the defective configuration at the vicinity of the surface.Besides, a relevant aspect in the case of plasma nitriding isthe surface sputtering. Some authors have considered the ef-fects of this phenomenon in the analysis of the compact layersgrowth [28,29].

Considering a mass balance in each interface, taking intoaccount a complete model of the sputtering process from thevery beginning of the thermochemical treatment, whose rele-vance is particularly important in ferrite, based both on soft-ware simulations and experimental data, and without assum-ing neither a parabolic growth nor another specific behaviorapriori , we have modeled the concomitant growth of compactnitride layers, as well as the nitrogen concentration profile ateach phase, during ion nitriding in pure iron. The above men-tioned elements provide a novel approach to the study of thecompound layer formation.

2. Statement of the problem

2.1. Surface erosion

In order to accurately develop the present model it is neces-sary to previously determine the sputtering rate. However,it cannot be assumed to be constant during the whole pro-cess due to the surface evolution. Many parameters shouldbe taken into account to describe exactly this phenomenonsuch as plasma characteristics, surface roughness evolutionand phase transitions in which iron nitrides are formed [28],

258 F. LEON CAZARES, A. JIMENEZ CENICEROS, J. OSEGUERA PENA, AND F. CASTILLO ARANGUREN

among others. This is the reason why it would be inappro-priate to compare this model with experiments reported inliterature [27] in which the conditions are not fully reported.

For practical purposes, an approximation based on differ-ent regimes is carried out taking into consideration the quali-tative description of the process given in the pertinent litera-ture [27-29].

It is possible to determine the sputtering rate for the firstinstants of the plasma nitriding process with the help of theStopping and Range of Ions in Matter(SRIM) software [29]by running a specific simulation with the ion-energy distri-bution function of the given plasma. However, this analysiswas specifically developed for pure iron. The sputtering ratedecreases as the nitrogen surface concentration increases, sothat once the nitride layer is formed and it has grown to athickness higher than the maximum ion implantation depth inthe bulk material, a steady-state regime lower than the initialrate is reached due to the allotropic transformation. This rateis modeled, for a transition period of time, through a fourthdegree polynomial to ensure that its profile is continuous andsmooth. The final value for this erosion rate was extractedfrom literature [27] concerning similar nitriding processes.

2.2. Mathematical model

The following mathematical model describes the layergrowth kinetics and nitrogen profile concentration at eachphase and diffusion zone during ion nitriding of pure iron.The model represents a moving boundary value problem.There has been an ongoing effort on the simulation of layergrowth kinetics and nitrogen concentration profiles in ion ni-triding during the last decades [27,30-32]. These researchpapers have yielded interesting results. However, usually,

severe conditions are imposed on the kinetics of the growthprocess. Meanwhile, consistency and interrelationship of theprocess data have not often been considered. These kinds ofrestrictions have frequently diminished the accuracy and sig-nificance of the obtained results.

The present model takes into account surface erosion[27,30-32] and its effect on the problem in a slightly differentway. Moreover, in the mathematical setting of the problem,the evolution of the diffusion zone is characterized through afictitious moving boundary. Both elements are introduced inorder to obtain a more accurate approach to the descriptionof the original problem.

The proposed model studies ion nitriding of pure irononce the compound layer is already formed. This takes placejust after the incubation period and before the settlement ofthe quasi-steady state of the layer growth. Hence, the plasmanitriding process of pure iron is studied right after the incu-bation of phasesε andγ ′. The growth of the concomitantlayers and the interfaces is characterized as a phenomenonthrough Fick’s Second Law, mass balance at the interfaces,and the corresponding solubility limits of each layer.

In building the mathematical model of the problem thefollowing assumptions are made:

- The surface erosion and layer growth occur in planefronts parallel to the specimen surface.

- Evolution of phases takes place under thermodynami-cal equilibrium conditions.

- Mass balance at the interfaces considers equal specificvolumes.

- Flow is one-dimensional.

FIGURE 1. Nitrogen concentration profiles, layers, interfaces and plasma-metal boundary in iron at 803.15 K.

Rev. Mex. Fis.60 (2014) 257–268

MODELING SURFACE PROCESSES AND KINETICS OF COMPOUND LAYER FORMATION DURING PLASMA. . . 259

- Diffusion coefficients are constant at each phase anddiffusion zone.

- The temperature at every point in the specimen is iden-tical during the whole process.

