nb3sn film deposition

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Physical Vapor Deposition of Bronze-Route Nb 3 Sn for SRF Cavities Wenura K. Withanage 1 , Andre Juliao 1 , Shreyas Balachandran 1 , Christopher Reis 1 , Shengzhi Zhang 1 , Wan Kyu Park 1 , Yi-Feng Su 1 , John Buttles 2 , Choong-Un Kim 3 , Peter J. Lee 1 , Lance D. Cooley 1 1 Applied Superconductivity Center, National High Magnetic Field Laboratory, Florida State University 2 Bailey Tool & Manufacturing, Lancaster, TX 3 Materials Science & Engineering Department, University of Texas – Arlington, Arlington, TX

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Page 1: Nb3Sn film deposition

Physical Vapor Deposition of Bronze-Route Nb3Sn for SRF Cavities

Wenura K. Withanage1, Andre Juliao1, Shreyas Balachandran1, Christopher Reis1, Shengzhi Zhang1, Wan Kyu Park1, Yi-Feng Su1, John Buttles2, Choong-Un Kim3, Peter J. Lee1,

Lance D. Cooley1

1 Applied Superconductivity Center, National High Magnetic Field Laboratory, Florida State University

2 Bailey Tool & Manufacturing, Lancaster, TX3 Materials Science & Engineering Department, University of Texas – Arlington, Arlington, TX

Page 2: Nb3Sn film deposition

Why investigate bronze routes?

• Move reaction window from ~1100°C to ~700°C

– Avoid the Nb6Sn5 and NbSn2 phases by exploiting ternary Cu-Sn-Nb system

• Make the reaction compatible with cavity bodies made from copper; avoid bulk niobium (and)

– Possible cost and formability advantages

– Potential direct application with conduction cooling

• Genesis of ideas traces back to founding of IARC at Fermilab

• Avoid Sn vapor, chlorides of Sn and Nb polishing chemistry (corrosive, toxicity).

• Tap into wealth of processing knowledge from composite wires.

• If desired, can push grain size to < 50 nm; very low roughness.

2

Page 3: Nb3Sn film deposition

Cu-Sn-Nb pathways for SRF

3

• Apply Nb to bronze and convert entirely to Nb3Sn

– Also works for bronzed copper → utilize Cu cavities

– More complicated geometries are possible, e.g. with diffusion barriers

• Apply bronze to Nb and react to form Nb3Sn, then remove bronze post-process

– Utilize Nb/Cu bimetal, e.g. hydroformedNb/Cu cavities

– Use Nb cavities

Phase diagram from Xingchen Xu, 2017 topical review of prospects for Nb3Sn conductors, SuST 30 093001

T ~ 650 °C

Avoid this region:Cu-Sn dissolves Nb

Nb3Sn

“Bronze” need not be bulk bronze (although bulk bronze is an easy starting point for studies) and can be bronzed Cu

CuSn

Clean Cu

Bronze surface

Page 4: Nb3Sn film deposition

First studies: Nb on a-bronze

• Substrates: Mechanically polished zero phosphorous Cu-15%wt Sn and Cu-15%wt Sn- 0.3%wt Ti bronzes.

• Commercial Cu and bronze usually has P as a de-oxidizing agent. Ti was explored here as a getter.

• Substrates were cold-rolled and homogenized at 525°Cprior to polishing.

• Nb film deposition conditions.

• Background pressure ~5E-9 Torr

• Processing gas 8 mTorr Ar

• Deposition rate 22.4 nm per minute

• Niobium film Tc 9.2 K, DTc 0.1 K

• Both process routes took place in the depositionchamber; no vacuum break or exposure to ambient

High Sn regions

Before

After

4

100 µm 100 µm

Page 5: Nb3Sn film deposition

Nb deposited on hot bronze achieves 10x faster reaction

14-16 K Tc transition consistent with CTE mismatch between Nb3Sn and bronze.Also seen by CERN for direct deposition of Nb3Sn on copper

14 16 18

-0.0008

-0.0006

-0.0004

-0.0002

0.0000

700 °C/Cu-Sn

700 °C/Cu-Sn-Ti

725 °C/Cu-Sn

725 °C/Cu-Sn-Ti

775 °C/Cu-Sn

775 °C/Cu-Sn-Ti

Norm

aliz

ed m

om

ent

T (K)

4 6 8 10 12 14 16 18 20

-1.0

-0.8

-0.6

-0.4

-0.2

0.0

No

rma

lize

d m

om

en

t

T (K)

775 °C/Cu-Sn

775 °C/Cu-Sn-Ti

725 °C/Cu-Sn-Ti

725 °C/Cu-Sn

700 °C/Cu-Sn

700 °C/Cu-Sn-Ti

ZFC 10 Oe ZFC 10 Oe

5

650 nm film produced in 20-minute process!

Addition of Ti is consistent with known alloying effects.

