（ADV/2018-2/1200）

Glass Business UnitShinagawa Intercity Tower C, 2-15-3, Konan, Minato-ku, Tokyo 108-6290, JapanTel +81-3-6433-3977 FAX +81-3-6433-3757http://www.nikon.co.jp/glass/Glass.Sales@nikon.com

N.B. Export of the products* in this catalog is controlled under the Japanese Foreign Exchange and Foreign Trade Law. Appropriate export procedure shall be required in case of export from Japan. *Products: Hardware and its technical information (including software)

■ NICF_P1-2

NICF Series ADVANTAGESHigh laser durability

Nikon’s strict process control and use of ultra-high-purity raw materials during the calcium fluoride growing process results

in increased durability to long-term exposure to high-power excimer lasers.

High quality crystals

Nikon is a leading supplier of large-sized, high-quality single crystal calcium fluoride. With our continuous process improvement cycle and

optimized growing conditions, we can produce material with minimal lattice and structural defects, resulting in increased laser durability.

High refractive index homogeneity

Nikon’s proprietary annealing process yields unsurpassed refractive index homogeneity.

NICF Transmittance rangeF2

157 nm ArF

193 nm KrF

248 nm i-line

365 nm g-line

436 nm

NICF-VNICF-ANICF-UNICF-S

NICF Available range of homogeneity< 0.5

NICF-VNICF-ANICF-UNICF-S

< 1 < 1.5 < 2 < 3 < 4 < 5 < 10 < 40 Not specified

at 633 nm

-

-

-

-

t

s

r

C

C'

He-Ne

D

d

e

F

F'

g

h

i

-

-

-

-

KrF

-

ArF

-

2.32542

1.97002

1.52958

1.0603

1.01398

0.85211

0.70652

0.65627

0.64385

0.63280

0.58929

0.58756

0.54608

0.48613

0.47999

0.43584

0.40466

0.36502

0.33415

0.31270

0.29673

0.2804

0.2484

0.19416

0.1934

0.18489

1.42211

1.42401

1.42613

1.42850

1.42879

1.43002

1.43166

1.43245

1.43267

1.43288

1.43380

1.43384

1.43492

1.43700

1.43726

1.43946

1.44148

1.44488

1.44848

1.45170

1.45463

1.45823

1.46786

1.50059

1.50133

1.51052　

Wavelength[µm] Refractive Indicies

Conditions： temperature：22.5 ℃ humidity：50 % atmospheric pressure：1013.25 hPa

※Each property is shown as a typical value.

nd 1.43384 νd 95.26

ne 1.43492 νe 94.72

P1

P2

P3

P4

Q1

Q2

Q3

Q4

5.81797965E-01

3.73232342E-01

8.36771960E-02

2.36293749E+00

2.47744200E-03

1.03202600E-02

1.03234730E-02

7.38225998E+02

Dispersion Coefficients ＊7

Ps,t

PC,s

Pd,C

Pe,d

Pg,F

Pi,h

P's,t

P'C',s

P'd,C'

P'e,d

P'g,F'

P'i,h

0.2697

0.5332

0.3046

0.2388

0.5389

0.7465

0.2675

0.5769

0.2540

0.2368

0.4783

0.7404

Relative Partial Dispersions

℃

- 40 ~ - 20

+20 ~ +40

+60 ~ +80

-10.6

-11.5

-12.1

-10.3

-11.2

-11.8

- 9.8

-10.6

-11.2

1060.0 nm 546.23 nm 365.12 nm

Effect of Temperature on Refractive Index

Absolute Δn/ΔT [10-6/℃]

D0

D1

D2

- 3.16E- 05

- 2.05E- 08

9.02E- 13

E0

E1

λ /µm

4.32E- 07

2.04E- 10

1.15E- 01

Constants for Absolute Δn/ΔT ＊8

F - C

F'- C'

0.004554

0.004592

Partial Dispersions

ΔP C,t

ΔP C,s

ΔP F,e

ΔP g,F

ΔP i,g

-0.1940

-0.0918

0.0183

0.0553

0.2642

Abnormal Dispersions

Optical Properties

Cleavage Plane

Molecular Weight

Climatic Resistance

CR(S)

Acid Resistance by Surface Method

AR(S)

Acid Resistance by Powder Method

AR(P)

Phosphate Resistance

PR(S)

Solubility in Water (20℃)

Dielectric Constants (27℃) ＊1

εr

[Class] ＊4

[Class]

[Class] ＊5

[Class] ＊6

[g/l] ＊1

(111)

78.08

1

3

1

1

0.016

6.81

Crystal Structure Cubic, Fluorite type

Chemical/Electrical Properties

Expansion Coefficient

Thermal Conductivity(20℃)