Notice that in the present article there is noa priori as-sumption on the parabolic layer growth.

Let t0 be the time from which layersε , γ ′ and diffusionzoneα are assumed to be formed and begin to evolve. Letus denote byξ0(t) the displacement of the surface in timet > t0 respect to its original positionx = 0 for t = 0; andξ1(t) represents theε-layer thickness fort > t0. Let ξ2(t)be the thickness of theγ ′- layer fort > t0. Also,ξ3(t) sym-bolizes the thickness of the diffusion zone at timet > t0,measured from the adjacent interface to a fictitious movingboundary which is determined by a null flux condition on it.Figure 1 illustrates the nitrogen concentration profiles, lay-ers, diffusion zone and interfaces, including the plasma-solidone.

Then, the model has the following form

∂C1

∂t= D1

∂2C1

∂x2, t > t0,

ξ0(t) < x < ξ0(t) + ξ1(t) (1)

∂C2

∂t= D2

∂2C2

∂x2, t > t0,

ξ0(t) + ξ1(t) < x < ξ0(t) + ξ1(t) + ξ2(t) (2)

∂C3

∂t= D3

∂2C3

∂x2, t > t0,

ξ0(t)+ξ1(t)+ξ2(t) < x < ξ0(t)+ξ1(t)+ξ2(t)+ξ3(t) (3)

WhereCi = Ci(x, t), i = 1, 2, 3 represent the nitro-gen concentration at depthx for time t andDi , i = 1, 2, 3are the effective diffusion coefficients at each phase and dif-fusion zone. Then, (1)-(3) express the Fick’s Second Law ateach section.

Ci(x, t0) = f(x) , i = 1, 2, 3 (4)

Express the initial nitrogen concentration for the timet0.

C1(x, t)∣∣x = ξ 0(t) + = CS (5)

Represents the boundary condition on the surface.

C1(x, t)∣∣x = (ξ 0(t)+ξ 1(t)) − = C1

min (6a)

C2(x, t)∣∣x = (ξ 0(t)+ξ 1(t)) + = C2

max (6b)

Indicate the jump at the interface betweenε andγ ′ withsolubility limits C1

min andC2max.

C2(x, t)∣∣x = (ξ 0(t)+ξ 1(t)+ξ2(t)) − = C2

min (6c)

C3(x, t)∣∣x = (ξ 0(t)+ξ 1(t)+ξ2(t)) + = C3

max (6d)

Represent the jump at the interface betweenγ ′ andαwith solubility limits C2

min andC3max.

C3(x, t)∣∣x = (ξ 0(t)+ξ 1(t)+ξ2(t)+ξ 3(t)) − = C0 (6e)

Stands for the nitrogen concentration at the fictitiousmoving boundary which separates the diffusion zone fromthe substrate.

Moreover,

ξ′1(t) =−D1

∂C1∂x

∣∣x= (ξ 0(t)+ξ 1(t)) − + D2

∂C2∂x

∣∣x= (ξ 0(t)+ξ 1(t)) +

C1min − C2

max

− ξ′0(t) (7)

ξ′2(t) =−D2

∂C2∂x

∣∣x= (ξ 0(t)+ξ 1(t)+ξ 3(t)) − + D3

∂C3∂x

∣∣x= (ξ 0(t)+ξ 1(t)+ξ3 (t)) +

C2min − C3

max

− ξ′0(t)− ξ′1(t) (8)

Whereξ′0(t) , ξ′1(t) , ξ′2(t) , ξ′3(t) stand for the deriva-tives of ξ0(t) , ξ1(t) , ξ2(t) , ξ3(t) respectively, representthe mass balance (Stefan condition) at each interface.

∂C3

∂x(x, t)

∣∣x = (ξ 0(t)+ξ 1(t)+ξ2(t)+ξ 3(t)) − = 0 (9)

Describes the flux null condition at the fictitious movingboundary which divides the diffusion zone from the substrate.This contrasts with (7) and (8), which express the mass bal-ance at the interfaces between the layers. It means that be-yond this fictitious moving border there is no nitrogen diffu-sion.

Finally,

ξi(t0) = xi, i = 1, 2, 3 (10)

Denote the thicknesses of layer and diffusion zone fortime t0.