Page 6: Nb3Sn film deposition

4 6 8 10 12 14 16 18 20

-1.0

-0.8

-0.6

-0.4

-0.2

0.0

No

rma

lize

d m

om

en

t

T (K)

650 °C/Cu-Sn

650 °C/Cu-Sn-Ti

700 °C/Cu-Sn

700 °C/Cu-Sn-Ti

775 °C/Cu-Sn

775 °C/Cu-Sn-Ti

ZFC 10 Oe

14 16 18 20

-0.0004

-0.0003

-0.0002

-0.0001

0.0000

650 °C/Cu-Sn

650 °C/Cu-Sn-Ti

700 °C/Cu-Sn

700 °C/Cu-Sn-Ti

775 °C/Cu-Sn

775 °C/Cu-Sn-Ti

No

rma

lize

d m

om

en

t

T (K)

ZFC 10 Oe

Nb on bronze + post-reaction behaves like processes in wires

6-hour heat treatments at > 700 °C were required to get full conversion of 500 nm

6

Similar effect of CTE mismatch between Nb3Sn and bronze as for route 1

Addition of Ti seems to accelerate diffusion, which is also noted for wires.

Page 7: Nb3Sn film deposition

Columnar grain structure produced by route 1 was never observed in bronze route

7

• Columnar grains through entire thickness

• Pipeline diffusion at bronze GBs → larger Nb3Sn grains

• Bronze twin boundaries are evident beneath Nb3Sn

• Very low roughness RA ~ 7–10 nm in 100 µm2.

• Sn content of Nb3Sn layer is measured (EDX) at 25% or higher in both substrates.

Protective silver

Protective silver

Page 8: Nb3Sn film deposition

Post-deposition reaction produces structures like those seen in wires

8

• Tendency toward high-angle equiaxed grains

• Evidence for pipeline diffusion along Ti alloyed bronze GBs, with enriched Sn and Ti.

• Very low roughness RA ~ 10 - 15 nm in 100 µm2.

• Sn content of Nb3Sn layer

• 22–23.5 % no Ti

• 24.5–25.5 % with Ti

• Large Ti6Sn5 grains in films on Tialloyed bronze.

Protective silver

Protective silver

Page 9: Nb3Sn film deposition

Discussion and summary

• Address the CTE mismatch issues, e.g. by engineering the copper

– But 15 K is already sufficient to use conduction cooling for low RBCS

• The hot bronze method may be better

– Full tin content in Nb3Sn

• What is the significance of the unique grain structure obtained by deposition of Nb onto hot bronze?

– Hot bronze in vacuum has a tin-rich surface → high tin activity. Can this be exploited further?

– Can Nb deposition properties give microstructure control?

→ HIPIMS and biasing schemes are available and not yet fully exploited

9

Page 10: Nb3Sn film deposition

Discussion and summary

• While roughness is extremely low inside the underlying bronze grains, twin boundaries and grain boundaries affect the Nb3Sn coating. Is it important to suppress twins and GB effects?

– Alloying with Ti and other elements increases stacking fault energy, reduces twinning

• What is the significance of the very low roughness? Does this trade off with very high GB density?

• RF measurements are needed.

• Copper in GBs studies are needed.

10

Page 11: Nb3Sn film deposition

Acknowledgment

• Many thanks to Akihiro Kikuchi (NIMS, Japan) for providing Ti alloyed bronze.

• Alexander Wozny and Jonathan Wozny for their support with bronze substrate polishing.

• This work at ASC, NHMFL-FSU was funded by U.S. Department of Energy, Office of Science, Office of High Energy Physics under Award No. DE-SC 0018379.

• A portion of this work was performed at the National High Magnetic Field Laboratory, which is supported by National Science Foundation Cooperative Agreement No. DMR-1644779 and the State of Florida.

11

Page 12: Nb3Sn film deposition

Backup Slides

12

Page 13: Nb3Sn film deposition

Bronze route Nb3Sn films for SRF cavities

• Low temperature deposition allowsbronze or Cu base cavity.

• Simplest case, Nb3Sn coated bronzecavities.

• Significant material cost saving fromswitching Nb host cavity to a bronzeor Cu host cavity.

• Easy fabrication and scaling.

• Cu at grain boundaries, Effect on RF?

• Low thermal conductivity, Engineeringsolutions? Reaction heat

treatment

Bronze cavityNb3Sn coating

Nb coating

Cavity heaterNb magnetron source

Bronze cavity

Nb3Sn coating

Hot bronze cavity

Route 1 for cavities

Route 2 for cavities13

Page 14: Nb3Sn film deposition

Proposed deposition chamber

14

cryopump

3 position gate valve

20” Z shift mechanism

resistive heater

magnetron source

cylindrical vacuum chamber 14” OD, 20” height

water-cooled heat shield

extension for pre-sputtering

Page 15: Nb3Sn film deposition

More introduction

15

J. P. Charlesworth et al J. Mat. Sci.5, 580 (1970)

P.J. Lee, D.C. Larbalestier, IEEE Transactions 11 (2001)

Nb – Sn phase diagram

Bronze process

Fractographs of a bronze route Nb3Sn filament• To synthesis pure Nb3Sn by reacting Nb

and Sn directly require temperaturesabove 930 °C.

• Eliminates the use of Cu substrate cavityin Nb – Sn direct reaction -> Significantmaterial costs

• Require sophisticated furnace systemsfor Nb – Sn reaction.

• Bronze route is a well-establishedtechnique in Nb3Sn wire fabrication.

• Bronze route guarantees only the pureNb3Sn phase at much lowertemperatures (~600 – 800 °C).

Page 16: Nb3Sn film deposition

Cu-Sn phase digram

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Page 17: Nb3Sn film deposition

CTE mismatch

17

CTE mismatch between Nb3Sn and common substratesD. O. Welch, Adv. Cryo. Eng., 26, pp. 48-65, 1980