Melting Point

Specific Heat Capacity

Thermal Diffusivity

α

λ

-

c

κ

[10-6 /℃]

[10-6 /℃]

[10-6 /℃]

[W/m・K]

[℃]

[J/g・K]

[10-7m2/sec]

18.4

18.4

20.8

9.70

1360

0.893

35.60

Thermal Properties

Young's Modulus

Poisson's Ratio

Knoop Hardness

Abrasion Hardness

Shear Modulus

Compressive Modulus

Mohs Hardness

Stress Optical Coefficient

(q11-q12) @193nm

[GPa]

[kgf/mm2]＊2

＊3

[GPa]

[GPa]

＊1

[10-12/Pa]

E

μ

HK

A

G

-

-

-

146<100>

101<110>

91<111>

0.21

164

301

34.6

83.8

4

1.77

Mechanical Properties

Specific Gravity 3.18Homogeneity［ppm］

Nikon NICF Series Calcium Fluoride

Glass Business Unit

Grade

NICF-V

NICF-A

NICF-U

NICF-S

≧99.5（at 157 nm）≧99.8（at 193 nm）≧99.8（at 248 nm）

ー

Internal transmittance [%]Sample thickness：10 mm

A

B

C

ー

Laser durability

VUV region, ArF excimer laser（193 nm）ArF excimer laser （193 nm）KrF excimer laser （248 nm）

UV region, Visible region, IR region

Recommended wavelengthBirefringence

※ Crystal orientation to be specified by the customer, <111>, random and custom orientations are available upon request.※ Values stated above are valid for material with a diameter of 30 - 260 mm and a thickness of 5 - 35 mm. Material outside this range will be regarded as custom.※ Laser durability is classified into three groups, A, B and C, with NICF-V represents the highest grade of material available.

2 - 20 nm/cm

on request

ー

Optical grades

Transmittance dataTransmittance data

Properties of NICF-V, A, U (Nikon Calcium Fluoride)

℃)

℃)

℃)

+70

+25

+300

~

~

~

- 30

0

+20

(

(

(

Inte

rnal

tran

smit

tan

ce　［

%］

－ VUV-UV region －

Wavelength ［nm］Thickness:10 mm100 150 200 250 300

0

20

40

60

80

100

NICF-VNICF-ANICF-U

Wavelength ［nm］Thickness:10 mm

Inte

rnal

tran

smit

tan

ce　［

%］

－ VUV-VIS-IR region －

0 2000 4000 6000 8000 10000 12000

100

80

60

40

20

0

NICF-V,-A,-U,-S

■ NICF_P1-2

NICF Series ADVANTAGESHigh laser durability

Nikon’s strict process control and use of ultra-high-purity raw materials during the calcium fluoride growing process results

in increased durability to long-term exposure to high-power excimer lasers.

High quality crystals

Nikon is a leading supplier of large-sized, high-quality single crystal calcium fluoride. With our continuous process improvement cycle and

optimized growing conditions, we can produce material with minimal lattice and structural defects, resulting in increased laser durability.

High refractive index homogeneity

Nikon’s proprietary annealing process yields unsurpassed refractive index homogeneity.

NICF Transmittance rangeF2

157 nm ArF

193 nm KrF

248 nm i-line

365 nm g-line

436 nm

NICF-VNICF-ANICF-UNICF-S

NICF Available range of homogeneity< 0.5

NICF-VNICF-ANICF-UNICF-S

< 1 < 1.5 < 2 < 3 < 4 < 5 < 10 < 40 Not specified

at 633 nm

-

-

-

-

t

s

r

C

C'

He-Ne

D

d

e

F

F'

g

h

i

-

-

-

-

KrF

-

ArF

-

2.32542

1.97002

1.52958

1.0603

1.01398

0.85211

0.70652

0.65627

0.64385

0.63280

0.58929

0.58756

0.54608

0.48613

0.47999

0.43584

0.40466

0.36502

0.33415

0.31270

0.29673

0.2804

0.2484

0.19416

0.1934

0.18489

1.42211

1.42401

1.42613

1.42850

1.42879

1.43002

1.43166

1.43245

1.43267

1.43288

1.43380

1.43384

1.43492

1.43700

1.43726

1.43946

1.44148

1.44488

1.44848

1.45170

1.45463

1.45823

1.46786

1.50059

1.50133

1.51052　

Wavelength[µm] Refractive Indicies

Conditions： temperature：22.5 ℃ humidity：50 % atmospheric pressure：1013.25 hPa

※Each property is shown as a typical value.