Meanwhile, the separationξ0(t) from the original surfacecaused by the surface erosion is modeled through

ξ0(t)=

β1 t, 0 ≤ t ≤ t0

a t4+b t3+c t2+d t+e, t0 ≤ t ≤ t1

β2 t+f, t1 ≤ t

(11)

β1 denotes the sputtering rate obtained through the SRIMsimulation for the ferritic phase and remains constant in[0,t0]. This rate is assumed to be a decreasing function of

Rev. Mex. Fis.60 (2014) 257–268

260 F. LEON CAZARES, A. JIMENEZ CENICEROS, J. OSEGUERA PENA, AND F. CASTILLO ARANGUREN

time in [t0 , t1] until it becomes constant again fromt1 on, ata sputtering rateβ2. The decreasing section ofξ0(t) is mod-eled through a fourth order polynomial fit in[t0 , t1], whichrepresents the behavior of the surface erosion. This fourthorder polynomial enables a smooth transition of the surfacedisplacement for the elapsing time between sputtering ratesβ1 andβ2.

3. Solution of the mathematical model

In such a way, the model (1)-(11) describes the layer anddiffusion zone growth kinetics in the transient stage: lay-ers are completely formed and evolve to a quasi-steady statefollowing a moving boundary diffusion pattern inCi(x, t),i = 1, 2, 3, where Stefan conditions are prescribed at theinterfacesξ0(t) + ξ1(t), ξ0(t) + ξ1(t) + ξ2(t) . The solutionto problem (1)-(11) is sought using Goodman’s method (heatbalance integral method HBIM [33-35]).

Concentration profilesCi(x, t) , i = 1, 2, 3 are repre-sented by

C1(x, t) = C1min + a1(t)(ξ0(t)

+ ξ1(t)− x) + b1(t)(ξ0(t) + ξ1(t)− x)2 (12)

ξ0(t) < x < ξ0(t) + ξ1(t) , t > t0

C2(x, t) = Cmin2 + a2(t)(ξ0(t) + ξ1(t) + ξ2(t)− x)

+ b2(t)(ξ0(t) + ξ1(t) + ξ2(t)− x)2 (13)

ξ0(t) + ξ1(t) < x < ξ0(t) + ξ1(t) + ξ2(t) , t > t0

C3(x, t) = Cmax3 + a3(t)(ξ0(t) + ξ1(t) + ξ2(t)− x)

+ b3(t)(ξ0(t) + ξ1(t) + ξ2(t)− x)2 (14)

ξ0(t) + ξ1(t) + ξ2(t) < x < ξ0(t) + ξ1(t)

+ ξ2(t) + ξ3(t) , t > t0

It meansCi(x, t), i = 1, 2, 3 are to be found as analyti-cal approximate solutions to (1)-(11).

The unknowns are nowai(t), bi(t) , ξi(t) , i = 1, 2, 3.Note that statements (12)-(14) guarantee the fulfillment of thejump conditions (6a), (6c) and (6d) at the interfaces. Also,from the decreasing behavior ofCi(x, t), i = 1, 2, 3 asfunctions of the space variable for fixed times and Fick’s Sec-ond Law it follows thatai(t) > 0, bi(t) > 0 i = 1, 2, 3.

Conditions (5), (6b) y (6d) become

C1min + a1(t)ξ1(t) + b1(t)ξ2

1(t) = CS (15)

C2min + a2(t)ξ2(t) + b2(t)ξ2

2(t) = C2max (16)

C3max − a3(t)ξ3(t) + b3(t)ξ2

3(t) = C0 (17)

Null flux condition (9) takes the form

a3(t)− 2b3(t) ξ3(t) = 0 (18)

The use of Stefan conditions at each interface yield

a1(t)C1

min − C2max

(D1a1(t)−D2a2(t)

− 2D2b2(t)ξ2(t))

= 2D1b1(t) (19)

a2(t)C2

min − C3max

(D2a2(t)−D3a3(t)) = 2D2b2(t) (20)

Mass balance integrals at each phase and diffusion zoneproduce the following three non-linear ODE in the same un-knowns as the previous polynomials equations.

(CS − C1

min

)ξ′0(t) +

(12

a′1(t) +

13b′1 (t) ξ1(t)

)ξ21(t)

+ (a1(t) + b1(t) ξ1(t)) ξ1(t) ξ′1(t) = 2D1b1ξ1(t) (21)

(C2

max − C2min

) (ξ′0(t) + ξ

′1(t)

)

+(

12a′2(t) +

13b′2(t)ξ2(t)

)ξ22(t)

+ (a2(t) + b2(t)ξ2(t)) ξ2(t)ξ′2(t) = 2D2b2(t)ξ2(t) (22)

(C3

max − C0

) (ξ′0(t) + ξ

′1(t) + ξ

′2(t) + ξ

′3(t)

)

−(

12a′3(t)−

13b′3(t)ξ3(t)

)ξ23(t)

− (a3(t)− b3(t)ξ3(t)) ξ3(t)ξ′3(t) = 2D3b3(t)ξ3(t) (23)

Equations (15)-(23) form a system of differential-algebraic equations (DAE) inai(t), bi(t), ξi(t), i = 1, 2, 3.A detailed deduction of this system is found in the Appendix.In solving the resulting DAE system, initial conditions forthe unknown are to be prescribed. Initial conditions forξi(t),i = 1, 2, 3 could be obtained using experimental results,once the layers are already formed at timet0. Meanwhile, ini-tial conditions for the coefficientsai(t), bi(t), i = 1, 2, 3 attime t0 could be found from the polynomial equations (15)-(20).

In such a way, the initial conditions found as indicatedabove, guarantee that the solutions (12)-(14) approximatelysatisfy the initial condition (4) of the original problem.

4. Numerical results and discussion

A strategy for solving the DAE system is to differentiate thepolynomial equations (15) - (20) in order to get ordinary dif-ferential equations in the same unknowns. The new equationsand the remaining three (21)-(23) form an ODE system sub-jected to the corresponding initial conditions, which is nu-merically solved.

Rev. Mex. Fis.60 (2014) 257–268

MODELING SURFACE PROCESSES AND KINETICS OF COMPOUND LAYER FORMATION DURING PLASMA. . . 261

FIGURE 2. (a) Nitrogen concentration profiles fort = 240 s andt = 36,000 s. (b) Log-log plot of a), which provides a better view of thediffusion zone.

The experimental values ofCS , Cimax, Ci

min, Di,i = 1, 2, 3 are taken from [36]:

CS = 27.211 at. %, C1min = 24.460 at. %,

C2max = 19.959 at. %, C2

min = 19.649 at. %

C3max = 0.28 at. %,

C0 = 0 at. %,

D1 = 1.7385× 10−14 m2/s,

D2 = 1.1525× 10−13 m2/s,

D3 = 5.6646× 10−12 m2/s

Rev. Mex. Fis.60 (2014) 257–268

262 F. LEON CAZARES, A. JIMENEZ CENICEROS, J. OSEGUERA PENA, AND F. CASTILLO ARANGUREN

FIGURE 3. Nitrogen concentration profiles for each phase at different times. (a)ε phase fort = 2, 4, 6, 8, 10 h. (b)γ’ phase fort = 2, 4, 6,8, 10 h. (c)α phase fort = 2, 6, 10 h..

Rev. Mex. Fis.60 (2014) 257–268

MODELING SURFACE PROCESSES AND KINETICS OF COMPOUND LAYER FORMATION DURING PLASMA. . . 263

Computer simulations allow to set

t0 = 120 s, ξ 1(120) = 10−7 m,

ξ 2(120) = 10−6 m, ξ 3(120) = 10−3 m,

β1 = 3.998× 10−10 m/s

β2 = 1.3889× 10−10 m/s

The initial conditions are found to be:

a1(120) = 2.24347× 107, a2(120) = 307773 ,

a3(120) = 560

b1(120) = 5.07531× 1013, b2(120) = 2.22658× 109,

b3(120) = 280000

Computing was performed on a PC at 2.4 GHz usingMathematica version 8. The results of the numerical experi-ments yield:

- The numerical solution of the ODE system initial prob-lem associated to equations (15)-(23) with the pre-scribed initial conditions.

- The behavior of the layer thicknesses and interfaces.

- The nitrogen concentration profiles at each phase anddiffusion zone.

- Curve fitting of the layers and diffusion zone thick-nesses.

FIGURE 4. Evolution of the different interfaces depths. (a) Layer interfaces and sputtered depth. (b) Layer interfaces, fictitious boundaryand the sputtered depth in a log-log plot.