nd 1.43384 νd 95.26

ne 1.43492 νe 94.72

P1

P2

P3

P4

Q1

Q2

Q3

Q4

5.81797965E-01

3.73232342E-01

8.36771960E-02

2.36293749E+00

2.47744200E-03

1.03202600E-02

1.03234730E-02

7.38225998E+02

Dispersion Coefficients ＊7

Ps,t

PC,s

Pd,C

Pe,d

Pg,F

Pi,h

P's,t

P'C',s

P'd,C'

P'e,d

P'g,F'

P'i,h

0.2697

0.5332

0.3046

0.2388

0.5389

0.7465

0.2675

0.5769

0.2540

0.2368

0.4783

0.7404

Relative Partial Dispersions

℃

- 40 ~ - 20

+20 ~ +40

+60 ~ +80

-10.6

-11.5

-12.1

-10.3

-11.2

-11.8

- 9.8

-10.6

-11.2

1060.0 nm 546.23 nm 365.12 nm

Effect of Temperature on Refractive Index

Absolute Δn/ΔT [10-6/℃]

D0

D1

D2

- 3.16E- 05

- 2.05E- 08

9.02E- 13

E0

E1

λ /µm

4.32E- 07

2.04E- 10

1.15E- 01

Constants for Absolute Δn/ΔT ＊8

F - C

F'- C'

0.004554

0.004592

Partial Dispersions

ΔP C,t

ΔP C,s

ΔP F,e

ΔP g,F

ΔP i,g

-0.1940

-0.0918

0.0183

0.0553

0.2642

Abnormal Dispersions

Optical Properties

Cleavage Plane

Molecular Weight

Climatic Resistance

CR(S)

Acid Resistance by Surface Method

AR(S)

Acid Resistance by Powder Method

AR(P)

Phosphate Resistance

PR(S)

Solubility in Water (20℃)

Dielectric Constants (27℃) ＊1 εr

[Class] ＊4

[Class]

[Class] ＊5

[Class] ＊6

[g/l] ＊1

(111)

78.08

1

3

1

1

0.016

6.81

Crystal Structure Cubic, Fluorite type

Chemical/Electrical Properties

Expansion Coefficient

Thermal Conductivity(20℃)

Melting Point

Specific Heat Capacity

Thermal Diffusivity

α

λ

-

c

κ

[10-6 /℃]

[10-6 /℃]

[10-6 /℃]

[W/m・K]

[℃]

[J/g・K]

[10-7m2/sec]

18.4

18.4

20.8

9.70

1360

0.893

35.60

Thermal Properties

Young's Modulus

Poisson's Ratio

Knoop Hardness

Abrasion Hardness

Shear Modulus

Compressive Modulus

Mohs Hardness

Stress Optical Coefficient

(q11-q12) @193nm

[GPa]

[kgf/mm2]＊2

＊3

[GPa]

[GPa]

＊1

[10-12/Pa]

E

μ

HK

A

G

-

-

-

146<100>

101<110>

91<111>

0.21

164

301

34.6

83.8

4

1.77

Mechanical Properties

Specific Gravity 3.18Homogeneity［ppm］

Nikon NICF Series Calcium Fluoride

Glass Business Unit

Grade

NICF-V

NICF-A

NICF-U

NICF-S

≧99.5（at 157 nm）≧99.8（at 193 nm）≧99.8（at 248 nm）

ー

Internal transmittance [%]Sample thickness：10 mm

A

B

C

ー

Laser durability

VUV region, ArF excimer laser（193 nm）ArF excimer laser （193 nm）KrF excimer laser （248 nm）

UV region, Visible region, IR region

Recommended wavelengthBirefringence

※ Crystal orientation to be specified by the customer, <111>, random and custom orientations are available upon request.※ Values stated above are valid for material with a diameter of 30 - 260 mm and a thickness of 5 - 35 mm. Material outside this range will be regarded as custom.※ Laser durability is classified into three groups, A, B and C, with NICF-V represents the highest grade of material available.

2 - 20 nm/cm

on request

ー

Optical grades

Wavelength ［nm］Thickness:10 mm

Inte

rnal

tran

smit

tan

ce　［

%］

Transmittance data　　－ VUV-UV region －

100 150 200 250 3000

20

40

60

80

100

NICF-VNICF-ANICF-U

Properties of NICF-V, A, U (Nikon Calcium Fluoride)

℃)

℃)

℃)

+70

+25

+300

~

~

~

- 30

0

+20

(

(

(

（ADV/2018-12）

Glass Business UnitShinagawa Intercity Tower C, 2-15-3, Konan, Minato-ku, Tokyo 108-6290, JapanTel +81-3-6433-3977 FAX +81-3-6433-3757https://www.nikon.co.jp/glass/Glass.Sales@nikon.com

N.B. Export of the products* in this catalog is controlled under the Japanese Foreign Exchange and Foreign Trade Law. Appropriate export procedure shall be required in case of export from Japan. *Products: Hardware and its technical information (including software)