Rev. Mex. Fis.60 (2014) 257–268

264 F. LEON CAZARES, A. JIMENEZ CENICEROS, J. OSEGUERA PENA, AND F. CASTILLO ARANGUREN

Figure 2 shows the nitrogen concentration profiles in lay-ersε, γ’ and diffusion zone for the variable erosion regimeproposed in this work. It is observed the expected behaviorfor different times according to reference data at 530◦C. InFig. 2b, log-log curves allow to appreciate the thickness ofthe diffusion zone.

In Fig. 3 the evolution of the concentration profiles isshown for each layer and diffusion zone at different times.The qualitative behavior of the concentration profiles is sim-ilar to the observed response for different nitriding regimes(with or without the sputtering phenomenon).

Figure 4 exhibits the erosion profile and its influence inthe kinetics of the interfaces. From figure 4b it is significantto point out that the behavior of the fictitious boundary, whichdivides the diffusion zone from the substrate as introduced inthe model following Goodman’s method, is not parabolic.

Figure 5 shows the profiles of the compound layerthickness for different sputtering rate regimes: no erosion,Marciniak’s constant, variable (proposed in this paper), andSRIM constant erosion rates. The thickness kinetics of thecompound layer under variable erosion rate, as proposed inthis work, is bounded by the thickness kinetics of the comp-

FIGURE 5. Evolution of the nitride compound layer thickness with different sputtering rate regimes: no erosion, Marciniak’s constant,variable and SRIM’s constant erosion rate for (a) short times and (b) large times.

Rev. Mex. Fis.60 (2014) 257–268

MODELING SURFACE PROCESSES AND KINETICS OF COMPOUND LAYER FORMATION DURING PLASMA. . . 265

ound layer modeled with constant erosion rates upon wherethe present model is built. As it can be seen, for long periodsof time the variable sputtering rate effect becomes negligi-ble as the compound layer thickness clearly approaches theMarciniak’s constant erosion profile. It is worth to mentionthat this figure exhibits that the compound layer thicknessesconsidering sputtering are significantly narrower than the onewith no erosion. The noticed behavior is in full agreementwith the conclusion of other authors [20].

5. Conclusions

The layer growth kinetics during plasma nitriding of pure ironcould be studied considering different stages associated to theformation a coalescence ofγ ′−Fe 4 N1−x y ε−Fe 2 N1−z

precipitates.The present work addresses the description of the layer

growth kinetics and nitrogen concentration profiles once thelayers are formed, and evolve following a moving boundarypattern. The research presents

- A correctly stated mathematical model of the problem,which takes into account the surface erosion.

- The adequacy and consistency of the mathematicalmodel with the mass transfer mechanism (Fick’s Sec-ond Law and mass-balance at the interfaces) and therelevant information of the problem (diffusion coeffi-cients and nitrogen solubility limits.

- The study and solution of the mathematical model us-ing Goodman’s method (heat balance integral method).

- The approximate analytical solutions are obtainedwithout a priori assumptions on the layer growth,avoiding the use of pre-established solutions of the dif-fusion equations which are not directly related to thestudied problem.

- The results of the present model qualitatively agreewith the research of other authors [20,30-32]. Never-theless, in the present work the modeling of the sput-tering rate is based on a computer simulation of theionic implantation through SRIM. This approach en-riches the study of the layer kinetics during ion nitrid-ing of pure iron.

- The curve fitting of the obtained layer growth exposesthe qualitative behavior observed by other authors [20]:“initially the nitride layer grows rapidly, but the ratefalls below the parabolic law after longer times”.

The consideration of the above mentioned elements pro-vides a novel and original approach to the study of the com-pound layer formation and kinetics during plasma nitridingof pure iron. The obtained results allow further research, andqualitative and quantitative understanding of nitriding pro-cesses.

Appendix

Next, a detailed deduction of (19)-(23) is presented. See also[24].

From condition 6a) it follows

dC1(x, t)dt

|x=(ξ0(t)+ξ1(t))−

=∂C1(x, t)

∂x(ξ′0(t) + ξ′1(t))|x= (ξ 0 (t)+ξ 1 (t)) −

+∂C1 (x, t)

∂t x=(ξ0(t)+ξ1(t))− = 0

Which yields

−a1(t) (ξ′0(t) + ξ′1(t)) + 2D 1b1(t) = 0 (A.1)

On the other hand, the mass balance condition (7) leadsto

ξ′1(t) =1

C 1min − C 2

max

[D 1a1(t)

−D 2

(a2(t) + 2b2 ξ

(2t)

) ]− ξ′0(t) (A.2)

Combining (A1) with (A2) the algebraic Eq. (19) is ob-tained

a1(t)C1

min − C2max

(D1a1(t)−D2a2(t)

− 2D2b2(t)ξ2(t))

= 2D1b1(t) (A.3)

Analogously, from 6c) and mass balance condition (8),the algebraic Eq. (20) can be inferred

a2(t)C2

min − C3max

(D2a2(t)−D3a3(t)) = 2D2b2(t) (A.4)

ODE (21)-(23) are deducted using mass balance integralalong each phase and diffusion zone.

Then, Fick’s Second Law in phaseε, whereξ0(t) < x <ξ0(t) + ξ1(t), is accomplished in average as

ξ 0(t)+ξ 1(t)∫

ξ 0(t)

∂C 1

∂tdx =

ξ 0(t)+ξ 1(t)∫

ξ 0(t)

D1∂2C 1

∂x2dx (A.5)

This mass balance integral can be calculated as follows.

ξ 0(t)+ξ 1(t)∫

ξ 0(t)

∂C 1

∂tdx

=d

dt

ξ 0(t)+ξ 1(t)∫

ξ 0(t)

C1(x, t) dx

− C1min(ξ′0(t) + ξ′1(t)) + CS ξ′0(t) (A.6)

Rev. Mex. Fis.60 (2014) 257–268

266 F. LEON CAZARES, A. JIMENEZ CENICEROS, J. OSEGUERA PENA, AND F. CASTILLO ARANGUREN

Which, employing (12), turns into

ξ 0(t)+ξ 1(t)∫

ξ 0(t)

∂C 1

∂tdx =

(a′1(t)

2+

b′1(t)3

ξ1(t))

ξ21(t) + (a1(t) + b1(t)ξ1(t)) ξ1(t) ξ′1(t) +

(CS − C1

min

)ξ′0(t) (A.7)

Furthermoreξ 0(t)+ξ 1(t)∫

ξ 0(t)

D1∂2C 1

∂x2dx = D1

[∂C1(x, t)

∂x| x = (ξ 0(t)+ξ 1(t))

− − ∂C1(x, t)∂x

|x = ξ 0(t) +

](A.8)

Again, thanks to (12), it leads to

ξ 0(t)+ξ 1(t)∫

ξ 0(t)

D1∂2C 1

∂x2dx = D1 [−a1(t) + a1(t) + 2b1(t)ξ1(t)] = 2D1b1(t)ξ1(t) (A.9)

Combining (A7) with (A9) the referred ODE (21) is obtained

(CS − C1

min

)ξ′0(t) +

(12

a′1(t) +

13b′1 (t) ξ1(t)

)ξ21(t) + (a1(t) + b1(t) ξ1(t)) ξ1(t) ξ1

′(t) = 2D1b1ξ1(t) (A.10)

Fick’s Second Law in phaseγ ′, whereξ0(t) + ξ1(t) < x < ξ0(t) + ξ1(t) + ξ2(t), in average yields

ξ 0(t)+ξ 1(t)+ξ 2(t)∫

ξ 0(t)+ξ 1(t)

∂C 2

∂tdx =

ξ 0(t)+ξ 1(t)+ξ 2(t)∫

ξ 0(t)+ξ 1(t)

D2∂2C 2

∂x2dx (A.11)

Similarly

ξ 0(t)+ξ 1(t)+ξ 2(t)∫

ξ 0(t)+ξ 1(t)

∂C 2

∂tdx =

d

dt

ξ 0(t)+ξ 1(t)+ξ 2(t)∫

ξ 0(t)+ξ 1(t)

C2(x, t) dx

− C2min (ξ′0(t) + ξ′1(t) + ξ′2(t)) + C2

max (ξ′0(t) + ξ′1(t)) (A.12)

Now, thanks to expressionC2(x, t) in (13) it follows that

ξ 0(t)+ξ 1(t)+ξ 2(t)∫

ξ 0(t)+ξ 1(t)

∂C 2

∂tdx =

(a′2(t)

2+

b′2(t)3

ξ2(t))

ξ22(t)

+ (a2(t) + b2(t)ξ2(t)) ξ2(t) ξ′2(t) +(C2

max − C2min

)( ξ′0(t) + ξ′1(t) ) (A.13)

Moreoverξ 0(t)+ξ 1(t)+ξ 2(t)∫

ξ 0(t)+ξ 1(t)

D2∂2C 2

∂x2dx = D2

[∂C2(x, t)

∂x| x = (ξ 0(t)+ξ 1(t)+ξ 2(t))

− − ∂C2(x, t)∂x

|x =( ξ 0(t)+ξ 1(t) )+

](A.14)

Which can be rewritten, employing (13), as

ξ 0(t)+ξ 1(t)+ξ 2(t)∫

ξ 0(t)+ξ 1(t)

D2∂2C 2

∂x2dx = D2 [−a2(t) + a2(t) + 2b2(t)ξ2(t)] = 2D2b2(t)ξ2(t) (A.15)

Now, the combination of (A13) y (A15) leads to ODE (22)

(C2

max − C2min

) (ξ′0(t) + ξ

′1(t)

)+

(12a′2(t) +

13b′2(t)ξ2(t)

)ξ22(t)

+ (a2(t) + b2(t)ξ2(t)) ξ2(t)ξ′2(t) = 2D2b2(t)ξ2(t) (A.16)

Rev. Mex. Fis.60 (2014) 257–268

MODELING SURFACE PROCESSES AND KINETICS OF COMPOUND LAYER FORMATION DURING PLASMA. . . 267

Finally at the diffusion zone, whereξ0(t) + ξ1(t) < x < ξ0(t) + ξ1(t) + ξ2(t) the mass balance integral becomes

ξ 0(t)+ξ 1(t)+ξ 2(t)+ξ 3(t)∫

ξ 0(t)+ξ 1(t)+ξ 2(t)

∂C 3

∂tdx =

ξ 0(t)+ξ 1(t)+ξ 2(t)+ξ 3(t)∫

ξ 0(t)+ξ 1(t)+ξ 2(t)

D3∂2C 3

∂x2dx (A.17)

Analogously

ξ 0(t)+ξ 1(t)+ξ 2(t)+ξ 3(t)∫

ξ 0(t)+ξ 1(t)+ξ 2(t)

∂C 3

∂tdx =

d

dt

ξ 0(t)+ξ 1(t)+ξ 2(t)+ξ 3(t)∫

ξ 0(t)+ξ 1(t)+ξ 2(t)

C3(x, t) dx

− C0 (ξ′0(t) + ξ′1(t) + ξ′2(t) + ξ′3(t)) + C2max (ξ′0(t) + ξ′1(t) + ξ′2(t)) (A.18)

And the expression (14) ofC3(x, t) produces

ξ 0(t)+ξ 1(t)+ξ 2(t)+ξ 3(t)∫

ξ 0(t)+ξ 1(t)+ξ 2(t)

∂C 3

∂tdx =

(−a′3(t)

2+

b′3(t)3

ξ3(t))

ξ23(t)

+ (−a3(t) + b3(t)ξ3(t)) ξ3(t) ξ′3(t) +(C3

max − C0

)( ξ′0(t) + ξ′1(t) + ξ′2(t) + ξ′3(t) ) (A.19)

On the other hand

ξ 0(t)+ξ 1(t)+ξ 2(t)+ξ 3(t)∫

ξ 0(t)+ξ 1(t)+ξ 2(t)

D3∂2C 3

∂x2dx = D3

×[∂C3(x, t)

∂x| x = (ξ 0(t)+ξ 1(t)+ξ 2(t)+ξ 3(t))

− − ∂C3(x, t)∂x

|x =( ξ 0(t)+ξ 1(t)+ξ 2(t) )+

]

And the use of (14) gives

ξ 0(t)+ξ 1(t)+ξ 2(t)+ξ 3(t)∫

ξ 0(t)+ξ 1(t)+ξ 2(t)

D3∂2C 3

∂x2dx = D3 [−a3(t) + a3(t) + 2b3(t)ξ3(t)] = 2D3b3(t)ξ3(t) (A.20)

In the end, ODE (23) is obtained from (A19) y (A20)

(C3

max − C0

) (ξ′0(t) + ξ

′1(t) + ξ

′2(t) + ξ

′3(t)

)−

(12a′3(t)−

13b′3(t)ξ3(t)

)ξ23(t)

− (a3(t)− b3(t)ξ3(t)) ξ3(t)ξ′3(t) = 2D3b3(t)ξ3(t) (A.21)

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